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FR2864339B1 - DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE - Google Patents

DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE

Info

Publication number
FR2864339B1
FR2864339B1 FR0351181A FR0351181A FR2864339B1 FR 2864339 B1 FR2864339 B1 FR 2864339B1 FR 0351181 A FR0351181 A FR 0351181A FR 0351181 A FR0351181 A FR 0351181A FR 2864339 B1 FR2864339 B1 FR 2864339B1
Authority
FR
France
Prior art keywords
observing
collage
interface
collage interface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0351181A
Other languages
French (fr)
Other versions
FR2864339A1 (en
Inventor
Fabrice Letertre
Bruce Faure
Franck Fournel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Soitec SA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0351181A priority Critical patent/FR2864339B1/en
Priority to PCT/FR2004/003361 priority patent/WO2005064320A1/en
Publication of FR2864339A1 publication Critical patent/FR2864339A1/en
Application granted granted Critical
Publication of FR2864339B1 publication Critical patent/FR2864339B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR0351181A 2003-12-23 2003-12-23 DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE Expired - Fee Related FR2864339B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0351181A FR2864339B1 (en) 2003-12-23 2003-12-23 DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE
PCT/FR2004/003361 WO2005064320A1 (en) 2003-12-23 2004-12-22 Device and method for observing a bonding interface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0351181A FR2864339B1 (en) 2003-12-23 2003-12-23 DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE

Publications (2)

Publication Number Publication Date
FR2864339A1 FR2864339A1 (en) 2005-06-24
FR2864339B1 true FR2864339B1 (en) 2006-02-17

Family

ID=34630629

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0351181A Expired - Fee Related FR2864339B1 (en) 2003-12-23 2003-12-23 DEVICE AND METHOD FOR OBSERVING A COLLAGE INTERFACE

Country Status (2)

Country Link
FR (1) FR2864339B1 (en)
WO (1) WO2005064320A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2926671B1 (en) * 2008-01-17 2010-04-02 Soitec Silicon On Insulator METHOD FOR TREATING DEFECTS WHEN BONDING PLATES
CH701418A1 (en) * 2009-07-10 2011-01-14 3S Swiss Solar Systems Ag Laminated layered body testing method for solar modules, involves scanning layered body according to dot matrix, converting extracted signals into digital data, storing data of modules as data record, and performing evaluation of data
EP3035047B1 (en) 2010-11-12 2019-03-20 EV Group E. Thallner GmbH Measuring device and method for measuring layer thicknesses and defects in a wafer stack
ES2402506B1 (en) * 2011-09-28 2014-03-11 Construcciones Biovivienda, S.L. METHOD FOR DETERMINING THE LACK OF CONTINUITY IN THE INTERSTICIAL CHAMBER OF DOUBLE WALL DEPOSITS.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4962879A (en) * 1988-12-19 1990-10-16 Duke University Method for bubble-free bonding of silicon wafers
FR2686697B1 (en) * 1992-01-27 1994-04-29 Aerospatiale DEVICE FOR DETECTING DEFECTS IN TWO - LAYERED PARTS, PARTICULARLY IN SOLAR CELLS.
DE19525770C1 (en) * 1995-07-14 1996-08-29 Fraunhofer Ges Forschung Bonding connections testing system for bonded semiconductor wafers
JP3500063B2 (en) * 1998-04-23 2004-02-23 信越半導体株式会社 Method for recycling peeled wafer and silicon wafer for reuse
US6121064A (en) * 1999-01-04 2000-09-19 International Business Machines Corporation STI fill for SOI which makes SOI inspectable

Also Published As

Publication number Publication date
FR2864339A1 (en) 2005-06-24
WO2005064320A1 (en) 2005-07-14

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20100831