FR2569430B1 - APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE - Google Patents

APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE

Info

Publication number: FR2569430B1
Authority: FR; France
Prior art keywords: crucible; bath; semiconductor material; material contained; single crystals
Prior art date: 1984-08-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR8512629A

Other languages

French (fr)

Other versions

FR2569430A1 (en

Inventor

Kinji Hoshi Nobuyuki Izawa Et Yasunori Okubo Toshihiko Suzuki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sony Corp

Original Assignee

Sony Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-08-24

Filing date

1985-08-22

Publication date

1993-12-03

1985-08-22 Application filed by Sony Corp filed Critical Sony Corp

1986-02-28 Publication of FR2569430A1 publication Critical patent/FR2569430A1/en

1993-12-03 Application granted granted Critical

1993-12-03 Publication of FR2569430B1 publication Critical patent/FR2569430B1/en

2005-08-22 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

FR8512629A 1984-08-24 1985-08-22 APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE Expired - Fee Related FR2569430B1 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59176420A JPS6153187A (en)	1984-08-24	1984-08-24	Device for growing single crystal

Publications (2)

Publication Number	Publication Date
FR2569430A1 FR2569430A1 (en)	1986-02-28
FR2569430B1 true FR2569430B1 (en)	1993-12-03

Family

ID=16013382

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR8512629A Expired - Fee Related FR2569430B1 (en)	1984-08-24	1985-08-22	APPARATUS FOR EXTRACTING SINGLE CRYSTALS FROM A BATH OF MOLTEN SEMICONDUCTOR MATERIAL CONTAINED IN A CRUCIBLE

Country Status (10)

Country	Link
JP (1)	JPS6153187A (en)
AT (1)	AT400848B (en)
CA (1)	CA1290654C (en)
DE (1)	DE3530231A1 (en)
FR (1)	FR2569430B1 (en)
GB (1)	GB2163367B (en)
IT (1)	IT1200719B (en)
MY (1)	MY101257A (en)
NL (1)	NL193666C (en)
SE (1)	SE467258B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS62105998A (en) *	1985-10-31	1987-05-16	Sony Corp	Production of silicon substrate
JPS62223090A (en) *	1986-03-20	1987-10-01	Shin Etsu Handotai Co Ltd	Device for pulling up semiconductor single crystal
JPS6389488A (en) *	1986-09-30	1988-04-20	Toshiba Corp	Production of single crystal
DE3733487C2 (en) *	1987-10-03	1997-08-14	Leybold Ag	Device for pulling single crystals
WO1991005891A1 (en) *	1989-10-16	1991-05-02	Nkk Corporation	Apparatus for manufacturing silicon single crystals
JPH03183689A (en) *	1989-12-11	1991-08-09	Mitsubishi Materials Corp	Device and method for pulling up single crystal
JP3016897B2 (en) *	1991-03-20	2000-03-06	信越半導体株式会社	Method and apparatus for producing silicon single crystal
EP0530397A1 (en) *	1991-09-04	1993-03-10	Kawasaki Steel Corporation	Czochralski crystal pulling process and an apparatus for carrying out the same
US5363795A (en) *	1991-09-04	1994-11-15	Kawasaki Steel Corporation	Czochralski crystal pulling process and an apparatus for carrying out the same
JP2862158B2 (en) *	1993-08-27	1999-02-24	信越半導体株式会社	Silicon single crystal manufacturing equipment
JPH1179889A (en) *	1997-07-09	1999-03-23	Shin Etsu Handotai Co Ltd	Production of and production unit for silicon single crystal with few crystal defect, and silicon single crystal and silicon wafer produced thereby
US6285011B1 (en) *	1999-10-12	2001-09-04	Memc Electronic Materials, Inc.	Electrical resistance heater for crystal growing apparatus
KR101105526B1 (en) *	2008-12-30	2012-01-13	주식회사 엘지실트론	Heater for producing single crystal ingot and single crystal ingot manufacturing apparatus having the same

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2979386A (en) *	1956-08-02	1961-04-11	Shockley William	Crystal growing apparatus
FR1316707A (en) *	1961-12-22	1963-02-01	Radiotechnique	Improvements to devices for obtaining single crystals by pulling
DE1289950B (en) *	1963-07-24	1969-02-27	Siemens Ag	Device for pulling semiconductor crystals
US3359077A (en) *	1964-05-25	1967-12-19	Globe Union Inc	Method of growing a crystal
DE1769860A1 (en) *	1968-07-26	1971-11-11	Siemens Ag	Device for pulling dislocation-free semiconductor single crystal rods
JPS4921063A (en) *	1972-06-15	1974-02-25
JPS6027464B2 (en) *	1976-09-28	1985-06-28	日本電気株式会社	High pixel density conversion device
DE2821481C2 (en) *	1978-05-17	1985-12-05	Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen	Device for pulling high-purity semiconductor rods from the melt
US4277441A (en) *	1979-01-15	1981-07-07	Mobil Tyco Solar Energy Corporation	Apparatus for monitoring crystal growth
DE3005492C2 (en) *	1980-02-14	1983-10-27	Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen	Process for the production of the purest single crystals by crucible pulling according to Czochralski
JPS5711897A (en) *	1980-06-27	1982-01-21	Sumitomo Electric Ind Ltd	Method of pulling up single crystal and device therefor
JPS5645890A (en) *	1980-06-30	1981-04-25	Sony Corp	Crystal growing apparatus
DE3027262A1 (en) *	1980-07-18	1982-02-11	Skf Kugellagerfabriken Gmbh, 8720 Schweinfurt	DRAWING PROCESSED, THIN-WALLED BEARING BUSHING
JPH0244799B2 (en) *	1981-10-26	1990-10-05	Sony Corp	KETSUSHOSEICHOHOHO
JPS5964591A (en) *	1982-09-30	1984-04-12	Sumitomo Electric Ind Ltd	Single crystal pulling equipment
JPH0669917B2 (en) *	1982-10-08	1994-09-07	住友電気工業株式会社	Control method for multiple stage heater
JPS59137399A (en) *	1983-01-28	1984-08-07	Nippon Telegr & Teleph Corp <Ntt>	Method and apparatus of growing low-dislocation density single crystal
JPS60103097A (en) *	1983-11-08	1985-06-07	Sumitomo Electric Ind Ltd	Device for pulling up single crystal

1984
- 1984-08-24 JP JP59176420A patent/JPS6153187A/en active Granted
1985
- 1985-08-16 GB GB08520574A patent/GB2163367B/en not_active Expired
- 1985-08-19 NL NL8502286A patent/NL193666C/en not_active IP Right Cessation
- 1985-08-22 FR FR8512629A patent/FR2569430B1/en not_active Expired - Fee Related
- 1985-08-23 SE SE8503935A patent/SE467258B/en not_active IP Right Cessation
- 1985-08-23 DE DE19853530231 patent/DE3530231A1/en active Granted
- 1985-08-23 CA CA000489331A patent/CA1290654C/en not_active Expired - Lifetime
- 1985-08-23 IT IT21977/85A patent/IT1200719B/en active
- 1985-08-23 AT AT0247085A patent/AT400848B/en not_active IP Right Cessation
1987
- 1987-06-25 MY MYPI87000893A patent/MY101257A/en unknown

Also Published As

Publication number	Publication date
GB8520574D0 (en)	1985-09-25
AT400848B (en)	1996-03-25
JPH0357072B2 (en)	1991-08-30
GB2163367B (en)	1988-04-07
NL8502286A (en)	1986-03-17
IT8521977A0 (en)	1985-08-23
CA1290654C (en)	1991-10-15
SE467258B (en)	1992-06-22
DE3530231A1 (en)	1986-02-27
GB2163367A (en)	1986-02-26
NL193666C (en)	2000-06-06
JPS6153187A (en)	1986-03-17
SE8503935L (en)	1986-02-25
MY101257A (en)	1991-08-17
FR2569430A1 (en)	1986-02-28
ATA247085A (en)	1995-08-15
SE8503935D0 (en)	1985-08-23
DE3530231C2 (en)	1991-01-17
IT1200719B (en)	1989-01-27
NL193666B (en)	2000-02-01

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Legal Events

Date	Code	Title	Description
2003-06-06	ST	Notification of lapse