GB9206442D0 - Treatment chamber - Google Patents

Treatment chamber

Info

Publication number: GB9206442D0
Authority: GB; United Kingdom
Prior art keywords: treatment chamber; chamber; treatment
Prior art date: 1992-03-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

GB929206442A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

METAL RESEARCH SEMICONDUCTORS

Original Assignee

METAL RESEARCH SEMICONDUCTORS

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-03-25

Filing date

1992-03-25

Publication date

1992-05-06

1992-03-25 Application filed by METAL RESEARCH SEMICONDUCTORS filed Critical METAL RESEARCH SEMICONDUCTORS

1992-03-25 Priority to GB929206442A priority Critical patent/GB9206442D0/en

1992-05-06 Publication of GB9206442D0 publication Critical patent/GB9206442D0/en

1993-03-05 Priority to AU36419/93A priority patent/AU3641993A/en

1993-03-05 Priority to JP5516341A priority patent/JPH06508661A/en

1993-03-05 Priority to PCT/GB1993/000461 priority patent/WO1993019222A1/en

1993-03-05 Priority to EP19930905518 priority patent/EP0586651A1/en

Status Pending legal-status Critical Current

Links

GB929206442A 1992-03-25 1992-03-25 Treatment chamber Pending GB9206442D0 (en)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
GB929206442A GB9206442D0 (en)	1992-03-25	1992-03-25	Treatment chamber
AU36419/93A AU3641993A (en)	1992-03-25	1993-03-05	Treatment chamber
JP5516341A JPH06508661A (en)	1992-03-25	1993-03-05	processing room
PCT/GB1993/000461 WO1993019222A1 (en)	1992-03-25	1993-03-05	Treatment chamber
EP19930905518 EP0586651A1 (en)	1992-03-25	1993-03-05	Treatment chamber

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB929206442A GB9206442D0 (en)	1992-03-25	1992-03-25	Treatment chamber

Publications (1)

Publication Number	Publication Date
GB9206442D0 true GB9206442D0 (en)	1992-05-06

Family

ID=10712771

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB929206442A Pending GB9206442D0 (en)	1992-03-25	1992-03-25	Treatment chamber

Country Status (5)

Country	Link
EP (1)	EP0586651A1 (en)
JP (1)	JPH06508661A (en)
AU (1)	AU3641993A (en)
GB (1)	GB9206442D0 (en)
WO (1)	WO1993019222A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9127340B2 (en)	2009-02-13	2015-09-08	Asm International N.V.	Selective oxidation process
US8889565B2 (en)	2009-02-13	2014-11-18	Asm International N.V.	Selective removal of oxygen from metal-containing materials
US7829457B2 (en)	2009-02-20	2010-11-09	Asm International N.V.	Protection of conductors from oxidation in deposition chambers
US8507388B2 (en)	2010-04-26	2013-08-13	Asm International N.V.	Prevention of oxidation of substrate surfaces in process chambers
US11390950B2 (en) *	2017-01-10	2022-07-19	Asm Ip Holding B.V.	Reactor system and method to reduce residue buildup during a film deposition process

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS61275192A (en) *	1985-05-31	1986-12-05	Furukawa Electric Co Ltd:The	Vapor-phase growing method for semiconductor thin film
JPS63227011A (en) *	1987-03-17	1988-09-21	Fujitsu Ltd	Chemical vapor deposition system
US5002011A (en) *	1987-04-14	1991-03-26	Kabushiki Kaisha Toshiba	Vapor deposition apparatus
US5108792A (en) *	1990-03-09	1992-04-28	Applied Materials, Inc.	Double-dome reactor for semiconductor processing

1992
- 1992-03-25 GB GB929206442A patent/GB9206442D0/en active Pending
1993
- 1993-03-05 EP EP19930905518 patent/EP0586651A1/en not_active Withdrawn
- 1993-03-05 WO PCT/GB1993/000461 patent/WO1993019222A1/en not_active Application Discontinuation
- 1993-03-05 AU AU36419/93A patent/AU3641993A/en not_active Abandoned
- 1993-03-05 JP JP5516341A patent/JPH06508661A/en active Pending

Also Published As

Publication number	Publication date
WO1993019222A1 (en)	1993-09-30
EP0586651A1 (en)	1994-03-16
AU3641993A (en)	1993-10-21
JPH06508661A (en)	1994-09-29

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