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ES2026934T3 - Maquina de microhaz laser para actuar sobre objetos incluyendo delgadas capas de material. - Google Patents

Maquina de microhaz laser para actuar sobre objetos incluyendo delgadas capas de material.

Info

Publication number
ES2026934T3
ES2026934T3 ES198787402961T ES87402961T ES2026934T3 ES 2026934 T3 ES2026934 T3 ES 2026934T3 ES 198787402961 T ES198787402961 T ES 198787402961T ES 87402961 T ES87402961 T ES 87402961T ES 2026934 T3 ES2026934 T3 ES 2026934T3
Authority
ES
Spain
Prior art keywords
machine
thin layers
act
objects including
including thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198787402961T
Other languages
English (en)
Inventor
Geoffroy Auvert
Jean-Claude Georgel
Yves Chemin Des Hermentaires Guern
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orange SA
Original Assignee
France Telecom SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by France Telecom SA filed Critical France Telecom SA
Application granted granted Critical
Publication of ES2026934T3 publication Critical patent/ES2026934T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Microscoopes, Condenser (AREA)
  • Laser Beam Processing (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Lasers (AREA)

Abstract

MAQUINA CON MICRO - HAZ LASER DE INTERVENCION SOBRE OBJETOS DE CAPAS FINAS, QUE COMPRENDE UNA PLATINA (14) RIGIDA E INDEFORMABLE SOBRE LA CUAL ESTAN MONTADOS UNOS COMPONENTES OPTICOS DEFINIENDO UNA VIA (34, 36, 38,46) DE TRANSMISION DEL HAZ LASER, UNA VIA (54, 56, 46) DE ALUMBRADO Y UNA VIA (70, 74, 76) DE OBSERVACION. EL INVENTO PERMITE NOTABLEMENTE MICRO - INTERVENCIONES SOBRE CIRCUITOS INTEGRADOS Y OBJETOS DE CAPAS FINAS.
ES198787402961T 1986-12-23 1987-12-22 Maquina de microhaz laser para actuar sobre objetos incluyendo delgadas capas de material. Expired - Lifetime ES2026934T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8618079A FR2608484B1 (fr) 1986-12-23 1986-12-23 Machine a microfaisceau laser d'intervention sur des objets a couches minces de materiau

Publications (1)

Publication Number Publication Date
ES2026934T3 true ES2026934T3 (es) 1992-05-16

Family

ID=9342235

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198787402961T Expired - Lifetime ES2026934T3 (es) 1986-12-23 1987-12-22 Maquina de microhaz laser para actuar sobre objetos incluyendo delgadas capas de material.

Country Status (9)

Country Link
US (1) US4825034A (es)
EP (1) EP0277444B1 (es)
JP (1) JPS63238988A (es)
KR (1) KR880007163A (es)
DE (1) DE3773484D1 (es)
ES (1) ES2026934T3 (es)
FR (1) FR2608484B1 (es)
IL (1) IL84897A (es)
IN (1) IN172171B (es)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059764A (en) * 1988-10-31 1991-10-22 Spectra-Physics, Inc. Diode-pumped, solid state laser-based workstation for precision materials processing and machining
FR2639567B1 (fr) * 1988-11-25 1991-01-25 France Etat Machine a microfaisceau laser d'intervention sur des objets a couche mince, en particulier pour la gravure ou le depot de matiere par voie chimique en presence d'un gaz reactif
FR2657803A1 (fr) * 1990-02-02 1991-08-09 Bertin & Cie Machine a micro-faisceau laser d'intervention sur des objets a couches minces, tels que des circuits integres.
US5171963A (en) * 1990-05-21 1992-12-15 Ntn Corporation Laser processing device and laser processing method
IT1240515B (it) * 1990-07-27 1993-12-17 Prima Ind Spa Dispositivo di regolazione per allineare un raggio laser secondo una linea di riferimento prestabilita
US5464960A (en) * 1993-01-12 1995-11-07 Iatrotech, Inc. Laser calibration device
US5416821A (en) * 1993-05-10 1995-05-16 Trw Inc. Grid formed with a silicon substrate
US5585016A (en) * 1993-07-20 1996-12-17 Integrated Device Technology, Inc. Laser patterned C-V dot
JP3399590B2 (ja) * 1993-08-04 2003-04-21 富士通株式会社 配線の切断装置
US5872051A (en) * 1995-08-02 1999-02-16 International Business Machines Corporation Process for transferring material to semiconductor chip conductive pads using a transfer substrate
US6472671B1 (en) * 2000-02-09 2002-10-29 Jean I. Montagu Quantified fluorescence microscopy
US6794424B2 (en) * 2001-12-04 2004-09-21 Agilent Technologies, Inc. Devices for calibrating optical scanners and methods of using the same
US20040094526A1 (en) * 2002-11-15 2004-05-20 Mccoy Edward D. Cutting laser beam nozzle assembly
US7534561B2 (en) 2003-04-02 2009-05-19 Agilent Technologies, Inc. Nucleic acid array in situ fabrication methods and arrays produced using the same
DE102004063692B3 (de) * 2004-12-28 2006-05-11 Georg-August-Universität Göttingen Positioniereinrichtung
DE102005059650B4 (de) * 2005-12-14 2011-08-18 Leica Microsystems CMS GmbH, 35578 Vorrichtung zur Montage für mehrere Laser und Mikroskop
DE102005059649B4 (de) * 2005-12-14 2017-09-07 Leica Microsystems Cms Gmbh Vorrichtung zur Montage für mehrere Laser
CA2691508C (en) * 2007-06-26 2015-12-08 Rolls-Royce Corporation Prism mount for a laser deposition device
US8374818B2 (en) * 2008-12-19 2013-02-12 Affymetrix, Inc. System, method and apparatus for calibrating inspection tools
DE102011000505A1 (de) * 2011-02-04 2012-08-09 A. Monforts Werkzeugmaschinen Gmbh & Co. Kg Werkzeugwechselträger und Werkzeugsystem

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR919297A (es) * 1959-09-04 1947-04-01
US3782823A (en) * 1972-03-23 1974-01-01 American Optical Corp Laser microprobe
US3769663A (en) * 1972-05-04 1973-11-06 T Perl Flashlight attachment clip for spectacles
FR2454635A1 (fr) * 1979-04-18 1980-11-14 Commissariat Energie Atomique Procede et dispositif de reglage de l'impact sur une cible d'un faisceau de lumiere monochromatique emis par une source laser
JPS5720261A (en) * 1980-07-14 1982-02-02 Olympus Optical Co Medical treating device
FR2541468B1 (fr) * 1983-02-17 1986-07-11 Commissariat Energie Atomique Dispositif d'alignement d'un faisceau laser par l'intermediaire de moyens optiques de visee, procede de reperage de l'axe d'emission du faisceau laser et procede de mise en oeuvre du dispositif, pour controler l'alignement

Also Published As

Publication number Publication date
EP0277444A1 (fr) 1988-08-10
IL84897A0 (en) 1988-06-30
DE3773484D1 (de) 1991-11-07
EP0277444B1 (fr) 1991-10-02
IL84897A (en) 1992-05-25
IN172171B (es) 1993-04-24
KR880007163A (ko) 1988-08-26
JPS63238988A (ja) 1988-10-05
US4825034A (en) 1989-04-25
FR2608484A1 (fr) 1988-06-24
FR2608484B1 (fr) 1989-04-28

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