JP2000263377A - Metal mold machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a metal mold machining device having the high speed rotation of a main spindle and a high rotation accuracy, high static rigidity and dynamic rigidity which can machine efficiently and precisely. SOLUTION: The main spindle 4 of a spindle device 1 for rotating a tool 11 is supported by static pressure magnetic compound bearings 6 to 9. Current detection means 15 to 18 for detecting the exciting current of the static pressure magnetic compound bearings 6 to 9 and a machining state grasping means 19 for grasping the machining state from the current detection value are provided. By providing an outside order response on-off means 20, the static pressure magnetic compound bearings 6 to 9 are supported by only the static pressure gas bearing by the outside order. The measuring means of the housing 5 temperature and a temperature measurement corresponding output means 77 are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mold processing apparatus used for cutting and grinding a molding die, and more particularly to a die processing apparatus having a spindle device provided with a hydrostatic magnetic composite bearing.

[0002]

2. Description of the Related Art Recently, attention has been paid to high-efficiency and high-precision processing in die processing. In order to realize such machining, a spindle device that can rotate at high speed, has high rotational accuracy, and has high static rigidity and dynamic rigidity is required. Processing is required. However, such demands could not be satisfied due to limitations in the functions of bearings provided in the spindle device.
On the other hand, the present applicant has proposed a spindle device used for general high-speed cutting that uses a hybrid non-contact bearing in which a hydrostatic gas bearing and a magnetic bearing are combined (Japanese Patent Application No. 10-097550). Such). According to this,
A bearing that makes use of the features of both bearings, that is, the excellent dynamic rigidity and rotational accuracy of the hydrostatic gas bearing and the excellent static rigidity of the magnetic bearing.

[0003] The present invention intends to meet the above-mentioned various demands in a mold processing machine by supporting a main shaft with a hydrostatic and magnetic composite bearing in which such a hydrostatic gas bearing and a magnetic bearing are combined. Is what you do. Generally, a method of measuring a processing load for detecting a processing state employs a method of estimating a load at the time of processing from a measured value of a motor output for spindle rotation. However, even in a mold processing apparatus that uses such a hydrostatic magnetic composite bearing and controls processing conditions,
There are the following unresolved issues. The method of estimating the load at the time of machining from the measured value of the motor output requires a dedicated measuring device to detect the machining state.
System cost is high. In the method of detecting the machining state from the measured motor output,
The processing state related to the spindle rotation frequency cannot be detected. The hydrostatic magnetic composite bearing has characteristics of both a hydrostatic gas bearing and a magnetic bearing. Therefore, when the resolution of the magnetic bearing sensor is low, the rotational accuracy of the main shaft is determined by this resolution, and the high rotational accuracy of the hydrostatic gas bearing cannot be fully utilized. When the hydrostatic magnetic composite bearing spindle device is rotated at a high speed, the temperature of the main shaft and the housing increases due to the loss (windage loss) in the hydrostatic gas bearing portion. The axial position of the tool at the tip of the device changes. For this reason, high-precision processing becomes difficult.

An object of the present invention is to provide a die machining apparatus capable of rotating a spindle at a high speed, having high rotation accuracy, high static rigidity and dynamic rigidity, and performing highly efficient and highly accurate machining. . Another object of the present invention is to reduce the cost by making it unnecessary to provide an expensive load measuring device while enabling the detection of the machining state during machining. Still another object of the present invention is to enable detection of a static load on a spindle. Still another object of the present invention is to enable a simple configuration to detect a machining state related to a rotation frequency of a spindle. Still another object of the present invention is to make it possible to perform optimum bearing setting according to desired processing conditions at any time, to effectively exert the function of the hydrostatic magnetic composite bearing, and to obtain higher rotational accuracy. It is to be. Still another object of the present invention is to enable an optimum bearing setting to be made quickly according to machining conditions that change with the progress of machining. Still another object of the present invention is to achieve high efficiency at the time of rough processing and high accuracy at the time of finish processing, thereby realizing high efficiency and high precision processing. Still another object of the present invention is to enable high-precision machining even when the temperature of a housing or the like changes due to windage or the like in a hydrostatic gas bearing. Still another object of the present invention is to make it possible to easily recognize the abnormality at the time of abnormality such as a rise in the housing temperature and to take immediate action. Still another object of the present invention is to enable monitoring and control of a processing state at a remote place.

[0005]

The structure of the present invention will be described with reference to FIG. 1 corresponding to an embodiment. The die machining apparatus according to the present invention is a mold processing apparatus provided with a spindle device (1) for rotating a tool (11), wherein the spindle device (1) includes a hydrostatic gas bearing (6A to 9A) and a magnetic bearing. (6B-9B) and a hydrostatic magnetic composite bearing (6
-9) basically supports the main shaft (1). According to this, the bearing structure takes advantage of the characteristics of both the dynamic rigidity and rotational accuracy of the hydrostatic gas bearings (6A to 9A) and the excellent static rigidity of the magnetic bearings (6B to 9B), and the main shaft ( 1) High-speed rotation is possible, high rotation accuracy, high static rigidity,
It has dynamic rigidity and can perform high-efficiency and high-precision machining. The following first to fourth inventions, which are developments of the present invention, are based on the above-described configuration and are provided with any of the following matters. According to a first aspect of the present invention, there is provided a mold processing apparatus comprising: a current detecting means (15 to 18) for detecting an exciting current of the magnetic bearings (6B to 9B); and a current detecting means (15 to 1).
A machining state grasping means (19) for grasping a machining state by the tool (11) from the current detection value of 8). According to this configuration, the hydrostatic composite bearing (6 to 9)
The machining state can be grasped by the machining state grasping means (19) from the current detection value of the excitation current of the magnetic bearings (6B to 9B) in the above. That is, when the spindle (4) is displaced in a radial direction or the like by a load acting on the tool (11) during machining, the magnetic bearing (6B) is restored so as to restore the displacement.
9B) is changed by the control function of the magnetic bearings (6B to 9B). Therefore, a machining state such as tool wear, tool damage, machining failure, and the like can be grasped from the excitation current. Since the machining state grasping means (19) is provided in this manner, the high performance of the hydrostatic magnetic composite bearings (6 to 9), that is, the function of enabling high-speed rotation, high rotation accuracy, high static rigidity and dynamic rigidity, and the like. Together, while detecting the processing state,
Processing can be performed under optimal processing conditions, and high-efficiency and higher-precision processing can be performed by utilizing the features of the hydrostatic composite bearings (6 to 9). In addition, the detectors are current detecting means (15 to 1) for exciting current of the magnetic bearings (6B to 9B).
8), it is not necessary to provide an external load measuring device, and the device can be simpler and can be manufactured at a lower cost as compared with a motor current detecting device.

In the first invention, the machining state grasping means (19) includes a current smoothing section for smoothing a current detection value of the current detecting means (15 to 18), and a spindle output of the current smoothing section. It is also possible to have a machining state grasping unit that converts a static load and grasps a machining state from the static load conversion result. As described above, by grasping the machining state from the static load conversion result, the machining state required for control can be grasped easily and accurately without being affected by load fluctuation or disturbance occurring in a very short time.

According to a second aspect of the present invention, there is provided a mold processing apparatus comprising:
Displacement detecting means (28, 3) for detecting the displacement of the main shaft (4)
8) and machining state grasping means (19) for grasping the machining state by the tool (11) from the displacement detection values of the displacement detecting means (28, 38). When the spindle (4) is displaced by a load acting on the tool (11) during machining, the displacement is detected by the displacement detecting means (28, 38). Therefore, the machining state can be grasped from the displacement detection value. Therefore, the provision of the above-mentioned machining state grasping means (19) is combined with the functions of the hydrostatic magnetic composite bearings (6 to 9) capable of high-speed rotation, having high rotation accuracy, high static rigidity and dynamic rigidity. In addition, it is possible to perform machining under the optimal machining conditions while detecting the machining state, and it is possible to perform machining with higher efficiency and higher accuracy by utilizing the features of the hydrostatic composite bearings (6 to 9). Moreover, the displacement detecting means (28, 3
8) is a detecting means generally provided in the magnetic bearings (6B to 9B) for controlling the magnetic bearings (6B to 9B), so that the machining state can be grasped without providing a dedicated detecting means, and Processing accuracy can be improved at low cost.

In the first and second inventions, the processing state grasping means (19) comprises a frequency analyzing section for frequency-analyzing the output of the current detecting means (15 to 18) or the displacement detecting means (28, 38); A machining state grasping unit for grasping the machining state from the amplitude of each frequency component at the time of machining output from the frequency analysis unit may be provided. The load acting on the tool is expressed as tool vibration based on the natural vibration of the tool, the workpiece, and the processing equipment, or the spindle speed. The machining state such as tool damage depends on the type of tool damage and machining failure. Show a characteristic tendency. Therefore, by providing a frequency analysis unit and a machining state grasping unit that grasps the machining state from the amplitude of each frequency component during machining, a highly accurate machining state that cannot be observed by detecting the averaged load of each frequency component Can be detected. Further, since the frequency analysis is performed, it is possible to analyze a large number of frequency bands with a simpler configuration than a frequency filter.

According to a third aspect of the present invention, there is provided a die machining apparatus including a spindle controller (3) for controlling the hydrostatic magnetic composite bearings (6 to 9), in response to a command external to the spindle controller (3). Magnetic bearing (6B ~
An external command response on / off means (20) for turning on / off the excitation of 9B) is provided. Magnetic bearing (6B-9B)
Is turned off, the main shaft (4) is supported only by the hydrostatic gas bearings (6A to 9A) in the hydrostatic magnetic composite bearings (6 to 9), and when the magnetic bearings (6B to 9B) are turned on, the static The main shaft (4) is supported by both the compressed gas bearings (6A to 9A) and the magnetic bearings (6B to 9B). Double bearing (6A-9A,
6B-9B) and a hydrostatic gas bearing (6A-9)
A) Support only by spindle controller (3)
Is switched by an external command. Therefore, optimal bearing setting according to desired processing conditions can be performed at any time, and the functions of the hydrostatic composite bearings (6 to 9) can be effectively exerted, and higher rotational accuracy can be obtained.

The external command for turning on and off the excitation may be a command given from a numerical controller (14) for controlling the mechanical part (13a) of the mold processing device. By giving the excitation on / off command from the numerical controller (14) in this way, according to the processing conditions that change with the progress of the processing,
Optimal bearing settings can be made quickly.

The external command to turn on / off the excitation may be a command to turn on the magnetic bearing during roughing and turn off the magnetic bearing during finishing. Thereby, high efficiency can be achieved at the time of rough processing, and high accuracy can be attained at the time of finishing processing, and high efficiency and high precision processing can be realized. That is, in general,
High-efficiency and high-precision machining is performed in two stages, rough machining and finish machining. In rough machining, the amount of work material removed per unit time is increased to increase efficiency, and in finish machining, on the contrary, the removal amount is reduced to achieve higher accuracy. For this reason, the load on the spindle is large during rough machining, rigidity and load capacity are required as spindle performance, and high rotational accuracy is required for finishing. By performing the on / off of the excitation as described above, it is possible to meet the demands of such processing types.

In a fourth aspect of the present invention, there is provided a mold processing apparatus comprising: a temperature measuring means (7) for a spindle housing (5);
6), a temperature measurement corresponding output means (77) for obtaining a predetermined output from the temperature measurement value of the temperature measurement means (76), and a temperature correspondence processing means (100) for performing a predetermined process from the output of this means (77). ). The predetermined output of the temperature measurement corresponding output means (77) is as follows: The output of the temperature measuring means (76) (that is, the temperature measurement value); A converted value obtained by converting the temperature measured value of the temperature measuring means (76) into an axial position of the tip of the spindle or the tip of the tool (11) by a predetermined thermal displacement calculation; It is at least one of an abnormal signal obtained by comparing the measured temperature value or the converted value with a set value. The converted value may be any value that can be handled as position data, and may be a value proportional to actual position data or a value indicating a displacement amount from a reference position. In the case of this configuration, even if the temperature of the spindle device (1) rises due to heat generation due to loss (windage loss) of the hydrostatic gas bearing, the temperature measurement value output from the temperature measurement corresponding output means (77), The feed amount can be corrected based on the converted value of the axial position calculated by the displacement, and the workpiece can be processed with high accuracy. When the output of the temperature measurement corresponding output means (77) is an abnormal signal, when the spindle is abnormal such as an excessive rise in the housing temperature, the abnormal signal is detected externally and the spindle device (1) is stopped. Can be performed quickly.

In the present invention, cooling means (71) for cooling the housing (5) in which the main shaft (4) is installed is provided, and the cooling means (77) is responsive to the output of the temperature measurement corresponding output means (77). 71) (FIG. 16 corresponding to the embodiment)
(See Reference Cooling Operation). In this way, by controlling the cooling means (71) with an output corresponding to the temperature measurement result, appropriate cooling of the housing (5) can be easily performed.

In the present invention, a spindle positioning mechanism (75) for moving the housing (5) on which the main shaft (4) is installed in the axial direction of the main shaft (4) is provided. Temperature correction means (83) for controlling the spindle positioning mechanism according to the output temperature measurement value or the converted value may be provided. When the spindle positioning mechanism (75) is provided as described above,
Workpieces can be machined with high precision by controlling the spindle position with temperature correction using the measured temperature value and its converted value.

In the present invention, the rotation drive source (10) for rotating the main shaft (4) may be a motor built in a housing (5) in which the main shaft (1) is installed.

In the present invention, the processing state grasping means (1)
A communication means (86) for transmitting the contents of 9) to a remote place via a communication line (87) may be provided. By providing the communication function by the communication line (87) in this way, it is possible to grasp the load of the tool and the machining state at a remote place, and to centrally manage a large number of spindle machines of the die machining apparatus at a remote place. Becomes possible. Further, in the present invention, a communication means (86) for transmitting the output of the temperature measurement corresponding output means (77) to a remote place via a communication line (87) may be provided. This makes it possible to grasp the temperature of the housing (5) and the state of thermal displacement accompanying the temperature change at a remote place, thereby enabling centralized management at a remote place.

[0017]

An embodiment of the present invention will be described with reference to the drawings. FIG. 18 is a conceptual diagram showing the entire die processing apparatus. This mold processing apparatus includes a spindle device 1 for rotating a tool 11 and a table device 51 for moving a workpiece W to be processed into a mold. The spindle device 1 includes a spindle device main body 2 composed of a mechanical part, and a spindle controller 3 for controlling the spindle device main body 2. The spindle device main body 2 and the table device 51 constitute a processing device main body 13a, and the processing device main body 13a is controlled by the numerical controller 14. The spindle device main body 2 is mounted on the base 52 at a position facing the table device 51 via a guide 53 and a spindle mounting table 74 so as to be able to move forward and backward, and is driven forward and backward by a spindle positioning mechanism 75 in the spindle axis direction (Z-axis direction). Is done. As shown in FIG. 19, the table device 51 is provided with a table 55 on which the work W is placed so as to be movable in two orthogonal directions (X and Y directions) perpendicular to the spindle axis direction (Z axis). It moves forward and backward by driving the table driving devices 56 and 57 in each direction. The table 55 has a two-stage structure in which an upper table 55b movable in the X-axis direction is provided on a lower table 55a movable in the Y-axis direction. The table driving devices 56 and 57 and the spindle positioning mechanism 75 of each axis are respectively constituted by a ball screw and a servomotor. In this example, the spindle axis direction (Z axis) is vertical, and the moving direction (X, Y directions) of the table device 51 is horizontal. Note that the spindle axis direction (Z axis) may be a horizontal direction or an inclined direction, and the table moving direction (X, Y directions) may be each direction in the vertical plane.

First, the outline of the main body 2 and the controller 3 of the spindle device 1 will be described. FIG. 1 is a block diagram showing a conceptual configuration of the spindle device 1. The spindle device main body 2 supports the main shaft 4 with a plurality of radial-type hydrostatic magnetic composite bearings 6 and 7 and axial hydrostatic magnetic composite bearings 8 and 9 installed in a housing 5 and provides a spindle drive source 10. It is a thing. Each of the hydrostatic magnetic composite bearings 6 to 9 includes a hydrostatic gas bearing 6A to 9A and a magnetic bearing 6B.
9B, and is controlled by the spindle controller 3. The main shaft 4 has a chuck 12 at its tip for holding a tool 11. The spindle controller 3 includes a magnetic bearing 6B constituting the hydrostatic magnetic composite bearings 6 to 9.
Detecting means 15 to 18 for detecting exciting currents of up to 9B
And a machining state grasping means 19 for grasping the machining state of the tool 11 from the current detection values of the current detecting means 15 to 18. Further, the spindle controller 3 is provided with an external command response on / off means 20 for turning on / off the excitation of the magnetic bearings 6B to 9B by an external command sent from the numerical controller 14 or the like. Further, the spindle controller 3 is provided with a temperature measurement corresponding output unit 77 for obtaining a predetermined output from the output of the temperature measurement unit 76 provided in the housing 5.

FIGS. 2 to 5 show the spindle device main body 2.
It will be described together. The spindle device 1 includes a processing device 1
3. A built-in motor type spindle device according to item 3,
The spindle drive source 10 is installed in the housing 5 in which the bearings 6 to 9 are installed. The spindle drive source 10 including the motor includes a rotor 21 provided integrally with the main shaft 4 and a stator 22 provided in the housing 5. The housing 5 is formed in a substantially cylindrical shape. The spindle drive source 10 is not a built-in type,
It may be provided outside the housing 5 to transmit rotation to the main shaft 4 via a transmission mechanism. In this example, the arrangement of the bearings 6 to 9 and the spindle drive source 10 is such that the front part (tool side part) and the rear part of the main shaft 4 are supported by radial type hydrostatic composite bearings 6 and 7, and the intermediate part is axial. Supported by a pair of hydrostatic magnetic bearings 8 and 9 and a spindle drive source 10 at the rear end.
Are arranged. Instead of the above arrangement, the spindle drive source 10 may be arranged between the radial bearings 6 and 7, and the axial bearings 8 and 9 may be arranged at an arbitrary position on the main shaft 4. The axial type bearings 8 and 9 may be non-contact bearings, and a single magnetic bearing or a static pressure gas bearing may be used instead of the hydrostatic / magnetic composite bearing.

Radial type hydrostatic magnetic composite bearings 6, 7
3 have the same configuration. FIG. 3 shows a cross section of one of the bearings 6, and FIG. The hydrostatic and magnetic composite bearings 6 and 7 are each a composite of the hydrostatic gas bearings 6A and 7A and the magnetic bearings 6B and 7B. The term "combination" as used in this specification means that both types of bearings of a static pressure type and a magnetic type are combined so as to generate a common portion. For example, a common portion (a radial bearing) is formed between a static pressure gas bearing surface and a magnetic bearing surface. In this case, an axially overlapping portion may be generated, or at least a part of parts may be shared by both types of bearings.

In this embodiment, as shown in FIG. 4, the throttles 24a of the hydrostatic gas bearings 6A and 7A are provided on the core 23 of the electromagnets of the magnetic bearings 6B and 7B, so that the bearing components can be used in common. Part of the bearing surface is configured to overlap in the axial direction. The core 23 includes a pair of main cores 23a, 23a separated in the axial direction, a connection core 23b connecting the main cores 23a, 23a, and both main cores 23a, 23a.
Extensions 23c, 2 extending from the spindle side end of
3c, the longitudinal section is formed in a C-shape. The inner diameter side surfaces of the main core portion 23a and the extension portion 23c are cylindrical surfaces forming a predetermined magnetic gap with the main shaft 4. Magnetic bearing 6
B and 7B are such that a coil 25 is wound around a connecting core portion 23b of the core 23. The coil 25 is embedded in a non-magnetic body 26 such as a resin material.

The static pressure gas bearings 6A and 7A are formed on the inner diameter side surfaces of the core 23 and the non-magnetic member 26 and form a bearing gap d between the main shaft 4 and the static pressure bearing surfaces 6Aa and 7Aa. An aperture 24a is provided on each of the main cores 23a, 23a and opens on the hydrostatic bearing surfaces 6Aa, 7Aa. The throttles 24a are provided at the ends of the air supply holes 24 opened on the outer diameter side surfaces of the main core portions 23a. As shown in a stepped cross section in FIG. 3, the cores 23 are arranged at a plurality of locations (four locations in the example in the figure) in the circumferential direction around the main shaft 4 and fixed to the housing 5. The gap between the circumferentially adjacent cores 23 is filled with a non-magnetic material 27 such as a resin material. The non-magnetic body 27 is formed around the non-magnetic body 26 around the coil 25.
(FIG. 4).

The magnetic bearings 6B and 7B are composed of a main shaft 4 and a core 23.
And a displacement detecting means 28 for detecting the displacement of the magnetic gap between them. The displacement detecting means 28 may directly detect the displacement amount, but in this example, by detecting the static pressure in the static pressure bearing gap d, the detected pressure value is converted into the displacement amount. To detect the displacement of the magnetic gap. More specifically, the displacement detecting means 28 is composed of a pressure detection air passage 28a having a distal end opened in the static pressure bearing gap d, and a sensor 28b communicating with the air passage 28a.
The sensor 28b is disposed at a position axially away from the core 23 as shown in FIG. The air passage 28a is formed by a fine hole or a pipe, and the core 2
An opening is provided at the portion of the non-magnetic member 26 between the third extending portions 23c. In FIG. 2, the opening positions of the throttle 24 a and the air passage 28 a are shifted in the circumferential direction for easy viewing of the drawing, but they are actually at the same position in the circumferential direction.

FIG. 5 is an enlarged view of the axial type hydrostatic composite bearings 8 and 9. The pair of bearings 8, 9 are opposed to both surfaces of a flange 4 a provided on the
And constitute one double-sided axial type hydrostatic gas bearing 30. The hydrostatic composite bearings 8 and 9 on both sides have the same configuration. These hydrostatic magnetic composite bearings 8 and 9 are respectively composed of hydrostatic gas bearings 8A and 9
A and the magnetic bearings 8B and 9B are combined.
In this embodiment, the throttles 34a of the hydrostatic gas bearings 8A and 9A are provided on the electromagnet cores 33 of the magnetic bearings 8B and 9B, so that the bearing components are shared and a part of the bearing surface overlaps in the axial direction. It is like that. The core 33 has a C-shaped longitudinal section so that an opening 33d is formed on the surface facing the spindle flange 4a, and the coil 35 is accommodated therein. The opening 33d is filled with a non-magnetic material. The core 33 has an assembly configuration of an inner core portion 33a and an outer core portion 33b having an L-shaped cross section in the illustrated example, but may be an integral structure. The spacer 29 is adjacent to the core 33 in the axial direction.

Axial type hydrostatic gas bearings 8A, 9A
Are hydrostatic bearing surfaces 8Aa, 9A formed on the side surface of the core 33 and forming a bearing gap d2 with the spindle flange 4a.
a, and hydrostatic bearing surfaces 8Aa, 9Aa provided on the core 33.
And a stop 34a which is open to the outside. The aperture 34a is
It is provided at the tip of an air supply hole 34 opened on the outer diameter side surface of the core 33.

The axial type magnetic bearings 8B and 9B have displacement detecting means 38 for detecting the displacement of the magnetic gap between the spindle flange 4a and the core 33. The displacement detecting means 38 may directly detect the displacement amount, but in this example, by detecting the static pressure in the static pressure bearing gap d2, the detected pressure value is converted into the displacement amount. To detect the displacement of the magnetic gap. More specifically, the displacement detection means 38 includes a pressure detection air passage 38a having a distal end opened in the static pressure bearing gap d2, and a sensor 38b (FIG. 2) communicating with the air passage 38a.

In the static pressure gas bearings 6A to 9A of each of the static pressure magnetic composite bearings 6 to 9, compressed air or other air is supplied from an air inlet 40a of an air inlet 40 provided in the housing 5 to an air inlet 24a. Is supplied.

The control system will be described. As shown in FIG. 1, the spindle controller 3 has a power supply 41, an electromagnet power circuit 42, and a control means 43 in the controller basic unit 3a. The electromagnet power circuit 42
The current supplied from the power supply 41 is supplied to the magnetic bearings 6B to 9 of the respective hydrostatic magnetic composite bearings 6 to 9 under the control of the control means 43.
This is a means for giving an exciting current to B, and is constituted by a current amplifier circuit or the like. The control means 43 controls each static pressure magnetic composite bearing 6
9 so that the displacement of the main shaft 4 is restored according to the detection values of the displacement detecting means 28 and 38 in the magnetic bearings 6B to
This is a means for controlling the exciting current of 9B. Control means 43
Specifically, for example, an excitation current control command is given in accordance with the result obtained by calculating the detection values of the displacement detection means 28 and 38 by an integration circuit or a proportional integration circuit.

In this embodiment, the spindle controller 3 having this basic configuration is provided with the above-mentioned current detecting means 15 to 1.
8, the processing state grasping means 19, the external command response on / off means 20, and the temperature measurement corresponding output means 77 are provided, the external output means 44 is provided, and the numerical controller 14 is provided with the excitation on / off command generating means 45, the processing state corresponding processing. Means 46 and a temperature corresponding processing means 100 are provided. For example, a current detector is used for the current detection units 15 to 18. As shown in FIG. 6, the numerical control device 14 includes a numerical control function unit 14a and a programmable controller function unit 1
4b, the numerical control function unit 14a decodes the machining program 50 to perform numerical control of each axis of the machining apparatus body 13a, and transmits a sequence command described in the machining program 50 to the programmable controller function unit 14a.
b. Programmable controller function unit 14
b denotes a means for performing sequence control of the processing apparatus main body 13a in accordance with a predetermined sequence program. The programmable controller function unit 14b is provided with the excitation on / off command generation means 45 and the processing state correspondence processing means 46. Referring to FIG.
Is omitted from the drawing.

FIG. 8 shows a basic conceptual configuration of the processing state grasping means 19. The machining state grasping means 19 is a means for grasping the machining state by the tool 11 from the current detection values of the current detecting means 15 to 18 as described above, and the grasping result is sent to the machining state correspondence processing means 46 of the numerical controller 14. Sent.
This grasp result may be the current detection value as it is,
It may be a comparison result obtained by comparing the current detection value with a set value, a value obtained by performing a predetermined calculation process from the current detection value, and a result obtained by comparing the calculation process with the set value. Is also good. If the control means 43 controls the exciting current in accordance with the values calculated by the integration circuits or the proportional integration circuits based on the detection values of the displacement detection means 28 and 38 as described above, The static load of the spindle 4 is converted from the detected value itself. Further, the processing state grasping means 19 includes the current detecting means 15 to 1.
8 is to output the results of grasping the machining state individually with respect to the detected current values of 8;
8, the current detection means 15 to 18 may output a grasping result of the machining state which comprehensively determines the detected current value.
Of these, the machining state may be grasped only by one or more specific detected current values.

FIG. 9 shows one specific example of the processing state grasping means 19. In this example, the machining state grasping means 19 calculates the current detection value of each of the current detecting
A current smoothing unit 19a for smoothing each of the currents;
And a machining state grasping unit 19b for transforming the static load of the spindle from the smoothed value output of 9a and grasping the machining state from the static load conversion result. Processing state grasping part 1
9b specifically, for example, compares the converted spindle static load with a set value, and outputs an abnormality when the converted spindle static load exceeds the set value. FIG. 12 shows a processing state grasping unit 19b.
1 shows an example of the processing performed in step (a). The static load of the main shaft 4a becomes a constant value as shown by a curve a when constant processing is continued. If tool wear increases or tool damage occurs,
It changes as shown by curves b and c. Therefore, an upper limit value and a lower limit value which are allowable as an appropriate load are determined as set values. When the upper limit value and the lower limit value are within the range (shaded area), the tool is normal and deviates from this range as shown by curves b and c. In this case, an abnormal signal of the tool abnormality is output as a result of grasping the machining state. In this specification, “converting a smoothed value output to a spindle static load” refers to a case where a smoothed value output is converted to a unit of load and a value at which a smoothed value output is converted to a value which is easily compared with a set value as a load. Includes both conversions.

FIG. 10 shows another specific example of the processing state grasping means 19. In this example, the machining state grasping means 19 calculates the current detection value of each of the current detecting
It has a frequency analysis unit 19c for frequency analysis and a processing state grasping unit 19d for grasping the machining state from the amplitude of each frequency component at the time of processing output from the frequency analysis unit 19c. FIG. 13 shows an example of a process performed by the processing state grasping unit 19c. When the constant processing is continued, the frequency analysis result of the detected current value becomes a substantially constant waveform having different amplitudes of the respective frequency components as shown by a curve d. Therefore, the set values m1, m2,.
Is set, and if the amplitude value of any of the frequency components exceeds the set value m2 of the corresponding frequency band, for example, as indicated by a curve portion e indicated by a broken line, it is determined that the tool is abnormal.

The machining state grasping means 19 in the above-described specific examples grasps the machining state from the current detection values of the current detecting means 15 to 18.
May be used to grasp the machining state from the detected values of the displacement detecting means 28 and 38. For example, processing state grasping means 1
Reference numeral 9 denotes a frequency analysis unit 19e for frequency-analyzing the outputs of the displacement sensor amplifiers of the displacement detection means 28 and 38, and the amplitude of each frequency component output from the frequency analysis unit 19e during machining, as shown in FIG. A machining state grasping unit 19f for grasping the machining state may be provided.

As shown in FIG. 1, the machining state grasping means 19 of each of the above-described components has a setting section 19g, which is used to output a machining state grasp result in comparison with a set value. The part 19g is used. The setting unit 19g is set such that various setting values can be changed or a plurality of preset setting values can be selected according to a command from the numerical controller 14 or other means. For example, when processing with different loads, such as roughing and finishing, is performed during operation of the spindle device, it is necessary to judge the acceptability of the tool with a set value according to the load. The setting unit 19g is capable of changing such a set value, and detects a signal accompanying a change in processing of the numerical controller 14 and changes the set value.

The external output means 44 includes the current detection means 15 to
18, the progress and results grasped by the machining state grasping means, for example, the smoothed value output of the current smoothing section 19 a (FIG. 9), the amplitude value of each frequency component outputted by the frequency analysis sections 19 c and 19 e, etc. Is output to the outside of the spindle controller 3. The external output means 44 also serves as a means for outputting the output of the temperature measurement corresponding output 77 to the outside, as described later. The numerical control device 14 may be configured such that the processing state is input via the external output means 44, and the output of the external output means 44 outputs information processing means different from the numerical control device 14, for example, the processing state. The information may be input to an information processing unit for statistical processing. Processing state correspondence processing means 46 provided in the numerical controller 14
Is for causing the processing device 13 to perform predetermined processing for a tool failure or the like, such as generation of an alarm or forced stop of the processing device, in accordance with the output of the processing result determination means 19.

The external command response on / off means 20 is means for turning on / off the excitation of the magnetic bearings 6B to 9B in the hydrostatic / magnetic composite bearings 6 to 9 according to a command external to the spindle controller 3. On / off of the excitation by the external command response on / off means 20 may be performed for all of the magnetic bearings 6B to 9B, or may be performed for only a specific one. In the example of FIG. 1, the external command response on / off means 20 is connected to the magnetic bearing 6B from the electromagnet power circuit 42.
9B is provided with a switch responsive to a control signal in each electric circuit portion. The external command response on / off means 20 includes a power supply 41 as shown in FIG.
15 may be provided between the control means 43 and the electromagnet power circuit 42, and the current becomes zero for the electromagnet power circuit 42, as shown in FIG. A command may be given.

The excitation on / off command generation means 45 of the numerical controller 14 gives an on / off command to the external command response on / off means 20 in accordance with a command of the machining program 50 as the machining by numerical control progresses. In this case, the excitation on / off command generating means 45 is configured, for example, by a predetermined command generated in the numerical controller 14 when the predetermined command of the machining program 50 is decoded by the numerical controller 14 or executed. , An excitation on / off command is generated. The on / off command to the external command response on / off means 20 may be issued from an information processing means such as a computer other than the numerical controller 14.

FIG. 7 shows an example of control when machining is performed by turning on / off the external command response on / off means 20. This example is an example applied when there is a finishing machining command after a rough machining command as in a machining program 50 shown in FIG. First, the excitation is turned on by the rough machining command (S1) (S1).
After 2), the spindle 4 is started (S3). In this state, the hydrostatic / magnetic composite bearings 6 to 9 support the main shaft 4 with both static pressure and magnetic force. Until the finish processing command is issued, the excitation is maintained as it is (S4). When there is a finish processing command, the excitation is turned off (S5), and the hydrostatic magnetic composite bearings 6 to 9 are turned off.
Are supported only by the static pressure gas bearings 6A to 9A. When there is a predetermined command such as the end of machining or rough machining of another part (S6),
The excitation is turned on (S7), and the spindle 4 is supported by both static pressure and magnetic force.

As described above, the magnetic bearings 6B-9
By turning off B and using the magnetic bearings 6B to 9B at the time of finish machining, high efficiency can be achieved at the time of rough machining, and high accuracy can be achieved at the time of finish machining, and high efficiency and high precision machining can be realized.

The measures against thermal expansion of the housing 5 and the like will be mainly described with reference to FIG. The spindle device 1 has a cooling means 71, and the cooling means 71
Medium passage 72 such as a water jacket provided in
And a cooling unit 73 that circulates a cooling medium such as cooling water through the cooling medium path 72. For the main shaft 4, a low thermal expansion material, for example, a low thermal expansion soft magnetic material such as an invar material is used. The housing 5 has a temperature measuring means 7
6 is provided, and the spindle controller 3 is provided with a temperature measurement corresponding output unit 77, an external output unit 44, a storage unit 79, a writing unit 80, and a reading unit 81. Further, the numerical control device 14 is provided with the temperature corresponding processing means 1.
As 00, a cooling control unit 82, a temperature correction unit 83, a forced stop unit 88, and an alarm unit 89 are provided. The temperature measuring means 76 detects the temperature of the housing on the tip side of the flange 4a of the main shaft 4, and uses a temperature-sensitive element such as a platinum resistance element or a thermocouple. The temperature measuring means 76 may use a measured value of the resistance of the electromagnet coil 25 (FIG. 4) of the magnetic bearing 6.

The output means 77 corresponding to the temperature measurement comprises a comparing means 84 and a digital converting means 85 in this example. The comparing unit 84 compares the temperature measurement value output from the temperature measuring unit 76 with a set value serving as a threshold value, and outputs an abnormal signal when the temperature exceeds the set value.
An electronic circuit element comparator is used. The comparison means 84
It may correspond to a plurality of set values and output an abnormal signal in a plurality of stages. Digital conversion means 85
Is a means for converting the output of the analog signal of the temperature measuring means 76 into a digital value. When the output of the comparing means 84 is a simple binary signal, the output of the comparing means 84 is converted into a digital value represented by a plurality of digits. Also serves as a means for conversion. The output means 77 corresponding to the temperature measurement is provided by the digital conversion means 8.
An abnormal signal based on a measured temperature value or a digital value output from 5 is output. Note that the abnormality signal from the comparing means 84 may be directly output from the temperature measurement corresponding output means 77.

The writing means 80 is means for storing in the storage means 79 the digital temperature measurement value and the abnormal signal output from the temperature measurement corresponding output means 77. The storage means 79 is capable of accumulating and storing these temperature measurement values and abnormal signals output one after another. Storage means 7
Reference numeral 9 includes a memory device, a magnetic disk device, and other mass storage devices.

The external output means 44 is a means for outputting each output of the temperature measurement corresponding output means 77 to the outside of the spindle controller 3, and may be an interface having a simple output port. 8
6 and readout means 81. The communication means 86 is a means for communicating with a remote place via a communication line 87 such as a telephone line network or a data communication line network. The reading means 81 is a means for outputting stored data from the storage means 79 in response to a command from outside the spindle controller 3, and measures the temperature during operation of an arbitrary spindle stored in the storage means 81 in accordance with the external command. Values and abnormal signals can be output. In this example, the external output means 44 is also used as a means for externally outputting the output of the processing state grasping means 19 in FIG. Another external output means may be provided. The writing means 80 may also serve as a means for storing the output of the machining state grasping means 19 in the storage means 79. In this case, the reading means 81 also stores the output of the storage means 79 in response to an external command. It is possible to output the stored contents relating to the processing state grasp result.

The means of the temperature handling unit 100 provided in the numerical controller 14 will be described. The forced stopping means 88
This is a means for forcibly stopping the processing apparatus 13 in response to an abnormal signal output from the temperature measurement corresponding output means 77 via the external output means 44. The alarm unit 89 is a unit that generates an alarm in response to an abnormal signal output from the temperature measurement corresponding output unit 77 via the external output unit 44, and generates an alarm sound, turns on and displays an alarm lamp as an alarm. It displays warnings on the device screen.

The cooling control means 82 is a means for controlling the cooling means 71 in response to an abnormal signal output from the temperature measurement corresponding output means 77 via the external output means 44. Give instructions to strengthen

The temperature compensating means 83 is means for controlling the spindle positioning mechanism 75 in accordance with the measured temperature value output from the temperature measuring corresponding output means 77 via the external output means 44. That is, the movement amount of the spindle positioning mechanism 75 is basically controlled in accordance with the command value of the machining program, but the temperature correction means 83 determines the feed amount in accordance with a predetermined temperature correction operation formula in accordance with the measured temperature value. change. In this temperature correction calculation, for example, a calculation is performed in which a change amount due to a temperature change of a dimension (dimension C) from the spindle device mounting position P to the tip of the tool as a correction value of the spindle feed amount is performed. C indicating the axial position of this tool tip
The dimensions are the dimension (A dimension) of the main shaft 4 from the tip of the tool 11 to the spindle flange 4a, and the spindle device mounting position P
Of housing 5 from spindle to spindle flange 4a (B
Dimension). Therefore, the thermal expansion amount of the dimension C is calculated from the difference between the thermal expansion amount of the housing of the dimension B and the thermal expansion amount of the spindle of the dimension A. Since the housing 5 and the main shaft 4 are not in contact with each other and have a difference in temperature and temperature change, the temperature of the main shaft 4 cannot be measured by the temperature measuring means 76 of the housing 5. In addition, since the spindle 5 rotates at a high speed, it is difficult to provide a separate sensor to measure the temperature. Therefore, the thermal expansion amount of the main shaft 4 may be calculated at a temperature estimated and calculated from the detected temperature of the temperature measuring means 76, or the main shaft thermal expansion amount may be ignored. For this reason, when a low-thermal-expansion material is used for the main shaft 4, the error of the thermal expansion correction can be small.

FIG. 17 shows another embodiment of the present invention. In this embodiment, the temperature measurement corresponding output means 77A
Has a conversion means 90, and has a comparison means 84A at the subsequent stage. In addition, the output means 7 corresponding to temperature measurement
7A has a digital conversion means 85A in the input section, and converts the signal obtained by converting the measured temperature value into a digital value by the conversion means 90A
Is input to The conversion means 90 calculates the axial position of the tip of the spindle 4 or the axial position (C dimension) of the tip of the tool 11 which is a member attached to the tip of the spindle by a predetermined thermal displacement calculation based on the temperature measurement value of the temperature measurement means 76. Convert to The comparing means 84A compares the converted value output from the converting means 90 with a set value, and outputs an abnormal signal when the converted value exceeds the set value. Temperature measurement compatible output means 77A
Outputs the temperature measured value output of the digital conversion unit 85A, the output of the conversion unit 90, and the abnormal signal of the comparison unit 84A. The external output means 44 outputs the respective outputs of the temperature measurement corresponding output means 77A to the outside of the spindle controller 3. The writing means 80 causes the storage means 79 to store the respective outputs of the temperature measurement corresponding output means 77A. The temperature correction unit 83A performs a temperature correction operation using the conversion value output from the conversion unit 90.

Other configurations and functions in this embodiment are the same as those in the embodiment of FIG. In this embodiment, the comparing unit 84A may output an abnormal signal by comparing the temperature measured value of the temperature measuring unit 76 with a set value, similarly to the embodiment of FIG. 1, instead of comparing the converted value. Digital conversion means 8 of temperature measurement means 76
The temperature measurement value based on the digital value converted in 5A may be compared with a set value to output an abnormal signal. For example, the abnormal signal is generated by comparing the temperature measured value of the temperature measuring means 76 (or a digital conversion value thereof) by the comparing means 84A, and the converted value output of the converting means 90 is output to the temperature correcting operation by the temperature correcting means 83A. Used.

According to the spindle device 1 of the embodiment shown in FIGS. 16 and 17, even if the temperature of the spindle device 1 changes, the spindle positioning amount can be temperature-corrected, and the workpiece W can be processed with high accuracy. Can be. Also,
When the spindle device is abnormal due to an excessive rise in the housing temperature, a signal is output to the outside to stop the spindle device 1 or to issue an alarm.

Next, the communication system will be described. As shown in FIG. 1, the spindle device 1 includes a remote information processing unit 121 and a communication line 8 such as a telephone line network in the spindle controller 3 or separately from the spindle controller 3.
7 has a communication means 86 for communicating. Communication means 86
Are external output means 44 and external output means 4
4 may be provided as a part of the numerical control device 14 or information processing means (not shown) serving as a higher-level control computer of the numerical control device 14. Is also good. The communication means 86 includes an output of the processing state grasping means 19 of the spindle device 1, a current detection value of the current detecting means 15 to 18, a current smoothing section 19a (FIG. 9).
And any of the amplitude values of the respective frequency components output by the frequency analysis units 19c and 19e (FIGS. 10 and 11) can be communicated. Further, the remote information processing means 91 has a function of performing predetermined processing on the information communicated from the communication means 86. The predetermined processing includes, for example, statistical processing of a processing state, generation of a command for controlling the spindle controller 3 or the numerical controller 14, and the like. Also, the information processing means 121 at the remote place
It has a function of giving an on / off command to an external command response on / off means 20 of the spindle controller 3. The transmission of the on / off command from the information processing means 121 to the external command response on / off means 20 is performed via the numerical control device 14 or information processing means (not shown) which is a higher-level control computer of the numerical control device 14. Is also good.
Further, the communication means 86 can transmit the output of the temperature measurement corresponding output means 77 and the contents stored in the storage means 79 (FIG. 16) via the communication line 87. The remote information processing means 121 may perform a predetermined process on the output of the temperature measurement correspondence output means 77 which has been communicated, and may give a command to the mold processing apparatus. For example, the information processing unit 121
In addition, the function of the temperature correspondence processing means 100 may be provided.

FIG. 20 shows a development example of the communication system. A plurality of other processing apparatuses 102 are installed in the business office 101 where the die processing apparatus 13 is installed.
102 is connected to the common information processing means 103 and 104 independently or in plurals. These information processing means 103 and 104 constitute a local area network 119 together with network components such as the web server 110, the fiber wall 111, and the router 112. This local area network 119 is connected via a communication line 87 to a remote information processing means 121 installed in a local area network of another business office 113 or 114 via a communication device 116 via the Internet 120. I have. The mold processing device 13
Basically, the numerical control device 14
3 and connected to a communication line in the local area network 119 via the information processing means 103. The numerical control device 14 and the spindle are used together with or separately from the communication line. The communication system may be provided with a communication system connected directly to a communication line in the local area network 119 from the communication means 86 provided in the controller 3.

[0052]

According to the die machining apparatus of the present invention, since the spindle employs a hydrostatic composite bearing for supporting the spindle, the spindle can be rotated at a high speed, and high rotational accuracy, high static rigidity and dynamic rigidity can be obtained. It has high efficiency and high precision machining. In the case where the hydrostatic composite bearing is used and each of the above means is provided, processing can be performed with higher efficiency and higher accuracy. When a current detecting means for detecting the exciting current of the magnetic bearing of the hydrostatic magnetic composite bearing and a machining state grasping means for grasping a machining state by a tool from a current detection value of the current detecting means are provided, an external load measurement is provided. It is possible to grasp the processing state without providing a device for performing the processing, and it is possible to perform the processing with higher accuracy under the optimum processing conditions. When a current smoothing unit for smoothing the current detection value of the current detection means is provided, it is possible to detect a static load on the spindle. When a displacement detecting means for detecting the displacement of the main spindle and a machining state grasping means for grasping a machining state by the tool from a displacement detection value of the displacement detecting means are provided, the machining state is not provided without providing dedicated sensors. Can be grasped, and the cost can be further reduced. In the case where a frequency analysis unit for analyzing the frequency of the output of the current detection means or the displacement detection means is provided, it is possible to detect a machining state related to the rotation frequency of the spindle with a simple configuration. When an external command response on / off means is provided to turn on / off the magnetic bearing in response to a command external to the spindle controller, the optimal bearing setting can be performed at any time according to the desired machining conditions, and the function of the hydrostatic magnetic composite bearing is effective. And higher rotational accuracy can be obtained.
In particular, when the excitation ON / OFF command is given from the numerical controller, the optimum bearing setting can be quickly performed according to the processing conditions that change as the processing proceeds. In particular, when the magnetic bearing is turned on during roughing and the magnetic bearing is turned off during finishing, higher efficiency can be achieved during roughing, and higher accuracy can be achieved during finishing, resulting in higher efficiency and higher precision. Can be realized. When the temperature measuring means of the spindle housing and the temperature measuring corresponding output means for obtaining a predetermined output from the measured value are provided, the mold can be processed with high accuracy even when the temperature of the housing or the like changes. it can. If an abnormal signal is determined by comparing the measured temperature value or its dimensional conversion value with the set value,
We can deal with it immediately.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a conceptual configuration of a spindle device in a mold processing apparatus according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional side view of the spindle device main body.

FIG. 3 is a cross-sectional front view of the spindle device main body.

FIG. 4 is an enlarged sectional view of a radial type hydrostatic composite bearing.

FIG. 5 is an enlarged sectional view of an axial type hydrostatic magnetic bearing.

FIG. 6 is a block diagram illustrating a conceptual configuration of a numerical control device.

FIG. 7 is a flowchart showing an example of an excitation on / off control of a magnetic bearing in a hydrostatic magnetic composite bearing.

FIG. 8 is a block diagram showing a basic configuration of a processing state grasping means.

FIG. 9 is a block diagram showing a modification of the processing state grasping means.

FIG. 10 is a block diagram showing another modification of the processing state grasping means.

FIG. 11 is a block diagram showing still another modification of the processing state grasping means.

FIG. 12 is a graph showing an example of grasping a machining state by current smoothing.

FIG. 13 is a graph showing an example of grasping a machining state by frequency analysis.

FIG. 14 is a block diagram of a spindle controller in which the arrangement of external command response on / off means is different.

FIG. 15 is a block diagram of a spindle controller in which the arrangement of external command response on / off means is further different.

FIG. 16 is a block diagram mainly showing an output means for temperature measurement of a spindle device in the mold processing apparatus.

FIG. 17 is a block diagram of a conceptual configuration of a spindle device mainly showing a modification of a temperature measurement corresponding output unit.

FIG. 18 is an explanatory diagram showing both a front view of an entire mold processing apparatus according to an embodiment of the present invention and a schematic block diagram of a control system thereof.

FIG. 19 is a plan view of a table portion of the mold processing apparatus.

FIG. 20 is an explanatory diagram showing a development example of a communication system of the mold processing apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Spindle device 44 ... External output means 2 ... Spindle device main body 45 ... Excitation on / off command generation means 3 ... Spindle controller 46 ... Processing state correspondence processing means 4 ... Spindle 51 ... Table device 5 ... Housing 71 ... Cooling means 6-9 ... Static pressure magnetic composite bearing 75 ... Spindle positioning device 6A-9A ... Static pressure gas bearing 76 ... Temperature measuring means 6B-9B ... Magnetic bearing 77,77A ...
Temperature measurement corresponding output means 10 Spindle drive source 78 External output means 11 Tool 79 Storage means 14 Numerical control device 80 Writing means 15-18 Current detection means 82 Cooling control means 19 Processing state grasping means 83 ... temperature correction means 19a ... current smoothing part 86 ... communication means 19b, 19d, 19f ... processing state grasping part 87 ... communication line 19c, 19e ... frequency analysis part 100 ... temperature correspondence processing means 20 ... external command response on / off means 121 ... remote Information processing means 28, 38 ... displacement detection means W ... work

Continued on the front page F term (reference) 3C029 CC03 3C045 FD14 FD16 3J102 AA01 AA02 BA03 BA19 CA09 CA11 DA03 DA09 DB05 DB10 DB11 EA02 EA06 EB03 GA07

Claims (14)

[Claims] 1. A mold processing apparatus provided with a spindle device for rotating a tool, wherein the spindle device has a main shaft supported by a hydrostatic / magnetic composite bearing in which a hydrostatic gas bearing and a magnetic bearing are combined. Processing equipment. 2. A mold processing apparatus provided with a spindle device for rotating a tool, wherein the spindle device has a spindle supported by a hydrostatic composite bearing in which a hydrostatic gas bearing and a magnetic bearing are combined. A mold processing device comprising: a current detecting means for detecting an exciting current of the magnetic bearing; and a machining state grasping means for grasping a machining state by the tool from a current detection value of the current detecting means. 3. The processing state grasping means includes: a current smoothing section for smoothing a current detection value of the current detecting means; and a static load of the main shaft converted from a smoothed value output of the current smoothing section. The die machining apparatus according to claim 2, further comprising a machining state grasping unit for grasping a machining state from a result. 4. A mold processing apparatus provided with a spindle device for rotating a tool, wherein the spindle device has a main shaft supported by a hydrostatic / magnetic composite bearing in which a hydrostatic gas bearing and a magnetic bearing are combined. A mold processing apparatus comprising: a displacement detection unit configured to detect a displacement of the main shaft; and a processing state determination unit configured to determine a processing state of the tool based on a displacement detection value of the displacement detection unit. 5. The processing state grasping means comprises: a frequency analyzing section for frequency-analyzing an output of the current detecting means or the displacement detecting means; and a processing means for processing the output from the frequency analyzing section based on an amplitude of each frequency component at the time of processing. The die machining apparatus according to claim 2 or 4, further comprising a machining state grasping unit for grasping a state. 6. A mold processing apparatus provided with a spindle device for rotating a tool, wherein the spindle device supports a main shaft with a hydrostatic magnetic composite bearing in which a hydrostatic gas bearing and a magnetic bearing are combined, A mold processing apparatus comprising: a spindle controller for controlling a hydrostatic magnetic composite bearing; and an external command response on / off means for turning on / off the excitation of the magnetic bearing by a command external to the spindle controller. 7. The die machining apparatus according to claim 6, wherein the external command for turning on and off the excitation is a command given from a numerical control device that controls a mechanical part of the die processing apparatus. 8. The die machining apparatus according to claim 7, wherein the external command to turn on / off the excitation is a command to turn on the magnetic bearing during rough machining and to turn off the magnetic bearing during finish machining. 9. A mold processing apparatus provided with a spindle device for rotating a tool, wherein the spindle device has a main shaft attached to a housing via a hydrostatic / magnetic composite bearing in which a hydrostatic gas bearing and a magnetic bearing are combined. What is supported, temperature measurement means of the housing, temperature measurement corresponding output means for obtaining a predetermined output from the temperature measurement value of the temperature measurement means,
Temperature corresponding processing means for performing predetermined processing from the output of this means, and a predetermined output of the temperature measurement corresponding output means,
The following ~: An output of said temperature measuring means; A converted value obtained by converting the temperature measured value of the temperature measuring means into an axial position of a spindle tip or a tool tip by a predetermined thermal displacement calculation; A mold processing apparatus comprising at least one of an abnormal signal obtained by comparing the measured temperature value or the converted value with a set value. 10. A cooling means for cooling a housing on which the main shaft is installed, wherein the temperature corresponding processing means is
10. A cooling control means for controlling a cooling operation of said cooling means in response to an output of said temperature measurement corresponding output means.
The mold processing apparatus described in the above. 11. A spindle positioning mechanism for moving a housing on which the main spindle is mounted in the axial direction of the main spindle, and the spindle positioning mechanism according to a temperature measured value output from the temperature measurement corresponding output means or the converted value. The mold processing apparatus according to claim 9, further comprising a temperature correction unit for controlling the temperature of the mold. 12. The die machining apparatus according to claim 1, wherein the spindle drive source for rotating the spindle is a motor built in a housing in which the spindle is installed. 13. The die machining apparatus according to claim 2, further comprising communication means for transmitting the contents grasped by said machining state grasping means to a remote place via a communication line. 14. The mold processing apparatus according to claim 9, further comprising communication means for transmitting an output of said temperature measurement corresponding output means to a remote place via a communication line.