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GB9112343D0 - Surface analysis apparatus - Google Patents

Surface analysis apparatus

Info

Publication number
GB9112343D0
GB9112343D0 GB919112343A GB9112343A GB9112343D0 GB 9112343 D0 GB9112343 D0 GB 9112343D0 GB 919112343 A GB919112343 A GB 919112343A GB 9112343 A GB9112343 A GB 9112343A GB 9112343 D0 GB9112343 D0 GB 9112343D0
Authority
GB
United Kingdom
Prior art keywords
analysis apparatus
surface analysis
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB919112343A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw Transducer Systems Ltd
Original Assignee
Renishaw Transducer Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Transducer Systems Ltd filed Critical Renishaw Transducer Systems Ltd
Priority to GB919112343A priority Critical patent/GB9112343D0/en
Publication of GB9112343D0 publication Critical patent/GB9112343D0/en
Priority to PCT/GB1992/001025 priority patent/WO1992022805A1/en
Priority to EP92911454A priority patent/EP0542962B2/en
Priority to DE69203830T priority patent/DE69203830T3/en
Priority to PCT/GB1992/001026 priority patent/WO1992022793A1/en
Priority to ZA924145A priority patent/ZA924145B/en
Priority to JP51130592A priority patent/JP3377209B2/en
Priority to US08/351,175 priority patent/US5510894A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/004—Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1782—In-depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
GB919112343A 1988-12-22 1991-06-08 Surface analysis apparatus Pending GB9112343D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB919112343A GB9112343D0 (en) 1991-06-08 1991-06-08 Surface analysis apparatus
PCT/GB1992/001025 WO1992022805A1 (en) 1991-06-08 1992-06-08 Surface analysis apparatus
EP92911454A EP0542962B2 (en) 1991-06-08 1992-06-08 Confocal spectroscopy
DE69203830T DE69203830T3 (en) 1991-06-08 1992-06-08 CONFOCAL SPECTROSCOPY.
PCT/GB1992/001026 WO1992022793A1 (en) 1991-06-08 1992-06-08 Confocal spectroscopy
ZA924145A ZA924145B (en) 1991-06-08 1992-06-08 Confocal spectroscopy
JP51130592A JP3377209B2 (en) 1991-06-08 1992-06-08 Confocal spectroscopy
US08/351,175 US5510894A (en) 1988-12-22 1994-11-30 Spectroscopic apparatus and methods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB919112343A GB9112343D0 (en) 1991-06-08 1991-06-08 Surface analysis apparatus

Publications (1)

Publication Number Publication Date
GB9112343D0 true GB9112343D0 (en) 1991-07-31

Family

ID=10696318

Family Applications (1)

Application Number Title Priority Date Filing Date
GB919112343A Pending GB9112343D0 (en) 1988-12-22 1991-06-08 Surface analysis apparatus

Country Status (3)

Country Link
GB (1) GB9112343D0 (en)
WO (1) WO1992022805A1 (en)
ZA (1) ZA924145B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9400111A (en) * 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Electron microscope with Raman spectroscopy.
WO1996010737A1 (en) * 1994-09-30 1996-04-11 Renishaw Plc Methods and apparatus for indentation, scratch or tribological testing
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US6520005B2 (en) 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
GB9514367D0 (en) * 1995-07-13 1995-09-13 Renishaw Plc Strain and/or stress sensitive devices
US6744500B2 (en) * 2001-10-23 2004-06-01 Stora Enso North America Corporation Identification of material inclusions in pulp and paper using Raman spectroscopy
DE10226801B4 (en) * 2002-06-15 2005-03-31 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Surface measuring device and method for mechanical and non-contact optical examination of object surfaces
GB0510497D0 (en) * 2004-08-04 2005-06-29 Horiba Ltd Substrate examining device
DE102009015341A1 (en) * 2009-03-27 2010-10-07 Carl Zeiss Ag Method for optical testing of sample during e.g. chemical analysis, involves detecting optical emission of sample depending on characteristic modulation i.e. temporally periodic modulation, of particle beam
DE202010010932U1 (en) * 2010-04-19 2011-10-07 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Device for imaging a sample surface
CN105973942B (en) * 2016-05-10 2019-01-25 国家纳米科学中心 A kind of device and method of synchronous electricity regulation and material transient absorption spectrometry
CZ2020405A3 (en) * 2020-07-10 2021-04-21 Univerzita Palackého v Olomouci Sample holder attachment for evaluating the mechanical resistance of thin films and a method for evaluating the quality of the mechanical resistance of thin films with this attachment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3037983C2 (en) * 1980-10-08 1983-03-31 Fa. Carl Zeiss, 7920 Heidenheim Method and device for the light-induced scanning microscopic representation of sample parameters in their spatial distribution
FR2596863B1 (en) * 1986-04-07 1988-06-17 Centre Nat Rech Scient ANALYTICAL MICROSCOPY DEVICE CAPABLE OF FORMING BOTH A RAMAN PROBE AND AN ELECTRONIC PROBE
US4942299A (en) * 1989-03-01 1990-07-17 Midwest Research Institute Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy
FR2654212A1 (en) * 1989-11-03 1991-05-10 Ardt METHOD OF SPECTROSCOPIC ANALYSIS OF THE LIGHT DIFFRACTEE OR ABSORBED BY A SUBSTANCE PLACED IN A CLOSE FIELD, AND NEAR-FIELD SCANNING OPTICAL MICROSCOPES IMPLEMENTING SAID METHOD

Also Published As

Publication number Publication date
WO1992022805A1 (en) 1992-12-23
ZA924145B (en) 1993-03-31

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