EP3608922A1 - Flexible and / or elastic component and method for the production thereof - Google Patents

Abstract

The present invention relates to a flexible and / or elastic component comprising an at least partially flexible and / or elastic substrate with a front side and a rear side and at least one electrically conductive elastomer matrix layer arranged in regions on the front side and / or the rear side of the substrate. The at least one elastomer matrix layer contains at least one electrically conductive particulate filler. In addition, at least in some areas at least one electrically conductive metal layer is arranged on the at least one elastomer matrix layer. Furthermore, the present invention also relates to a method for producing the flexible and / or elastic component and its use.

Description

The present invention relates to a flexible and / or elastic component comprising an at least partially flexible and / or elastic substrate with a front side and a rear side and at least one electrically conductive elastomer matrix layer arranged in regions on the front side and / or the rear side of the substrate. The at least one elastomer matrix layer contains at least one electrically conductive particulate filler. In addition, at least in regions, at least one electrically conductive metal layer is arranged on the at least one elastomer matrix layer. Furthermore, the present invention also relates to a method for producing the flexible and / or elastic component and its use.

Conventional polymers are usually not electrically conductive. Remedy is the addition of conductive fillers (extrinsic conductivity) or the use of intrinsically conductive polymers. However, the latter are in theirs Selection is very limited and mostly expensive, while conductive fillers can in principle be added to any polymer.

In the EP 2 775 483 B1 describes an electrically conductive material which contains conductive particles and an elastomeric binder. With regard to elastomers, the addition of fillers has the advantage that core properties such as flexibility and elasticity are largely retained. However, the increase in viscosity and embrittlement with increasing proportion of filler are disadvantageous, which limits processability and application. Therefore, even when using highly conductive silver-coated copper particles, the specific conductivity of filled elastomers is limited to about 10 ⁴ S / m.

This is sufficient for low currents such as those present in (voltage-based) signal transmissions or when used as capacitive sensors. For the power supply of energy-intensive electronics (microprocessors, wireless modules), use as a heating element or for wireless energy transmission, however, very large interconnect cross-sections are necessary, which, depending on the application, cannot be achieved due to limited lateral expansion or thickness.

The complex mechanical and electrical connection of metallic components is a major disadvantage for the use of conductive elastomers. So far, only adhesive or crimped connections have been considered, which are limited in their mechanical strength or miniaturizability. The highly automated and parallelized soldering processes that are widespread in the electrical industry, however, have so far not been used.

To increase the conductivity and improve the solderability, physical vapor deposition (PVD) has been used in the prior art to coat non-conductive polymers with conductive material. This serves, among other things, as the basis for subsequent galvanization. The inadequate strength of the layer deposited via PVD is only indirectly compensated for by mechanical interlocking of the galvanized layer with a porous substrate.

Alternatively, chemical processes have been in existence for some time to metallize electrically non-conductive polymers. However, this requires a complex, multi-stage process, sometimes using chemicals that are harmful to the environment and human health.

None of the methods uses an already conductive, filled polymer as the substrate. The layer applied by gas phase deposition is also subject to a high level of equipment and does not adhere adequately to the substrate. An improvement in adhesion can only be achieved with additional structuring effort for the substrate. Chemical metallization is also associated with high process expenditure and can only be used with certain polymer matrices.

Based on this, it was the object of the present invention to provide a flexible and / or elastic component with an elastomer matrix layer which has a high electrical conductivity.

This object is achieved with respect to a flexible and / or elastic component with the features of patent claim 1 and with respect to a method for producing such a flexible and / or elastic component with the features of patent claim 15. Claim 22 specifies possible uses of the flexible and / or elastic component according to the invention. The respective dependent claims represent advantageous developments.

According to the invention, a flexible and / or elastic component is thus specified which has an at least partially flexible and / or elastic substrate with a front side and a rear side and at least one electrically conductive elastomer matrix layer arranged in regions on the front side and / or the rear side of the substrate includes. The at least one elastomer matrix layer contains at least one electrically conductive particulate filler. In addition, at least in regions, at least one electrically conductive metal layer is arranged on the at least one elastomer matrix layer.

The component according to the invention comprises an elastomer matrix layer which has both an electrically conductive particulate filler and an electrically conductive metal layer. As a result, the electrical conductivity of the elastomer matrix layer is significantly increased. For example, an electrical conductivity of approximately 10 ⁷ S / m and thus, with the same electrode cross section, a conductivity which is up to three orders of magnitude greater than that of an elastomer matrix which is only particle-filled and not coated is achieved. Because of this, the component according to the invention is also suitable for those applications which require a very high conductivity, such as for the power supply of energy-intensive electronics (microprocessors, wireless modules), use as a heating element or for wireless energy transmission. The elastomer matrix layer arranged in regions on the substrate can be used, for example, as a flexible and / or elastic conductor track structure.

The electrically conductive metal layer arranged on the elastomer matrix layer also simplifies the connection of conventional surface-mounted components, such as SMD components because they can be easily attached to the metal layer by soldering.

Because the elastomer matrix layer contains an electrically conductive particulate filler, it would already be electrically conductive to a certain extent without the additional metal layer. Because of this, the electrically conductive metal layer can be very easily via an electrochemical deposition, e.g. a galvanic deposition on which the elastomer matrix layer is applied. The elastomer matrix layer provided with the electrically conductive metal layer can thus be produced in a simple manner.

A particular advantage of the component according to the invention is also its flexibility and / or elasticity, which is achieved by using a flexible and / or elastic substrate and an elastomer layer as the matrix layer. Due to the flexibility and / or elasticity of the component, it is also suitable for special applications, such as use as a flexible and / or elastic sensor or actuator. Thus, a capacitive or resistive elastomer sensor system and elastomer actuator system can be implemented with the component according to the invention, which directly with the necessary control, Evaluation and transmission electronics is combined. However, the component according to the invention can also be used as a carrier for semiconductor sensors such as temperature, light, moisture, acceleration and position sensors with flexible and / or stretchable conductor tracks, which are realized by an elastomer matrix layer, which are then on textile or generally movable surfaces (e.g. human skin, robot joints).

According to the invention, the electrically conductive elastomer matrix layer is only partially arranged on the front and / or the back of the substrate. This means that the front and / or back of the substrate has at least one partial area with an electrically conductive elastomer matrix layer arranged thereon and at least one partial area without an electrically conductive elastomer matrix layer arranged thereon. Due to the arrangement only in certain areas, the component according to the invention is suitable for special electrical applications, e.g. suitable for use as a flexible and / or elastic sensor or actuator. Here, the electrically conductive elastomer matrix layer can serve, for example, as a flexible and / or elastic conductor track. The arrangement in regions can also result from a full-surface arrangement by subsequent subtractive processing (e.g. selective removal with a light or material beam).

The at least one electrically conductive elastomer matrix layer can be arranged on the front of the substrate, on the back of the substrate or on the front and on the back of the substrate. For example, the flexible and / or elastic component can comprise at least two electrically conductive elastomer matrix layers, at least one of these layers being arranged on the front side of the substrate and at least one further of these layers being arranged on the rear side of the substrate.

• die Oberfläche der mindestens einen Elastomer-Matrix-Schicht mindestens einen metallisierten Teilbereich, in dem die mindestens eine elektrisch leitfähige Metallschicht auf der Elastomer-Matrix-Schicht angeordnet ist, und mindestens einen nicht-metallisierten Teilbereich aufweist, und/oder
• die mindestens eine elektrisch leitfähige Metallschicht eine gewellte Struktur aufweist, wenn sich die mindestens eine Elastomer-Matrix-Schicht in einem nicht-gedehnten Zustand befindet, und/oder
• die mindestens eine Elastomer-Matrix-Schicht mit der mindestens einen leitfähigen Metallschicht zweidimensional strukturiert ist, vorzugsweise mäanderförmig strukturiert ist.

A preferred embodiment of the flexible and / or elastic component according to the invention is characterized in that

• the surface of the at least one elastomer matrix layer has at least one metallized partial area in which the at least one electrically conductive metal layer on the elastomer matrix layer is arranged, and has at least one non-metallized portion, and / or
• the at least one electrically conductive metal layer has a corrugated structure when the at least one elastomer matrix layer is in an unstretched state, and / or
• the at least one elastomer matrix layer is structured two-dimensionally with the at least one conductive metal layer, is preferably structured in a meandering manner.

In this way it can be achieved that the electrically conductive metal layer does not influence the flexibility and / or elasticity of the component too strongly. The flexible and / or elastic component according to this embodiment thus has an even higher flexibility and / or elasticity.

On the one hand, it is possible for the electrically conductive metal layer to be arranged only in regions on the surface of the at least one elastomer matrix layer, ie the surface of the elastomer matrix layer has at least one metallized partial area in which the at least one electrically conductive metal layer is arranged on the elastomer matrix layer, and at least one non-metallized partial area. The surface of the elastomer matrix layer preferably has a plurality of metallized subregions, in which the at least one electrically conductive metal layer is arranged on the elastomer matrix layer, and a plurality of non-metallized subregions. This only local metallization ensures that the generally bendable but non-stretchable metal layer is not arranged on the entire elastomer matrix layer, but that there are additionally stretchable non-metallized areas. The presence of these expandable, non-metallized areas increases the flexibility or elasticity of the component according to the invention. In order to further increase the flexibility or elasticity, for example, the elastomer matrix layer and / or the metallized areas can be structured in a meandering manner.

Alternatively or additionally, the flexibility and in particular the elasticity of the component according to the invention can also be increased by the fact that the metallization, i.e. the electrically conductive metal layer is applied to the elastomer matrix layer in a stretched state of the elastomer matrix layer, i.e. when the elastomer matrix layer is in a stretched state. In this case, the metal layer has a (two- or three-dimensional) corrugated structure when the elastomer matrix layer is again in a non-stretched state, since the applied non-corrugated metal layer after the elastomer is relaxed. Matrix layer swells. This corrugated structure means that the metal layer does not restrict the elasticity of the elastomer matrix layer, since the waves can smooth out when they are stretched again, thus allowing the coated elastomer matrix layer to behave more flexibly.

In addition, the flexibility and / or the elasticity of the component according to the invention can also be increased by applying the electrically conductive metal layer in the form of a two-dimensional, preferably meandering, structure to the elastomer matrix layer. The increase in flexibility and / or elasticity ultimately results from the fact that the expansion of the component or of the elastomer matrix layer is converted into a bend in the metal layer.

• Elastomeren, vorzugsweise Silicon, Fluorsilicon, Polyurethan, Polynorbornen, Naturkautschuk, Styrol-Butadien, Isobutylen-Isopren, Ethylen-Propylen-Dien-Terpolymer, Poly-Chlorbutadien, chlorsulfoniertes Polyethylen, Acrylnitril-Butadien, hydriertes Acrylnitril-Butadien, Fluorkautschuk, Flüssigkristallelastomere, thermoplastische Elastomere, besonders bevorzugt thermoplastische Styrol-Copolymere, wie z.B. Styrol-Butadien-Styrol-, Styrol-Ethylen-Butadien-Styrol-, Styrol-Ethylen-Propylen-Styrol-, Styrol-Ethylen-Ethylen-Propylen-Styrol- oder Styrol-Isopren-Styrol-Copolymere, teilvernetzte Blends auf Polyolefin-Basis, besonders bevorzugt Blends aus Ethylen-Propylen-Dien-Kautschuken und Polypropylen, Blends aus Nitril-Butadien-Kautschuk und Polypropylen und Blends aus Ethylen-Propylen-Dien-Kautschuk und Polyethylen, thermoplastischen Urethan-Copolymeren, besonders bevorzugt Copolymere mit aromatischem Hartsegment und Ester-Weichsegment, Copolymere mit aromatischem Hartsegment und Ether-Weichsegment und Copolymere mit aromatischem Hartsegment und Ester/Ether-Weichsegment,
• Thermoplasten, vorzugsweise Polyethylen, Polypropylen, Polyvinylchlorid, Polystyrol, Acrylnitril-Butadien-Styrol, Polyamide, Polylactat, Polymethylmethacrylat, Polyetheretherketon, Polyvinylchlorid, Polycarbonat, Cellulosehydrat/-acetat, Polylacted, Polyethylenterephthalat, Polytetrafluorethylen, Polyester, thermoplastische Polyurethane, thermoplastische Polyimide, thermoplastische Flüssigkristallelastomere,
• Duroplasten, vorzugsweise Kunstharze, wie z.B. Phenolharz, Harnstoffharz, Melaminharz, Epoxidharz, Polyesterharz, duroplastische Polyurethane, duroplastische Polyimide, duroplastische Flüssigkristallelastomere, sowie
• Mischungen, Blends und Aufschäumungen hiervon

In a further preferred embodiment of the flexible and / or component according to the invention, the substrate contains or consists of a material which is selected from the group consisting of

• Elastomers, preferably silicone, fluorosilicone, polyurethane, polynorbornene, natural rubber, styrene-butadiene, isobutylene-isoprene, ethylene-propylene-diene terpolymer, poly-chlorobutadiene, chlorosulfonated polyethylene, acrylonitrile-butadiene, hydrogenated acrylonitrile-butadiene, thermoplastic rubber, liquid rubber Elastomers, particularly preferably thermoplastic styrene copolymers, such as styrene-butadiene-styrene, styrene-ethylene-butadiene-styrene, styrene-ethylene-propylene-styrene, styrene-ethylene-ethylene-propylene-styrene or styrene-isoprene -Styrene copolymers, partially cross-linked blends based on polyolefin, especially preferably blends of ethylene-propylene-diene rubbers and polypropylene, blends of nitrile-butadiene rubber and polypropylene and blends of ethylene-propylene-diene rubber and polyethylene, thermoplastic urethane copolymers, particularly preferably copolymers with an aromatic hard segment and ester-soft segment Copolymers with aromatic hard segment and ether soft segment and copolymers with aromatic hard segment and ester / ether soft segment,
• Thermoplastics, preferably polyethylene, polypropylene, polyvinyl chloride, polystyrene, acrylonitrile butadiene styrene, polyamides, polylactate, polymethyl methacrylate, polyether ether ketone, polyvinyl chloride, polycarbonate, cellulose hydrate / acetate, polylacted, polyethylene terephthalate, polytetrafluoroethylene, polyester, thermoplastic thermoplastic, thermoplastic, thermoplastic, thermoplastic .
• Thermosets, preferably synthetic resins, such as phenol resin, urea resin, melamine resin, epoxy resin, polyester resin, thermosetting polyurethanes, thermosetting polyimides, thermosetting liquid crystal elastomers, and
• Mixtures, blends and foams thereof

The substrate is preferably electrically non-conductive.

According to a further preferred embodiment, the elastomer of the elastomer matrix layer is selected from the group consisting of silicone, fluorosilicone, polyurethane, polynorbornene, natural rubber, styrene-butadiene, isobutylene-isoprene, ethylene-propylene-diene terpolymer, poly-chlorobutadiene, chlorosulfonated polyethylene, acrylonitrile butadiene, hydrogenated acrylonitrile butadiene, fluororubber, liquid crystal elastomers, thermoplastic elastomers, preferably thermoplastic styrene copolymers, such as styrene-butadiene-styrene, styrene-ethylene-butadiene-styrene, styrene-ethylene-propylene-styrene -, Styrene-ethylene-ethylene-propylene-styrene or styrene-isoprene-styrene copolymers, partially crosslinked blends based on polyolefin, preferably blends of ethylene-propylene-diene rubbers and polypropylene, blends of nitrile-butadiene rubber and polypropylene and blends of ethylene-propylene-diene rubber and polyethylene, thermoplastic urethane copolymers, preferably copolymers with an aromatic hard segment and ester soft segment, copolymers with an aromatic hard segment and ether soft segment and copolymers with an aromatic hard segment and ester / ether soft segment, and mixtures thereof.

In a particularly preferred embodiment, the elastomer of the elastomer matrix layer is a non-thermoplastic elastomer, very particularly preferably a silicone. Non-thermoplastic elastomers, in particular silicones, have the advantage that they are at least briefly thermally stable even at high temperatures of over 200 ° C. and do not decompose or melt at such high temperatures. Thus, electrical components can easily be applied to the component according to the invention by means of soldering processes in which high temperatures of over 200 ° C. are reached. In addition, the component manufactured in this way can in principle also be operated at temperatures of up to 200 ° C.

• eine zumindest teilweise anisotrope Gestalt besitzen, wobei die Partikel vorzugsweise plättchenförmig, stäbchenförmig oder faserförmig sind, und/oder
• eine unregelmäßige Oberfläche besitzen, die vorzugsweise dadurch hervorgerufen ist, dass die Partikel durch Agglomeration von Nanopartikeln entstanden sind.

A further preferred embodiment of the component according to the invention is characterized in that the electrically conductive particulate filler consists of particles which

• have an at least partially anisotropic shape, the particles preferably being platelet-shaped, rod-shaped or fibrous, and / or
• have an irregular surface, which is preferably caused by the fact that the particles are formed by agglomeration of nanoparticles.

By using such special particles, the electrically conductive metal layer can adhere very well to the elastomer matrix layer.

• mindestens einen metallischen partikulären Füllstoff umfasst, dessen Anteil in der mindestens einen Elastomer-Matrix-Schicht mindestens 20 Gew.-%, bevorzugt mindestens 60 Gew.-%, beträgt, und/oder
• mindestens einen nicht-metallischen oder nur teilweise metallischen partikulären Füllstoff umfasst, dessen Anteil in der mindestens einen Elastomer-Matrix-Schicht mindestens 1 Gew.-%, bevorzugt mindestens 3 Gew.-%, beträgt.

Another preferred embodiment is characterized in that the at least one particulate filler

• comprises at least one metallic particulate filler, the proportion of which is at least in the at least one elastomer matrix layer 20 wt .-%, preferably at least 60 wt .-%, and / or
• comprises at least one non-metallic or only partially metallic particulate filler, the proportion of which in the at least one elastomer matrix layer is at least 1% by weight, preferably at least 3% by weight.

It is further preferred that the proportion of the at least one electrically conductive particulate filler in the at least one elastomer matrix layer is at least 10% by volume, preferably at least 20% by volume.

By using a higher proportion of conductive particulate filler it can be achieved that the elastomer matrix layer has a higher electrical conductivity.

• Partikeln, die mindestens ein Metall ausgewählt aus der Gruppe bestehend aus Aluminium, Eisen, Zink, Zinn, Kupfer, Silber, Gold, Platin und Mischungen hiervon enthalten oder daraus bestehen,
• Kompositpartikeln, welche einen Kern, bevorzugt einen Kern aus Glas oder einem Metall, sowie eine auf dem Kern angeordnete elektrisch leitfähige Beschichtung, bevorzugt eine Beschichtung aus Silber, aufweisen,
• Partikeln, die aus einem elektrisch leitfähigen, nicht-metallischen Material bestehen, welches bevorzugt ausgewählt ist aus der Gruppe bestehend aus Ruß, Graphit, Graphen, Kohlenstoff-Nanoröhren, Polyanilin, Polyacetylen, Polypyrrol, Polyparaphenylen, Polythiophen und Mischungen hiervon, und
• Mischungen solcher Partikel.

A further preferred embodiment of the flexible and / or elastic component according to the invention is characterized in that the electrically conductive particulate filler contains or consists of particles which are selected from the group consisting of

• Particles which contain or consist of at least one metal selected from the group consisting of aluminum, iron, zinc, tin, copper, silver, gold, platinum and mixtures thereof,
• Composite particles which have a core, preferably a core made of glass or a metal, and an electrically conductive coating, preferably a coating made of silver, arranged on the core,
• Particles consisting of an electrically conductive, non-metallic material, which is preferably selected from the group consisting of carbon black, graphite, graphene, carbon nanotubes, polyaniline, polyacetylene, polypyrrole, polyparaphenylene, polythiophene and mixtures thereof, and
• Mixtures of such particles.

Furthermore, it is preferred that the at least one elastomer matrix layer additionally contains particles of an electrically non-conductive, non-metallic material, preferably silicas.

• ein Metall enthält oder aus diesem besteht, welches ausgewählt ist aus der Gruppe bestehend aus Aluminium, Kupfer, Silber, Gold, Platin, Zink, Zinn und Mischungen hiervon, und/oder
• eine Schichtdicke von 100 nm bis 100 µm, bevorzugt von 5 µm bis 50 µm, aufweist, und/oder
• eine abgeschiedene Schicht, vorzugsweise eine physikalisch abgeschiedene, chemisch abgeschiedene oder elektrochemisch abgeschiedene Schicht, besonders bevorzugt eine galvanisch abgeschiedene Schicht, ist.

Another preferred embodiment of the flexible and / or elastic component according to the invention is characterized in that the at least one electrically conductive metal layer

• contains or consists of a metal which is selected from the group consisting of aluminum, copper, silver, gold, platinum, zinc, tin and mixtures thereof, and / or
• a layer thickness of 100 nm to 100 microns, preferably from 5 microns to 50 microns, and / or
• is a deposited layer, preferably a physically deposited, chemically deposited or electrochemically deposited layer, particularly preferably an electrodeposited layer.

With a minimum layer thickness of the metal layer of 100 nm, preferably 5 µm, a higher conductivity of the metal layer can be achieved. A maximum layer thickness of the metal layer of 100 μm, preferably 50 μm, can achieve a higher flexibility or elasticity of the component according to the invention. By using a layer thickness in the range from 100 nm to 100 μm, preferably from 5 μm to 50 μm, both a higher conductivity of the metal layer and also a higher flexibility and / or elasticity of the flexible component according to the invention can be achieved.

In a further preferred embodiment of the flexible and / or elastic component according to the invention, the at least one elastomer matrix layer is at least partially arranged on the substrate in the form of conductor tracks. This results in a particularly large number of possible uses of the component as an electrical component.

The electrically conductive elastomer matrix layer can be an elastomer electrode.

A further preferred embodiment is characterized in that the flexible and / or elastic component comprises one or more electrical components, preferably an SMD component, which are connected to the at least one electrically conductive metal layer via a solder. The solder is preferably a tin alloy, particularly preferably a tin-bismuth alloy. In addition, it is preferred that the solder joint, i.e. the point at which the electrical component is connected to the metal layer via the solder is mechanically stiffened by at least one cover layer and / or at least one encapsulation. For example, the solder joints and / or the electrical component can be encapsulated with an elastomer, preferably an elastomer with high rigidity. Alternatively or additionally, the overall structure, i.e. the entire front side of the substrate, then again coated with the substrate material, for example.

In a further preferred embodiment of the flexible and / or elastic component according to the invention, the flexible and / or elastic component has a plurality of flexible and / or elastic substrates and a plurality of electrically conductive elastomer matrix layers, the substrates and the elastomer matrix layers alternating are arranged. This results in a layer structure of alternately arranged substrates and elastomer matrix layers, an electrically conductive metal layer being arranged on the outermost elastomer matrix layer or the outermost elastomer matrix layers. Such an arrangement is particularly suitable for use as a sensor, e.g. Pressure sensor, suitable. In addition, it is preferred that at least one of the plurality of substrates has at least one interruption by which the electrically conductive elastomer matrix layers adjoining this substrate are connected. This allows the conductive layers to be connected across one or more levels. Furthermore, the substrate layers for realizing sensor functions can also contain gas volumes, for example by foaming or hollow structures.

• eine Antennenstruktur und/oder eine Spulenstruktur, und/oder
• eine Sensorstruktur und/oder eine Aktorstruktur.

The flexible and / or elastic component according to the invention preferably comprises

• an antenna structure and / or a coil structure, and / or
• a sensor structure and / or an actuator structure.

1. a) ein flexibles und/oder elastisches Substrat mit einer Vorderseite und einer Rückseite bereitgestellt wird,
2. b) die Vorderseite und/oder die Rückseite des Substrats mit mindestens einer bereichsweise angeordneten elektrisch leitfähigen Elastomer-Matrix-Schicht versehen wird, die mindestens einen elektrisch leitfähigen partikulären Füllstoff enthält, und
3. c) die mindestens eine Elastomer-Matrix-Schicht zumindest bereichsweise mit einer elektrisch leitfähigen Metallschicht versehen wird.

The present invention also relates to a method for producing a flexible and / or elastic component according to the invention, in which

1. a) a flexible and / or elastic substrate is provided with a front and a back,
2. b) the front and / or the back of the substrate is provided with at least one regionally arranged electrically conductive elastomer matrix layer which contains at least one electrically conductive particulate filler, and
3. c) the at least one elastomer matrix layer is provided at least in regions with an electrically conductive metal layer.

• die Vorderseite und/oder die Rückseite des Substrats bereichsweise mit der mindestens einen elektrisch leitfähigen Elastomer-Matrix-Schicht versehen wird, oder
• die Vorderseite und/oder die Rückseite des Substrats zunächst vollflächig mit der mindestens einen elektrisch leitfähigen Elastomer-Matrix-Schicht versehen wird und anschließend mindestens ein Teilbereich der mindestens einen elektrisch leitfähigen Elastomer-Matrix-Schicht entfernt wird, wobei das Entfernen vorzugsweise mittels Laserbehandlung erfolgt.

A preferred variant of the method according to the invention is characterized in that the front and / or the back of the substrate is provided with the at least one regionally arranged electrically conductive elastomer matrix layer in step b) in that

• the front and / or the back of the substrate is partially provided with the at least one electrically conductive elastomer matrix layer, or
• the front and / or the back of the substrate is first provided over the entire area with the at least one electrically conductive elastomer matrix layer and then at least a portion of the at least one electrically conductive elastomer matrix layer is removed, the removal preferably being carried out by means of laser treatment.

The elastomer matrix layer on the substrate in step b) can therefore be produced in two different preferred ways. Either the elastomer matrix layer is applied directly to the substrate only in regions, so that an elastomer matrix layer arranged only in regions results. Or the elastomer matrix layer is first applied to the entire surface of the substrate, after which a part of the The elastomer matrix layer is removed by subtractive processing (for example by selective removal with a light or material beam, preferably by laser treatment). Of course, it is alternatively also possible to first apply the elastomer matrix layer in regions and then to remove part of the elastomer matrix layer.

• die elektrisch leitfähige Elastomer-Matrix-Schicht bereichsweise mit der mindestens einen elektrisch leitfähigen Metallschicht versehen wird, oder
• die elektrisch leitfähige Elastomer-Matrix-Schicht zunächst vollflächig mit der mindestens einen elektrisch leitfähigen Metallschicht versehen wird und anschließend mindestens ein Teilbereich der mindestens einen elektrisch leitfähigen Metallschicht entfernt wird, wobei das Entfernen vorzugsweise mittels Laserbehandlung erfolgt.

A preferred variant of the method according to the invention is characterized in that in step c)

• the electrically conductive elastomer matrix layer is partially provided with the at least one electrically conductive metal layer, or
• the electrically conductive elastomer matrix layer is first provided over the entire surface with the at least one electrically conductive metal layer and then at least a partial area of the at least one electrically conductive metal layer is removed, the removal preferably being carried out by means of laser treatment.

In principle, the electrically conductive metal layer can be produced on the elastomer matrix layer in such a way that a metal layer arranged only in regions on the elastomer matrix layer or a metal layer arranged over the entire surface of the elastomer matrix layer is obtained. There are two preferred options for producing a metal layer that is only arranged in regions. Either the metal layer is applied directly only in regions to the elastomer matrix layer, so that a metal layer arranged only in regions results. Or the metal layer is first applied to the entire surface of the elastomer matrix layer, after which part of the metal layer is removed by subtractive processing (e.g. by selective removal with a light or material beam, preferably by laser treatment). Of course, it is alternatively also possible to first apply the metal layer in regions and then to remove a part of the metal layer.

• physikalischer Abscheidung, besonders bevorzugt PVD-Abscheidung, oder
• chemischer Abscheidung, besonders bevorzugt CVD-Abscheidung oder nasschemischer Abscheidung, oder
• elektrochemischer Abscheidung, besonders bevorzugt Galvanisierung oder Elektroplattierung, ganz besonders bevorzugt unter Verwendung eines Tauchbades oder eines Tampon-Verfahrens.

A further preferred variant of the method according to the invention is characterized in that the elastomer matrix layer is provided with the electrically conductive metal layer in step c) takes place in that the electrically conductive metal layer is deposited on the elastomer matrix layer. The deposition is preferably carried out by means of

• physical deposition, particularly preferably PVD deposition, or
• chemical deposition, particularly preferably CVD deposition or wet chemical deposition, or
• electrochemical deposition, particularly preferably electroplating or electroplating, very particularly preferably using an immersion bath or a tampon process.

In this way, a particularly simple and inexpensive application of the metal layer is possible. Electrochemical deposition, in particular deposition by galvanization, e.g. using an immersion bath or a tampon method, since the deposition can be carried out in a particularly simple and inexpensive manner.

In a further preferred variant of the method according to the invention, the elastomer matrix layer is provided with the electrically conductive metal layer in step c) in that the electrically conductive metal layer is deposited electrochemically using an electrolyte, the deposition being at a phase boundary between the electrolyte and the still uncrosslinked or only partially crosslinked elastomer matrix layer. The electrochemical deposition takes place on the either uncrosslinked or only partially crosslinked, i.e. the not yet fully cross-linked, elastomer matrix layer. Due to the deposition at the phase boundary, the metal layer can partially fold into the not yet fully cross-linked elastomer matrix layer. Subsequent curing then enables the complete crosslinking of the elastomer matrix layer with the metal layer partially folded therein. This results in a significantly better connection of the metal layer to the elastomer matrix layer.

Another preferred variant of the method according to the invention is thereby characterized in that in step c) the at least one elastomer matrix layer is at least partially provided with an electrically conductive metal layer, while the at least one elastomer matrix layer is in an expanded state. In this way, when the elastomer matrix layer is again in a non-stretched state, the metal layer has a (three-dimensional) corrugated structure, since the applied non-corrugated metal layer is after the elastomer matrix layer has relaxed aufwellt. This corrugated structure means that the metal layer does not restrict the elasticity of the elastomer matrix layer, since the waves can smooth out when they are stretched again. As a result, a significantly more flexible behavior of the coated elastomer matrix layer is made possible. This process variant significantly increases the flexibility of the component produced.

It is further preferred that between step b) and c) the at least one electrically conductive elastomer matrix layer is provided with at least one further flexible and / or elastic substrate and at least one further electrically conductive elastomer matrix layer, so that the Substrates and the elastomer matrix layers are arranged alternately.

Furthermore, the present invention also relates to the use of the flexible and / or elastic component according to the invention as a heating element, as a coil, as an antenna, as a printed circuit board, as a sensor, preferably a temperature sensor, light sensor, moisture sensor, acceleration sensor, position sensor, pressure sensor, proximity sensor, strain sensor, shear force sensor , as a magnetic or magnetorheological or dielectric actuator, as a dielectric generator, as a dielectric or resistive sensor, or as an integrated component which fulfills several of the functions mentioned.

The present invention is intended to be explained in more detail with reference to the following examples and figures, without restricting it to the specific embodiments and parameters shown here.

In Fig. 1 is a schematic representation of an exemplary special embodiment of the flexible and elastic component according to the invention in Form of an elastic board shown in a sectional view. The component comprises a flexible and elastic substrate 1 with a front side and a back side and an electrically conductive elastomer matrix layer 2, which is arranged in regions on the front side of the substrate and which is an elastomer electrode. The substrate 1 is an electrically non-conductive elastomer substrate. The elastomer matrix layer 2 contains an electrically conductive particulate filler. In regions, an electrically conductive metal layer 3 is arranged on the elastomer matrix layer 2, which is an electrodeposited metal layer. Furthermore, the component comprises an electrical component 6 with soldering pads 5, which is an SMD component. The component 6 is connected to the electrically conductive metal layer 3 via a solder 4.

In Fig. 2 is a schematic representation of another exemplary special embodiment of the flexible and elastic component according to the invention shown, which on the in Fig. 1 shown embodiment builds. In addition to the Fig. 1 The component shown is in the component in Fig. 2 the solder joint is mechanically stiffened by a cover layer 8 and by an encapsulation 7. For example, solder joints and / or SMD components can be encapsulated with an elastomer of high rigidity. In addition, the entire structure can be coated again with the substrate material.

In Fig. 3 a schematic representation of a further exemplary embodiment of the flexible and elastic component according to the invention is shown. The component comprises a flexible and / or elastic substrate 1 with a front side and a rear side and an electrically conductive elastomer matrix layer 2 arranged in regions on the front side of the substrate, which is arranged in the form of conductor tracks on the substrate 1. The elastomer matrix layer 2 contains an electrically conductive particulate filler. In regions, an electrically conductive metal layer 3 is arranged on the elastomer matrix layer 2, on which electrical components 6 are attached, which are SMD components. The SMD components 6 themselves are in Fig. 3 not shown for the sake of clarity. The metal layer 3 serves as solder pads for the electrical components 6. In addition, the component comprises an antenna or coil structure 9, which is only shown schematically, and a sensor or actuator structure 10.

Claims (22)

Flexible and / or elastic component comprising an at least partially flexible and / or elastic substrate (1) with a front and a back and at least one electrically conductive elastomer matrix layer arranged in regions on the front and / or the back of the substrate (1) (2), wherein the at least one elastomer matrix layer (2) contains at least one electrically conductive particulate filler, and wherein at least in some areas at least one electrically conductive metal layer (3) is arranged on the at least one elastomer matrix layer (2) , Component according to the preceding claim, characterized in that - The surface of the at least one elastomer matrix layer (2) at least one metallized partial area, in which the at least one electrically conductive metal layer (3) is arranged on the elastomer matrix layer (2), and at least one non-metallized partial area has, and / or - The at least one electrically conductive metal layer (3) has a corrugated structure when the at least one elastomer matrix layer (2) is in a non-stretched state, and / or - The at least one elastomer matrix layer (2) with the at least one conductive metal layer (3) is two-dimensionally structured, preferably structured in a meandering manner. Component according to one of the preceding claims, characterized in that the substrate (1) contains or consists of a material which is selected from the group consisting of - Elastomers, preferably silicone, fluorosilicone, polyurethane, polynorbornene, natural rubber, styrene-butadiene, isobutylene-isoprene, ethylene-propylene-diene terpolymer, poly-chlorobutadiene, chlorosulfonated polyethylene, acrylonitrile-butadiene, hydrogenated acrylonitrile-butadiene, liquid rubber, fluorinated rubber. thermoplastic elastomers, particularly preferably thermoplastic styrene copolymers, such as styrene-butadiene-styrene, styrene-ethylene-butadiene-styrene, styrene-ethylene-propylene-styrene, styrene-ethylene-ethylene-propylene-styrene or styrene or Isoprene-styrene copolymers, partially cross-linked blends based on polyolefin, particularly preferably blends made of ethylene-propylene-diene rubbers and polypropylene, blends made of nitrile-butadiene rubber and polypropylene and blends made of ethylene-propylene-diene rubber and polyethylene, thermoplastic Urethane copolymers, particularly preferably copolymers with an aromatic hard segment and ester soft segment, copolymers with an aromatic hard segment and ether soft hsegment and copolymers with aromatic hard segment and ester / ether soft segment, - Thermoplastics, preferably polyethylene, polypropylene, polyvinyl chloride, polystyrene, acrylonitrile butadiene styrene, polyamides, polylactate, polymethyl methacrylate, polyether ether ketone, polyvinyl chloride, polycarbonate, cellulose hydrate / acetate, polylacted, polyethylene terephthalate, polytetrafluoroethylene, polyesters, thermoplastic polyurethanes, thermoplastic liquid crystal elastomers - Thermosets, preferably synthetic resins such as phenolic resin, urea resin, melamine resin, epoxy resin, polyester resin, thermosetting polyurethanes, thermosetting polyimides, thermosetting liquid crystal elastomers and - Mixtures, blends and foams thereof. Component according to one of the preceding claims, characterized in that the elastomer is selected from the group consisting of made of silicone, fluorosilicone, polyurethane, polynorbornene, natural rubber, styrene-butadiene, isobutylene-isoprene, ethylene-propylene-diene terpolymer, poly-chlorobutadiene, chlorosulfonated polyethylene, acrylonitrile-butadiene, hydrogenated acrylonitrile-butadiene, fluororubber, thermoplastic elastomer, liquid crystal elastomer, liquid crystal elastomer preferably thermoplastic styrene copolymers, such as styrene-butadiene-styrene, styrene-ethylene-butadiene-styrene, styrene-ethylene-propylene-styrene, styrene-ethylene-ethylene-propylene-styrene or styrene-isoprene-styrene Copolymers, partially cross-linked blends based on polyolefin, preferably blends made of ethylene-propylene-diene rubber and polypropylene, blends made of nitrile-butadiene rubber and polypropylene and blends made of ethylene-propylene-diene rubber and polyethylene, thermoplastic urethane copolymers, preferably Copolymers with aromatic hard segment and ester soft segment, copolymers with aromatic hard segment and ether soft segment and copolymers with aromati hard segment and soft ester / ether segment, and mixtures thereof. Component according to one of the preceding claims, characterized in that the elastomer is a non-thermoplastic elastomer, preferably a silicone. Component according to one of the preceding claims, characterized in that the electrically conductive particulate filler consists of particles which have an at least partially anisotropic shape, the particles preferably being platelet-shaped, rod-shaped or fibrous, and / or - have an irregular surface, which is preferably caused by the fact that the particles are formed by agglomeration of nanoparticles. Component according to one of the preceding claims, characterized in that the at least one particulate filler comprises at least one metallic particulate filler, the proportion of which in the at least one elastomer matrix layer (2) is at least 20% by weight, preferably at least 60% by weight, and / or - comprises at least one non-metallic or only partially metallic particulate filler, the proportion of which in the at least one elastomer matrix layer (2) is at least 1% by weight, preferably at least 3% by weight. Component according to one of the preceding claims, characterized in that the proportion of the at least one electrically conductive particulate filler in the at least one elastomer matrix layer (2) is at least 10% by volume, preferably at least 20% by volume. Component according to one of the preceding claims, characterized in that the electrically conductive particulate filler contains or consists of particles which are selected from the group consisting of Particles which contain or consist of at least one metal selected from the group consisting of aluminum, iron, zinc, tin, copper, silver, gold, platinum and mixtures thereof, Composite particles which have a core, preferably a core made of glass or a metal, and an electrically conductive coating, preferably a coating made of silver, arranged on the core, - Particles which consist of an electrically conductive, non-metallic material, which is preferably selected from the group consisting of carbon black, graphite, graphene, carbon nanotubes, polyaniline, polyacetylene, polypyrrole, polyparaphenylene, polythiophene and mixtures thereof, and - Mixtures of such particles. Component according to one of the preceding claims, characterized in that the at least one elastomer matrix layer (2) additionally contains particles of an electrically non-conductive, non-metallic material, preferably silicas. Component according to one of the preceding claims, characterized in that the at least one electrically conductive metal layer (3) contains or consists of a metal which is selected from the group consisting of aluminum, copper, silver, gold, platinum, zinc, tin and mixtures thereof, and / or - Has a layer thickness of 100 nm to 100 microns, preferably from 5 microns to 50 microns, and / or a deposited layer, preferably a physically deposited, chemically deposited or electrochemically deposited layer, particularly preferably an electrodeposited layer. Component according to one of the preceding claims, characterized in that the at least one elastomer matrix layer (2) is arranged at least partially in the form of conductor tracks on the substrate (1). Component according to one of the preceding claims, characterized in that the flexible and / or elastic component comprises an electrical component (6), preferably an SMD component, which has a solder (4), which is preferably a tin alloy, is particularly preferably a tin-bismuth alloy with which at least one electrically conductive metal layer (3) is connected, the solder joint preferably being mechanically stiffened by at least one cover layer (8) and / or at least one encapsulation (7). Component according to one of the preceding claims, characterized in that the flexible and / or elastic component a plurality of flexible and / or has elastic substrates (1) and a plurality of electrically conductive elastomer matrix layers (2), the substrates and the elastomer matrix layers being arranged alternately, and preferably at least one of the plurality of substrates having at least one interruption, by which are connected to the electrically conductive elastomer matrix layers adjacent to this substrate. A method of manufacturing a flexible and / or elastic member according to any one of claims 1 to 14, in which a) a flexible and / or elastic substrate (1) is provided with a front and a back, b) the front and / or the back of the substrate (1) is provided with at least one regionally arranged electrically conductive elastomer matrix layer (2) which contains at least one electrically conductive particulate filler, and c) the at least one elastomer matrix layer (2) is provided at least in regions with at least one electrically conductive metal layer (3). Method according to claim 15, characterized in that the front and / or the back of the substrate (1) is provided with the at least one regionally arranged electrically conductive elastomer matrix layer (2) in step b) in that - The front and / or the back of the substrate (1) is partially provided with the at least one electrically conductive elastomer matrix layer (2), or - The front and / or the back of the substrate (1) is first provided over the entire area with the at least one electrically conductive elastomer matrix layer (2) and then at least a portion of the at least one electrically conductive elastomer matrix layer (2) is removed becomes, the removal preferably being carried out by means of laser treatment. Method according to one of claims 15 or 16, characterized in that in step c) - The electrically conductive elastomer matrix layer (2) is partially provided with the at least one electrically conductive metal layer (3), or - The electrically conductive elastomer matrix layer (2) is first provided over the entire area with the at least one electrically conductive metal layer (3) and then at least a portion of the at least one electrically conductive metal layer (3) is removed, the removal preferably being carried out by means of laser treatment , Method according to one of claims 15 to 17, characterized in that the elastomer matrix layer (2) is provided with the electrically conductive metal layer (3) in step c) in that the electrically conductive metal layer (3) on the elastomer -Matrix layer (2) is deposited, the deposition preferably by means of physical deposition, particularly preferably PVD deposition, or - chemical deposition, particularly preferably CVD deposition or wet chemical deposition, or electrochemical deposition, particularly preferably electroplating or electroplating, very particularly preferably using an immersion bath or a tampon process, he follows. Method according to one of Claims 15 to 18, characterized in that the elastomer matrix layer (2) is provided with the electrically conductive metal layer (3) in step c) in that the electrically conductive metal layer (3) is used electrochemically an electrolyte is deposited, the deposition taking place at a phase boundary between the electrolyte and the still uncrosslinked or only partially crosslinked elastomer matrix layer. Method according to one of claims 15 to 19, characterized in that in step c) the at least one elastomer matrix layer (2) is at least partially provided with an electrically conductive metal layer (3), while the at least one elastomer matrix Layer (2) is in a stretched state. Method according to one of claims 15 to 20, characterized in that between step b) and c) the at least one electrically conductive elastomer matrix layer (2) with at least one further flexible and / or elastic substrate and at least one further electrically conductive elastomer -Matrix layer is provided so that the substrates and the elastomer matrix layers are arranged alternately. Use of a flexible and / or elastic component according to one of claims 1 to 14 as a heating element, as a coil, as an antenna, as a printed circuit board, as a sensor, preferably a temperature sensor, light sensor, moisture sensor, acceleration sensor, position sensor, pressure sensor, proximity sensor, strain sensor, shear force sensor, as magnetic or magnetorheological or dielectric actuator, as a dielectric generator, as a dielectric or resistive sensor, or as an integrated component which fulfills several of the functions mentioned.

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