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GB762365A - Improvements in and relating to ionic vacuum pumping apparatus - Google Patents

Improvements in and relating to ionic vacuum pumping apparatus

Info

Publication number
GB762365A
GB762365A GB1926053A GB1926053A GB762365A GB 762365 A GB762365 A GB 762365A GB 1926053 A GB1926053 A GB 1926053A GB 1926053 A GB1926053 A GB 1926053A GB 762365 A GB762365 A GB 762365A
Authority
GB
United Kingdom
Prior art keywords
chamber
discharge
pump
gas
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1926053A
Inventor
Walter Steckelmacher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
W Edwards and Company London Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by W Edwards and Company London Ltd filed Critical W Edwards and Company London Ltd
Priority to GB1926053A priority Critical patent/GB762365A/en
Publication of GB762365A publication Critical patent/GB762365A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

762,365. Discharge apparatus. EDWARDS & CO. (LONDON), Ltd., W. Oct. 8, 1954 [July 10, 1953], No. 19260/53. Class 39(1). In an ionization vacuum pump the ionization of the gas to be evacuated is effected by means of a high frequency discharge. The pump shown comprises a cylindrical discharge chamber 1 of glass or other dielectric material having good secondary emission properties connected to a metal vessel 2 which it is required to evacuate. The vessel 2 is provided with an earth connection 3. A collector electrode 5 having a lead 6 for connection to a source of high voltage is supported in a continuation 4 of the chamber 1 of reduced diameter which is connected to a backing pump (not shown). A coil 7 surrounding the discharge chamber 1 is connected to a high frequency oscillator 8. An additional steady transverse magnetic field may be supplied to increase the lengths of the paths traversed by the electrons. The coil 7 may be replaced by two coils, each embracing one half of the periphery of the chamber 1, or by two plate electrodes either inside or outside the chamber. The discharge can be started with a potential as low as 100 volts, the required large increase in the number of electrons being obtained by secondary emission from the walls of the discharge chamber. The ionized gas particles resulting from collision are attracted towards the electrode 5 thereby forming a stream of gas which passes to the backing pump.
GB1926053A 1953-07-10 1953-07-10 Improvements in and relating to ionic vacuum pumping apparatus Expired GB762365A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1926053A GB762365A (en) 1953-07-10 1953-07-10 Improvements in and relating to ionic vacuum pumping apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1926053A GB762365A (en) 1953-07-10 1953-07-10 Improvements in and relating to ionic vacuum pumping apparatus

Publications (1)

Publication Number Publication Date
GB762365A true GB762365A (en) 1956-11-28

Family

ID=10126415

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1926053A Expired GB762365A (en) 1953-07-10 1953-07-10 Improvements in and relating to ionic vacuum pumping apparatus

Country Status (1)

Country Link
GB (1) GB762365A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3292844A (en) * 1962-05-23 1966-12-20 Robert A Cornog Vacuum pump
EP0499239A2 (en) * 1991-02-12 1992-08-19 Ebara Corporation Ion pump and vacuum pumping unit using the same
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5480286A (en) * 1990-08-03 1996-01-02 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
GB2552071A (en) * 2016-05-31 2018-01-10 Agilent Technologies Inc Ion throughput pump and method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3292844A (en) * 1962-05-23 1966-12-20 Robert A Cornog Vacuum pump
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5480286A (en) * 1990-08-03 1996-01-02 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5727929A (en) * 1990-08-03 1998-03-17 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
EP0499239A2 (en) * 1991-02-12 1992-08-19 Ebara Corporation Ion pump and vacuum pumping unit using the same
EP0499239A3 (en) * 1991-02-12 1993-03-03 Ebara Corporation Ion pump and vacuum pumping unit using the same
GB2552071A (en) * 2016-05-31 2018-01-10 Agilent Technologies Inc Ion throughput pump and method
US10455683B2 (en) 2016-05-31 2019-10-22 Agilent Technologies, Inc. Ion throughput pump and method
GB2552071B (en) * 2016-05-31 2022-11-09 Agilent Technologies Inc Ion throughput pump and method

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