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GB2179496B - A method of controlling a distribution of carrier lifetimes within a semiconductor material - Google Patents

A method of controlling a distribution of carrier lifetimes within a semiconductor material

Info

Publication number
GB2179496B
GB2179496B GB8521223A GB8521223A GB2179496B GB 2179496 B GB2179496 B GB 2179496B GB 8521223 A GB8521223 A GB 8521223A GB 8521223 A GB8521223 A GB 8521223A GB 2179496 B GB2179496 B GB 2179496B
Authority
GB
United Kingdom
Prior art keywords
distribution
controlling
semiconductor material
carrier lifetimes
lifetimes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8521223A
Other versions
GB2179496A (en
GB8521223D0 (en
Inventor
Peter John Frith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marconi Electronic Devices Ltd
Original Assignee
Marconi Electronic Devices Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Electronic Devices Ltd filed Critical Marconi Electronic Devices Ltd
Priority to GB8521223A priority Critical patent/GB2179496B/en
Publication of GB8521223D0 publication Critical patent/GB8521223D0/en
Publication of GB2179496A publication Critical patent/GB2179496A/en
Application granted granted Critical
Publication of GB2179496B publication Critical patent/GB2179496B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thyristors (AREA)
GB8521223A 1985-08-23 1985-08-23 A method of controlling a distribution of carrier lifetimes within a semiconductor material Expired GB2179496B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8521223A GB2179496B (en) 1985-08-23 1985-08-23 A method of controlling a distribution of carrier lifetimes within a semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8521223A GB2179496B (en) 1985-08-23 1985-08-23 A method of controlling a distribution of carrier lifetimes within a semiconductor material

Publications (3)

Publication Number Publication Date
GB8521223D0 GB8521223D0 (en) 1985-10-02
GB2179496A GB2179496A (en) 1987-03-04
GB2179496B true GB2179496B (en) 1989-08-09

Family

ID=10584265

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8521223A Expired GB2179496B (en) 1985-08-23 1985-08-23 A method of controlling a distribution of carrier lifetimes within a semiconductor material

Country Status (1)

Country Link
GB (1) GB2179496B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3940723A1 (en) * 1989-12-09 1991-06-20 Eupec Gmbh & Co Kg METHOD FOR GENERATING CARGO LIFETIME PROFILES IN A SEMICONDUCTOR
US5883403A (en) * 1995-10-03 1999-03-16 Hitachi, Ltd. Power semiconductor device
JP2008091705A (en) * 2006-10-03 2008-04-17 Mitsubishi Electric Corp Semiconductor device and manufacturing method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0028934A1 (en) * 1979-11-12 1981-05-20 Fujitsu Limited A method of manufacturing a semiconductor device
EP0036157A1 (en) * 1980-03-14 1981-09-23 Rockwell International Corporation Low temperature annealing of semiconductor devices

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0028934A1 (en) * 1979-11-12 1981-05-20 Fujitsu Limited A method of manufacturing a semiconductor device
EP0036157A1 (en) * 1980-03-14 1981-09-23 Rockwell International Corporation Low temperature annealing of semiconductor devices

Also Published As

Publication number Publication date
GB2179496A (en) 1987-03-04
GB8521223D0 (en) 1985-10-02

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19920823