GB2390477B - Electron beam plotter - Google Patents
Electron beam plotterInfo
- Publication number
- GB2390477B GB2390477B GB0302450A GB0302450A GB2390477B GB 2390477 B GB2390477 B GB 2390477B GB 0302450 A GB0302450 A GB 0302450A GB 0302450 A GB0302450 A GB 0302450A GB 2390477 B GB2390477 B GB 2390477B
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron beam
- beam plotter
- plotter
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/03—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by deforming with non-mechanical means, e.g. laser, beam of particles
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Optical Recording Or Reproduction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002044104A JP2003242924A (en) | 2002-02-21 | 2002-02-21 | Electron beam lithography device |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0302450D0 GB0302450D0 (en) | 2003-03-05 |
GB2390477A GB2390477A (en) | 2004-01-07 |
GB2390477B true GB2390477B (en) | 2005-08-03 |
Family
ID=19192762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0302450A Expired - Fee Related GB2390477B (en) | 2002-02-21 | 2003-02-03 | Electron beam plotter |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2003242924A (en) |
GB (1) | GB2390477B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007116741A1 (en) | 2006-03-28 | 2007-10-18 | Pioneer Corporation | Recording system, recording device, and recording control signal generation device |
JP4789260B2 (en) * | 2006-08-23 | 2011-10-12 | エスアイアイ・ナノテクノロジー株式会社 | Charged particle beam apparatus and aperture axis adjusting method |
JP2014011374A (en) | 2012-07-02 | 2014-01-20 | Nuflare Technology Inc | Mask drawing method and mask drawing device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6136141A (en) * | 1984-07-26 | 1986-02-20 | Nippon Sheet Glass Co Ltd | Method for bonding glass tube to metal fixture |
JPS6228090A (en) * | 1985-07-29 | 1987-02-06 | Hitachi Ltd | Beam aligner for electron beam |
JPS6263425A (en) * | 1986-08-26 | 1987-03-20 | Toshiba Corp | Electron beam exposure system |
JPH10289860A (en) * | 1997-04-16 | 1998-10-27 | Nikon Corp | Method for adjusting beam of projection optical system and projection optical system |
-
2002
- 2002-02-21 JP JP2002044104A patent/JP2003242924A/en active Pending
-
2003
- 2003-02-03 GB GB0302450A patent/GB2390477B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6136141A (en) * | 1984-07-26 | 1986-02-20 | Nippon Sheet Glass Co Ltd | Method for bonding glass tube to metal fixture |
JPS6228090A (en) * | 1985-07-29 | 1987-02-06 | Hitachi Ltd | Beam aligner for electron beam |
JPS6263425A (en) * | 1986-08-26 | 1987-03-20 | Toshiba Corp | Electron beam exposure system |
JPH10289860A (en) * | 1997-04-16 | 1998-10-27 | Nikon Corp | Method for adjusting beam of projection optical system and projection optical system |
Also Published As
Publication number | Publication date |
---|---|
JP2003242924A (en) | 2003-08-29 |
GB2390477A (en) | 2004-01-07 |
GB0302450D0 (en) | 2003-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20100203 |