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FR2824643B1 - Dispositif de modulation de lumiere - Google Patents

Dispositif de modulation de lumiere

Info

Publication number
FR2824643B1
FR2824643B1 FR0106144A FR0106144A FR2824643B1 FR 2824643 B1 FR2824643 B1 FR 2824643B1 FR 0106144 A FR0106144 A FR 0106144A FR 0106144 A FR0106144 A FR 0106144A FR 2824643 B1 FR2824643 B1 FR 2824643B1
Authority
FR
France
Prior art keywords
light modulation
modulation device
light
modulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0106144A
Other languages
English (en)
Other versions
FR2824643A1 (fr
Inventor
Jean Pierre Lazzari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR0106144A priority Critical patent/FR2824643B1/fr
Priority to PCT/FR2002/001510 priority patent/WO2002091060A2/fr
Publication of FR2824643A1 publication Critical patent/FR2824643A1/fr
Application granted granted Critical
Publication of FR2824643B1 publication Critical patent/FR2824643B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FR0106144A 2001-05-10 2001-05-10 Dispositif de modulation de lumiere Expired - Fee Related FR2824643B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0106144A FR2824643B1 (fr) 2001-05-10 2001-05-10 Dispositif de modulation de lumiere
PCT/FR2002/001510 WO2002091060A2 (fr) 2001-05-10 2002-05-02 Dispositif de modulation de lumiere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0106144A FR2824643B1 (fr) 2001-05-10 2001-05-10 Dispositif de modulation de lumiere

Publications (2)

Publication Number Publication Date
FR2824643A1 FR2824643A1 (fr) 2002-11-15
FR2824643B1 true FR2824643B1 (fr) 2003-10-31

Family

ID=8863094

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0106144A Expired - Fee Related FR2824643B1 (fr) 2001-05-10 2001-05-10 Dispositif de modulation de lumiere

Country Status (2)

Country Link
FR (1) FR2824643B1 (fr)
WO (1) WO2002091060A2 (fr)

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7660031B2 (en) 2004-09-27 2010-02-09 Qualcomm Mems Technologies, Inc. Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7663794B2 (en) 2004-09-27 2010-02-16 Qualcomm Mems Technologies, Inc. Methods and devices for inhibiting tilting of a movable element in a MEMS device
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7830586B2 (en) 1999-10-05 2010-11-09 Qualcomm Mems Technologies, Inc. Transparent thin films
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7839557B2 (en) 2004-09-27 2010-11-23 Qualcomm Mems Technologies, Inc. Method and device for multistate interferometric light modulation
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US8085458B2 (en) 2005-10-28 2011-12-27 Qualcomm Mems Technologies, Inc. Diffusion barrier layer for MEMS devices
US8115988B2 (en) 2004-07-29 2012-02-14 Qualcomm Mems Technologies, Inc. System and method for micro-electromechanical operation of an interferometric modulator
US8226836B2 (en) 2004-09-27 2012-07-24 Qualcomm Mems Technologies, Inc. Mirror and mirror layer for optical modulator and method
US8402647B2 (en) 2010-08-25 2013-03-26 Qualcomm Mems Technologies Inc. Methods of manufacturing illumination systems
US8439546B2 (en) 2009-01-13 2013-05-14 Qualcomm Mems Technologies, Inc. Large area light panel and screen
US8817357B2 (en) 2010-04-09 2014-08-26 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of forming the same

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (fr) 1998-04-08 1999-10-14 Etalon, Inc. Modulation interferometrique de rayonnement
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
TW200920685A (en) 2007-06-29 2009-05-16 Qualcomm Mems Technologies Inc Electromechanical device treatment with water vapor
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US20100302218A1 (en) 2009-05-29 2010-12-02 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
CN107167915A (zh) * 2017-05-17 2017-09-15 杭州元色科技有限公司 环境光干涉式彩色透明显示模块及透明显示方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2336930A1 (de) * 1973-07-20 1975-02-06 Battelle Institut E V Infrarot-modulator (ii.)
NL7510103A (nl) * 1975-08-27 1977-03-01 Philips Nv Elektrostatisch bestuurde beeldweergeefinrichting.
NL8001281A (nl) * 1980-03-04 1981-10-01 Philips Nv Weergeefinrichting.
US4617608A (en) * 1984-12-28 1986-10-14 At&T Bell Laboratories Variable gap device and method of manufacture
EP0614101A3 (fr) * 1993-02-03 1994-10-19 Canon Kk Déflecteur optique et méthode de sa fabrication.
DE4403297C2 (de) * 1993-11-02 1997-01-16 Norbert Dr Schwesinger Vorrichtung zur Ablenkung optischer Strahlen
FR2794251B1 (fr) * 1999-05-27 2002-08-02 Sfim Ind Miroir a membrane deformable

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7830586B2 (en) 1999-10-05 2010-11-09 Qualcomm Mems Technologies, Inc. Transparent thin films
US8115988B2 (en) 2004-07-29 2012-02-14 Qualcomm Mems Technologies, Inc. System and method for micro-electromechanical operation of an interferometric modulator
US7830589B2 (en) 2004-09-27 2010-11-09 Qualcomm Mems Technologies, Inc. Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7663794B2 (en) 2004-09-27 2010-02-16 Qualcomm Mems Technologies, Inc. Methods and devices for inhibiting tilting of a movable element in a MEMS device
US9001412B2 (en) 2004-09-27 2015-04-07 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8970939B2 (en) 2004-09-27 2015-03-03 Qualcomm Mems Technologies, Inc. Method and device for multistate interferometric light modulation
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US8289613B2 (en) 2004-09-27 2012-10-16 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US8226836B2 (en) 2004-09-27 2012-07-24 Qualcomm Mems Technologies, Inc. Mirror and mirror layer for optical modulator and method
US7839557B2 (en) 2004-09-27 2010-11-23 Qualcomm Mems Technologies, Inc. Method and device for multistate interferometric light modulation
US8213075B2 (en) 2004-09-27 2012-07-03 Qualcomm Mems Technologies, Inc. Method and device for multistate interferometric light modulation
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7660031B2 (en) 2004-09-27 2010-02-09 Qualcomm Mems Technologies, Inc. Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8085458B2 (en) 2005-10-28 2011-12-27 Qualcomm Mems Technologies, Inc. Diffusion barrier layer for MEMS devices
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8064124B2 (en) 2006-01-18 2011-11-22 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US8439546B2 (en) 2009-01-13 2013-05-14 Qualcomm Mems Technologies, Inc. Large area light panel and screen
US8817357B2 (en) 2010-04-09 2014-08-26 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of forming the same
US8402647B2 (en) 2010-08-25 2013-03-26 Qualcomm Mems Technologies Inc. Methods of manufacturing illumination systems

Also Published As

Publication number Publication date
WO2002091060A2 (fr) 2002-11-14
WO2002091060A3 (fr) 2003-04-03
FR2824643A1 (fr) 2002-11-15

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Legal Events

Date Code Title Description
ST Notification of lapse