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ES2147297T3 - Sensor de fuerza o de alargamiento. - Google Patents

Sensor de fuerza o de alargamiento.

Info

Publication number
ES2147297T3
ES2147297T3 ES95927652T ES95927652T ES2147297T3 ES 2147297 T3 ES2147297 T3 ES 2147297T3 ES 95927652 T ES95927652 T ES 95927652T ES 95927652 T ES95927652 T ES 95927652T ES 2147297 T3 ES2147297 T3 ES 2147297T3
Authority
ES
Spain
Prior art keywords
capacitor
measuring capacitor
pct
measured
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95927652T
Other languages
English (en)
Inventor
Gunter Doemens
Markus Gilch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of ES2147297T3 publication Critical patent/ES2147297T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
  • Push-Button Switches (AREA)
  • Golf Clubs (AREA)

Abstract

LA INVENCION SE REFIERE A UNA SENSOR DE FUERZA O DILATACION, DISPONIENDO DE UN CONDENSADOR (MK) DE MEDICION DEL QUE LAS ESTRUCTURAS (ES1, ES2) DE ELECTRODO DE INTERBLOQUEO, CON ESTRUCTURA SIMILAR A PEINE, PUEDEN SER MOVIDAS DE FORMA PARALELA UNA CON RESPECTO A OTRA A TRAVES DE DOS PUNTOS (BP,1 BP2) DE SEGURIDAD COMO UNA FUNCION DE LA FUERZA (F) O DE LA DILATACION ({EP}) A SER MEDIDA. LA CAPACIDAD TOTAL DEL CONDENSADOR (MK) DE MEDICION SE DETERMINA POR MEDIO DE UN ENSAMBLE PARALELO DE PARES DE ELECTRODOS INDIVIDUALES. UNA VARIACION EN LA CAPACIDAD TOTAL DEL CONDENSADOR (MK) DE MEDICION, ORIGINADA MEDIANTE UNA VARIACION EN LA DISTANCIA (D1) ENTRE LOS ELECTRODOS, SUMINISTRA INFORMACION ACERCA DE LA FUERZA (F) O DILATACION ({EP}) A SER MEDIDA. UNA VARIACION ENTRE LOS ELECTRODOS ORIGINADA MEDIANTE DILATACION TERMICA SE COMPENSA COMO SIGUE: UN CONDENSADOR (KK) DE COMPENSACION DE DISEÑO, IDENTICO AL DEL CONDENSADOR (MK) DE MEDICION Y PERPENDICULAR CON EL, SE CONECTA EN SERIE DE FORMA RELATIVA AL CONDENSACION (MK) DE MEDICION, SIENDO SELECCIONADOS LOS PUNTOS (BP3, BP4) DE SEGURIDAD DEL CONDENSADOR (KK) DE COMPENSACION DE TAL FORMA, QUE LAS VARIACIONES TERMICAS EN LA DISTANCIA (D1, D3) ENTRE LOS ELECTRODOS DEL CONDENSADOR (MK) DE MEDICION Y EL CONDENSADOR (KK) DE COMPENSACION TIENEN SIGNOS OPUESTOS.
ES95927652T 1994-08-16 1995-08-09 Sensor de fuerza o de alargamiento. Expired - Lifetime ES2147297T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4429050 1994-08-16

Publications (1)

Publication Number Publication Date
ES2147297T3 true ES2147297T3 (es) 2000-09-01

Family

ID=6525832

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95927652T Expired - Lifetime ES2147297T3 (es) 1994-08-16 1995-08-09 Sensor de fuerza o de alargamiento.

Country Status (7)

Country Link
US (1) US5750904A (es)
EP (1) EP0776467B1 (es)
JP (1) JPH10504387A (es)
AT (1) ATE192846T1 (es)
DE (1) DE59508330D1 (es)
ES (1) ES2147297T3 (es)
WO (1) WO1996005492A1 (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6606913B1 (en) * 1998-11-06 2003-08-19 Wisconsin Alumni Research Foundation Micromachined strain sensor
DE19959128B4 (de) * 1998-12-08 2004-02-12 Trw Inc., Lyndhurst Kapazitiver Gewichtssensor
CA2361735A1 (en) * 1999-02-24 2000-08-31 Advanced Safety Concepts, Inc. Capacitive sensors for vehicular environments
WO2001004593A1 (fr) * 1999-07-09 2001-01-18 Tokin Corporation Capteur de contrainte capacitif et son procédé d'utilisation
US6499348B1 (en) * 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
JP4977020B2 (ja) * 2004-07-08 2012-07-18 シェンバーガー，デボラ 歪モニタリングシステム及び装置
US7509870B2 (en) * 2005-10-26 2009-03-31 Orthodata Technologies Llc MEMS capacitive bending and axial strain sensor
US7380461B2 (en) * 2006-03-09 2008-06-03 Suryakala Majeti Micro-electromechanical capacitive strain sensor
US7784366B2 (en) * 2008-07-29 2010-08-31 Motorola, Inc. Single sided capacitive force sensor for electronic devices
DE102011076008B4 (de) 2011-05-17 2013-10-31 Siemens Aktiengesellschaft Kraftaufnehmer, insbesondere Wägezelle
US10349543B2 (en) * 2013-02-22 2019-07-09 Vibrant Composites Inc. Layered assemblies
US9541462B2 (en) * 2014-08-29 2017-01-10 Kionix, Inc. Pressure sensor including deformable pressure vessel(s)
US10732055B2 (en) * 2015-10-30 2020-08-04 Northwestern University Dielectrostrictive sensors for shear stress measurement, process monitoring, and quality examination of viscoelastic materials
US11536619B2 (en) 2016-09-13 2022-12-27 Sony Corporation Sensor, band, electronic device, and wristwatch-type electronic device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2715831A1 (de) * 1977-04-07 1978-10-19 Electric Power Res Inst Vorrichtung zur kapazitiven dehnungsmessung
US4289035A (en) * 1978-02-15 1981-09-15 The Bendix Corporation Compensated capacitive transducer demodulator circuit
DE58900556D1 (de) * 1988-08-11 1992-01-23 Siemens Ag Messaufnehmer fuer laengen- oder abstandsaenderungen, insbesondere fuer beruehrungslose messung von drehmomenten an rotierenden wellen.
DE3832568A1 (de) * 1988-09-24 1990-03-29 Philips Patentverwaltung Schaltungsanordnung zur temperaturkompensation von kapazitiven druck- und differenzdrucksensoren
US5397911A (en) * 1991-04-02 1995-03-14 Honda Giken Kogyo Kabushiki Kaisha Semiconductor sensor with plural gate electrodes
EP0618450A1 (de) * 1993-03-30 1994-10-05 Siemens Aktiengesellschaft Beschleunigungssensor
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer

Also Published As

Publication number Publication date
US5750904A (en) 1998-05-12
JPH10504387A (ja) 1998-04-28
EP0776467B1 (de) 2000-05-10
WO1996005492A1 (de) 1996-02-22
ATE192846T1 (de) 2000-05-15
EP0776467A1 (de) 1997-06-04
DE59508330D1 (de) 2000-06-15

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