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EP2893331B1 - Vorrichtung und verfahren zur kombinierten konfokalen röntgenfluoreszenz und röntgen-computertomographie - Google Patents

Vorrichtung und verfahren zur kombinierten konfokalen röntgenfluoreszenz und röntgen-computertomographie Download PDF

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EP2893331B1
EP2893331B1 EP13763415.0A EP13763415A EP2893331B1 EP 2893331 B1 EP2893331 B1 EP 2893331B1 EP 13763415 A EP13763415 A EP 13763415A EP 2893331 B1 EP2893331 B1 EP 2893331B1
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ray
xrf
sample
subsystem
interest
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EP2893331A1 (de
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Michael Feser
Srivatsan Seshadri
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Carl Zeiss X Ray Microscopy Inc
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Carl Zeiss X Ray Microscopy Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/24—Earth materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/419—Imaging computed tomograph

Definitions

  • CT computed tomography
  • 3-D three-dimensional spatial resolution down to and exceeding one micrometer
  • These systems are widely used for research and find increasing use in industrial applications. See [Scott_2004]-Scott, David et al, A Novel X-ray Micro tomography System with High Resolution and Throughput For Non-Destructive 3D Imaging of Advanced Packages, ISTFA 2004: 30th International Symposium for Testing and Failure Analysis; Boston, MA; USA; 14-18 Nov. 2004, 94-98; and [Stock_2008]-Stock, S. R, Recent advances in X-ray microtomography applied to materials, Int. Mater Rev, 1008, 53, 129-181 .
  • X-ray CT scanning systems generate three-dimensional tomographic volumes of the samples from a series of projections at different angles. Projections are also referred to as 2-D projection images, or projection data.
  • the tomographic volumes are generated from the projection data using software reconstruction algorithms based on back-projection and other image processing techniques to reveal and analyze features within the samples.
  • X-ray CT has a long track record in integrated circuit (IC) failure analysis. More recently, CT is being used in oil and gas rock analysis to determine porosity and model flow characteristics [Ingrain Digital Rock Physics]. This application has been added to its list of industrial applications.
  • rapid adoption of high-resolution CT for mining applications is occurring starting with research institutions ([Miller_2009]- Miller, J. D et. al, Liberation-limited grade/recovery curves from X-ray micro CT analysis of feed material for the evaluation of separation efficiency, Int. J. Miner. Process, 2009, 93, 48-53 ) and has found its way into industrial laboratories with initial focus on tailings analysis for floatation.
  • Tailings from mining operations are materials left over from processing after most of the valuable minerals have been extracted.
  • the tailings particles are very small in size - the sizes are of the order of a micrometer to about 100 micrometers ( ⁇ m) or less for platinum and gold operations and can reach down to about a micrometer.
  • Platinum bulk concentrations in tailings are only on the order of 0.5 parts per million (ppm) currently (compared to a few ppms for the raw ore). While the bulk concentrations are very small, the precious metals are not distributed uniformly in the tailings. In fact, they are found in micron sized grains highly localized in space.
  • MLA Mineral Liberation Analyzer
  • the tailings particles are dispersed and fixed in epoxy such that they are physically separated from each other. These samples are then cut and polished for study under the SEM.
  • a back scattered electron (BSE) image of the surface is acquired with high spatial resolution.
  • the signal acquired in the BSE image is proportional to the density and atomic number of the minerals contained in these particles; and the images are depicted with different shades of grey.
  • BSE back scattered electron
  • High resolution x-ray CT technology has the potential to overcome all of the problems inherent to MLA mentioned above.
  • the CT technique enables the sampling of a relatively large 3-D volume in a matter of a few hours to locate minerals of interest, such as platinum grains. This enables collection of statistically relevant data with a very short turnaround time allowing for the design of experiments.
  • isotropic information content of x-ray CT true 3-D data of individual particles are collected to completely describe the liberation state of the platinum grains and grain association, which is important for understanding the root cause of yield.
  • x-ray CT technology provides non-destructive imaging of samples at arbitrary depth within the sample
  • operators can utilize the x-ray CT to generate projection images at different depths within the sample, and combine the images into a 3-D volume.
  • the 3-D volume information generated is also known as a CT volume dataset.
  • x-ray CT systems preferably enable the selection of two-dimensional, cross-sectional "slices" within the three-dimensional tomographic volume data sets via software tools. These tools typically allow an operator to select a synthetic or tomographic slice at an arbitrary angle within the volume datasets for analyzing information within the sample. This also provides the ability to locate features within the sample at an arbitrary depth, all while leaving the sample intact.
  • X-Ray Fluorescence is a very popular and well-established characterization technique for determining the elemental composition of samples.
  • Sasov describes in " A compact MicroCT / MicroXRF scanner for non-destructive 3D chemical analysis", proceedings of SPIE 2008 a compact laboratory dual modality scanner for non-destructive three-dimensional volumetric analysis of local chemical composition, enhanced by morphological information.
  • the microXRF scanner includes a full-field acquisition system and two x-ray sources are running to get symmetrical excitation on the object.
  • Boone et al describe in "3D Petrography of a Cu-Ba Mineralization by Combining ⁇ CT and ⁇ XRF" a 3D analysis software that combines 3D ⁇ CT data with ⁇ XRF mappings providing chemical information of the surface of the scanned sample.
  • High resolution 3-D x-ray CT has become a widespread imaging modality across many disciplines including materials science, biology, geology, and semiconductors, to name a few.
  • the main shortcoming of x-ray CT is that it produces only "grey scale" images where the intensity of a feature in the image is a proxy for the local mass density (away from x-ray absorption edges).
  • x-ray CT is combined with confocal XRF to provide a more complete characterization and understanding of a sample.
  • the detection of 3-D distribution of structures inside the sample is coupled with elemental composition analysis of those structures.
  • the present invention includes integration of a confocal XRF system into an x-ray CT system as a correlative microscopy solution (CT/XRF).
  • CT/XRF system has an x-ray CT subsystem, or CT subsystem, and a Confocal XRF subsystem, or CXRF subsystem.
  • CT subsystem is acquiring information from the sample
  • CXRF subsystem is acquiring information from the sample
  • the CT/XRF system is said to be running in XRF mode.
  • the CXRF subsystem After performing x-ray CT 3-D imaging of a sample into a CT volume dataset, the CXRF subsystem is in accordance with the present invention, used to scan only a limited number of points or small areas predetermined from the structural information of the volume dataset.
  • a controller of the CT/CXRF system manages the acquisition of volume information from the CT subsystem and the acquisition of elemental composition information from the CXRF subsystem.
  • the CT/CXRF technology of the invention can deliver results similar to MLA.
  • the data obtained by the invention can be positively correlated with MLA results, using the elemental composition information that the invention provides for selected grains of interest within a sample.
  • the ability of a combined CT/CXRF instrument to probe deeper layers within a sample provides a clear advantage over MLA, which is by nature a surface technology.
  • the invention does not require the complex preparation of polished sections of the sample that is typical of MLA systems.
  • the CT/CXRF technology of the invention provides non-destructive sample analysis.
  • the ability to identify and precisely locate features such as metal grains with respect to the boundary of the particles in 3D demonstrates superiority of this technique over MLA.
  • the system and method can provide for 3D contextual information that can be used to determine the liberation state of the elements of the grains. This greatly improves extraction yields over MLA, because the inherently 2D technique that MLA provides has been shown to overestimate the mineral recovery [Miller_2009].
  • the invention features an x-ray computed tomography (CT)/ x-ray fluorescence (CXRF) system.
  • This system comprises an x-ray CT subsystem for acquisition of volume information and a confocal XRF subsystem for acquisition of elemental composition information.
  • a controller in communication with the x-ray CT subsystem and the XRF subsystem manages the acquisition by the x-ray CT subsystem and the XRF subsystem.
  • the controller provides spatial calibration of the confocal XRF subsystem based on the volume information received from the x-ray CT subsystem.
  • the controller combines the volume information from the x-ray CT subsystem with the elemental composition information from the confocal XRF subsystem to verify a liberation state of elements within the sample.
  • the controller selects a limited number of points or small areas predetermined from the volume information for the acquisition of the elemental composition information by the XRF subsystem.
  • the controller preferably performs correlation between the volume information and the elemental composition information to provide elemental contrast of the sample as a function of depth. In response to the correlation, the controller generates elemental distribution maps as a function of position within the sample.
  • the controller generates an interactive graphic, which enables the identification and selection of a feature of interest within the volume information acquired by the x-ray CT subsystem.
  • the controller also defines a region of interest that includes the feature of interest.
  • the region of interest is used to translate the feature of interest from x-ray CT subsystem coordinates to XRF subsystem coordinates.
  • the controller accesses the region of interest with the XRF subsystem for the acquisition of the elemental composition information.
  • the controller generates a coordinate transfer function that translates between x-ray CT subsystem coordinates and confocal XRF subsystem coordinates.
  • the controller generates the coordinate transfer function to account for differences in resolution, for example, between the x-ray CT subsystem and the confocal XRF subsystem.
  • the controller generates the coordinate transfer function for translating selected features of interest from the volume information of the x-ray CT subsystem into a region of interest for acquisition of the elemental composition information by the XRF subsystem.
  • the XRF subsystem positions the region of interest at a confocal probing spot of the XRF subsystem by referencing the coordinate transfer function.
  • the controller corrects the elemental composition information acquired by the confocal XRF subsystem using absorption information of the volume information acquired by the x-ray CT subsystem.
  • the absorption information is associated with voxel intensities of the volume information.
  • the controller can compare the elemental composition information acquired by the confocal XRF subsystem against reference elemental information to identify elements in the sample.
  • the reference elemental information is typically included within a database that communicates with the controller.
  • the confocal XRF subsystem selectively probes a region of interest of the volume information at a sub-micrometer spatial resolution for the acquisition of the elemental composition information.
  • the present invention provides as well a method for analyzing a sample using x-ray computed tomography and confocal x-ray fluorescence according to claim 11.
  • 3-D images delivered by x-ray CT include a cubic array of voxels with "average” attenuation values. These values are represented by "grey levels”. The differences in grey levels, or voxel intensities, correspond to differences in attenuation and are representative of the material that caused this attenuation. A histogram of these grey level values allows one to analyze and determine the various materials and their phases present in the image, provided the grey levels are suitably calibrated. These grey levels are often sufficient for many applications such as IC failure analysis or porosity analysis for oil and gas rock analysis.
  • ambiguities arise due to so-called grey-scale overlaps. These occur if materials with different elemental composition exhibit very similar or same grey levels in the x-ray CT data. For example, if a small high-density grain is found in a tailings sample, it is generally not possible to positively identify this grain as a platinum compound compared to some other high-density compounds (e.g. lead, palladium, etc.). Several hundred known platinum compounds can be present with varying density (and grey scale values) in addition to countless other high-density compounds composed of other elements, making elemental identification extremely important.
  • the system and method here enables the probing of a grain for elemental composition analysis to give a positive identification to the element and further enables the narrowing of the precise compound. Additionally, in biological applications, the availability of trace-element sensitive spatially resolved probing is useful for toxicological studies to directly put structural changes in context with the presence of toxins.
  • One of the proposed solutions to some of the problems with the current technology is to complement the x-ray CT scanner with a confocal XRF setup that is able to selectively probe points or small volumes of the x-ray CT volume at a spatial resolution of less than ⁇ (100 um) 3 and preferably less than ⁇ (50 um) 3 , and in some cases less than ⁇ (20 um) 3 with ppm level sensitivity.
  • confocal XRF The ppm sensitivity on bulk homogeneous samples is achieved with confocal XRF.
  • confocal XRF For highly complex and heterogeneous samples as well as samples with very small bulk concentrations where elements to be detected are highly concentrated in very small volumes and localized in space (such as in tailings samples in mining industry), confocal XRF has significant advantages over conventional XRF due to its ability to define the volume of interest to be probed. Confocal XRF also allows for significantly improved signal to background ratios to efficiently detect localized concentrations of elements in thick samples.
  • the coupling of high resolution x-ray CT with confocal XRF helps mitigate and overcome the inherent limitations of the confocal XRF technique on sample sizes.
  • the coupling overcomes such limitations as limited x-ray penetration into samples and absorption of emergent fluorescence x-rays in the sample. This is because for high resolution x-ray tomography, sample sizes are typically of the order of 1-2 mm.
  • Mo and Ag sources are, in some embodiments, used with polycapillary optics optimized for MoK ⁇ ( ⁇ 17.5 kilo electron volts (KeV)) and AgK ⁇ ( ⁇ 22.2 KeV) radiation, for which the penetration depths inside tailings samples are of the order of ⁇ 2 millimeters (mm).
  • MoK ⁇ ⁇ 17.5 kilo electron volts
  • AgK ⁇ ⁇ 22.2 KeV
  • platinum L ⁇ lines ⁇ 9.4 KeV
  • about 10% transmission is expected over ⁇ 1 mm which corresponds to a total sample thickness that can be used of ⁇ 2 mm (penetration of L x-rays are even larger). Higher transmission is expected for other L lines such as L ⁇ and L ⁇ x-ray lines.
  • Fig. 1A shows an example of the integrated x-ray CT/XRF system 10 in CT mode, which has been constructed according to the principles of the present invention.
  • This integrated system 10 includes an x-ray CT subsystem 100, or CT subsystem, and a confocal x-ray fluorescence subsystem 102, or CXRF subsystem.
  • the integrated system 10 also includes a controller 128 that manages various parts of the x-ray CT subsystem 100 and the confocal x-ray fluorescence subsystem 102.
  • the controller 128 receives data from these subsystems 100/102. Based on the data received, the controller 128 manages how these subsystems 100/102 operate accordingly and their operations coordinated.
  • the controller 128 also includes an interactive graphic 170.
  • the interactive graphic 170 provides interactive operator selection of features of interest 120 from the acquired volume information 150 of the sample 104, and presents the selection and display via display device 136. More detail on the controller 128 and its other components accompanies the descriptions for Fig 4 and Fig 8 , herein below.
  • These subsystems 100/102 are used together to determine the mineral content of a sample 104. Examples of samples 104 include mineral samples such as sandstone, bituminous sand, ore, and coal or samples containing precious metals or fluids, such as water or crude oil.
  • the sample 104 is held within a sample tube 110.
  • This sample tube 110 is a glass or plastic test tube, for example.
  • the size of the sample is about 1-4 mm in diameter and ⁇ 2-20 mm in height.
  • the sample is a flat sample that is placed, or in a sample container other than the sample tube.
  • the sample has a different configuration such as cubic or spherical.
  • x, y, z sample stage 112 has the capability to position different regions of the flat face of the samples in the x-ray beams.
  • the sample tube 110 is mounted on an x, y, z sample stage 112 that allows for the positioning of the sample 104 in the beam 107 generated by the x-ray source 106.
  • the x, y, z sample stage 112 comprises three orthogonal motorized positioning arms that allow for the positioning of the sample 104 along each of the three orthogonal dimensions under the control of the controller 128.
  • the x, y, z sample stage 112 has an integrated rotation stage 114 preferably attached underneath the x, y, z sample stage 112.
  • the integrated rotation stage 114 enables the x, y, z sample stage 112 to rotate through 360 degrees around the vertical (z) axis. This allows the x, y, z sample stage to be rotated along with the sample tube 110 and sample 104 to any desired angle ( ⁇ ) with respect to the x-ray CT subsystem 100 and/or confocal x-ray fluorescence subsystem 102.
  • the rotation stage 114 is preferably a precision rotary stage such as an air bearing stage or a mechanical ball-bearing or roller bearing stage.
  • the x-ray CT subsystem 100 includes an x-ray source 106 that generates the x-ray radiation beam 107.
  • the x-ray source 106 is preferably a laboratory based source such as a sealed tube, rotating-anode, or micro-focus x-ray source.
  • the x-ray source is a transmission x-ray micro-focus source with a source size of about 2 ⁇ m or less operated up to a maximum power of 10 Watts.
  • the small spot size or source size allows for high resolution imaging.
  • Use of a transmission source allows for a favorable imaging geometry by shortening the distance between the source and a detector enabling high throughput.
  • a high-energy x-ray radiation beam is selected with energy above several keV for the x-ray source 106. This is typically required to penetrate samples with tens of micrometers or greater thickness. Higher energy radiation of tens of keV is used when the sample is usually about a millimeter or greater in thickness. Generally, the range is 5-150 keV.
  • the x-ray source has a tungsten target.
  • the x-ray CT subsystem 100 also includes a spatially resolved transmission detector 108.
  • the detector 108 is a scintillated CCD detector with optical magnification as described in U.S. Pat. No. 7,057,187 B1 .
  • the spatially resolved detector 108 records x-ray radiation 107 that passes through the sample 104.
  • the spatially resolved detector 108 includes a scintillator, a charge-coupled device (CCD) camera, and a lens or lens system for imaging visible light from the scintillator onto the CCD camera.
  • CCD charge-coupled device
  • the x-ray CT subsystem 100 performs sub-micrometer spatial resolution 3-D imaging of the sample 104.
  • the x-ray source 106 emits x-rays 107 that penetrate the sample 104. Then, the x-rays 107 are detected and recorded by the spatially resolved detector 108.
  • the generated images are passed from the spatially resolved detector 108 to the controller 128.
  • the controller 128 operates the x-ray source 106 and the spatially resolved detector 108 to generate a series of projections 156 of the sample 104.
  • the controller 128 also operates the rotation stage 114. In between projections 156, the controller 128 advances the rotation stage 114 through a predetermined arc. Once enough projections 156 have been generated at different values for ⁇ , the controller 128 combines the images or projections 156 into a 3-D tomographic image of the sample 104.
  • the sample is rotated through 360 degrees during the scan. In another embodiment, the angular range for scanning the sample is limited to 180 degrees or lower.
  • a series of 2D projection images 156 (typically about 1600 images or more) are obtained and mathematically reconstructed to produce a 3-D volume, with grey value in each voxel representing the optical density.
  • the conditions of acquisition of images are optimized for speed and maximization of signal to noise ratios.
  • Source filters 157 are used in some examples, to pre-harden the beam 107 incident on the sample 104 to ensure proper beam hardening corrections to the reconstructed data. Suitable calibration can be performed and CT numbers obtained in terms of Hounsfield Units which gives a measure of linear attenuation coefficient in the material at a given location.
  • the controller 128 commands the switching of the x-ray source 106 from CT mode to XRF mode and back to CT mode. This can be accomplished with a switchable source optical element 116 such as an elliptical polycapillary optic. In one example, the switchable source optical element 116 is attached to the x-ray source 106 via a moveable arm 118. When the controller 128 directs the x-ray source 106 to switch to XRF mode, the switchable source optical element 116 is positioned into the path of the x-rays 107 and in front of the x-ray source 106 as shown in Fig. 1B .
  • the switchable source optical element 116 detaches from the x-ray source 106 and is moved out of the path of the x-rays 107 as shown in Fig. 1A .
  • Fig. 1B shows an example of the integrated x-ray CT/XRF system 10 in XRF mode.
  • the source optical element 116 functions to control and direct x rays over a broad range of angles and energies from the source to generate a small focused beam 109 onto a volume or region of interest 122 in the sample 104.
  • the confocal x-ray fluorescence subsystem 102 further includes a collection optical element 124 and an x-ray fluorescence detector 126.
  • the collection optical element 124 is preferably a half optic that can be used to minimize the total number of reflections of x-rays inside the optical element 124.
  • the collection optical element 124 is an elliptical polycapillary optic. The collection optical element 124 gathers fluorescence x-rays 111 that are generated within the particular region of interest 122.
  • the intersection of the foci of source optical element 116 and the collection optical element 124 defines the confocal volume which depends on the focus size and strongly depends upon the detected fluorescence x-ray energy.
  • the confocal volume, as defined by the intersection of the foci of source optical polycapillary element 116 and the collection optical polycapillary element 124, is approximately (50 ⁇ m) 3 in one example or (20 ⁇ m) 3 , or less, in another example.
  • the source optical element 116 is optimized for AgK ⁇ ( ⁇ 22.2KeV) characteristic x-rays from the source 106.
  • the half optic collection optical element 124 is used to minimize the total number of reflections of x-rays inside the capillaries and increase efficiency of detection of fluorescence x-rays from the sample.
  • the collection optical element 124 is optimized to detect fluorescence x-rays in the energy range of 9-13 KeV (suitable for detection of precious metals) most efficiently.
  • the collection optical element 124 is suitably optimized for the K lines of these elements whose energies lie in the 7-10 KeV range.
  • the length of the collection optical element 124 is optimized and the distance between the energy dispersive detector 126 and the sample surface is minimized to reduce the absorption of softer fluorescence x-rays in air such that the sensitivity of the instrument is not severely compromised.
  • the collection optical element 124 produces or collimates a parallel beam of fluorescence x-rays 113 onto the x-ray fluorescence detector 126.
  • the x-ray fluorescence detector 126 is an energy-dispersive x-ray spectroscopy (EDS) detector, in one example.
  • EDS detector converts the x-ray energy received from the collimated fluorescence x-rays 113 into voltage signals. Based on the voltage signals (characterizing x-ray energy), elemental composition information 152 of the region of interest 122 is determined.
  • the controller accepts the elemental composition information 152, also known as an XRF spectral dataset 152, from the CXRF subsystem 102.
  • the XRF spectral dataset 152 acquired by the CXRF subsystem 102 includes individual characteristic peaks 166 associated with individual elements.
  • XRF spectral datasets 152 for regions of interest 122 include characteristic peaks 166 associated with different elements, such as the Fig. 7 L ⁇ line 162 and the Fig. 7 L ⁇ line 164 of platinum (9.45 KeV and 11.2 KeV), and the Fig. 5 characteristic peaks 166 of lead (10.45 KeV and 12.62 KeV) and Copper (Cu).
  • the characteristic peaks 166 identify and distinguish between the elements in the sample 104.
  • the controller 128 is in communication with the confocal x-ray fluorescence subsystem 102. Based on the results of the CT analysis in Fig 1A , the controller 128 selects subsequent regions of interest 122 from the volume information 150 to be probed by the x-ray fluorescence subsystem 102.In more detail, the controller 128 operates the x, y, z sample stage 112/rotation stage 114 to rotate around the z-axis and position the sample tube 110 along the x, y, and z axes in relation to the confocal x-ray fluorescence subsystem 102. This provides desired positioning of the region of interest 122 with respect to the x-ray source 106 and the collection optical element 124/x-ray fluorescence detector 126. The rotation/positioning is optimized to reduce absorption of fluorescent x-rays.
  • the confocal x-ray fluorescence subsystem 102 performs elemental composition analysis of the sample 104.
  • the x-ray source 106 emits x-rays through the switchable source optical element 116 which focuses or directs the x-rays 109 towards an analysis region or a region of interest 122 in the sample 104.
  • the x-rays used for CT mode will not be optimal for the XRF mode.
  • the source 106 uses a new Ag target that can be operated at greater than the energy used in CT mode, such as greater than 20 Watts or up to 50 Watts or more.
  • the CT imaging subsystem 100 typically uses an x-ray source with a high Z target such as tungsten target.
  • a high Z target such as tungsten target.
  • other targets such as Mo, Rh, Ag etc.
  • the x-ray source produces a broad spectrum of x-rays with energies up to the maximum applied voltage chosen by the user. Any or all of the spectrum may be utilized for CT imaging.
  • the XRF subsystem 102 typically uses lower Z x-ray source targets such as molybdenum, rhodium, and silver that produce characteristic x-rays and continuum in the energy range most suitable to excite elements useful for precious metal mining analysis.
  • Other lower Z targets such as Cu, Ni, Fe can also be used for XRF subsystem. If need be, even high Z targets containing W and Pt may also be used. The choice of targets depends specifically upon the application.
  • the focused x-rays 109 induce fluorescence of elements within the analysis region 122, which are collected by the collection optical element 124.
  • the collection optical element 124 receives emitted fluorescence x-rays 111. Then, the collection optical element 124 collimates the x-rays 113 towards an x-ray florescence detector 126 for detecting the florescence x-rays 111/113 from the region of interest 122.
  • the controller 128 receives data regarding elemental composition information 152 of the region of interest 122 from the x-ray florescence detector 126 in the form of energy spectra. These data are converted by the controller 128 into their final form, XRF spectral data 152, that provide a map of the elemental composition of the sample 104 for each of the regions of interest 122 that is analyzed.
  • the CT/XRF system 10 is shown as two separate subsystems.
  • CT mode or function is performed using an x-ray CT subsystem 100.
  • the sample tube 110 is transferred to a separate confocal XRF subsystem 102.
  • These separate subsystems are used in combination to determine the mineral content, for example, of the sample 104 within the sample tube 110.
  • This CT/XRF system 10 includes a controller 128 that manages various parts of the x-ray CT subsystem 100 and the confocal x-ray fluorescence (CXRF) subsystem 102.
  • the controller 128 receives data from these subsystems 100/102. Based on the data received, the controller manages how these subsystems 100/102 operate.
  • the sample tube 110 is first mounted on an x, y, z sample stage 112A of the x-ray CT subsystem 100.
  • this x, y, z sample stage 112A has an integrated rotation stage 114A for rotating the sample tube 110 to any desired angle ( ⁇ ) with respect to the x-ray CT subsystem 100.
  • the x-ray CT subsystem 100 includes a first x-ray source 106A and a spatially resolved transmission detector 108.
  • the CT subsystem 100 is activated to collect a series of projections 156 at different values for ⁇ .
  • the projections 156 are combined into a 3-D tomographic reconstruction 150 of the sample 104.
  • the first x-ray source 106A emits diverging x-rays 107 through the features of interest 120.
  • the x-ray source 106A is a transmission x-ray micro source with source size of about 2 ⁇ m or less and preferably1.5 ⁇ m or less operated up to a maximum power of 10 Watts.
  • the x-ray source 106A is a reflection source having a source size or spot size of about 5 ⁇ m or less operated at a power between about 10 and 30 Watts.
  • These x-rays 107 are captured and recorded by the spatially resolved detector 108.
  • the spatially resolved detector 108 generates images from the detection of these x-rays 107.
  • controller 128 operates the x-ray source 106A along with the integrated rotation stage 114A to obtain the projections 156 for the different values of ⁇
  • the CT/XRF system 10 switches from CT mode to XRF mode.
  • the sample 104 is switched from the x, y, z sample stage 112A of the CT system 100 to the x, y, z sample stage 112B of the XRF system 102.
  • a compatible kinematic mounting system is used for both systems 100, 102 to enable reproducible sample transfer that keeps a fixed coordinate transformation between both systems.
  • a reference marker that can be identified by both systems is used to enable the transfer of the coordinate system between both systems.
  • the controller 128 provides spatial calibration of the confocal XRF subsystem 102 based on the results of CT mode. Spatial calibration is the transfer of system coordinates (x, y, z, ⁇ ) from the x-ray CT subsystem 100 to the confocal x-ray fluorescence subsystem 102.
  • the controller 128 receives CT system coordinates 204 (x, y, z, ⁇ ) CT from the x-ray CT subsystem 100 that characterize the locations of the features of interest 120.
  • the CT system coordinates 204 (x, y, z, ⁇ ) CT are converted by the controller 128 to XRF system coordinates 207 (x, y, z, ⁇ ) XRF . This conversion defines a region of interest 122 for the confocal XRF subsystem 102.
  • the confocal XRF subsystem 102 includes a second x-ray source 106B in communication with the controller 128.
  • the controller 128 adjusts this second x-ray source 106B accordingly during XRF mode.
  • the second x-ray source 106B is a laboratory micro focus source with Ag target that is operated at greater than 20 Watts or 50 Watts or more. Generally, however, the source's target as a Z of less than 50, as discussed previously.
  • the confocal XRF subsystem 102 also has a second rotation stage 114B and a second x, y, z sample stage 112B for receiving and holding the sample tube 110 from the x-ray CT subsystem 100.
  • the controller 128 directs the rotation of the sample tube 110 via the second x, y, z sample stage 112B/rotation stage 114B based on the XRF system coordinates 207.
  • the confocal XRF subsystem 102 includes the source optical element 116 such as an elliptical polycapillary optic for focusing the x-rays 109.
  • the source optical element 116 can be attached to the second x-ray source 106B or placed in front of the second x-ray source 106B.
  • the confocal XRF subsystem 102 is able to collect fluorescence radiation with the collection optical element 124 and detect that radiation with the x-ray fluorescence detector 126 as described above.
  • the separate confocal x-ray fluorescence subsystem 102 performs elemental composition analysis of the sample 104, which is typically limited to regions of interest 122 identified in the CT analysis.
  • the second x-ray source 106B emits x-rays 107 through the source optical element 116 which focuses the x-rays 109 towards a region of interest 122 in the sample 104.
  • the controller operates the rotation stage 114B and the x, y, z sample stage 112B of the XRF subsystem 102 to place the desired regions of interest 122 at the focal point of the source optical element 116 and the collection optical element 124.
  • the focused x-rays 109 induce fluorescence of elements within the region of interest 122. Fluorescence x-rays 111 are received and guided by the collection optical element 124 towards an x-ray florescence detector 126 for detecting the florescence x-rays 111/113 from the region or volume of interest 122.
  • the controller 128 receives data regarding energy of the x-rays detected by the fluorescence detector 126 and thus the elemental composition information 152 of the region of interest 122.
  • the XRF spectral datasets 152 provide a map of the elemental composition of the sample for the analyzed regions of interest 122. After performing correction of the XRF spectral 152 using depth information of the volume information, the controller matches the XRF spectral datasets 152 to reference elemental information 168.
  • the controller converts the XRF spectral data into element-specific estimates of concentrations present in the sample, identifying characteristic peaks 166 of the XRF spectral datasets 152.
  • the controller 128 then displays the XRF spectral datasets 152 onto display device 136.
  • the controller correlates information from the CT volume dataset/volume information 150 and the elemental composition information/XRF spectral datasets 152 for the region of interest 122. More detail for the correlation capability of the controller 128 accompanies the description for Fig. 6A-6D and Fig. 8 .
  • Fig. 3 illustrates another example of a CT/XRF system 10. This is a top view of an integrated CT/XRF system 10 that has the capability of running both CT analysis and XRF analysis simultaneously or sequentially without removing the sample from the system.
  • the first x-ray source 106A is for CT analysis.
  • the second x-ray source 106B includes an optical element 116 attachment for XRF analysis.
  • the first x-ray source 106A emits a dispersive group of x-rays 107 across features of interest 120 in the sample 104.
  • the second x-ray source 106B utilizes the source optical element 116 to emit a focused set of x-rays 109 at a region of interest 122 in the sample 104.
  • the CT/XRF system 10 can simultaneously develop 3-D CT images as well as XRF elemental composition images during CT/XRF mode.
  • the x-rays 107 are captured and detected by the spatially resolved detector 108.
  • the focused x-rays 109 are collected and guided by the collection optical element 124.
  • the collection optical element 124 captures the fluorescence x-rays 111 and directs the rays 113 as a parallel beam towards an x-ray florescence detector 126 for detecting the fluorescence rays 111/113 from the region of interest 122.
  • the CT/XRF system 10 can alternatively run CT mode or XRF mode at different times from one another. For example, the CT/XRF system 10 is run in CT mode first to determine desired features of interest 120 in the sample 104. Then, the system 10 is run in XRF mode to analyze the regions of interest 122 that surround the desired features of interest 120 to thereby determine the elemental composition.
  • Fig. 4 displays an exemplary interactive graphic 170 generated by the controller 128, for a representative tailings sample 104.
  • the interactive graphic 170 displays volume information 150 generated by the x-ray CT subsystem 100 from the projections for the sample 104.
  • the operator selects a synthetic slice 142 within the volume information 150, and the interactive graphic 170 displays a 2-D image of the slice 142 in response to the selection.
  • the synthetic slice 142 includes clusters 144 of pixels associated with grains of elements and compounds of the sample 104.
  • the clusters 144 typically include trace metals such as Iron (Fe), Platinum (Pt), Copper (Cu), and Chromium (Cr).
  • the gray levels of pixels in a slice 142, or voxels within the full CT volume dataset 150 correspond to attenuation of x-rays for features within the sample 104 in response to the CT scan.
  • the brightness of the grey levels for each pixel/voxel reflect the proportion of X-rays scattered or absorbed as they pass through the sample.
  • the brightest clusters 144 correspond to metallic elements and compounds, which typically absorb the highest proportion of incident x-rays within a sample 104.
  • the operator selects a feature of interest 120, such as one of the brighter clusters 144 associated with metallic elements and compounds.
  • the controller 128 then calculates a region of interest 122 that surrounds the feature of interest 120.
  • the controller provides the region of interest 122 to the CXRF subsystem 102 to use as an acquisition target for performing elemental compositional analysis. More detail and supporting information for the creation of the region of interest 122 by the controller 128 accompanies the description for Fig. 8 in this section.
  • Fig. 5 shows an XRF spectral dataset 152 for the slice 142 and region of interest 122 selected in Fig. 4 .
  • the XRF spectral dataset 152 has been compared to reference elemental information 168.
  • the reference elemental information 168 is included in a database 154 that communicates with the controller 128.
  • the XRF spectral dataset 152 includes characteristic peaks 166 of elements that uniquely identify the elemental composition of the region of interest 122 of the sample 104.
  • Fig. 6A-6D shows a workflow that illustrates the correlative aspects of the CT/XRF system 10, for a feature of interest 120 selected by an operator within a tailings sample 104.
  • an operator uses the interactive graphic in Fig. 6A to select a feature of interest 120 within a slice 142.
  • the controller 128 calculates a region of interest 122 in response to the selection.
  • the region of interest 122 includes the feature of interest 120.
  • Fig. 6B shows the XRF spectral data 152 obtained by the CXRF subsystem 102 for the region of interest 122 of Fig. 6A .
  • the controller 128 generates the XRF spectral data 152 as outlined in the description for Fig. 2 and Fig. 5 .
  • the controller 128 then correlates the volume information 150 with the elemental composition information 152 for the region of interest 122 to create and display elemental composition maps, such as the maps of Fig. 6C and 6D.
  • Fig. 6C shows a map of the elemental distribution for the region of interest 122 as a function of depth
  • Fig. 6D shows a contour map of elemental iron (Fe) for the selected feature of interest 120.
  • Fig. 7 displays the XRF spectral data 152 for a tailings sample 104 that includes Platinum (Pt) to show the sensitivity of the x-ray CT/XRF system 10.
  • the XRF spectral data 152 includes characteristic peaks 166 of different elements, such as metallic elements Iron (Fe), Chromium (Cr), Nickel (Ni), and Copper (Cu).
  • the XRF spectral data 152 includes characteristic peaks 166 of the Pt L ⁇ line 162 and the Pt L ⁇ line 164, the display of which is not possible using currently available XRF-only systems.
  • Fig. 8 shows more detail for the controller 128.
  • the controller 128 is a separate card of a computer system, or a stand-alone device.
  • the controller 128, in addition to other functions, manages the acquisition of volume information 150 on the x-ray CT subsystem 100, and the acquisition of elemental composition information on the confocal XRF subsystem.
  • the controller 128 accepts the projection images 156 and calculates the volume information 150 from the x-ray CT subsystem 100, and includes the interactive graphic 170 that enables operator selection of a synthetic slice 142 and feature of interest 120.
  • the controller 128 creates a region of interest 122 that includes the feature of interest 120. The creation of the region of interest 122 depends on whether the x-ray CT subsystem 100 and CXRF subsystem 102 are part of an integrated system, or exist as separate, non-integrated systems.
  • the resolution of the volume information/CT volume dataset 150 generated by the x-ray CT subsystem 100 is typically on the order of a few microns or less.
  • the resolution limit of current XRF systems is typically ⁇ (20 ⁇ m) 3 .
  • the controller 128 must account for the differences in resolution provided by the x-ray CT subsystem 100 and the CXRF subsystem 102. As a result, the controller 128 creates a region of interest 122 of the volume information 150 that includes the selected feature of interest 120, and additional voxels of the volume information surrounding the selected feature of interest 120.
  • the controller 128 generates a coordinate transfer function 158 to convert CT system coordinates 204 (x, y, z, ⁇ ) CT from the x-ray CT subsystem 100 to XRF system coordinates 207 (x, y, z, ⁇ ) XRF .
  • This conversion creates the region of interest 122 for the confocal XRF subsystem 102.
  • This conversion is also referred to as spatial calibration of the confocal XRF subsystem 102 based on the results of CT mode.
  • the controller 128 determines the region of interest 122, the controller 128 provides the positions of the region of interest 122 to the CXRF subsystem 102 for acquisition of the elemental composition information 151.
  • the controller 128 generates the XRF spectral dataset 152 as previously outlined in the description for Fig. 2 and Fig. 5 .
  • the controller 128 includes applications 138 that perform "offline" correlations between the volume information 150 and the XRF spectral datasets 152. This enables generation of such correlated information as the Fig. 6C 3-D elemental compositional plot as a function of depth, and the Fig. 6D 2-D contour plot of specific elements.
  • the controller 128 displays the XRF spectral datasets 152 and the correlated information to the display device 136.
  • Fig. 9 illustrates an example of the steps for a calibration process of a CT/XRF system according to an embodiment of the invention.
  • a series of projections are acquired covering the reference sample at different angles.
  • the reference sample includes at least three fiducial markers, also known as fiducials, in three different planes. This is required for unambiguous coordinate transfer.
  • the fiducial markers have high contrast in CT mode and are identifiable in XRF mode.
  • high density spheres such as 1-10 ⁇ m diameter copper or gold spheres, function as fiducials. These fiducials are embedded in an epoxy matrix plug that functions as the reference sample.
  • a cross-shaped fiducial is deposited on a membrane, that functions as the reference sample or target.
  • step 402 CT volume data of the reference sample is generated from the projections.
  • step 404 the one or more fiducials are found in the reference sample using the CT volume data.
  • the reference sample may need to be moved to the XRF system in step 406, using a common kinematic mounting system.
  • the sample is scanned to generate XRF data.
  • fiducials are found in the reference sample using the XRF spectral data.
  • the reference sample fiducials from the CT are compared with the reference sample fiducials of the XRF in step 412.
  • a coordinate transfer function 158 is determined between CT system coordinates (x, y, z, ⁇ ) CT and XRF system coordinates (x, y, z, ⁇ ) XRF .
  • a pack of mineral material needs to be acquired and prepared.
  • Fig. 10 illustrates an example of the steps involved in converting mineral material to a mineral sample for analysis.
  • step 500 mineral material is mined. Then, in step 502, the mineral material is crushed and ground into a powder. This mineral powder is run through a flotation process in step 504. Flotation includes mixing the powder with detergent in an aqueous solution in order to separate mineral particles from the powder into the concentrate and tailings. Next, in step 506, the raw mineral material and/or concentrate and/or tailings are packed into a sample tube 110.
  • step 508 x-ray CT and confocal XRF analysis are performed on this mineral sample/concentrate/tailing 104 in the sample tube 110. Based on the results of the x-ray CT/confocal XRF analysis, the mining/flotation process is modified and/or optimized in step 510.
  • the analysis of a sample using a CT/XRF system is a process that can be run through separate CT and XRF systems as described in the method of Fig. 11A , or through an integrated CT/XRF system as illustrated in the method of Fig. 11B .
  • step 600/620 This process starts with a step 600/620 of acquiring a series of projections covering the sample 104 within the sample tube 110 at different angles.
  • step 602/622 CT volume data (x, y, z, ⁇ ) CT of the sample (e.g. mineral sample) are generated from the projections. This is accomplished using tomographic reconstruction algorithms that are executed by the controller 128, for example.
  • step 604/624 a user or computer algorithm executing on the controller 128 selects features of interest (x, y, z, ⁇ ) CT in the CT volume data.
  • regions or volumes of interest are defined from the selected features of interest based on the CT volume data of the sample.
  • the resolution of the CT volume data is a few microns, or less.
  • the resolution limit of the XRF system under current technologies is ⁇ (20 ⁇ m) 3 .
  • step 608 includes the transfer of a sample tube to the XRF system after the regions of interest are defined.
  • step 610/628 the selected regions of interest are positioned at the confocal probing spot of the XRF system by reference to the coordinate transfer function 158.
  • step 612/630 XRF spectral data from the regions of interest are acquired.
  • the XRF spectral data are corrected using absorption information from the CT volume data in step 614/632.
  • step 616/634 the XRF spectral data are matched with reference elemental information that correlates with elemental composition. Based on this match, the controller is able to identify the elemental composition of the regions of interest.
  • a raster scan analysis of the sample with a CT/XRF system can also be performed using separate CT and XRF systems as illustrated in Fig. 12A , or an integrated CT/XRF system as illustrated in Fig. 12B .
  • This process starts with step 700/720 of acquiring a series of projections covering the sample 104 within the sample tube 110 at different angles.
  • step 702/722 CT volume data (x, y, z, ⁇ ) CT of the sample (e.g. mineral sample) is generated from the projections.
  • the sample is segmented from the CT volume data S(x, y, z, ⁇ ) in step 704/724.
  • the sample tube 110 is transferred to the XRF system after the sample is segmented in step 704.
  • step 708/726 surface points are raster scanned using segmentation with optimized rotation ⁇ .
  • the sub-surface of the sample is raster scanned using segmentation in step 710/728.
  • step 712/730 the raster scan sub-surface step 710/728 is repeated to penetration limit.
  • the CT volume data are used to correct the XRF spectral data at depth using the transfer function to correlate CT volume data with XRF spectral data in step 714/732.
  • Fig. 13 illustrates the process of determining the composition of the sample using CT and XRF systems.
  • step 800 the process starts with acquiring a series of projections covering the sample 104 within the sample tube 110 at different angles.
  • CT volume data (x, y, z, ⁇ ) CT of the sample is generated from the projections in step 802.
  • the CT volume data are segmented into classes based on gray level.
  • regions within each segmentation class are selected. Selected regions are positioned at the confocal probing spot of the XRF system in step 808.
  • step 810 the composition of the selected regions is determined.
  • a phase map (x, y, z, ⁇ ) CT of the sample is generated and the composition of the sample is determined using the composition information that is generated for each gray level in the CT volume data.

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Claims (14)

  1. Röntgen-Computertomografie-(CT)-/Röntgenfluoreszenz-(XRF)-System (10), umfassend:
    ein Röntgen-CT-Subsystem (100) zum Erfassen von Volumeninformation (150);
    ein konfokales XRF-Subsystem (102) zum Erfassen von elementarer Zusammensetzungsinformation;
    und
    eine Steuerung (128) in Kommunikation mit dem Röntgen-CT-Subsystem (100) und dem XRF-Subsystem (102) ,
    dadurch gekennzeichnet, dass die Steuerung (128) dafür ausgelegt ist, die Erfassung durch das Röntgen-CT-Subsystem (100) und das konfokale XRF-Subsystem (102) zu verwalten mittels Auswahl einer Anzahl von aus der Volumeninformation (150) vorbestimmten Punkten oder Bereichen für die Erfassung der elementaren Zusammensetzungsinformation durch das XRF-Subsystem (102).
  2. System (10) nach Anspruch 1, wobei die Steuerung (128) dafür ausgelegt ist, eine Koordinatenübertragungsfunktion zum Übersetzen einer ausgewählten Anzahl von Punkten oder Bereichen aus der Volumeninformation (150) des Röntgen-CT-Subsystems (100) in eine Region von Interesse zur Erfassung der elementaren Zusammensetzungsinformation durch das XRF-Subsystem (102) zu erzeugen.
  3. System (10) nach Anspruch 1 oder 2, wobei die Steuerung (128) dafür ausgelegt ist, Korrelation zwischen der Volumeninformation (150) und der elementaren Zusammensetzungsinformation durchzuführen, um elementaren Kontrast der Probe (104) als eine Funktion von Tiefe bereitzustellen.
  4. System nach Anspruch 3, wobei die Steuerung (128) in Reaktion auf die Korrelation dafür ausgelegt ist, elementare Verteilungskarten als eine Funktion der Position innerhalb der Probe (104) zu erzeugen.
  5. System nach einem der Ansprüche 1 bis 4, wobei die Steuerung dafür ausgelegt ist,
    eine interaktive Grafik (170) zu erzeugen, die es dem Benutzer ermöglicht, ein Merkmal von Interesse in der durch das Röntgen-CT-Subsystem (100) erfassten Volumeninformation (150) zu identifizieren und auszuwählen;
    eine Region von Interesse einzurichten, die das Merkmal von Interesse aufweist, wobei die Region von Interesse eingerichtet wird, um das Merkmal von Interesse (120) aus Röntgen-CT-Subsystemkoordinaten in konfokale XRF-Subsystemkoordinaten zu übersetzen; und
    zur Erfassung der elementaren Zusammensetzungsinformation auf die Region von Interesse (120) in dem XRF-Subsystem (XRF-Subsystem (102)) zuzugreifen.
  6. System (10) nach einem der Ansprüche 1 bis 5, umfassend eine Röntgenquelle (106), die eine gemeinsame Quelle für das CT-Subsystem (100) und das XRF-Subsystem (102) ist.
  7. System (10) nach Anspruch 6, umfassend ein schaltbares optisches Quellelement (116), das dafür ausgelegt ist, durch die Steuerung (128) zum Umschalten der Röntgenquelle vom CT-Modus in den XRF-Modus geschaltet zu werden.
  8. System (10) nach Anspruch 2, wobei die Steuerung (128) dafür ausgelegt ist, die Region von Interesse (120) an einem konfokalen Sondierungs-Spot des XRF-Subsystems (102) durch Referenzierung der Koordinatenübertragungsfunktion zu positionieren.
  9. System (10) nach einem der Ansprüche 1 bis 8, wobei die Steuerung (128) dafür ausgelegt ist, die durch das konfokale XRF-Subsystem (102) erfasste elementare Zusammensetzungsinformation unter Verwendung von Absorptionsinformation der durch das Röntgen-CT-Subsystem (100) erfassten Volumeninformation (150) zu korrigieren.
  10. System (10) nach einem der Ansprüche 1 bis 9, wobei die Steuerung (128) dafür ausgelegt ist, die durch das konfokale XRF-Subsystem (102) erfasste elementare Zusammensetzungsinformation gegen elementare Referenzinformation zu vergleichen, um Elemente in der Probe (104) zu identifizieren.
  11. Verfahren zum Analysieren einer Probe (104) unter Verwendung von Röntgen-Computertomografie (Röntgen-CT) und konfokaler Röntgenfluoreszenz (XRF), umfassend:
    Erhalten einer dreidimensionalen Röntgen-Computertomografie-(CT)-Messung der Probe (104);
    wobei das Verfahren gekennzeichnet ist durch Auswählen einer Anzahl von aus der Röntgen-CT-Messung der Probe (104) vorbestimmten Punkten oder Bereichen für die Erfassung von XRF-Spektren;
    Erfassen von Röntgenfluoreszenz-(XRF)-Spektren aus den ausgewählten Punkten oder Bereichen; und Abgleich der erfassten XRF-Spektren mit elementarer Referenzinformation zur Identifizierung.
  12. Verfahren nach Anspruch 11, wobei das Auswählen von Punkten oder Bereichen aus der Röntgen-CT-Messung umfasst:
    Erzeugen einer interaktiven Grafik (170), die es dem Benutzer ermöglicht, ein Merkmal von Interesse in der durch das Röntgen-CT-Subsystem (100) erfassten Volumeninformation zu identifizieren und auszuwählen;
    Auswählen von einem oder mehreren Merkmalen von Interesse in der CT-Messung der Probe durch einen Benutzer;
    Definieren von einer oder mehreren Regionen von Interesse (120) aus den ausgewählten Merkmalen von Interesse;
    Erfassen von konfokalen Röntgenfluoreszenz-(cXRF)-Spektren aus den definierten Regionen von Interesse (120).
  13. Verfahren nach einem der Ansprüche 11 oder 12, ferner umfassend das Kombinieren der dreidimensionalen Röntgen-CT-Messung der Probe (104) mit der Identifizierung von Elementen in der Probe (104) zum Überprüfen eines Freisetzungsstatus von Elementen in der Probe (104).
  14. Verfahren nach einem der Ansprüche 11 bis 13, ferner umfassend das Korrelieren der dreidimensionalen Röntgen-CT-Messung der Probe (104) mit der Identifizierung von Elementen in der Probe (104), um elementaren Kontrast der Probe (104) als eine Funktion von Tiefe bereitzustellen.
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