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GB1287262A - Improvements in or relating to non-thermionic glow discharge devices - Google Patents

Improvements in or relating to non-thermionic glow discharge devices

Info

Publication number
GB1287262A
GB1287262A GB42371/68A GB4237168A GB1287262A GB 1287262 A GB1287262 A GB 1287262A GB 42371/68 A GB42371/68 A GB 42371/68A GB 4237168 A GB4237168 A GB 4237168A GB 1287262 A GB1287262 A GB 1287262A
Authority
GB
United Kingdom
Prior art keywords
current
glow discharge
control
relating
sept
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42371/68A
Inventor
Ronald Arthur Dugdale
Stanley Denis Ford
John Thomas Maskrey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB42371/68A priority Critical patent/GB1287262A/en
Priority to US854404A priority patent/US3678334A/en
Priority to DE19691944882 priority patent/DE1944882A1/en
Priority to FR6930232A priority patent/FR2017451A1/fr
Priority to NL6913601A priority patent/NL6913601A/xx
Publication of GB1287262A publication Critical patent/GB1287262A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

1287262 Automatic current control UNITED KINGDOM ATOMIC ENERGY AUTHORITY 3 Sept 1969 [5 Sept 1968] 42371/68 Heading G3R [Also in Division H1] Current through an electron beam processing apparatus flows through resistance R5, Fig. 2, the voltage across which is compared with a reference voltage set by a dial 52 and used to control the current flowing through a diode gate 54 to a control electrode 2, thereby maintaining a constant current through the apparatus. The electrode 2 forms a control electrode for a glow discharge between the cathode 21 and the anode enclosure 7 which provides a source of electrons for the processing apparatus. A neon tube 53 in parallel with resistance R5 protects against current surges.
GB42371/68A 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices Expired GB1287262A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB42371/68A GB1287262A (en) 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices
US854404A US3678334A (en) 1968-09-05 1969-09-02 Non-thermionic glow discharge devices
DE19691944882 DE1944882A1 (en) 1968-09-05 1969-09-04 Cold cathode glow discharge device
FR6930232A FR2017451A1 (en) 1968-09-05 1969-09-04
NL6913601A NL6913601A (en) 1968-09-05 1969-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB42371/68A GB1287262A (en) 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices

Publications (1)

Publication Number Publication Date
GB1287262A true GB1287262A (en) 1972-08-31

Family

ID=10424129

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42371/68A Expired GB1287262A (en) 1968-09-05 1968-09-05 Improvements in or relating to non-thermionic glow discharge devices

Country Status (5)

Country Link
US (1) US3678334A (en)
DE (1) DE1944882A1 (en)
FR (1) FR2017451A1 (en)
GB (1) GB1287262A (en)
NL (1) NL6913601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT312121B (en) * 1972-10-09 1973-12-27 Boris Grigorievich Sokolov Electron beam system for heat treatment of objects by electron bombardment
NL7407254A (en) * 1974-05-30 1975-12-02 Philips Nv REFILLABLE COLD CATHOD IN A GAS DISCHARGE ELECTRONIC ION CANNON.
GB1454196A (en) * 1974-07-04 1976-10-27 Sokolov B G Electron beam apparatus
FR2294793A1 (en) * 1974-12-20 1976-07-16 Inst Kerntechnik Energiewand BEAM CURRENT CONTROL IN AN ELECTRONIC HARNESS WELDING MACHINE
GB2033704B (en) * 1978-10-30 1982-09-29 Electricity Council Electron discharge heating device
DE3014151C2 (en) * 1980-04-12 1982-11-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Pulsed electron beam generator
DE3026164A1 (en) * 1980-07-08 1982-01-28 Europäische Atomgemeinschaft (EURATOM), Kirchberg METHOD AND DEVICE FOR DISCHARGING CHEMICAL TREATMENT OF SENSITIVE WORKPIECES BY USE OF GLIMMENT DISCHARGE
US4475063A (en) * 1981-06-22 1984-10-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Hollow cathode apparatus
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
US4531077A (en) * 1983-12-16 1985-07-23 The United States Of America As Represented By The United States Department Of Energy Ion source with improved primary arc collimation
US4716340A (en) * 1985-12-10 1987-12-29 Denton Vacuum Inc Pre-ionization aided sputter gun
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US4739214A (en) * 1986-11-13 1988-04-19 Anatech Ltd. Dynamic electron emitter
US4956582A (en) * 1988-04-19 1990-09-11 The Boeing Company Low temperature plasma generator with minimal RF emissions
US5216690A (en) * 1992-03-11 1993-06-01 Hanks Charles W Electron beam gun with grounded shield to prevent arc down
WO2016070940A1 (en) * 2014-11-07 2016-05-12 Applied Materials, Inc. Apparatus and method for treatment of flexible substrates having a large width using an electron beam
WO2019016857A1 (en) * 2017-07-18 2019-01-24 株式会社日立ハイテクノロジーズ Charged particle beam device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3218431A (en) * 1962-12-27 1965-11-16 Gen Electric Self-focusing electron beam apparatus
US3225251A (en) * 1963-01-15 1965-12-21 Martin Marietta Corp Cathode glow display using a single cathode electrode
US3223885A (en) * 1963-04-29 1965-12-14 Gen Electric Stabilization circuit for electron beam apparatus
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus
US3414702A (en) * 1965-05-28 1968-12-03 Gen Electric Nonthermionic electron beam apparatus
GB1154379A (en) * 1965-12-30 1969-06-04 Atomic Energy Authority Uk Improvements in or relating to Cold-Cathode Discharge Devices
US3377506A (en) * 1966-03-30 1968-04-09 United Aircraft Corp Electromagnetic current control for a hollow cathode
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
GB1209026A (en) * 1966-10-26 1970-10-14 Atomic Energy Authority Uk Improvements in or relating to cold cathode, glow discharge device
US3454827A (en) * 1967-06-16 1969-07-08 United Aircraft Corp Current control for a cold cathode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015391A1 (en) * 1979-03-03 1980-09-17 Vacuumschmelze GmbH Glow discharge lamp for qualitative and quantitative spectral analysis

Also Published As

Publication number Publication date
US3678334A (en) 1972-07-18
FR2017451A1 (en) 1970-05-22
NL6913601A (en) 1970-03-09
DE1944882A1 (en) 1970-03-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees