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FR2934044B1 - Detecteur bolometrique d'ondes electromagnetiques. - Google Patents

Detecteur bolometrique d'ondes electromagnetiques.

Info

Publication number
FR2934044B1
FR2934044B1 FR0854857A FR0854857A FR2934044B1 FR 2934044 B1 FR2934044 B1 FR 2934044B1 FR 0854857 A FR0854857 A FR 0854857A FR 0854857 A FR0854857 A FR 0854857A FR 2934044 B1 FR2934044 B1 FR 2934044B1
Authority
FR
France
Prior art keywords
electromagnetic waves
bolometric detector
bolometric
detector
waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0854857A
Other languages
English (en)
Other versions
FR2934044A1 (fr
Inventor
Patrick Agnese
Agnes Arnaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0854857A priority Critical patent/FR2934044B1/fr
Priority to PCT/FR2009/051003 priority patent/WO2010007266A1/fr
Priority to EP09797567A priority patent/EP2340422A1/fr
Publication of FR2934044A1 publication Critical patent/FR2934044A1/fr
Priority to US12/941,261 priority patent/US20110057107A1/en
Application granted granted Critical
Publication of FR2934044B1 publication Critical patent/FR2934044B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0837Microantennas, e.g. bow-tie

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
FR0854857A 2008-07-17 2008-07-17 Detecteur bolometrique d'ondes electromagnetiques. Expired - Fee Related FR2934044B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0854857A FR2934044B1 (fr) 2008-07-17 2008-07-17 Detecteur bolometrique d'ondes electromagnetiques.
PCT/FR2009/051003 WO2010007266A1 (fr) 2008-07-17 2009-05-28 Detecteur bolometrique d'ondes electromagnetiques
EP09797567A EP2340422A1 (fr) 2008-07-17 2009-05-28 Detecteur bolometrique d'ondes electromagnetiques
US12/941,261 US20110057107A1 (en) 2008-07-17 2010-11-08 Bolometric detector for detecting electromagnetic waves

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0854857A FR2934044B1 (fr) 2008-07-17 2008-07-17 Detecteur bolometrique d'ondes electromagnetiques.

Publications (2)

Publication Number Publication Date
FR2934044A1 FR2934044A1 (fr) 2010-01-22
FR2934044B1 true FR2934044B1 (fr) 2014-08-15

Family

ID=40342179

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0854857A Expired - Fee Related FR2934044B1 (fr) 2008-07-17 2008-07-17 Detecteur bolometrique d'ondes electromagnetiques.

Country Status (4)

Country Link
US (1) US20110057107A1 (fr)
EP (1) EP2340422A1 (fr)
FR (1) FR2934044B1 (fr)
WO (1) WO2010007266A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5428783B2 (ja) * 2009-11-12 2014-02-26 日本電気株式会社 ボロメータ型THz波検出器
FR2976072B1 (fr) * 2011-05-31 2014-09-12 Commissariat Energie Atomique Detecteur spectroscopique et detecteur de gaz incluant au moins un tel detecteur
US8957378B2 (en) 2011-10-02 2015-02-17 International Business Machines Corporation Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
FR2983953B1 (fr) * 2011-12-09 2014-01-03 Commissariat Energie Atomique Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs
FR2994596B1 (fr) * 2012-08-20 2015-01-02 Commissariat Energie Atomique Detecteur bolometrique d'un rayonnement electromagnetique dans le domaine du terahertz et dispositif de detection matriciel comportant de tels detecteurs
FR3002367B1 (fr) 2013-02-18 2015-03-20 Commissariat Energie Atomique Procede de realisation d'un dispositif imageur
FR3009865B1 (fr) * 2013-08-22 2015-07-31 Commissariat Energie Atomique Detecteur bolometrique a bolometre de compensation a thermalisation renforcee
FR3016997B1 (fr) * 2014-01-30 2016-03-04 Commissariat Energie Atomique Detecteur de rayonnement photonique comportant un reseau d'antennes et un support resistif en spirale
EP3204742A4 (fr) 2014-10-10 2018-05-30 Robert Bosch GmbH Procédé pour moduler la sensibilité d'un bolomètre par l'intermédiaire d'une interférence négative
FR3047842B1 (fr) * 2016-02-12 2018-05-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composant electronique a resistance metallique suspendue dans une cavite fermee
RU178649U1 (ru) * 2017-12-11 2018-04-16 федеральное государственное бюджетное образовательное учреждение высшего образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" (НГТУ) Двумерный массив кросс-дипольных антенн на две поляризации с болометрами на холодных электронах для аэростатного телескопа ОЛИМПО
US10883804B2 (en) * 2017-12-22 2021-01-05 Ams Sensors Uk Limited Infra-red device
CN108507558B (zh) * 2018-03-28 2024-04-30 株洲菲斯罗克光电科技股份有限公司 一种轻量化三轴一体光纤陀螺仪
US20210389183A1 (en) * 2018-11-09 2021-12-16 Yale University High-speed ultrathin silicon-on-insulator infrared bolometers and imagers
FR3120261A1 (fr) * 2021-03-12 2022-09-02 Commissariat à l'Energie Atomique et aux Energies Alternatives Détecteur thermique d’un rayonnement électromagnétique comportant une antenne et une charge résistive couplées de manière inductive
US11788893B1 (en) * 2021-04-22 2023-10-17 National Technology & Engineering Solutions Of Sandia, Llc Nanoscale bolometer operating near the thermodynamic limit
US20220373395A1 (en) * 2021-05-11 2022-11-24 U.S. Army Combat Capabilities Development Command, Army Research Laboratory Phonon disruptors for increased thermal resistance without sacrificing electrical signal quality in thermal sensors using alloy and intermetallic materials

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US7495220B2 (en) * 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor
US6329655B1 (en) * 1998-10-07 2001-12-11 Raytheon Company Architecture and method of coupling electromagnetic energy to thermal detectors
US6329649B1 (en) * 1998-10-07 2001-12-11 Raytheon Company Mm-wave/IR monolithically integrated focal plane array
FR2788129B1 (fr) * 1998-12-30 2001-02-16 Commissariat Energie Atomique Detecteur bolometrique a antenne
US6507021B1 (en) * 2000-11-15 2003-01-14 Drs Sensors & Targeting Systems, Inc. Reference bolometer and associated fabrication methods
FR2855609B1 (fr) * 2003-05-26 2005-07-01 Commissariat Energie Atomique Dispositif de detection bolometrique a antenne, a cavite optimisee, pour ondes electromagnetiques millimetriques ou submillimetriques, et procede de fabrication de ce dispositif
FR2884608B1 (fr) * 2005-04-18 2007-05-25 Commissariat Energie Atomique Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
US7501626B2 (en) * 2006-06-02 2009-03-10 Honeywell International Inc. Micromechanical thermal sensor

Also Published As

Publication number Publication date
FR2934044A1 (fr) 2010-01-22
US20110057107A1 (en) 2011-03-10
EP2340422A1 (fr) 2011-07-06
WO2010007266A1 (fr) 2010-01-21

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Legal Events

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Effective date: 20160331