GB9519925D0 - Electrostatic chuck and method of manufacturing the same - Google Patents
Electrostatic chuck and method of manufacturing the sameInfo
- Publication number
- GB9519925D0 GB9519925D0 GBGB9519925.3A GB9519925A GB9519925D0 GB 9519925 D0 GB9519925 D0 GB 9519925D0 GB 9519925 A GB9519925 A GB 9519925A GB 9519925 D0 GB9519925 D0 GB 9519925D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacturing
- same
- electrostatic chuck
- chuck
- electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23723194 | 1994-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB9519925D0 true GB9519925D0 (en) | 1995-11-29 |
| GB2293689A GB2293689A (en) | 1996-04-03 |
Family
ID=17012333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9519925A Withdrawn GB2293689A (en) | 1994-09-30 | 1995-09-29 | Electrostatic chuck |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR960012283A (en) |
| GB (1) | GB2293689A (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5933314A (en) * | 1997-06-27 | 1999-08-03 | Lam Research Corp. | Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks |
| US5880924A (en) * | 1997-12-01 | 1999-03-09 | Applied Materials, Inc. | Electrostatic chuck capable of rapidly dechucking a substrate |
| TW432580B (en) * | 1998-09-29 | 2001-05-01 | Applied Materials Inc | Piezoelectric method and apparatus for semiconductor wafer detection |
| US6965506B2 (en) | 1998-09-30 | 2005-11-15 | Lam Research Corporation | System and method for dechucking a workpiece from an electrostatic chuck |
| US6790375B1 (en) * | 1998-09-30 | 2004-09-14 | Lam Research Corporation | Dechucking method and apparatus for workpieces in vacuum processors |
| US6215640B1 (en) | 1998-12-10 | 2001-04-10 | Applied Materials, Inc. | Apparatus and method for actively controlling surface potential of an electrostatic chuck |
| JP2003060018A (en) * | 2001-08-13 | 2003-02-28 | Nissin Electric Co Ltd | Method and apparatus for attraction of substrate |
| DE102012109073A1 (en) * | 2012-09-26 | 2014-03-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for operating a gripping device and electrostatic gripping device |
| US11282732B2 (en) * | 2014-02-07 | 2022-03-22 | Trek, Inc. | System and method for clamping a work piece |
| KR20210010849A (en) * | 2018-04-12 | 2021-01-28 | 에이에스엠엘 네델란즈 비.브이. | Apparatus comprising electrostatic clamps and methods of operating the apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2106325A (en) * | 1981-09-14 | 1983-04-07 | Philips Electronic Associated | Electrostatic chuck |
| JPH06103683B2 (en) * | 1990-08-07 | 1994-12-14 | 株式会社東芝 | Electrostatic adsorption method |
| EP0506537A1 (en) * | 1991-03-28 | 1992-09-30 | Shin-Etsu Chemical Co., Ltd. | Electrostatic chuck |
| US5325261A (en) * | 1991-05-17 | 1994-06-28 | Unisearch Limited | Electrostatic chuck with improved release |
| US5436790A (en) * | 1993-01-15 | 1995-07-25 | Eaton Corporation | Wafer sensing and clamping monitor |
-
1995
- 1995-09-29 GB GB9519925A patent/GB2293689A/en not_active Withdrawn
- 1995-09-29 KR KR1019950033152A patent/KR960012283A/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| GB2293689A (en) | 1996-04-03 |
| KR960012283A (en) | 1996-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5885469B1 (en) | Topographical structure of an electrostatic chuck and method of fabricating same | |
| AU687475B2 (en) | Hubcap and method of manufacturing the same | |
| EP0726604A3 (en) | MIS device and method of manufacturing the same | |
| EP0882574A4 (en) | Complex sheet and method of manufacturing the same | |
| GB9515147D0 (en) | Semiconductor device and method of manufacturing the same | |
| AU685030B2 (en) | Abrasive sheet and method of manufacturing the same | |
| EP0700087A3 (en) | Semiconductor device and method of manufacturing the same | |
| GB2322920B (en) | Common rail and method of manufacturing the same | |
| GB2322922B (en) | Common rail and method of manufacturing the same | |
| EP0783727A4 (en) | Microstructures and methods for manufacturing microstructures | |
| GB2322921B (en) | Common rail and method of manufacturing the same | |
| AU1874695A (en) | Retroreflective article and method of making the same | |
| EP1024323A4 (en) | Joint and method of manufacturing the same | |
| AU2682595A (en) | Laminated body and method of manufacturing the same | |
| EP0744646A4 (en) | Gradual multifocus lens and method of manufacturing the same | |
| AU3685397A (en) | Photovoltaic element and method of and apparatus for manufacturing the same | |
| EP0712149A3 (en) | Light-emitting device and method of manufacturing the same | |
| GB2296191B (en) | Shaped absorbent article and method of manufacturing the same | |
| EP0860883A4 (en) | Transistor and method of manufacturing the same | |
| HUP0001645A3 (en) | Coated material and method of manufacturing the same | |
| GB9519925D0 (en) | Electrostatic chuck and method of manufacturing the same | |
| SG71064A1 (en) | Package and method of manufacture of the same | |
| GB2309585B (en) | Silicon-on-insulator substrate and method of fabricating the same | |
| GB9626954D0 (en) | Silicon-on-insulator substrate and method of fabricating the same | |
| EP0712914A3 (en) | Calcined pencil leads and method of manufacturing the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |