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EP3378574B1 - Method and device for separating and handling of particles from a particle supply - Google Patents

Method and device for separating and handling of particles from a particle supply Download PDF

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Publication number
EP3378574B1
EP3378574B1 EP18154848.8A EP18154848A EP3378574B1 EP 3378574 B1 EP3378574 B1 EP 3378574B1 EP 18154848 A EP18154848 A EP 18154848A EP 3378574 B1 EP3378574 B1 EP 3378574B1
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EP
European Patent Office
Prior art keywords
particles
pipette
gas
particle
particle mixture
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EP18154848.8A
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German (de)
French (fr)
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EP3378574A1 (en
Inventor
Toni BOHATZSCH
Steffen Howitz
Daniel Seifert
Thomas Wegener
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GeSiM Gesellschaft fur Silizium-Mikrosysteme mbH
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GeSiM Gesellschaft fur Silizium-Mikrosysteme mbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating

Definitions

  • the invention relates to a method and a device for separating and handling particles from a particle supply, consisting of a sample table with the particle supply and a traversable in xyz direction pipette, wherein the particles have a mass down to the ⁇ g range and particle sizes of below 150 microns have.
  • a method and a device for sorting particles from a particle mixture has become known, in which the particle mixture with particles to be sorted out is moved relative to a collecting device.
  • the particle mixture with particles to be sorted out is moved relative to a collecting device.
  • they are irradiated with pulsed electromagnetic radiation, whereby particles which reflect and / or absorb electromagnetic radiation in a defined wavelength range receive an acceleration, so that they are moved into the collecting device.
  • a device for Sorting out two or more materials from a suspension is generated in a flow channel, and in each case identical particles are diverted into one of two output ports by means of a control device.
  • the invention has for its object to remove the aforementioned particles from a particle supply, transport and store targeted and with high accuracy on a storage location.
  • the device consists of a sample table with a particle supply of particles, which is connected to a vibration generator for supplying mechanical vibration energy to form a gas-solid particle mixture over the sample table, wherein above the gas-solid-particle mixture in a xyz-direction movable pipette is arranged with a pinhole for receiving particles from the gas-solid-particle mixture, which is connected to a device for generating a negative pressure and wherein between the pipette and the pinhole a pulse generator for generating of electro-acoustic pulses is located.
  • the sample table is preferably connected to motors for generating vibration energy.
  • motors for generating vibration energy.
  • piezoelectric actuators for generating vibrational energy instead.
  • the sample table is bounded laterally by an edge.
  • the pinhole diaphragm consists of microtechnically structured silicon or glass and is provided with a pore or a pore array.
  • an anti-adhesive layer which preferably consists of a carbon-fluorine compound.
  • the pipette for receiving particles from the gas-solid-particle mixture and for transporting and depositing particles or a particle array in a target position is attached to a receptacle of an x-y-z positioning device.
  • a light barrier for leveling thereof and an active optical image recognition device located above the sample table with the particle supply and the gas-solid-particle mixture generated thereupon.
  • the pipette is moved vertically in the direction of the gas-solid-particle mixture and is moved stepwise under active optical image recognition into the gas-solid-particle mixture, up to the pipette At least one particle is detected, whereupon the movement is stopped.
  • the device for receiving particles 1 from a particle supply 2 consists of a pinhole 3 with at least one hole at the exit of a pipette 4, which is attached to a receptacle 5 of an xyz positioning device, not shown.
  • the pinhole 3 can be moved freely with the pipette 4 relative to the particle supply 2.
  • the particle supply 2 is located on a sample table 6, which is bounded laterally by an edge 7.
  • the sample table 6 is coupled to a vibration generator 8 in order to enable the sample table 6 to vibrate in order to produce a gas-solid-particle mixture 10, consisting of a plurality of particles 1, above the particle supply 2.
  • the sample stage 6 can have a heater in order to be able to provide a sufficiently dry particle supply 2 and to minimize the adhesion / cohesion of the particles 1 in the gas-solid-particle mixture 10.
  • the perforated plate 3 is connected to a vacuum connection 9 in order to be able to generate a suitable holding force by means of negative pressure, vacuum or vacuum pulses, so that particles 1 can be sucked from the gas-solid particle mixture 10 over the particle supply 2 at the pinhole 3.
  • the energy supplied to the particle supply 2 on the sample table 6 can also be generated by motors or by piezoelectric actuators.
  • particles 1 hold in chaotic motion and high kinetic energy, so that the particles 1 can not build up bonds to adjacent particles 1. Only then is it possible to be able to absorb particles 1 with the pinhole 3 with the smallest possible expenditure of energy.
  • lowest possible energy expenditure means that the holding force is equal to, or nearly equal to, the weight of the particle 1.
  • particles 1 takes place by focusing an energy pulse at the pinhole 3, in the form of a vacuum pulse, or a series of negative pressure pulses until at least one particle 1 adheres to the pinhole 3. Particles 1 with a diameter that are smaller than the diameter of the opening in the pinhole 3, are sucked through the pinhole 3 and separated out into a particle separator, not shown.
  • a light barrier 12 which is used together with the vibration generator 8 for leveling the gas-solid particle mixture 10 generated above the sample table 6 .
  • the vibration energy of the vibrator 8 increases until the photocell 12 detects the presence of particles 1 on the particle supply 2, whereupon the further increase of the vibration energy is stopped by the control loop.
  • the control circuit will reduce the vibrational energy of the vibrator 8 until the desired target value of the attenuation is reached again.
  • the at least one particle 1 can then be transported with the aid of the x-y-z - positioning to a designated storage location and stored there controlled.
  • the deposition of particles 1 is again energy-minimized by impressing an energy pulse, such as an electro-acoustic pulse.
  • an energy pulse such as an electro-acoustic pulse.
  • a pulse generator 11 located at the pinhole 3 and the shaft of the pipette 4, a pulse generator 11, which may be a piezoelectric actuator or a piezoceramic crystal.
  • the detachment of the particles 1 from the pinhole 3 can also be effected by an (air) pressure pulse, but this is critical insofar as the particle 1 could be accelerated too much at too high a pressure pulse.
  • disturbing air turbulence at the storage location would result. A targeted storage of particles would not be possible then.
  • the pinhole 3 may consist of microtechnically structured silicon or glass and may be a pore or a pore array, as in Fig. 2 shown, so that the inclusion of a defined number of particles from the gas-solid-particle mixture 10 is ensured.
  • the diameter of the pore or the pores of the pore array depends on the size of the particles to be separated 1, whose diameter must be slightly larger than the diameter of the pore.
  • the pinhole 3 can be coated with an anti-adhesive layer, such as a carbon-fluorine compound.
  • the method according to the invention comprises the provision of a particle reservoir 2 located on a sample table 6 with the particles 1 to be separated in a gas atmosphere, such as air, inert gas or another carrier gas. Subsequently, a layer of a gas-solid particle mixture 10 over the particle supply 2 with the particles 1 to be separated by exciting the particle stock 2 by means of energy supply, such as mechanical vibrations, e.g. Ultrasonic vibrations generated by a vibrator 8, so that in the forming over the particle supply 2 gas-particulate mixture particles 10 particles 1 in chaotic motion and with high kinetic energy without binding to adjacent particles.
  • energy supply such as mechanical vibrations, e.g. Ultrasonic vibrations generated by a vibrator 8
  • the pipette 4 provided with a pinhole 3 at the exit is moved in the direction of the surface of the gas-solid particle mixture 10 and generates a series of negative pressure pulses, or negative pressure at the outlet of the pipette 4 until at least one particle 1 adheres to the pinhole 3.
  • the detection of adhering to the pipette 4 particles 1 can be done by optical detection.
  • the now adhering due to the negative pressure at the pinhole 3 at least one particle 1 is now transported via a designated storage location and replaced by generating a short-term energy pulse by means of the power generator 6 of the pinhole 3 of the pipette 4 and stored by the following gravitational support at the intended location.

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Description

Die Erfindung betrifft ein- Verfahren und eine Vorrichtung zur Vereinzelung und Handhabung von Partikeln aus einem Partikelvorrat, bestehend aus einem Probentisch mit dem Partikelvorrat und einer in x-y-z-Richtung verfahrbaren Pipette, wobei die Partikel eine Masse bis herab in den µg-Bereich und Korngrößen von unterhalb von 150 µm aufweisen.The invention relates to a method and a device for separating and handling particles from a particle supply, consisting of a sample table with the particle supply and a traversable in xyz direction pipette, wherein the particles have a mass down to the μg range and particle sizes of below 150 microns have.

Benötigt wird die Vereinzelung und Handhabung solcher Partikel beispielsweise bei der Hydratisierung von pulverisierten Substanzen, wobei Mengen unterschiedlicher Partikel im pg-Bereich zu mischen sind.The separation and handling of such particles is required, for example, in the hydration of pulverized substances, wherein quantities of different particles in the pg range are to be mixed.

Aus der DE 101 57 032 A1 ist ein Verfahren und eine Vorrichtung zum Sortieren von Partikeln aus einem Partikelgemisch bekannt geworden, bei dem das Partikelgemisch mit auszusortierenden Partikeln relativ zu einer Auffangeinrichtung bewegt wird. Zum Aussortieren spezifischer Partikel werden diese mit einer gepulsten elektromagnetischen Strahlung bestrahlt, wodurch Partikel, welche in einem festgelegten Wellenlängenbereich elektromagnetische Strahlung reflektieren und/oder absorbieren, eine Beschleunigung erhalten, so dass diese in die Auffangeinrichtung bewegt werden.From the DE 101 57 032 A1 For example, a method and a device for sorting particles from a particle mixture has become known, in which the particle mixture with particles to be sorted out is moved relative to a collecting device. For sorting specific particles, they are irradiated with pulsed electromagnetic radiation, whereby particles which reflect and / or absorb electromagnetic radiation in a defined wavelength range receive an acceleration, so that they are moved into the collecting device.

Weiterhin wird in der US 5 101 978 eine Vorrichtung zum Aussortieren von zwei oder mehr Materialien aus einer Suspension beschrieben. Auch hier wird ein Strom aufeinanderfolgender Partikel, wie rote und weiße Blutkörperchen, in einem Strömungskanal erzeugt und jeweils gleiche Partikel mit Hilfe einer Steuereinrichtung in einen von zwei Ausgabeports abgeleitet.Furthermore, in the US 5 101 978 a device for Sorting out two or more materials from a suspension. Here too, a stream of successive particles, such as red and white blood cells, is generated in a flow channel, and in each case identical particles are diverted into one of two output ports by means of a control device.

Diese Vorrichtungen sind aufwändig zu realisieren und für die Vereinzelung besonders kleiner und pulverisierter Partikel nicht geeignet.These devices are complex to implement and not suitable for the separation of particularly small and pulverized particles.

Der Erfindung liegt die Aufgabe zugrunde, die eingangs genannten Partikel aus einem Partikelvorrat zu entnehmen, zu transportieren und gezielt und mit hoher Genauigkeit auf einem Ablageort abzulegen.The invention has for its object to remove the aforementioned particles from a particle supply, transport and store targeted and with high accuracy on a storage location.

Gelöst wird die Aufgabe durch die kennzeichnenden Merkmale der unabhängigen Ansprüche.The problem is solved by the characterizing features of the independent claims.

Besondere Ausgestaltungen der Erfindung gehen aus den zugehörigen Unteransprüchen hervor.Particular embodiments of the invention will become apparent from the accompanying dependent claims.

Die erfindungsgemäße Vorrichtung besteht aus einem Probentisch mit einem Partikelvorrat aus Partikeln, der mit einem Schwingungserzeuger zur Zufuhr mechanischer Schwingungsenergie zur Ausbildung eines Gas-Feststoff-Partikelgemisches über dem Probentisch verbunden ist, wobei über dem Gas-Feststoff-Partikelgemisch eine in x-y-z-Richtung bewegbare Pipette mit einer Lochblende zur Aufnahme von Partikeln aus dem Gas-Feststoff-Partikelgemisch angeordnet ist, die mit einer Einrichtung zur Erzeugung eines Unterdrucks verbunden ist und wobei sich zwischen der Pipette und der Lochblende ein Impulserzeuger zur Erzeugung von elektro-akustischen Impulsen befindet.The device according to the invention consists of a sample table with a particle supply of particles, which is connected to a vibration generator for supplying mechanical vibration energy to form a gas-solid particle mixture over the sample table, wherein above the gas-solid-particle mixture in a xyz-direction movable pipette is arranged with a pinhole for receiving particles from the gas-solid-particle mixture, which is connected to a device for generating a negative pressure and wherein between the pipette and the pinhole a pulse generator for generating of electro-acoustic pulses is located.

Der Probentisch ist bevorzugt mit Motoren zur Erzeugung von Schwingungsenergie verbunden. Alternativ können stattdessen auch piezoelektrische Aktoren zur Erzeugung von Schwingungsenergie eingesetzt werden.The sample table is preferably connected to motors for generating vibration energy. Alternatively, it is also possible to use piezoelectric actuators for generating vibrational energy instead.

Um einen definierten Ort für die Erzeugung des Gas-Feststoff-Partikelgemisches zu schaffen, ist der Probentisch seitlich durch einen Rand umgrenzt.In order to create a defined location for the production of the gas-solid particle mixture, the sample table is bounded laterally by an edge.

In einer weiteren Ausgestaltung besteht die Lochblende aus mikrotechnisch strukturiertem Silizium oder Glas und ist mit einer Pore oder einem Porenarray versehen.In a further embodiment, the pinhole diaphragm consists of microtechnically structured silicon or glass and is provided with a pore or a pore array.

Um ein leichtes Ablösen erfasster Partikel von der Lochblende zur gewährleisten, ist diese mit einer Antihaftschicht beschichtet, die bevorzugt aus einer Kohlenstoff-Fluor-Verbindung besteht.In order to ensure easy detachment of detected particles from the pinhole, this is coated with an anti-adhesive layer, which preferably consists of a carbon-fluorine compound.

In Fortführung der Erfindung ist die Pipette zur Aufnahme von Partikeln aus dem Gas-Feststoff-Partikelgemisch und zum Transport und zur Ablage von Partikeln oder eines Partikelarrays in einer Zielposition, an einer Aufnahme einer x-y-z-Positioniervorrichtung befestigt.In continuation of the invention, the pipette for receiving particles from the gas-solid-particle mixture and for transporting and depositing particles or a particle array in a target position, is attached to a receptacle of an x-y-z positioning device.

Weiterhin befinden sich über dem Probentisch mit dem Partikelvorrat und dem darüber erzeugten Gas-Feststoff-Partikelgemisch eine Lichtschranke zum Nivellieren desselben sowie eine aktive optische Bilderkennungsvorrichtung.Furthermore, located above the sample table with the particle supply and the gas-solid-particle mixture generated thereupon, a light barrier for leveling thereof and an active optical image recognition device.

Das erfindungsgemäße Verfahren zur Vereinzelung und Handhabe von Partikeln aus einem Gas-Feststoff-Partikelgemisch ist gekennzeichnet durch folgende Schritte:

  • Ausbilden einer Schicht eines Gas-Feststoff-Partikelgemisches über einem Partikelvorrat mit den zu vereinzelnden Partikeln durch Anregen desselben mittels Schwingungen, so dass sich im Gas-Feststoff-Partikelgemisch Partikel in chaotischer Bewegung und hoher kinetischer Energie ohne Bindung zu benachbarten Partikeln aufhalten,
  • schrittweises Absenken einer mit einer Lochblende am Ausgang versehenen Pipette in Richtung zur Oberfläche des Gas-Feststoff-Partikelgemisches und Erzeugen eines Unterdruckes oder einer Folge von Unterdruckimpulsen am Ausgang der Pipette, bis mindestens ein Partikel an der Lochblende haftet,
  • Transportieren des infolge des Unterdrucks an der Pipette haftenden mindestens einen Partikels über einen vorgesehenen Ablageort, und
  • Ablösen des mindestens einen Partikels von der Lochblende der Pipette durch Erzeugen eines mechanischen Energieimpulses sowie schwerkraftbedingte Ablage des Partikels am Ablageort.
The inventive method for separating and handling of particles from a gas-solid-particle mixture is characterized by the following steps:
  • Forming a layer of a gas-solid particle mixture over a particle supply with the particles to be separated by exciting it by means of vibrations, so that in the gas-solid particle mixture particles in chaotic motion and high kinetic energy without binding to adjacent particles,
  • stepwise lowering a pipette provided with a pinhole at the exit in the direction of the surface of the gas-solid particle mixture and generating a negative pressure or a sequence of negative pressure pulses at the outlet of the pipette until at least one particle adheres to the pinhole,
  • Transporting the at least one particle adhering to the pipette as a result of the negative pressure via a designated storage location, and
  • Detachment of the at least one particle from the pinhole of the pipette by generating a mechanical energy pulse and gravity-induced deposition of the particle at the storage location.

In einer Fortbildung des erfindungsgemäßen Verfahrens wird die Pipette vertikal in Richtung zum Gas-Feststoff-Partikelgemisch bewegt und unter aktiver optischer Bilderkennung schrittweise in das Gas-Feststoff-Partikel-Gemisch hinein bewegt wird, bis an der Pipette das mindestens eine Partikel detektiert wird, woraufhin die Bewegung gestoppt wird.In a further development of the method according to the invention, the pipette is moved vertically in the direction of the gas-solid-particle mixture and is moved stepwise under active optical image recognition into the gas-solid-particle mixture, up to the pipette At least one particle is detected, whereupon the movement is stopped.

Die Erfindung wird nachfolgend an einem Ausführungsbeispiel näher erläutert. In den zugehörigen Zeichnungen zeigen:

Fig. 1:
eine schematische Übersichtsdarstellung der erfindungsgemäßen Vorrichtung zur Vereinzelung und Handhabung von Partikeln aus einem Partikelvorrat; und
Fig. 2:
eine vergrößerte Unteransicht einer Lochblende zur Entnahme von Partikeln aus einem Gas-Feststoff-Partikelgemisch.
The invention will be explained in more detail using an exemplary embodiment. In the accompanying drawings show:
Fig. 1:
a schematic overview of the device according to the invention for the separation and handling of particles from a particle supply; and
Fig. 2:
an enlarged bottom view of a pinhole for removing particles from a gas-solid-particle mixture.

Die Vorrichtung zur Aufnahme von Partikeln 1 aus einem Partikelvorrat 2 nach Fig. 1 besteht aus einer Lochblende 3 mit mindestens einem Loch am Ausgang einer Pipette 4, die an einer Aufnahme 5 einer nicht dargestellten x-y-z - Positioniervorrichtung befestigt ist. Damit kann die Lochblende 3 mit der Pipette 4 relativ zum Partikelvorrat 2 frei bewegt werden. Der Partikelvorrat 2 befindet sich auf einem Probentisch 6, der seitlich durch einen Rand 7 begrenzt ist. Der Probentisch 6 ist mit einem Schwingungserzeuger 8 gekoppelt, um den Probentisch 6 in Schwingungen versetzen zu können, um über dem Partikelvorrat 2 ein Gas-Feststoff-Partikelgemisch 10, bestehend aus einer Vielzahl von Partikeln 1, zu erzeugen. Zusätzlich kann der Probentisch 6 über eine Heizung verfügen, um einen ausreichend trockenen Partikelvorrat 2 bereitstellen zu können und um die Adhäsion/Kohäsion der Partikel 1 im Gas-Feststoff-Partikelgemisch 10 zu minimieren.The device for receiving particles 1 from a particle supply 2 according to Fig. 1 consists of a pinhole 3 with at least one hole at the exit of a pipette 4, which is attached to a receptacle 5 of an xyz positioning device, not shown. Thus, the pinhole 3 can be moved freely with the pipette 4 relative to the particle supply 2. The particle supply 2 is located on a sample table 6, which is bounded laterally by an edge 7. The sample table 6 is coupled to a vibration generator 8 in order to enable the sample table 6 to vibrate in order to produce a gas-solid-particle mixture 10, consisting of a plurality of particles 1, above the particle supply 2. In addition, the sample stage 6 can have a heater in order to be able to provide a sufficiently dry particle supply 2 and to minimize the adhesion / cohesion of the particles 1 in the gas-solid-particle mixture 10.

Die Lochblende 3 ist mit einem Vakuumanschluss 9 verbunden, um durch Unterdruck, Vakuum, oder Vakuumimpulse eine geeignete Haltekraft erzeugen zu können, so dass Partikel 1 aus einem Gas-Feststoff-Partikelgemisch 10 über dem Partikelvorrat 2 an der Lochblende 3 angesaugt werden können.The perforated plate 3 is connected to a vacuum connection 9 in order to be able to generate a suitable holding force by means of negative pressure, vacuum or vacuum pulses, so that particles 1 can be sucked from the gas-solid particle mixture 10 over the particle supply 2 at the pinhole 3.

Zur Erzeugung des Gas-Feststoff-Partikelgemisches 10 wird dem Probentisch 6 über den Schwingungserzeuger 8 Energie, wie Schwingungsenergie, zugeführt, so dass sich die Partikel 1 im Partikelvorrat zu bewegen beginnen und verlassen diesen bei ausreichender Energieversorgung nach oben. Dadurch bildet sich über dem Partikelvorrat 2 ein chaotisches Gas-Feststoff-Partikelgemisch 10 aus, in dem sich die Partikel chaotisch mit hoher kinetischer Energie ohne Bindung zu benachbarten Partikeln bewegen.To generate the gas-solid particle mixture 10, energy is supplied to the sample table 6 via the vibration generator 8, such as vibration energy, so that the particles 1 begin to move in the particle supply and leave it with sufficient energy supply. As a result, a chaotic gas-solid-particle mixture 10 forms above the particle reservoir 2, in which the particles move chaotically with high kinetic energy without binding to adjacent particles.

Voraussetzung hierfür ist, dass die erzeugten Schwingungen, beispielsweise Ultraschallschwingungen, hauptsächlich entgegen der Schwerkraft gerichtet sind. Die dem Partikelvorrat 2 auf dem Probentisch 6 zugeführte Energie kann auch durch Motoren oder durch piezoelektrische Aktoren erzeugt werden.The prerequisite for this is that the vibrations generated, such as ultrasonic vibrations, are mainly directed against gravity. The energy supplied to the particle supply 2 on the sample table 6 can also be generated by motors or by piezoelectric actuators.

In dem Gas-Feststoff-Partikelgemisch 10 halten sich Partikel 1 in chaotischer Bewegung und hoher kinetischer Energie auf, so dass die Partikel 1 keine Bindungen zu benachbarten Partikeln 1 aufbauen können. Erst dadurch besteht die Möglichkeit, Partikel 1 mit der Lochblende 3 mit kleinstmöglichem Energieaufwand aufnehmen zu können. Die Formulierung "kleinstmöglicher Energieaufwand" bedeutet, dass die Haltekraft gleich, oder nahezu gleich der Gewichtskraft des Partikels 1 ist.In the gas-solid-particle mixture 10, particles 1 hold in chaotic motion and high kinetic energy, so that the particles 1 can not build up bonds to adjacent particles 1. Only then is it possible to be able to absorb particles 1 with the pinhole 3 with the smallest possible expenditure of energy. The phrase "lowest possible energy expenditure" means that the holding force is equal to, or nearly equal to, the weight of the particle 1.

Die Aufnahme von Partikeln 1 erfolgt durch Fokussieren eines Energieimpulses an der Lochblende 3, in Form eines Unterdruckimpulses, oder einer Folge von Unterdruckimpulsen, bis mindestens ein Partikel 1 an der Lochblende 3 haftet. Partikel 1 mit einem Durchmesser, die kleiner sind als der Durchmesser der Öffnung in der Lochblende 3, werden durch die Lochblende 3 abgesaugt und in einen nicht dargestellten Partikelabscheider ausgesondert.The inclusion of particles 1 takes place by focusing an energy pulse at the pinhole 3, in the form of a vacuum pulse, or a series of negative pressure pulses until at least one particle 1 adheres to the pinhole 3. Particles 1 with a diameter that are smaller than the diameter of the opening in the pinhole 3, are sucked through the pinhole 3 and separated out into a particle separator, not shown.

Um ein schnelleres Aufnehmen von Partikeln 1 zu erreichen, befindet sich in einem vorgegebenen Abstand über dem Probentisch 6 mit dem Partikelvorrat 2 eine Lichtschranke 12, die gemeinsam mit dem Schwingungserzeuger 8 zum Nivellieren des über dem Probentisch 6 erzeugten Gas-Feststoff-Partikelgemisches 10 eingesetzt wird. Das kann grundsätzliche durch einen einfachen Regelkreis erfolgen, der einerseits zunächst die Schwingungsenergie des Schwingungserzeugers 8 soweit erhöht, bis die Lichtschranke 12 das Vorhandensein von Partikeln 1 über dem Partikelvorrat 2 detektiert, woraufhin mittels des Regelkreises der weitere Anstieg der Schwingungsenergie gestoppt wird. Für den Fall, dass die Lichtschranke 12 eine Partikelzunahme über einen vorgegebenen Wert registriert, d.h. eine stärkere Dämpfung des ausgestrahlten Lichtes, dann wird der Regelkreis die Schwingungsenergie des Schwingungserzeugers 8 reduzieren, bis der gewünschte Sollwert der Dämpfung wieder erreicht ist.In order to achieve a faster absorption of particles 1, located at a predetermined distance above the sample table 6 with the particle supply 2, a light barrier 12, which is used together with the vibration generator 8 for leveling the gas-solid particle mixture 10 generated above the sample table 6 , This can basically be done by a simple control loop, on the one hand, the vibration energy of the vibrator 8 increases until the photocell 12 detects the presence of particles 1 on the particle supply 2, whereupon the further increase of the vibration energy is stopped by the control loop. In the event that the light barrier 12 registers a particle increase over a predetermined value, i. a greater attenuation of the emitted light, then the control circuit will reduce the vibrational energy of the vibrator 8 until the desired target value of the attenuation is reached again.

Die Aufnahme von Partikeln 1 mit der Pipette 4 kann nun wie vorstehend beschrieben, erfolgen, indem die Pipette 4 soweit in Richtung zum Gas-Feststoff-Partikelgemisch 10 abgesenkt wird, bis die Aufnahme eines Partikels 1 beispielsweise mit Hilfe einer aktiven optischen Bilderkennungsvorrichtung (nicht dargestellt) detektiert wird.The inclusion of particles 1 with the pipette 4 can now be carried out as described above by the pipette 4 is lowered so far in the direction of the gas-solid-particle mixture 10 until the inclusion of a particle 1, for example, with Help an active optical image recognition device (not shown) is detected.

Der mindestens eine Partikel 1 kann dann mit Hilfe der x-y-z - Positioniervorrichtung zu einem vorgesehenen Ablageort transportiert und dort kontrolliert abgelegt werden.The at least one particle 1 can then be transported with the aid of the x-y-z - positioning to a designated storage location and stored there controlled.

Das Ablegen von Partikeln 1 erfolgt wiederum energieminimiert durch Aufprägen eines Energieimpulses, beispielsweise eines elektro-akustischen Impulses. Zu diesem Zweck befindet sich an der Lochblende 3 bzw. am Schaft der Pipette 4 ein Impulserzeuger 11, der ein Piezoaktor bzw. ein piezokeramischer Kristall sein kann.The deposition of particles 1 is again energy-minimized by impressing an energy pulse, such as an electro-acoustic pulse. For this purpose, located at the pinhole 3 and the shaft of the pipette 4, a pulse generator 11, which may be a piezoelectric actuator or a piezoceramic crystal.

Grundsätzlich kann das Ablösen der Partikel 1 von der Lochblende 3 auch durch einen (Luft-)Druckimpuls bewirkt werden, was jedoch insofern kritisch ist, da der Partikel 1 bei einem zu starken Druckimpuls zu stark beschleunigt werden könnte. Außerdem wären störende Luftwirbel am Ablageort die Folge. Eine gezielte Ablage von Partikeln wäre dann nicht möglich.In principle, the detachment of the particles 1 from the pinhole 3 can also be effected by an (air) pressure pulse, but this is critical insofar as the particle 1 could be accelerated too much at too high a pressure pulse. In addition, disturbing air turbulence at the storage location would result. A targeted storage of particles would not be possible then.

Die Lochblende 3 kann aus mikrotechnisch strukturiertem Silizium oder Glas bestehen und kann eine Pore oder ein Porenarray, wie in Fig. 2 dargestellt, aufweisen, so dass die Aufnahme einer definierten Anzahl von Partikeln aus dem Gas-Feststoff-Partikelgemisch 10 sichergestellt ist. Der Durchmesser der Pore bzw. der Poren des Porenarrays richtet sich nach der Größe der zu vereinzelnden Partikel 1, deren Durchmesser etwas größer sein muss, als der Durchmesser der Pore.The pinhole 3 may consist of microtechnically structured silicon or glass and may be a pore or a pore array, as in Fig. 2 shown, so that the inclusion of a defined number of particles from the gas-solid-particle mixture 10 is ensured. The diameter of the pore or the pores of the pore array depends on the size of the particles to be separated 1, whose diameter must be slightly larger than the diameter of the pore.

Um eine geringstmögliche Haltekraft für die Partikel 1 zu erreichen, kann die Lochblende 3 mit einer Antihaftschicht, beispielsweise einer Kohlenstoff-Fluor-Verbindung, beschichtet werden.To a lowest possible holding force for the particles 1 to reach, the pinhole 3 can be coated with an anti-adhesive layer, such as a carbon-fluorine compound.

Das erfindungsgemäße Verfahren umfasst das Bereitstellen eines auf einem Probentisch 6 befindlichen Partikelvorrates 2 mit den zu vereinzelnden Partikeln 1 in einer Gasatmosphäre, wie Luft, Inertgas oder einem anderen Trägergas. Anschließend wird eine Schicht eines Gas-Feststoff-Partikelgemisches 10 über dem Partikelvorrat 2 mit den zu vereinzelnden Partikeln 1 durch Anregen des Partikelvorrates 2 mittels Energiezufuhr, wie mechanische Schwingungen, z.B. Ultraschallschwingungen durch einen Schwingungserzeuger 8, erzeugt, so dass sich in dem über dem Partikelvorrat 2 ausbildenden Gas-Feststoff-Partikelgemisch 10 Partikel 1 in chaotischer Bewegung und mit hoher kinetischer Energie ohne Bindung zu benachbarten Partikeln aufhalten.The method according to the invention comprises the provision of a particle reservoir 2 located on a sample table 6 with the particles 1 to be separated in a gas atmosphere, such as air, inert gas or another carrier gas. Subsequently, a layer of a gas-solid particle mixture 10 over the particle supply 2 with the particles 1 to be separated by exciting the particle stock 2 by means of energy supply, such as mechanical vibrations, e.g. Ultrasonic vibrations generated by a vibrator 8, so that in the forming over the particle supply 2 gas-particulate mixture particles 10 particles 1 in chaotic motion and with high kinetic energy without binding to adjacent particles.

Von Vorteil ist hierbei die vorstehend beschriebene Nivellierung des Gas-Feststoff-Partikelgemisches 10 mit Hilfe einer Lichtschranke einzusetzen, um ein in etwa gleich bleibendes Niveau der Obergrenze der aufgewirbelten Partikel 1 sicherzustellen.It is advantageous in this case to use the above-described leveling of the gas-solid particle mixture 10 with the aid of a light barrier in order to ensure an approximately constant level of the upper limit of the fluidized-up particles 1.

Anschließend wird die mit einer Lochblende 3 am Ausgang versehene Pipette 4 in Richtung zur Oberfläche des Gas-Feststoff-Partikelgemisches 10 bewegt und eine Folge von Unterdruckimpulsen, oder Unterdruck am Ausgang der Pipette 4 erzeugt, bis mindestens ein Partikel 1 an der Lochblende 3 haftet. Die Feststellung von an der Pipette 4 anhaftenden Partikeln 1 kann durch optische Detektion erfolgen.Subsequently, the pipette 4 provided with a pinhole 3 at the exit is moved in the direction of the surface of the gas-solid particle mixture 10 and generates a series of negative pressure pulses, or negative pressure at the outlet of the pipette 4 until at least one particle 1 adheres to the pinhole 3. The detection of adhering to the pipette 4 particles 1 can be done by optical detection.

Das nun infolge des Unterdrucks an der Lochblende 3 haftende mindestens eine Partikel 1 wird nun über einen vorgesehenen Ablageort transportiert und durch Erzeugen eines kurzfristigen Energieimpulses mittels des Energieerzeugers 6 von der Lochblende 3 der Pipette 4 abgelöst und nach folgend schwerkraftunterstützt am vorgesehenen Ablageort abgelegt.The now adhering due to the negative pressure at the pinhole 3 at least one particle 1 is now transported via a designated storage location and replaced by generating a short-term energy pulse by means of the power generator 6 of the pinhole 3 of the pipette 4 and stored by the following gravitational support at the intended location.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

11
Partikelparticle
22
Partikelvorratparticles stock
33
Lochblendepinhole
44
Pipettepipette
55
Aufnahme für x-y-z-PositioniervorrichtungShooting for x-y-z positioning device
66
Probentischsample table
77
Randedge
88th
Schwingungserzeugervibrator
99
Vakuumanschlussvacuum connection
1010
Gas-Feststoff-PartikelgemischGas-solid particle mixture
1111
Impulserzeugerpulse generator
1212
Lichtschrankephotocell

Claims (12)

  1. Device for separating and handling particles from a particle supply, consisting of a sample table with the particle supply and a pipette that can be moved in the x-y-z direction, the particles having a mass down into the µg range and grain sizes of below 150 µm, characterized in that the sample table (6) is connected to a vibration generator (8) for supplying mechanical vibrational energy for the forming of a gas-solid particle mixture (10) over the sample table, in that a pipette (4) with a perforated orifice plate (3) for receiving particles (1) from the gas-solid particle mixture (10) is arranged over the gas-solid particle mixture (10) and is connected to a device for generating a negative pressure, and in that between the pipette (4) and the perforated orifice plate (3) there is a pulse generator (11) for generating electro-acoustic pulses.
  2. Device according to Claim 1, characterized in that the sample table (6) is connected to motors for generating vibrational energy.
  3. Device according to Claim 1, characterized in that the sample table (6) is connected to piezoelectric actuators for generating vibrational energy.
  4. Device according to Claim 1, characterized in that the sample table (6) is laterally surrounded by a border (7) .
  5. Device according to Claim 1, characterized in that the perforated orifice plate (3) consists of microtechnically structured silicon or glass.
  6. Device according to Claim 5, characterized in that the perforated orifice plate (3) comprises a pore or an array of pores.
  7. Device according to Claims 5 and 6, characterized in that the perforated orifice plate (3) is coated with a nonstick layer.
  8. Device according to Claim 7, characterized in that the nonstick layer consists of a carbon-fluorine compound.
  9. Device according to one of Claims 1 to 8, characterized in that the pipette (4) is fastened on a receptor (5) of an x-y-z robot for receiving particles (1) from the gas-solid particle mixture (10) and for transporting and depositing particles (1) or an array of particles in a target position.
  10. Device according to one of Claims 1 to 9, characterized in that arranged over the sample table (6) with the particle supply (2) are a light barrier (12), for levelling the same, and also an active optical image recognition device.
  11. Method for separating and handling particles from a gas-solid particle mixture, characterized by
    - forming a layer of a gas-solid particle mixture (10) over a particle supply (2) with the particles (1) to be separated by exciting the same by means of vibrations, so that particles (1) are kept in chaotic motion and at a high level of kinetic energy, without bonding to neighbouring particles (1), over the gas-solid particle mixture (10),
    - gradually lowering a pipette (4), provided with a perforated orifice plate (3) at the outlet, in the direction of the surface of the fluidized gas-solid particle mixture (10) and generating a negative pressure or a sequence of negative pressure pulses at the outlet of the pipette (4), until at least one particle (1) attaches itself to the perforated orifice plate (3),
    - transporting the at least one particle (1) attached to the pipette (4) as a result of the negative pressure over an intended depositing location, and
    - releasing the at least one particle (1) from the perforated orifice plate (3) of the pipette (4) by generating an energy pulse and depositing the particle (10) by gravitational force at the depositing location.
  12. Method according to Claim 11, characterized in that the pipette (4) is moved vertically in the direction of the fluidized gas-solid particle mixture (10) and is gradually moved into the fluidized gas-particle mixture (10), with the optical image recognition active, until the at least one particle (1) is detected at the pipette (4), whereupon the movement is stopped.
EP18154848.8A 2017-03-24 2018-02-02 Method and device for separating and handling of particles from a particle supply Active EP3378574B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102017106417 2017-03-24

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EP3378574B1 true EP3378574B1 (en) 2019-10-02

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Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012145850A1 (en) * 2011-04-28 2012-11-01 Qualysense Ag Sorting apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

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