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HUE038409T2 - Delta-fázisú molibdén-nitridet tartalmazó Mo-N-bázisú réteget tartalmazó bevonat - Google Patents

Delta-fázisú molibdén-nitridet tartalmazó Mo-N-bázisú réteget tartalmazó bevonat

Info

Publication number
HUE038409T2
HUE038409T2 HUE14873980A HUE14873980A HUE038409T2 HU E038409 T2 HUE038409 T2 HU E038409T2 HU E14873980 A HUE14873980 A HU E14873980A HU E14873980 A HUE14873980 A HU E14873980A HU E038409 T2 HUE038409 T2 HU E038409T2
Authority
HU
Hungary
Prior art keywords
coating
based layer
molybdenum nitride
delta phase
delta
Prior art date
Application number
HUE14873980A
Other languages
English (en)
Inventor
Juergen Ramm
Johann Karner
Original Assignee
Oerlikon Surface Solutions Ag Pfaeffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfaeffikon filed Critical Oerlikon Surface Solutions Ag Pfaeffikon
Publication of HUE038409T2 publication Critical patent/HUE038409T2/hu

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5886—Mechanical treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
HUE14873980A 2013-11-29 2014-12-01 Delta-fázisú molibdén-nitridet tartalmazó Mo-N-bázisú réteget tartalmazó bevonat HUE038409T2 (hu)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013018007.4A DE102013018007A1 (de) 2013-11-29 2013-11-29 Verfahren zur Verbesserung des Gegenkörperverschleisses im tribologischen Kontakt
PCT/EP2014/003151 WO2015078581A1 (de) 2013-11-29 2014-11-26 Mo-n basierte hartstoffschicht

Publications (1)

Publication Number Publication Date
HUE038409T2 true HUE038409T2 (hu) 2018-10-29

Family

ID=51987118

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE14873980A HUE038409T2 (hu) 2013-11-29 2014-12-01 Delta-fázisú molibdén-nitridet tartalmazó Mo-N-bázisú réteget tartalmazó bevonat

Country Status (10)

Country Link
US (1) US10106881B2 (hu)
EP (1) EP3074548B1 (hu)
JP (1) JP6523283B2 (hu)
KR (1) KR102322971B1 (hu)
CN (1) CN106062237B (hu)
DE (1) DE102013018007A1 (hu)
ES (1) ES2677224T3 (hu)
HU (1) HUE038409T2 (hu)
PT (1) PT3074550T (hu)
WO (2) WO2015078581A1 (hu)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017102059A1 (de) * 2017-02-02 2018-08-02 Friedrich-Alexander-Universität Erlangen Schichtsystem und Bauteil
US11929512B2 (en) 2019-04-30 2024-03-12 The Board Of Trustees Of The Leland Stanford Junior University Oxidized surface layer on transition metal nitrides: active catalysts for the oxygen reduction reaction
EP4031690A1 (de) * 2019-09-19 2022-07-27 Oerlikon Surface Solutions AG, Pfäffikon Substrat mit einem molydännitrid schichtsystem, sowie beschichtungsverfahren zur herstellung eines schichtsystems
CN113023691B (zh) * 2021-03-11 2022-08-26 中国检验检疫科学研究院 一种单晶多孔Mo2N纳米带的合成方法及应用

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4421144C2 (de) 1993-07-21 2003-02-13 Unaxis Balzers Ag Beschichtetes Werkzeug mit erhöhter Standzeit
US6827976B2 (en) 1998-04-29 2004-12-07 Unaxis Trading Ag Method to increase wear resistance of a tool or other machine component
CA2327031C (en) * 1999-11-29 2007-07-03 Vladimir Gorokhovsky Composite vapour deposited coatings and process therefor
US7704611B2 (en) * 2004-04-19 2010-04-27 Pivot A.S. Hard, wear-resistant aluminum nitride based coating
CA2569860C (en) * 2004-07-15 2015-01-20 Oc Oerlikon Balzers Ag High oxidation resistant hard coating for cutting tools
PL2355126T3 (pl) * 2005-03-24 2016-04-29 Oerlikon Surface Solutions Ag Truebbach Warstwa twardego materiału
SE529223C2 (sv) * 2005-05-06 2007-06-05 Seco Tools Ab Belagt skärverktyg innefattande hexagonal h-(Mel,Me2)Xfas
CN104805436A (zh) * 2006-09-26 2015-07-29 奥尔利康贸易股份公司（特吕巴赫） 具有硬涂层的工件
KR100821535B1 (ko) * 2007-01-17 2008-04-14 오에스지 가부시키가이샤 경질 다층 코팅 및 이를 포함하는 경질 다층 코팅 공구
US20090026292A1 (en) * 2007-07-27 2009-01-29 Caterpillar Inc. Coatings for use in fuel system components
DE102010053751A1 (de) 2010-10-28 2012-05-03 Oerlikon Trading Ag, Trübbach Molybdänmonoxidschichten und deren Herstellung mittels PVD
CN201943835U (zh) * 2011-01-28 2011-08-24 浙江汇锦梯尔镀层科技有限公司 具有pvd镀层的活塞环
WO2013135364A2 (en) * 2012-03-12 2013-09-19 Oerlikon Trading Ag, Trübbach Coating with enhanced sliding properties
DE102012207814A1 (de) 2012-05-10 2013-11-14 Mahle International Gmbh Bauelement, insbesondere ein Gleitelement

Also Published As

Publication number Publication date
PT3074550T (pt) 2018-07-18
JP2016540125A (ja) 2016-12-22
EP3074548B1 (de) 2021-10-27
WO2015096882A2 (de) 2015-07-02
KR20160091367A (ko) 2016-08-02
KR102322971B1 (ko) 2021-11-08
WO2015078581A1 (de) 2015-06-04
DE102013018007A1 (de) 2015-06-03
US10106881B2 (en) 2018-10-23
EP3074548A1 (de) 2016-10-05
CN106062237A (zh) 2016-10-26
ES2677224T3 (es) 2018-07-31
CN106062237B (zh) 2018-09-21
US20170029930A1 (en) 2017-02-02
WO2015096882A3 (de) 2015-09-11
JP6523283B2 (ja) 2019-05-29

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