JP2000090734A - Conductive paste, and solar battery using it - Google Patents
Conductive paste, and solar battery using itInfo
- Publication number
- JP2000090734A JP2000090734A JP10282010A JP28201098A JP2000090734A JP 2000090734 A JP2000090734 A JP 2000090734A JP 10282010 A JP10282010 A JP 10282010A JP 28201098 A JP28201098 A JP 28201098A JP 2000090734 A JP2000090734 A JP 2000090734A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- conductive paste
- electrode
- type
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Conductive Materials (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本願発明は、半導体用電極、
特に結晶系Si太陽電池のp型Si半導体用として用い
るのに適した導電性ペースト、及びそれを用いて形成さ
れた電極を有する太陽電池に関する。The present invention relates to an electrode for a semiconductor,
In particular, the present invention relates to a conductive paste suitable for use as a p-type Si semiconductor of a crystalline Si solar cell, and a solar cell having electrodes formed using the same.
【0002】[0002]
【従来の技術】p型半導体基板上に電極が形成された電
子部品の一つに、図1に示すような太陽電池がある。こ
の太陽電池においては、厚さ300〜400μmのp型
Si半導体基板1が用いられており、このp型Si半導
体基板1の受光面側には、0.3〜0.5μmのn型不
純物層2及び光電変換効率を高めるための反射防止膜3
が形成されており、さらにこの反射防止膜3を貫通し
て、p型Si半導体基板1のn型不純物層2に達するよ
うに、n型Si半導体用のグリッド電極4が形成されて
いる。2. Description of the Related Art A solar cell as shown in FIG. 1 is one of electronic parts having electrodes formed on a p-type semiconductor substrate. In this solar cell, a p-type Si semiconductor substrate 1 having a thickness of 300 to 400 μm is used, and an n-type impurity layer of 0.3 to 0.5 μm is provided on the light receiving surface side of the p-type Si semiconductor substrate 1. 2 and antireflection film 3 for improving photoelectric conversion efficiency
Is formed, and a grid electrode 4 for an n-type Si semiconductor is formed so as to penetrate the anti-reflection film 3 and reach the n-type impurity layer 2 of the p-type Si semiconductor substrate 1.
【0003】また、p型Si半導体基板1の裏面側に
は、そのほぼ全面に裏面電極5が形成されている。な
お、この裏面電極5は、通常、アルミニウム粉末、ガラ
スフリット及び有機質ビヒクルを配合した導電性Alペ
ーストを、p型Si半導体基板1の裏面に塗布した後、
Alの融点(660℃)以上の温度で焼成することによ
り形成されている。そして、この裏面電極5が形成され
る際に、裏面電極5とp型Si半導体基板1の界面(A
l/Si界面)のp型Si半導体基板1側にAl−Si
合金層6が形成され、生成キャリアの裏面電極5におけ
る再結合が抑制され、結果として、生成キャリアの収集
効率が向上するBSF効果が得られる。On the back side of the p-type Si semiconductor substrate 1, a back surface electrode 5 is formed on almost the entire surface. The back electrode 5 is usually formed by applying a conductive Al paste containing aluminum powder, glass frit and an organic vehicle to the back surface of the p-type Si semiconductor substrate 1.
It is formed by firing at a temperature higher than the melting point of Al (660 ° C.). When the back electrode 5 is formed, the interface between the back electrode 5 and the p-type Si semiconductor substrate 1 (A
1 / Si interface) on the p-type Si semiconductor substrate 1 side.
The alloy layer 6 is formed, and the recombination of the generated carriers at the back electrode 5 is suppressed. As a result, the BSF effect of improving the collection efficiency of the generated carriers is obtained.
【0004】[0004]
【発明が解決しようとする課題】しかし、上記従来の、
アルミニウム粉末、ガラスフリット及び有機質ビヒクル
を配合してなる導電性Alペーストを用いた場合、焼成
時に裏面電極(Al電極膜)5やAl−Si合金層6
と、p型Si半導体基板1との線熱膨張係数の差(表1
参照)により、p型Si半導体基板1に、通常、裏面電
極5の形成面側が凹面となるような反りが生じる。SUMMARY OF THE INVENTION
When a conductive Al paste containing an aluminum powder, a glass frit and an organic vehicle is used, the back electrode (Al electrode film) 5 or the Al—Si alloy layer 6 is baked during firing.
And the p-type Si semiconductor substrate 1 (see Table 1).
), The p-type Si semiconductor substrate 1 is normally warped such that the surface on which the back electrode 5 is formed is concave.
【0005】[0005]
【表1】 [Table 1]
【0006】このようにp型Si半導体基板に反りが生
じると、太陽電池を製造する工程で割れなどが発生して
歩留まりが低下するという問題点がある。When the p-type Si semiconductor substrate is warped as described above, there is a problem that cracks or the like are generated in a process of manufacturing a solar cell and the yield is reduced.
【0007】また、p型Si半導体基板の厚みを薄くす
ると反り量が増大するため、p型Si半導体基板の薄層
化が制約され、p型Si半導体基板の薄層化によるコス
トダウンの妨げになるという問題点がある。[0007] Further, when the thickness of the p-type Si semiconductor substrate is reduced, the amount of warpage increases, so that the thickness of the p-type Si semiconductor substrate is restricted. There is a problem that becomes.
【0008】また、p型Si半導体基板の反り量を低減
する方法として、電極膜厚を薄くする方法が知られてい
るが、電極膜厚を薄くすると、Al−Si合金の生成量
が少なくなり、十分なBSF効果を得ることができなく
なり、太陽電池特性が低下するという問題点がある。As a method of reducing the amount of warpage of a p-type Si semiconductor substrate, a method of reducing the thickness of an electrode is known. However, when the thickness of the electrode is reduced, the amount of Al-Si alloy formed decreases. However, there is a problem in that a sufficient BSF effect cannot be obtained, and the solar cell characteristics deteriorate.
【0009】本願発明は、上記問題点を解決するもので
あり、所望の太陽電池特性を確保しつつ電極膜厚を薄く
することが可能な、p型Si半導体基板への電極形成用
の導電性ペースト、及び該導電性ペーストを用いて形成
した電極を備えた太陽電池を提供することを目的とす
る。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and provides a conductive material for forming an electrode on a p-type Si semiconductor substrate which can reduce the electrode thickness while securing desired solar cell characteristics. It is an object to provide a solar cell including a paste and an electrode formed using the conductive paste.
【0010】[0010]
【課題を解決するための手段】上記目的を達成するため
に、本願発明(請求項1)の導電性ペーストは、p型S
i半導体基板上への電極形成用の導電性ペーストであっ
て、アルミニウム粉末、ガラスフリット、有機質ビヒク
ル及びアルミニウム含有有機化合物を含有することを特
徴としている。In order to achieve the above object, the conductive paste of the present invention (claim 1) is a p-type conductive paste.
A conductive paste for forming an electrode on an i-semiconductor substrate, comprising aluminum powder, glass frit, an organic vehicle, and an aluminum-containing organic compound.
【0011】アルミニウム(Al)粉末、ガラスフリッ
ト、有機質ビヒクルを配合するとともに、さらにアルミ
ニウム(Al)含有有機化合物を含有させることによ
り、焼成工程で、Al含有有機化合物が分解して、金属
アルミニウムが生成し、p型Si半導体基板と効率よく
反応するため、電極膜厚を薄くしても、電極とp型Si
半導体基板との界面に、所望の特性を実現するために必
要なAl−Si合金を生成させることが可能になり、十
分なBSF効果を得ることが可能になる。したがって、
本願発明の導電性ペーストを用いることにより、所望の
太陽電池特性を確保しつつ電極膜厚を薄くすることが可
能になり、p型Si半導体基板の反り量を小さくして、
歩留まりを向上させることが可能になるとともに、Si
半導体基板の薄層化によるコストダウンを図ることが可
能になる。By mixing aluminum (Al) powder, glass frit and an organic vehicle, and further containing an aluminum (Al) -containing organic compound, the aluminum-containing organic compound is decomposed in the firing step to produce metallic aluminum. However, in order to efficiently react with the p-type Si semiconductor substrate, the electrode and the p-type Si
At the interface with the semiconductor substrate, it is possible to generate an Al-Si alloy necessary for realizing desired characteristics, and it is possible to obtain a sufficient BSF effect. Therefore,
By using the conductive paste of the present invention, it is possible to reduce the thickness of the electrode while securing desired solar cell characteristics, reduce the amount of warpage of the p-type Si semiconductor substrate,
The yield can be improved and the Si
The cost can be reduced by reducing the thickness of the semiconductor substrate.
【0012】また、請求項2の導電性ペーストは、アル
ミニウム粉末、ガラスフリット、有機質ビヒクル及びア
ルミニウム含有有機化合物の配合割合を、 アルミニウム粉末 :50.0〜75.0重量
% ガラスフリット : 0.5〜 5.0重量
% 有機質ビヒクル :20.0〜30.0重量
% アルミニウム含有有機化合物: 1.0〜15.0重量
% (Al金属換算:0.01〜3.0重量%)としたこと
を特徴としている。In the conductive paste of the present invention, the compounding ratio of the aluminum powder, the glass frit, the organic vehicle and the aluminum-containing organic compound is as follows: aluminum powder: 50.0 to 75.0% by weight; glass frit: 0.5 To 5.0% by weight Organic vehicle: 20.0 to 30.0% by weight Aluminum-containing organic compound: 1.0 to 15.0% by weight (in terms of Al metal: 0.01 to 3.0% by weight) It is characterized by.
【0013】Al粉末の配合割合を50.0〜75.0
重量%の範囲としたのは、Al粉末の割合が50.0重
量%未満になると電極の焼結密度が低くなり、電極膜の
抵抗が大きくなって特性が低下し、また、75.0重量
%を超えると導電性ペーストの印刷性が低下することに
よる。The mixing ratio of the Al powder is from 50.0 to 75.0.
The range of the weight percent is that when the proportion of the Al powder is less than 50.0 weight percent, the sintering density of the electrode decreases, the resistance of the electrode film increases, and the characteristics deteriorate. %, The printability of the conductive paste is reduced.
【0014】また、ガラスフリットの配合割合を0.5
〜5.0重量%の範囲としたのは、ガラスフリットの割
合が0.5重量%未満になると電極−p型Si半導体基
板の接着強度が低下し、5.0重量%を超えると電極−
p型Si半導体基板界面にガラスが偏析して電気的接触
を阻害することによる。Further, the mixing ratio of the glass frit is 0.5
The reason for setting the range to 5.0 wt% is that when the proportion of the glass frit is less than 0.5 wt%, the adhesive strength of the electrode-p-type Si semiconductor substrate decreases, and when the proportion exceeds 5.0 wt%, the electrode-
This is because glass segregates at the interface of the p-type Si semiconductor substrate and inhibits electrical contact.
【0015】また、有機質ビヒクルの配合割合を20.
0〜30.0重量%の範囲としたのは、有機質ビヒクル
の割合が20.0重量%未満になると導電性ペーストの
印刷性が低下し、30.0重量%を超えると電極の焼結
密度が低下して電極膜の抵抗が大きくなり、特性が低下
することによる。Further, the mixing ratio of the organic vehicle is 20.
The range of 0 to 30.0% by weight is that when the ratio of the organic vehicle is less than 20.0% by weight, the printability of the conductive paste is lowered, and when the ratio exceeds 30.0% by weight, the sintering density of the electrode is lowered. Is reduced, the resistance of the electrode film is increased, and the characteristics are reduced.
【0016】また、Al含有有機化合物の配合割合を
1.0〜15.0重量%の範囲としたのは、Al含有有
機化合物の割合が1.0重量%未満になると十分な添加
効果が得られず、また、15.0重量%を超えると電極
焼結密度が低下し、電極膜の抵抗増大による太陽電池特
性の劣化を招くことによる。The reason why the compounding ratio of the Al-containing organic compound is in the range of 1.0 to 15.0% by weight is that when the ratio of the Al-containing organic compound is less than 1.0% by weight, a sufficient effect of addition is obtained. In addition, if it exceeds 15.0% by weight, the sintered density of the electrode decreases, and the resistance of the electrode film increases, thereby deteriorating the solar cell characteristics.
【0017】また、請求項3の導電性ペーストは、前記
アルミニウム含有有機化合物が、アルミニウムレジネー
ト、ステアリン酸アルミニウム、オレイン酸アルミニウ
ム、ラウリン酸アルミニウム、乳酸アルミニウム、アル
ミニウムアセチルアセトネート、アルミニウムトリイソ
プロポキシド、アルミニウムブトキシドからなる群より
選ばれる少なくとも1種であることを特徴としている。Further, in the conductive paste according to the present invention, the aluminum-containing organic compound may be aluminum resinate, aluminum stearate, aluminum oleate, aluminum laurate, aluminum lactate, aluminum acetylacetonate, aluminum triisopropoxide, It is characterized in that it is at least one selected from the group consisting of aluminum butoxide.
【0018】アルミニウム含有有機化合物としては、特
に制約はなく、アルミニウムを含有する種々の有機化合
物を用いることが可能であるが、その中でも、特に、ア
ルミニウムレジネート、ステアリン酸アルミニウム、オ
レイン酸アルミニウム、ラウリン酸アルミニウム、乳酸
アルミニウム、アルミニウムアセチルアセトネート、ア
ルミニウムトリイソプロポキシド、アルミニウムブトキ
シドからなる群より選ばれる少なくとも1種を用いるこ
とにより、本願発明の効果を確実に奏させることが可能
になり、本願発明を実効あらしめることができる。The organic compound containing aluminum is not particularly limited, and various organic compounds containing aluminum can be used. Among them, aluminum resinate, aluminum stearate, aluminum oleate, and lauric acid are particularly preferable. By using at least one selected from the group consisting of aluminum, aluminum lactate, aluminum acetylacetonate, aluminum triisopropoxide, and aluminum butoxide, the effects of the present invention can be surely exerted. It can be effective.
【0019】また、本願発明(請求項4)の太陽電池
は、請求項1〜3のいずれかに記載の導電性ペーストを
塗布して焼き付けることにより形成した電極を備えてい
ることを特徴としている。Further, a solar cell according to the present invention (claim 4) is characterized by comprising an electrode formed by applying and baking the conductive paste according to any one of claims 1 to 3. .
【0020】請求項1〜3のいずれかに記載の導電性ペ
ーストを用いて電極を形成した場合、太陽電池特性を確
保しつつ電極膜厚を薄くし、p型Si半導体基板の反り
を低減することができるようになる。すなわち、従来は
電極膜厚を50〜60μmとすることが必要であったも
のを、太陽電池特性を損なうことなく(すなわち、p型
Si半導体基板の電極形成面に形成されるAl−Si合
金層の生成量を減らすことなく)20〜30μmにまで
薄くすることが可能になり、p型Si半導体基板の反り
を防止して、歩留まりを向上させることが可能になる。When the electrode is formed by using the conductive paste according to any one of claims 1 to 3, the thickness of the electrode is reduced while maintaining the solar cell characteristics, and the warpage of the p-type Si semiconductor substrate is reduced. Will be able to do it. That is, the electrode thickness conventionally required to be 50 to 60 μm is reduced without deteriorating the solar cell characteristics (that is, the Al—Si alloy layer formed on the electrode formation surface of the p-type Si semiconductor substrate). (Without reducing the generation amount of silicon), it is possible to reduce the thickness to 20 to 30 μm, to prevent the p-type Si semiconductor substrate from warping, and to improve the yield.
【0021】[0021]
【発明の実施の形態】以下、本願発明の実施の形態を示
して、その特徴とするところをさらに詳しく説明する。
なお、この実施形態では、太陽電池用のp型Si半導体
基板に電極を形成する場合に用いられる導電性ペースト
を例にとって説明する。BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described, and features thereof will be described in more detail.
In this embodiment, a conductive paste used for forming an electrode on a p-type Si semiconductor substrate for a solar cell will be described as an example.
【0022】まず、アルミニウム粉末50.0〜75.
0重量%、ガラスフリット0.5〜5.0重量%、有機
質ビヒクル20.0〜30.0重量%を含有するととも
に、各種のAl含有有機化合物を、表2に示すような割
合で含有する導電性ペーストを調製した。First, aluminum powder 50.0-75.
0 wt%, glass frit 0.5 to 5.0 wt%, organic vehicle 20.0 to 30.0 wt%, and various Al-containing organic compounds in proportions as shown in Table 2. A conductive paste was prepared.
【0023】具体的には、ニトロセルロースをターピネ
オールに溶解してなる有機質ビヒクルに、球状のAl粉
末と、軟化点585℃のB−Si−Pb系ガラスフリッ
トを加えた後、Al含有有機化合物(例えば市販のAl
レジネートR1058(N.E.ケムキャット(株)
製)など)を添加し、Al粉末が扁平に潰れないように
留意しながら、周知の金属ロールを用いて十分に混練し
て導電性ペーストを得た。Specifically, a spherical Al powder and a B-Si-Pb-based glass frit having a softening point of 585 ° C. are added to an organic vehicle obtained by dissolving nitrocellulose in terpineol, and then an Al-containing organic compound ( For example, commercially available Al
Resinate R1058 (NE Chemcat Corporation)
And the like, and kneaded sufficiently using a well-known metal roll, to obtain a conductive paste, while taking care not to flatten the Al powder.
【0024】なお、本願発明の導電性ペーストに用いる
Al粉末としては、比表面積が大きすぎてAl粉末の表
面酸化が進みすぎることを防止する一方、p型Si半導
体基板との間の反応性を確保する見地から、平均粒径が
5〜20μmのアトマイズ粉などのような球形粉末を用
いることが望ましい。The Al powder used in the conductive paste of the present invention has a specific surface area that is too large to prevent the surface oxidation of the Al powder from progressing too much, while reducing the reactivity with the p-type Si semiconductor substrate. From the viewpoint of securing, it is desirable to use a spherical powder such as an atomized powder having an average particle diameter of 5 to 20 μm.
【0025】また、本願発明の導電性ペーストに用いる
ガラスフリットとしては、上述のような、B−Si−P
b系ガラスフリットが好ましいガラスフリットとして用
いられるが、ガラスフリットはこれに限られるものでは
なく、650〜800℃の温度で焼成することにより、
p型Si半導体基板と良好な接着性(接合性)を示す種
々のガラスフリットを好適に用いることが可能である。
なお、その他の好ましいガラスフリットの例としては、
B−Si−Bi系、B−Si−Zn系、Si−Bi−P
b系などが挙げられる。The glass frit used for the conductive paste of the present invention includes B-Si-P
The b-type glass frit is used as a preferable glass frit, but the glass frit is not limited to this, and by firing at a temperature of 650 to 800 ° C,
It is possible to suitably use various types of glass frit exhibiting good adhesion (bonding property) to the p-type Si semiconductor substrate.
In addition, as examples of other preferable glass frit,
B-Si-Bi system, B-Si-Zn system, Si-Bi-P
b type and the like.
【0026】また、有機質ビヒクルとしては、上述のよ
うに、ニトロセルロースをターピネオールに溶解したも
のに限らず、焼成後に灰分が残留しないエチルセルロー
スやニトロセルロースのような繊維系樹脂、アクリル樹
脂、アルキッド樹脂などから選択された少なくとも1種
をターピネオールやセロソルブなどの有機溶剤に溶解し
た種々のものを用いることが可能である。As described above, the organic vehicle is not limited to one obtained by dissolving nitrocellulose in terpineol, but may be a fibrous resin such as ethylcellulose or nitrocellulose in which ash does not remain after firing, an acrylic resin, an alkyd resin, or the like. It is possible to use various ones in which at least one selected from the group consisting of terpineol and cellosolve is dissolved in an organic solvent such as terpineol or cellosolve.
【0027】また、添加物であるAl含有有機化合物と
しては、アルミニウムレジネート、ステアリン酸アルミ
ニウム、オレイン酸アルミニウム、ラウリン酸アルミニ
ウム、乳酸アルミニウム、アルミニウムアセチルアセト
ネート、アルミニウムトリイソプロポキシド、アルミニ
ウムブトキシドから選ばれる少なくとも1種を用いるこ
とが可能であり、さらにAlを含有するその他の有機化
合物を用いることが可能である。The Al-containing organic compound as an additive is selected from aluminum resinate, aluminum stearate, aluminum oleate, aluminum laurate, aluminum lactate, aluminum acetylacetonate, aluminum triisopropoxide, and aluminum butoxide. At least one kind can be used, and other organic compounds containing Al can be used.
【0028】なお、これらのAl含有有機化合物は、粉
末で添加してもよいが、適当な溶媒に溶解して液体で添
加した場合、ペースト中での分散度が向上し、界面のA
l−Si合金層6の生成が促進され、十分なBSF効果
を得ることが可能になり好ましい。These Al-containing organic compounds may be added in powder form. However, when dissolved in an appropriate solvent and added in liquid form, the degree of dispersion in the paste is improved, and the A
This is preferable because the formation of the l-Si alloy layer 6 is promoted and a sufficient BSF effect can be obtained.
【0029】上記のようにして調製した導電性ペースト
を用いて、p型Si半導体基板の裏面側のほぼ全面に裏
面電極(Al電極)を形成することにより、図1に示す
ような太陽電池を製造した。By using the conductive paste prepared as described above, a back electrode (Al electrode) is formed on almost the entire back surface of the p-type Si semiconductor substrate to obtain a solar cell as shown in FIG. Manufactured.
【0030】なお、図1に示す太陽電池は、従来の技術
の欄でも説明したように、厚さ300〜400μmのp
型Si半導体基板1の受光面側に、0.3〜0.5μm
のn型不純物層2及び反射防止膜3が形成され、かつ、
反射防止膜3を貫通してn型不純物層2に達するグリッ
ド電極4が形成されているとともに、p型Si半導体基
板の裏面のほぼ全面に裏面電極(Al電極)5が形成さ
れ、裏面電極5とp型Si半導体基板1の界面にAl−
Si合金層6が形成された構造を有している。The solar cell shown in FIG. 1 has a thickness of 300 to 400 μm as described in the section of the prior art.
0.3 to 0.5 μm on the light-receiving surface side of the type Si semiconductor substrate 1
N-type impurity layer 2 and antireflection film 3 are formed, and
A grid electrode 4 penetrating the antireflection film 3 and reaching the n-type impurity layer 2 is formed, and a back electrode (Al electrode) 5 is formed on almost the entire back surface of the p-type Si semiconductor substrate. Al- at the interface between the substrate and the p-type Si semiconductor substrate 1
It has a structure in which a Si alloy layer 6 is formed.
【0031】なお、この太陽電池の作製手順は以下の通
りである。まず、p型Si半導体基板1の受光面側に所
定深さのn型不純物層2が形成されたpn接合を有し、
さらに、反射防止膜3が形成されたp型Si半導体基板
を用意する。そして、反射防止膜3上に、受光面用Ag
ペーストをグリッド状に印刷、塗布し、乾燥する。続い
て、p型Si半導体基板1の裏面側に、上記のAl含有
有機化合物を添加した導電性ペーストをほぼ全面にスク
リーン印刷法により塗布する。それから、導電性ペース
トを乾燥させた後、近赤外線焼成炉を用いて、最高温度
750℃で焼成し、受光面のグリッド電極4及び裏面電
極5を形成することにより、図1に示すような太陽電池
を得る。The procedure for manufacturing this solar cell is as follows. First, a p-type Si semiconductor substrate 1 has a pn junction in which an n-type impurity layer 2 having a predetermined depth is formed on the light-receiving surface side,
Further, a p-type Si semiconductor substrate on which the antireflection film 3 is formed is prepared. Then, on the anti-reflection film 3, the light-receiving surface Ag
The paste is printed on a grid, applied and dried. Subsequently, a conductive paste to which the above-described Al-containing organic compound is added is applied to almost the entire back surface of the p-type Si semiconductor substrate 1 by a screen printing method. Then, after the conductive paste is dried, it is baked at a maximum temperature of 750 ° C. using a near-infrared firing furnace to form the grid electrode 4 and the back electrode 5 on the light receiving surface, thereby forming a solar cell as shown in FIG. Get batteries.
【0032】なお、この実施形態の太陽電池において
は、十分なBSF効果を得るために、従来の太陽電池の
場合には50〜60μmの膜厚が必要であった裏面電極
の厚みを、表2の試料No.1〜10に示すように20〜
30μmの膜厚としている。In the solar cell of this embodiment, in order to obtain a sufficient BSF effect, the thickness of the back electrode, which was required to be 50 to 60 μm in the case of the conventional solar cell, is shown in Table 2. As shown in Sample Nos. 1 to 10,
The thickness is 30 μm.
【0033】上記のようにして作製した太陽電池につい
て、従来の導電性ペーストと、Al含有有機化合物を添
加した本願発明の実施形態の導電性ペーストを用いた場
合における、裏面電極の膜厚と、p型Si半導体基板の
反り量及び太陽電池特性(FF値)の関係などを表2に
示す。With respect to the solar cell fabricated as described above, when the conventional conductive paste and the conductive paste of the embodiment of the present invention to which an Al-containing organic compound was added were used, Table 2 shows the relationship between the amount of warpage of the p-type Si semiconductor substrate and the solar cell characteristics (FF value).
【0034】[0034]
【表2】 [Table 2]
【0035】p型Si半導体基板1の反り量は、10mm
×37.5mm×200μm(t)の基板に導電性ペースト
を塗布して焼成した場合の、図2に示す距離Xの値であ
る。なお、製造工程において不具合が発生しない反り量
の目標値は、60.0μm以下であり、太陽電池特性
(FF値)は0.710以上である。The warpage of the p-type Si semiconductor substrate 1 is 10 mm
The value of the distance X shown in FIG. 2 when a conductive paste is applied to a substrate of × 37.5 mm × 200 μm (t) and baked. The target value of the amount of warpage that does not cause a problem in the manufacturing process is 60.0 μm or less, and the solar cell characteristic (FF value) is 0.710 or more.
【0036】表2に示すように、従来の導電性ペースト
を用いて裏面電極を形成した場合、0.710以上のF
F値を得ようとすると、裏面電極(Al電極)を従来例
1のように50μm以上にしなければならず、p型Si
半導体基板の反り量が大きくなり、また、反り量を小さ
くするために、従来例2のように裏面電極の厚みを小さ
くすると、FF値が0.7未満となり、所望の太陽電池
特性を得ることができなくなる。As shown in Table 2, when the back electrode was formed using a conventional conductive paste, the F
In order to obtain an F value, the back electrode (Al electrode) must be 50 μm or more as in Conventional Example 1, and the p-type Si
If the thickness of the back electrode is reduced as in Conventional Example 2 to increase the amount of warpage of the semiconductor substrate and to reduce the amount of warpage, the FF value becomes less than 0.7, and desired solar cell characteristics can be obtained. Can not be done.
【0037】これに対し、本願発明の実施形態にかかる
導電性ペーストを用いて裏面電極を形成した場合、裏面
電極の膜厚を20.3〜26.1μmと薄くしても、F
F値0.710以上の太陽電池特性を得ることが可能で
ある。また、裏面電極の膜厚を上記のように薄くしてい
るので、p型Si半導体基板の反り量を小さくして、製
造工程における歩留まりを向上させることが可能にな
る。On the other hand, when the back electrode is formed by using the conductive paste according to the embodiment of the present invention, even if the thickness of the back electrode is as thin as 20.3 to 26.1 μm, F
It is possible to obtain solar cell characteristics having an F value of 0.710 or more. Further, since the thickness of the back electrode is reduced as described above, the amount of warpage of the p-type Si semiconductor substrate can be reduced, and the yield in the manufacturing process can be improved.
【0038】なお、本願発明は、上記実施形態に限定さ
れるものではなく、導電性ペーストを構成する各材料の
配合割合や、太陽電池の構造などに関し、発明の要旨の
範囲内において、種々の応用、変形を加えることが可能
である。It should be noted that the present invention is not limited to the above-described embodiment, but includes various proportions of the materials constituting the conductive paste, the structure of the solar cell, etc., within the scope of the invention. Applications and modifications are possible.
【0039】[0039]
【発明の効果】上述のように、本願発明(請求項1)の
導電性ペーストは、Al粉末、ガラスフリット、有機質
ビヒクルを配合するとともに、さらにAl含有有機化合
物を配合しているので、焼成工程でAl含有有機化合物
が分解し、金属アルミニウムが生成して、p型Si半導
体基板と効率よく反応するため、電極膜厚を薄くしても
所望の太陽電池特性を確保することが可能になる。そし
て、電極膜厚を薄くすることが可能になる結果、歩留ま
りを向上させることが可能になるとともに、p型Si半
導体基板の薄層化によるコストダウンを図ることが可能
になる。As described above, the conductive paste of the present invention (Claim 1) contains Al powder, glass frit, and an organic vehicle, and further contains an Al-containing organic compound. As a result, the Al-containing organic compound is decomposed to produce metallic aluminum, which reacts efficiently with the p-type Si semiconductor substrate, so that desired solar cell characteristics can be ensured even if the electrode thickness is reduced. As a result, the electrode thickness can be reduced, so that the yield can be improved and the cost can be reduced by reducing the thickness of the p-type Si semiconductor substrate.
【0040】また、請求項2の導電性ペーストのよう
に、アルミニウム粉末、ガラスフリット、有機質ビヒク
ル及びアルミニウム含有有機化合物の配合割合を、アル
ミニウム粉末50.0〜75.0重量%、ガラスフリッ
ト0.5〜 5.0重量%、有機質ビヒクル20.0〜
30.0重量%、アルミニウム含有有機化合物1.0〜
15.0重量%(Al金属換算:0.01〜3.0重量
%)とすることにより、さらに確実に、所望の太陽電池
特性を確保しつつ、電極膜厚を薄くすることが可能にな
る。Further, as in the conductive paste of the second aspect, the mixing ratio of the aluminum powder, the glass frit, the organic vehicle and the aluminum-containing organic compound is such that the aluminum powder is 50.0 to 75.0% by weight, the glass frit is 0. 5 to 5.0% by weight, organic vehicle 20.0 to
30.0% by weight, aluminum-containing organic compound 1.0 to
By setting the content to 15.0% by weight (in terms of Al metal: 0.01 to 3.0% by weight), it is possible to more reliably reduce the thickness of the electrode while securing desired solar cell characteristics. .
【0041】また、請求項3の導電性ペーストのよう
に、Al含有有機化合物として、アルミニウムレジネー
ト、ステアリン酸アルミニウム、オレイン酸アルミニウ
ム、ラウリン酸アルミニウム、乳酸アルミニウム、アル
ミニウムアセチルアセトネート、アルミニウムトリイソ
プロポキシド、アルミニウムブトキシドからなる群より
選ばれる少なくとも1種を用いることにより、本願発明
の効果を確実に奏させることが可能になり、本願発明を
実効あらしめることができる。Further, as in the conductive paste according to claim 3, as the Al-containing organic compound, aluminum resinate, aluminum stearate, aluminum oleate, aluminum laurate, aluminum lactate, aluminum acetylacetonate, aluminum triisopropoxide are used. By using at least one selected from the group consisting of aluminum butoxide, the effects of the present invention can be reliably achieved, and the present invention can be made effective.
【0042】また、本願発明(請求項4)の太陽電池の
ように、請求項1〜3のいずれかに記載の導電性ペース
トを用いて電極を形成した場合、太陽電池特性を確保し
つつ電極膜厚を薄くし、p型Si半導体基板の反りを低
減することができるようになる。すなわち、従来は電極
膜厚を50〜60μmとすることが必要であったもの
を、太陽電池特性を損なうことなく(すなわち、p型S
i半導体基板の電極形成面に形成されるAl−Si合金
層の生成量を減らすことなく)20〜30μmにまで薄
くすることが可能になり、p型Si半導体基板の反りを
防止して、歩留まりを向上させることができる。Further, when the electrode is formed using the conductive paste according to any one of claims 1 to 3 as in the solar cell of the present invention (claim 4), the electrode is formed while ensuring the solar cell characteristics. It becomes possible to reduce the film thickness and reduce the warpage of the p-type Si semiconductor substrate. That is, what conventionally required the electrode film thickness to be 50 to 60 μm is reduced without impairing the solar cell characteristics (that is, the p-type S
The thickness can be reduced to 20 to 30 μm (without reducing the generation amount of the Al—Si alloy layer formed on the electrode formation surface of the i-semiconductor substrate), and the p-type Si semiconductor substrate can be prevented from warping and the yield can be reduced. Can be improved.
【図1】本願発明の一実施形態にかかる太陽電池の構造
を示す図である。FIG. 1 is a diagram showing a structure of a solar cell according to an embodiment of the present invention.
【図2】p型Si半導体基板の反り量を示す模式図であ
る。FIG. 2 is a schematic diagram showing the amount of warpage of a p-type Si semiconductor substrate.
1 p型Si半導体基板 2 n型不純物層 3 反射防止膜 4 グリッド電極 5 裏面電極(Al電極) 6 Al−Si合金層 REFERENCE SIGNS LIST 1 p-type Si semiconductor substrate 2 n-type impurity layer 3 anti-reflection film 4 grid electrode 5 back electrode (Al electrode) 6 Al-Si alloy layer
Claims (4)
電性ペーストであって、 アルミニウム粉末、ガラスフリット、有機質ビヒクル及
びアルミニウム含有有機化合物を含有することを特徴と
する導電性ペースト。1. A conductive paste for forming electrodes on a p-type Si semiconductor substrate, said conductive paste comprising aluminum powder, glass frit, an organic vehicle and an aluminum-containing organic compound.
質ビヒクル及びアルミニウム含有有機化合物の配合割合
を、 アルミニウム粉末 :50.0〜75.0重量
% ガラスフリット : 0.5〜 5.0重量
% 有機質ビヒクル :20.0〜30.0重量
% アルミニウム含有有機化合物: 1.0〜15.0重量
% (Al金属換算:0.01〜3.0重量%)としたこと
を特徴とする請求項1記載の導電性ペースト。2. The compounding ratio of aluminum powder, glass frit, organic vehicle and aluminum-containing organic compound is as follows: Aluminum powder: 50.0 to 75.0% by weight Glass frit: 0.5 to 5.0% by weight Organic vehicle: The aluminum-containing organic compound: 20.0 to 30.0% by weight: 1.0 to 15.0% by weight (in terms of Al metal: 0.01 to 3.0% by weight). Conductive paste.
ミニウムレジネート、ステアリン酸アルミニウム、オレ
イン酸アルミニウム、ラウリン酸アルミニウム、乳酸ア
ルミニウム、アルミニウムアセチルアセトネート、アル
ミニウムトリイソプロポキシド、アルミニウムブトキシ
ドからなる群より選ばれる少なくとも1種であることを
特徴とする請求項1又は2記載の導電性ペースト。3. The aluminum-containing organic compound is at least one selected from the group consisting of aluminum resinate, aluminum stearate, aluminum oleate, aluminum laurate, aluminum lactate, aluminum acetylacetonate, aluminum triisopropoxide, and aluminum butoxide. 3. The conductive paste according to claim 1, wherein the conductive paste is one kind.
ーストを塗布して焼き付けることにより形成した電極を
備えた太陽電池。4. A solar cell comprising an electrode formed by applying and baking the conductive paste according to claim 1.
Priority Applications (1)
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JP10282010A JP2000090734A (en) | 1998-09-16 | 1998-09-16 | Conductive paste, and solar battery using it |
Applications Claiming Priority (1)
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---|---|---|---|
JP10282010A JP2000090734A (en) | 1998-09-16 | 1998-09-16 | Conductive paste, and solar battery using it |
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Publication Number | Publication Date |
---|---|
JP2000090734A true JP2000090734A (en) | 2000-03-31 |
Family
ID=17646980
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