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GB2390477B - Electron beam plotter - Google Patents

Electron beam plotter

Info

Publication number
GB2390477B
GB2390477B GB0302450A GB0302450A GB2390477B GB 2390477 B GB2390477 B GB 2390477B GB 0302450 A GB0302450 A GB 0302450A GB 0302450 A GB0302450 A GB 0302450A GB 2390477 B GB2390477 B GB 2390477B
Authority
GB
United Kingdom
Prior art keywords
electron beam
beam plotter
plotter
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0302450A
Other versions
GB2390477A (en
GB0302450D0 (en
Inventor
Nobuki Yamaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Publication of GB0302450D0 publication Critical patent/GB0302450D0/en
Publication of GB2390477A publication Critical patent/GB2390477A/en
Application granted granted Critical
Publication of GB2390477B publication Critical patent/GB2390477B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261Preparing a master, e.g. exposing photoresist, electroforming
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/023Means for mechanically adjusting components not otherwise provided for
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/03Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by deforming with non-mechanical means, e.g. laser, beam of particles
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007Holding mechanisms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Optical Recording Or Reproduction (AREA)
GB0302450A 2002-02-21 2003-02-03 Electron beam plotter Expired - Fee Related GB2390477B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002044104A JP2003242924A (en) 2002-02-21 2002-02-21 Electron beam lithography device

Publications (3)

Publication Number Publication Date
GB0302450D0 GB0302450D0 (en) 2003-03-05
GB2390477A GB2390477A (en) 2004-01-07
GB2390477B true GB2390477B (en) 2005-08-03

Family

ID=19192762

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0302450A Expired - Fee Related GB2390477B (en) 2002-02-21 2003-02-03 Electron beam plotter

Country Status (2)

Country Link
JP (1) JP2003242924A (en)
GB (1) GB2390477B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116741A1 (en) 2006-03-28 2007-10-18 Pioneer Corporation Recording system, recording device, and recording control signal generation device
JP4789260B2 (en) * 2006-08-23 2011-10-12 エスアイアイ・ナノテクノロジー株式会社 Charged particle beam apparatus and aperture axis adjusting method
JP2014011374A (en) 2012-07-02 2014-01-20 Nuflare Technology Inc Mask drawing method and mask drawing device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136141A (en) * 1984-07-26 1986-02-20 Nippon Sheet Glass Co Ltd Method for bonding glass tube to metal fixture
JPS6228090A (en) * 1985-07-29 1987-02-06 Hitachi Ltd Beam aligner for electron beam
JPS6263425A (en) * 1986-08-26 1987-03-20 Toshiba Corp Electron beam exposure system
JPH10289860A (en) * 1997-04-16 1998-10-27 Nikon Corp Method for adjusting beam of projection optical system and projection optical system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136141A (en) * 1984-07-26 1986-02-20 Nippon Sheet Glass Co Ltd Method for bonding glass tube to metal fixture
JPS6228090A (en) * 1985-07-29 1987-02-06 Hitachi Ltd Beam aligner for electron beam
JPS6263425A (en) * 1986-08-26 1987-03-20 Toshiba Corp Electron beam exposure system
JPH10289860A (en) * 1997-04-16 1998-10-27 Nikon Corp Method for adjusting beam of projection optical system and projection optical system

Also Published As

Publication number Publication date
JP2003242924A (en) 2003-08-29
GB2390477A (en) 2004-01-07
GB0302450D0 (en) 2003-03-05

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100203