GB2179496B - A method of controlling a distribution of carrier lifetimes within a semiconductor material - Google Patents
A method of controlling a distribution of carrier lifetimes within a semiconductor materialInfo
- Publication number
- GB2179496B GB2179496B GB8521223A GB8521223A GB2179496B GB 2179496 B GB2179496 B GB 2179496B GB 8521223 A GB8521223 A GB 8521223A GB 8521223 A GB8521223 A GB 8521223A GB 2179496 B GB2179496 B GB 2179496B
- Authority
- GB
- United Kingdom
- Prior art keywords
- distribution
- controlling
- semiconductor material
- carrier lifetimes
- lifetimes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Thyristors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8521223A GB2179496B (en) | 1985-08-23 | 1985-08-23 | A method of controlling a distribution of carrier lifetimes within a semiconductor material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8521223A GB2179496B (en) | 1985-08-23 | 1985-08-23 | A method of controlling a distribution of carrier lifetimes within a semiconductor material |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8521223D0 GB8521223D0 (en) | 1985-10-02 |
GB2179496A GB2179496A (en) | 1987-03-04 |
GB2179496B true GB2179496B (en) | 1989-08-09 |
Family
ID=10584265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8521223A Expired GB2179496B (en) | 1985-08-23 | 1985-08-23 | A method of controlling a distribution of carrier lifetimes within a semiconductor material |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2179496B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3940723A1 (en) * | 1989-12-09 | 1991-06-20 | Eupec Gmbh & Co Kg | METHOD FOR GENERATING CARGO LIFETIME PROFILES IN A SEMICONDUCTOR |
US5883403A (en) * | 1995-10-03 | 1999-03-16 | Hitachi, Ltd. | Power semiconductor device |
JP2008091705A (en) * | 2006-10-03 | 2008-04-17 | Mitsubishi Electric Corp | Semiconductor device and manufacturing method thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0028934A1 (en) * | 1979-11-12 | 1981-05-20 | Fujitsu Limited | A method of manufacturing a semiconductor device |
EP0036157A1 (en) * | 1980-03-14 | 1981-09-23 | Rockwell International Corporation | Low temperature annealing of semiconductor devices |
-
1985
- 1985-08-23 GB GB8521223A patent/GB2179496B/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0028934A1 (en) * | 1979-11-12 | 1981-05-20 | Fujitsu Limited | A method of manufacturing a semiconductor device |
EP0036157A1 (en) * | 1980-03-14 | 1981-09-23 | Rockwell International Corporation | Low temperature annealing of semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
GB2179496A (en) | 1987-03-04 |
GB8521223D0 (en) | 1985-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19920823 |