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FR2594546B1 - Dispositif de mesure de la temperature du diaphragme d'un capteur de pression - Google Patents

Dispositif de mesure de la temperature du diaphragme d'un capteur de pression

Info

Publication number
FR2594546B1
FR2594546B1 FR8602272A FR8602272A FR2594546B1 FR 2594546 B1 FR2594546 B1 FR 2594546B1 FR 8602272 A FR8602272 A FR 8602272A FR 8602272 A FR8602272 A FR 8602272A FR 2594546 B1 FR2594546 B1 FR 2594546B1
Authority
FR
France
Prior art keywords
measuring
pressure sensor
diaphragm temperature
diaphragm
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8602272A
Other languages
English (en)
Other versions
FR2594546A1 (fr
Inventor
Luc M Petitjean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etudes et Fabrication Flopetrol SA
Original Assignee
Etudes et Fabrication Flopetrol SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etudes et Fabrication Flopetrol SA filed Critical Etudes et Fabrication Flopetrol SA
Priority to FR8602272A priority Critical patent/FR2594546B1/fr
Publication of FR2594546A1 publication Critical patent/FR2594546A1/fr
Application granted granted Critical
Publication of FR2594546B1 publication Critical patent/FR2594546B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
FR8602272A 1986-02-19 1986-02-19 Dispositif de mesure de la temperature du diaphragme d'un capteur de pression Expired FR2594546B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8602272A FR2594546B1 (fr) 1986-02-19 1986-02-19 Dispositif de mesure de la temperature du diaphragme d'un capteur de pression

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8602272A FR2594546B1 (fr) 1986-02-19 1986-02-19 Dispositif de mesure de la temperature du diaphragme d'un capteur de pression

Publications (2)

Publication Number Publication Date
FR2594546A1 FR2594546A1 (fr) 1987-08-21
FR2594546B1 true FR2594546B1 (fr) 1988-09-23

Family

ID=9332304

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8602272A Expired FR2594546B1 (fr) 1986-02-19 1986-02-19 Dispositif de mesure de la temperature du diaphragme d'un capteur de pression

Country Status (1)

Country Link
FR (1) FR2594546B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2648910B1 (fr) * 1989-06-21 1993-10-01 Propulsion Ste Europeenne Capteur a membrane a concentration de deformations
JP2769661B2 (ja) * 1992-09-29 1998-06-25 三菱電機株式会社 半導体装置およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4320664A (en) * 1980-02-25 1982-03-23 Texas Instruments Incorporated Thermally compensated silicon pressure sensor
DE3176209D1 (en) * 1980-11-29 1987-06-25 Tokyo Electric Co Ltd Load cell and method of manufacturing the same
US4345477A (en) * 1980-12-03 1982-08-24 Honeywell Inc. Semiconduction stress sensing apparatus
FR2497346A1 (fr) * 1980-12-31 1982-07-02 Gi Teploene Transducteur extensometrique a semi-conducteurs
FR2545605B1 (fr) * 1983-05-03 1985-10-11 Sedeme Dispositif de mesure a jauges de contrainte, notamment pour la mesure de pression
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置

Also Published As

Publication number Publication date
FR2594546A1 (fr) 1987-08-21

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Legal Events

Date Code Title Description
ST Notification of lapse