GB1190305A - Method of making a Getter Vacuum Pump - Google Patents

Abstract

1,190,305. Gettering; Ion pumps. NORTON CO. 27 Sept., 1968, No. 45982/68. Heading H1D. A method of manufacturing a getter vacuum pump comprises the steps of cleaning the pump body 12, assembling the pump and connecting it to outside pumping means 28, 30, operating said outside pumping means to reduce the pressure within the getter pump to substantially 10<SP>-4</SP> torr, heating the getter pump body during the latter portion of the above said pressure reduction at a temperature in excess of the maximum operating temperature of the getter pump body, then operating the getter pump whereby a getter source 22 in the pump is heated to emit getter material therefrom while the pump body is at said elevated temperature to further reduce pressure therein while an adherent primer coat of getter material is established on the inner wall of the getter vacuum pump body. The method is stated to prevent peeling of the getter layers from the wall of the pump during subsequent pumping cycles, and is applicable to getter pumps of all types, including those operating without ionization. The orbitron pump shown is provided with stainless steel piping 14 for cooling liquid, and bake-out heaters 24 in the form of electric blankets wrapped around the pump body. The said elevated temperature may be 500‹ C. and is preferably at least 100‹ C. higher than bake-out temperature. A chart of the steps of the method is provided (Fig. 2, not shown).