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EP2394202B1 - Mechanical oscillating system for watches and functional element for watches - Google Patents

Mechanical oscillating system for watches and functional element for watches Download PDF

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Publication number
EP2394202B1
EP2394202B1 EP10721923.0A EP10721923A EP2394202B1 EP 2394202 B1 EP2394202 B1 EP 2394202B1 EP 10721923 A EP10721923 A EP 10721923A EP 2394202 B1 EP2394202 B1 EP 2394202B1
Authority
EP
European Patent Office
Prior art keywords
balance
spring
mechanical oscillation
balance spring
oscillation system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
EP10721923.0A
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German (de)
French (fr)
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EP2394202A2 (en
Inventor
Konrad Damasko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Damasko GmbH
Original Assignee
Damasko GmbH
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Publication date
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Priority claimed from DE102009031841A external-priority patent/DE102009031841A1/en
Application filed by Damasko GmbH filed Critical Damasko GmbH
Priority to EP16165465.2A priority Critical patent/EP3101484A1/en
Priority claimed from DE102010006790A external-priority patent/DE102010006790A1/en
Publication of EP2394202A2 publication Critical patent/EP2394202A2/en
Application granted granted Critical
Publication of EP2394202B1 publication Critical patent/EP2394202B1/en
Revoked legal-status Critical Current
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    • GPHYSICS
    • G04HOROLOGY
    • G04BMECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B17/00Mechanisms for stabilising frequency
    • G04B17/04Oscillators acting by spring tension
    • G04B17/06Oscillators with hairsprings, e.g. balance
    • G04B17/066Manufacture of the spiral spring

Definitions

  • the invention relates to a mechanical vibration system for watches according to claim 1.
  • the European patent application EP 1 445 670 A1 discloses a hospital spring of amorphous or crystalline material (silicon wafer).
  • the winding cross-section of the spiral spring is 0.015 mm 2 .
  • the document does not mention anything regarding the structure of the vibration system and the grain size and other parameters of the balance spring.
  • German translation of the European patent specification EP 0 732 635 B1 merely discloses that with the claimed method, a hospital spring for clockworks can be produced.
  • the material of the base plate from which the micromechanical part is structured may be monocrystalline or polycrystalline silicon.
  • the document does not mention anything regarding the structure of the vibration system and the grain size and other parameters of the balance spring.
  • the international patent application WO 2006/123095 A2 discloses the production of a spiral spring, wherein the individual turns of the coil spring are cut out by means of a laser.
  • the spiral spring consists of an iron-nickel alloy.
  • the object of the invention is to show a vibration system which avoids these disadvantages.
  • a mechanical vibration system according to claim 1 is formed.
  • Functional elements in the context of the invention are in particular those of a mechanical oscillating system for watches and in particular for mechanical watches or wristwatches, namely in particular the spiral and balance spring, the oscillating body or the balance wheel, the shaft of the oscillating body, elements for fixing the balance spring on the oscillating body or Elements for attachment of the balance spring on the shaft of the oscillating body and on a circuit board of the movement, the so-called double disc on the shaft of the oscillating body for deflecting the armature, the armature and the escape wheel.
  • Functional elements in the context of the invention are also gears of a movement generally.
  • the mechanical vibration system for watches especially for watches, from a balance spring and a balance wheel with a shaft for attachment of the balance spring.
  • the balance spring is made of polycrystalline silicon with elongated grains resulting from the columnar growth.
  • the elongated grains have a grain width in the range between 10 and 1000 nm and a grain length in the range between 2 and 50 microns.
  • a winding cross-section of the balance spring is 0.001 mm 2 to 0.3 mm 2 .
  • the grain length is in the range between 5 and 50 microns.
  • the winding cross-section of the balance spring may be 0.001 mm 2 to 0.01 mm 2 or 0.001 mm 2 to 0.03 mm 2 .
  • the coefficient of linear expansion of the balance spring is less than 8x10 -6 / K.
  • the balance spring is provided on the outer surface of its windings with a thermally generated layer of silicon oxide. This layer has a maximum thickness of 4 microns, preferably of a maximum of 3 microns or smaller.
  • the balance spring is suitably fixed to the shaft with an inboard end, and an outboard end of the balance spring is held with a spring holder block on a spring holder that is adjustable by pivoting about an axis of the balance wheel.
  • the balance wheel consists of an outer ring, radially inwardly extending spokes and a central hub portion for attachment of the balance shaft.
  • the balance wheel is made in one piece with the spokes and the outer ring.
  • the outer ring has on its inside between the spokes formed mounting portions, wherein an adjustment element is provided at each attachment portion.
  • the balance wheel or the balance spring form at least one bearing and / or sliding and / or mounting surface on which the surface of the balance wheel or the balance spring consists of an inner layer of silicon oxide and a DLC coating forming the outer surface consists.
  • At least one single-layer or multi-layer metallic intermediate layer is provided, which consists, for example, of titanium nitride and / or titanium carbide and / or tungsten carbide.
  • the oscillating body or balance wheel for example, designed so that the adjusting elements are held by clipping or latching on the oscillating body or on the inside of the balance wheel or a ring of the balance wheel, and / or that the oscillating body of molybdenum or a molybdenum in made of a high proportion alloy, wherein the aforementioned features may be used individually or in any combination.
  • a coil spring for a mechanical oscillating system for watches the coil spring body in the region of its outer end with a multi-wave section, wherein the coil spring (balance spring) is executed in a further development of the invention, for example, that they made Silicon, and / or that it is made of polycrystalline silicon or a silicon ceramic, for example of silicon nitride, wherein the aforementioned features of the coil spring may be used individually or in any combination.
  • the vibration system generally designated 1 in the figure consists of the spiral spring 2 and of the oscillating or balance wheel 3.
  • the balance spring 2 is made of silicon, preferably of polycrystalline silicon.
  • the preparation of the balance spring 2 is carried out, for example, from a non-metallic crystalline or sintered material having a particle size in the range between 10 and 50,000 nm, preferably between 10 - 10.000nm, wherein Columnen-growth, the grain size, for example, a length of about 5 - 50 ⁇ m and has a width of 10 -1,000nm.
  • the non-metallic crystalline or sintered material has a thermal coefficient of linear expansion of less than 8 10 -6 / K or the balance spring 2 is using a wafer made of this material or silicon, for example by cutting and / or etching (masking and etching).
  • the wafer is produced, for example, by epitaxial deposition of silicon.
  • the cross-sectional area of the spring coil is, for example, 0.001-0.01 mm 2 .
  • the balance spring 2 is provided on the outer surface of its turns with a e.g. provided thermally generated layer of silicon oxide. This layer has a maximum thickness of 4 microns, preferably of at most 3 microns or smaller.
  • the oscillating mass or the oscillating body ie the oscillating or balance wheel 3, which has, for example, the usual spoked wheel-like form for such wheels, is made of Molybdenum or made of an alloy with a high molybdenum content.
  • the combination of silicon (for the balance spring 2) and molybdenum (for the balance wheel 3) results in an optimally temperature-compensated mechanical vibration system, ie a mechanical vibration system whose gear or frequency accuracy is, in particular, independent of changes in temperature.
  • FIG. 2 shows the coil spring 2 again in an individual representation.
  • a special feature of this coil spring is that it is designed in the area of its outer spring end at 2.1 multiple wave-shaped. This area results in an improved, very uniform vibration behavior of the spiral spring 2.
  • the spiral spring 2 with the section 2.1 is also advantageously used for oscillating systems of watches, in particular wristwatches, in which the oscillating mass is designed differently than described above.
  • FIG. 3 shows a perspective view of a vibrating system 1 a with the coil spring 2a and the oscillating or balance wheel 3a.
  • the balance spring 2a and the balance wheel 3a are made of the same material and / or in the same manner as described above for the coil spring 2 and the balance wheel 3.
  • the balance wheel 3a is designed spoke-like, consisting of an outer ring 4, four radially extending from the ring 4 inwardly extending spokes 5 and a central hub portion 6, which has the opening 6.1 for attachment of the balance shaft and integral with the spokes 5 and the outer ring 4 is made.
  • the outer ring 4 is formed on its inside with a circumferential groove 7 and between the spokes 5 each having a fork-like attachment portion 8.
  • an adjusting element 9 is provided, which is made in one piece of a non-magnetic metallic material, such as molybdenum or a corrosion-resistant steel. With the adjusting elements 9, as well as the spokes 5 at regular angular intervals about the axis of the balance wheel 3a and the Opening 6.1 are arranged distributed, the relevant for the frequency or oscillation period of the vibration system dynamic moment of inertia of the balance wheel 3a can be adjusted.
  • the attachment portion 8 are each provided below the groove 7.
  • the adjusting elements 9 consist of a circular-disk-shaped body 10 with a pin 11 which is arranged coaxially with the axis of this body and projecting beyond an end face of the centering element 9 with a circular-cylindrical outer surface. Furthermore, in the body 10 is a continuous, i. open and arcuately curved recess 12 is provided on both end faces of the disk-shaped body 10, which extends over an angular range of slightly less than 180 ° about the axis of the centering element 9, in such a way that the centering element 9 and its body 10 at its periphery has a continuous edge, the center of mass of the centering element 9 but is offset radially to the axis of the centering element 9.
  • each centering element is rotatably provided on a mounting portion 8 about an axis parallel to the axis of the balance wheel 3a, with a certain stiffness in that the respective pin 1 1 is held by snapping or latching on the fork-like mounting portion 8 and each Adjusting element 9 extends on the periphery with its disc-like body 10 in the groove 7, where it is secured axially and bears radially against the bottom of the groove.
  • each adjusting element 9 is pushed with its pin 1 1 radially on the associated fork-like mounting portion 8.
  • the center of mass of each adjusting element u.a. displaced radially to the axis of the balance wheel 3a and thereby set the dynamic moment of inertia in the desired manner.
  • the balance spring 2a is fastened with the inner end in a suitable manner to the balance shaft, not shown.
  • the outer end of the coil spring 2a is at a Federhalterklötzchen or block 14 held by pivoting about the axis of the balance wheel 3a adjustable spring holder 15.
  • the spring holder block 14 made of metallic material is a section 14.1, with which it can be secured in an opening 16 of the spring holder 15 by clipping or latching, as well as with a section 14.2 with two fork or clamping arms 17 and 18 executed, which form between them a clamping gap 19, in which the coil spring 2a can be fixed by clamping.
  • the clamping gap 19 is open to the underside facing away from the portion 14.1 as well as to two opposite end faces of the spring holder block 14 and on the side facing the portion 14.1 bounded by a surface 20.1.
  • the spring holder block 14 In the assembled state, the spring holder block 14 is oriented with its longitudinal extent parallel to the axis of the balance wheel 3a. During assembly of the oscillating system, the outer portion of the coil spring 2a of the section 14.1 or
  • the adjusting elements 9, but in particular the respective spring holder block 14 are preferably manufactured as so-called LIGA parts with the LIGA method known to those skilled in the art, which allows the production of metallic moldings with very small dimensions by the process steps lithography, electroplating and impression.
  • FIG. 7 schematically the formation of a bearing and / or escort and / or mounting surface of a functional element 21 reproduced, which consists of silicon, preferably polycrystalline, for example, epitaxially deposited polycrystalline silicon.
  • the bearing and / or sliding and / or mounting surface forming surface 22 of the functional element 21 is formed by a multilayer coating, at least consisting of a directly adjoining the silicon material of the functional element 21 coating 23 of silicon oxide, for example by thermal Oxidation or produced in any other suitable manner.
  • the coating 23 is followed by a metallic intermediate layer 24, which preferably consists of titanium nitride and / or titanium carbide and / or tungsten carbide and is applied, for example, in a PVD coating process.
  • the intermediate layer 24 may in turn be designed in a multi-layered manner, specifically in several individual layers, for example, of the abovementioned materials.
  • the intermediate layer 24 is followed by a coating 25 forming the actual outer surface, which is embodied as a DLC coating and produced, for example, by CVD deposition.
  • the invention is based on the finding that improved adhesion of the layer 25 to the layer 23 is achieved by the metallic intermediate layer 24, so that the layer 25 is effectively prevented from flaking or loosening by the functional element 21 during assembly and during use of a clock , This is true not only for storage and sliding surfaces, but especially for mounting surfaces and especially for those with or on which a clamping attachment is done, such as a clamping attachment of the spiral or balance spring or the oscillating body to a shaft, etc.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Springs (AREA)
  • Micromachines (AREA)

Description

Die Erfindung bezieht sich auf ein mechanisches Schwingsystem für Uhren gemäß Patentanspruch 1.The invention relates to a mechanical vibration system for watches according to claim 1.

Es wurde bereits vorgeschlagen, die Feder oder Unruhfeder (Spiralfeder) eines mechanisches Schwingsystems aus Silizium zu fertigen und u.a. zur Verbesserung der mechanischen Festigkeit und zur Temperaturkompensation an deren Oberflächen mit einer Schicht aus Siliziumoxid zu versehen. Insbesondere dann, wenn die Schicht aus Siliziumoxid thermisch erfolgt ist, besteht bei Schichtdicken, die für eine optimale Temperaturkompensation erforderlich wären, d.h. bei Schichtdicken größer als 4 µm u.a. die Gefahr einer Verformung, zumindest einer partiellen Verformung der Unruhfeder, was dann zu einer Beeinträchtigung der Ganggenauigkeit des Schwingsystems und/oder zu nicht reproduzierbaren Verhältnissen bei der Fertigung führt.It has already been proposed to manufacture the spring or balance spring (spiral spring) of a mechanical vibration system made of silicon and u.a. To provide mechanical strength and temperature compensation on their surfaces with a layer of silicon oxide. In particular, when the layer of silicon oxide is thermally cured, layer thicknesses that would be required for optimum temperature compensation, i. at layer thicknesses greater than 4 microns i.a. the risk of deformation, at least a partial deformation of the balance spring, which then leads to a deterioration of the accuracy of the vibration system and / or to non-reproducible conditions in the production.

Die europäische Patentanmeldung EP 1 445 670 A1 offenbart eine Spitalfeder aus amorphem oder kristallinem Material (Siliziumscheibe). Der Windungsquerschnitt der Spiralfeder beträgt 0,015mm2. Das Dokument erwähnt nichts hinsichtlich des Aufbaus des Schwingsystems und der Korngröße und weiterer Parameter der Unruhfeder.The European patent application EP 1 445 670 A1 discloses a hospital spring of amorphous or crystalline material (silicon wafer). The winding cross-section of the spiral spring is 0.015 mm 2 . The document does not mention anything regarding the structure of the vibration system and the grain size and other parameters of the balance spring.

Die deutsche Übersetzung der europäischen Patentschrift EP 0 732 635 B1 offenbart lediglich, dass mit dem beanspruchten Verfahren auch eine Spitalfeder für Uhrwerke hergestellt werden kann. Das Material der Basisplatte aus der das mikromechanische Teil strukturiert wird, kann ein- oder polykristallines Silizium sein. Das Dokument erwähnt nichts hinsichtlich des Aufbaus des Schwingsystems und der Korngröße und weiterer Parameter der Unruhfeder.The German translation of the European patent specification EP 0 732 635 B1 merely discloses that with the claimed method, a hospital spring for clockworks can be produced. The material of the base plate from which the micromechanical part is structured may be monocrystalline or polycrystalline silicon. The document does not mention anything regarding the structure of the vibration system and the grain size and other parameters of the balance spring.

Die internationale Patentanmeldung WO 2006/123095 A2 offenbart die Herstellung einer Spiralfeder, wobei die einzelnen Windungen der Spiralfeder mittels eines Lasers ausgeschnitten werden. Die Spiralfeder besteht aus einer Eisen-Nickel Legierung.The international patent application WO 2006/123095 A2 discloses the production of a spiral spring, wherein the individual turns of the coil spring are cut out by means of a laser. The spiral spring consists of an iron-nickel alloy.

Aufgabe der Erfindung ist es, ein Schwingsystem aufzuzeigen, welches diese Nachteile vermeidet. Zur Lösung dieser Aufgabe ist ein mechanisches Schwingsystem entsprechend dem Patentanspruch 1 ausgebildet.The object of the invention is to show a vibration system which avoids these disadvantages. To solve this problem, a mechanical vibration system according to claim 1 is formed.

Funktionselemente im Sinne der Erfindung sind insbesondere solche eines mechanischen Schwingsystems für Uhren und dabei speziell für mechanische Uhren oder Armbanduhren, nämlich insbesondere die Spiral- und Unruhfeder, der Schwingkörper bzw. das Unruhrad, die Welle des Schwingkörpers, Elemente zur Befestigung der Unruhfeder am Schwingkörper bzw. Elemente zur Befestigung der Unruhfeder an der Welle des Schwingkörpers sowie an einer Platine des Uhrwerks, die sogenannte Doppelscheibe an der Welle des Schwingkörpers zum Auslenken des Ankers, der Anker sowie das Ankerrad. Funktionselemente im Sinne der Erfindung sind weiterhin auch Zahnräder eines Uhrwerks generell.Functional elements in the context of the invention are in particular those of a mechanical oscillating system for watches and in particular for mechanical watches or wristwatches, namely in particular the spiral and balance spring, the oscillating body or the balance wheel, the shaft of the oscillating body, elements for fixing the balance spring on the oscillating body or Elements for attachment of the balance spring on the shaft of the oscillating body and on a circuit board of the movement, the so-called double disc on the shaft of the oscillating body for deflecting the armature, the armature and the escape wheel. Functional elements in the context of the invention are also gears of a movement generally.

Nach einem Aspekt der Erfindung besteht das mechanische Schwingsystem für Uhren, insbesondere für Armbanduhren, aus einer Unruhfeder und einem Unruhrad mit einer Welle zur Befestigung der Unruhfeder. Die Unruhfeder besteht aus polykristallinem Silizium mit langgestreckten Körnern, die aufgrund des Columnen-Wachstums resultieren. Die langgestreckten Körner haben eine Kornbreite im Bereich zwischen 10 und 1000 nm und eine Kornlänge im Bereich zwischen 2 und 50 µm. Ein Windungsquerschnitt der Unruhfeder beträgt 0,001 mm2 bis 0,3 mm2.
Gemäß einem Aspekt der Erfindung liegt die Kornlänge im Bereich zwischen 5 und 50 µm. Der Windungsquerschnitt der Unruhfeder kann 0,001 mm2 bis 0,01 mm2 oder 0,001 mm2 bis 0,03 mm2 betragen. Der Längenausdehnungskoeffizient der Unruhfeder ist kleiner als 8x10-6/K.
Gemäß einer bevorzugten Ausführungsform der Erfindung ist die Unruhfeder an der Außenfläche ihrer Windungen mit einer thermisch erzeugten Schicht aus Siliziumoxid versehen. Diese Schicht besitzt eine Dicke von maximal 4 µm, bevorzugt von maximal 3µm oder kleiner.
Die Unruhfeder ist mit einem innenliegenden Ende in geeigneter Weise an der Welle befestigt und ein außenliegendes Ende der Unruhfeder mit einem Federhalterklotz an einem durch Schwenken um eine Achse des Unruhrades einstellbaren Federhalters gehalten.
According to one aspect of the invention, the mechanical vibration system for watches, especially for watches, from a balance spring and a balance wheel with a shaft for attachment of the balance spring. The balance spring is made of polycrystalline silicon with elongated grains resulting from the columnar growth. The elongated grains have a grain width in the range between 10 and 1000 nm and a grain length in the range between 2 and 50 microns. A winding cross-section of the balance spring is 0.001 mm 2 to 0.3 mm 2 .
According to one aspect of the invention, the grain length is in the range between 5 and 50 microns. The winding cross-section of the balance spring may be 0.001 mm 2 to 0.01 mm 2 or 0.001 mm 2 to 0.03 mm 2 . The coefficient of linear expansion of the balance spring is less than 8x10 -6 / K.
According to a preferred embodiment of the invention, the balance spring is provided on the outer surface of its windings with a thermally generated layer of silicon oxide. This layer has a maximum thickness of 4 microns, preferably of a maximum of 3 microns or smaller.
The balance spring is suitably fixed to the shaft with an inboard end, and an outboard end of the balance spring is held with a spring holder block on a spring holder that is adjustable by pivoting about an axis of the balance wheel.

Gemäß einer Ausführungsform besteht das Unruhrad aus einem äußeren Ring, radial nach innen verlaufenden Speichen und aus einem mittleren Nabenabschnitt, zur Befestigung der Unruh-Welle. Das Unruhrad ist einstückig mit den Speichen und dem äußeren Ring hergestellt. Der äußere Ring weist an seiner Innenseite zwischen den Speichen ausgebildete Befestigungsabschnitte auf, wobei an jedem Befestigungsabschnitt ein Justierelement vorgesehen ist.
Gemäß einer weiteren Ausführungsform der Erfindung bilden das Unruhrad oder die Unruhfeder wenigstens eine Lager- und/oder Gleit- und/oder Montagefläche aus, an der die Oberfläche des Unruhrads oder die Unruhfeder aus einer inneren Schicht aus Siliziumoxid und einer die Außenfläche bildenden DLC-Beschichtung besteht. Zwischen der von der DLC-Beschichtung gebildeten äußeren Schicht und der inneren Schicht aus Siliziumoxid ist wenigstens eine ein- oder mehrlagig metallische Zwischenschicht vorgesehen, die beispielsweise aus Titan-Nitrid und/oder Titan-Carbid und/oder Wolfram-Carbid besteht.
In Weiterbildung der Erfindung sind der Schwingkörper oder die Unruhrad beispielsweise so ausgebildet, dass die Justierelemente durch Klipsen oder Verrasten am Schwingkörper bzw. an der Innenseite des Unruhrades oder eines Ringes des Unruhrades gehalten sind, und/oder dass der Schwingkörper aus Molybdän oder einer Molybdän in einem hohen Anteil enthaltenden Legierung gefertigt ist, wobei die vorgenannten Merkmale jeweils einzeln oder in beliebiger Kombination verwendet sein können.
According to one embodiment, the balance wheel consists of an outer ring, radially inwardly extending spokes and a central hub portion for attachment of the balance shaft. The balance wheel is made in one piece with the spokes and the outer ring. The outer ring has on its inside between the spokes formed mounting portions, wherein an adjustment element is provided at each attachment portion.
According to a further embodiment of the invention, the balance wheel or the balance spring form at least one bearing and / or sliding and / or mounting surface on which the surface of the balance wheel or the balance spring consists of an inner layer of silicon oxide and a DLC coating forming the outer surface consists. Between the outer layer formed by the DLC coating and the inner layer of silicon oxide, at least one single-layer or multi-layer metallic intermediate layer is provided, which consists, for example, of titanium nitride and / or titanium carbide and / or tungsten carbide.
In a further development of the invention, the oscillating body or balance wheel, for example, designed so that the adjusting elements are held by clipping or latching on the oscillating body or on the inside of the balance wheel or a ring of the balance wheel, and / or that the oscillating body of molybdenum or a molybdenum in made of a high proportion alloy, wherein the aforementioned features may be used individually or in any combination.

Nach einem weiteren Aspekt der Erfindung ist bei einer Spiralfeder für ein mechanisches Schwingsystem für Uhren, der Spiralfederkörper im Bereich seines außenliegenden Endes mit einem mehrfach wellenförmig ausgeführt Abschnitt versehen, wobei die Spiralfeder (Unruhfeder) in Weiterbildung der Erfindung beispielsweise so ausgeführt ist, dass sie aus Silizium besteht, und/oder,dass sie aus polykristallinem Silizium oder einer Siliziumkeramik, z.B. aus Silizium- Nitrid hergestellt ist,
wobei die vorgenannten Merkmale der Spiralfeder jeweils einzeln oder in beliebiger Kombination verwendet sein können.
According to a further aspect of the invention is provided in a coil spring for a mechanical oscillating system for watches, the coil spring body in the region of its outer end with a multi-wave section, wherein the coil spring (balance spring) is executed in a further development of the invention, for example, that they made Silicon, and / or that it is made of polycrystalline silicon or a silicon ceramic, for example of silicon nitride,
wherein the aforementioned features of the coil spring may be used individually or in any combination.

Nach einem weiteren Aspekt der Erfindung sind der Schwingkörper oder das Unruhrad für ein mechanisches Schwingsystem für Uhren, insbesondere Armbanduhren, mit an einem radial außenliegenden Bereich des Schwingkörpers angebrachten Justierelementen zur Einstellung des dynamischen Schwingkörper Trägheitsmomentes des Schwingkörpers in Bezug auf seine Schwingachse, so ausgeführt, wobei der Schwingkörper in Weiterbildung der Erfindung beispielsweise so ausgeführt ist,

  • dass die Zentrierelemente jeweils von wenigstens einem um eine Achse parallel oder im Wesentlichen parallel zur Schwingachse dreh- oder schwenkbar am Massenkörper mit einem gegenüber der Dreh- oder Schwenkachse versetzten Massenschwerpunkt aufweisen,
  • und/oder
  • dass er speichenradartig ausgebildet ist,
  • und/oder
  • dass die Justierelemente durch Klipsen oder Verrasten am Schwingkörper bzw. an der Innenseite des Unruhrades oder eines Ringes des Unruhrades gehalten sind, und/oder
  • dass er aus Molybdän oder einer Molybdän in einem hohen Anteil enthaltenden Legierung gefertigt ist,
wobei die vorgenannten Merkmale des Schwingkörpers jeweils einzeln oder in beliebiger Kombination verwendet sein können.According to a further aspect of the invention, the oscillating body or the balance wheel for a mechanical oscillating system for watches, in particular wristwatches, with attached to a radially outer region of the vibrating body adjusting elements for Setting the dynamic oscillatory moment of inertia of the oscillating body with respect to its oscillating axis, so executed, wherein the oscillating body is designed in a further development of the invention, for example, so
  • in that the centering elements each have at least one about an axis parallel or substantially parallel to the swing axis rotatable or pivotable on the mass body with a relative to the rotational or pivot axis offset center of gravity,
  • and or
  • that it is formed Speichenradartig,
  • and or
  • that the adjusting elements are held by clipping or latching on the oscillating body or on the inside of the balance wheel or a ring of the balance wheel, and / or
  • that it is made of molybdenum or an alloy containing molybdenum in a high proportion,
wherein the aforementioned features of the vibrating body can be used individually or in any combination.

Weiterbildungen, Vorteile und Anwendungsmöglichkeiten der Erfindung ergeben sich auch aus der nachfolgenden Beschreibung von Ausführungsbeispielen und aus den Figuren. Dabei sind alle beschriebenen und/oder bildlich dargestellten Merkmale für sich oder in beliebiger Kombination grundsätzlich Gegenstand der Erfindung, unabhängig von ihrer Zusammenfassung in den Ansprüchen oder deren Rückbeziehung. Auch wird der Inhalt der Ansprüche zu einem Bestandteil der Beschreibung gemacht.Further developments, advantages and applications of the invention will become apparent from the following description of exemplary embodiments and from the figures. In this case, all described and / or illustrated features alone or in any combination are fundamentally the subject of the invention, regardless of their summary in the claims or their dependency. Also, the content of the claims is made an integral part of the description.

Die Erfindung wird im Folgenden anhand der Figuren an Ausführungsbeispielen näher erläutert. Es zeigen:

  • Fig. 1 in vereinfachter Funktionsdarstellung die wesentlichen Elemente eines mechanischen Schwingsystems einer Armbanduhr;
  • Fig. 2 in Draufsicht die Spiralfeder des Schwingsystems der Figur 1 ;
  • Fig. 3 in perspektivischer Teildarstellung ein mechanisches Schwingsystem für Uhren, insbesondere Armbanduhren gemäß einer weiteren Ausführungsform;
  • Fig. 4 in Einzeldarstellung und in Draufsicht das Schwing- und Unruhrad des Schwingsystems der Figur 3;
  • Fig. 5 in perspektivischer Darstellung und in Draufsicht eines der Zentrierelemente des Unruhrades des Schwingsystems der Figur 3;
  • Fig. 6 in Einzeldarstellung einen Federhalter oder Halteklotz für die Spiral- oder Unruhfeder des Schwingsystems der Figur 3;
  • Fig. 7 in vereinfachter Darstellung einen Schnitt durch eine mehrlagige Beschichtung auf einem aus Silizium hergestellten Funktionselement.
The invention will be explained in more detail below with reference to the figures of exemplary embodiments. Show it:
  • Fig. 1 in a simplified functional representation of the essential elements of a mechanical vibration system of a wristwatch;
  • Fig. 2 in plan view, the coil spring of the vibration system of FIG. 1 ;
  • Fig. 3 in a perspective partial view of a mechanical vibration system for watches, in particular wristwatches according to another embodiment;
  • Fig. 4 in individual representation and in plan view of the oscillating and balance wheel of the vibration system of FIG. 3 ;
  • Fig. 5 in a perspective view and in plan view of one of the centering of the balance wheel of the oscillating system of FIG. 3 ;
  • Fig. 6 in an individual representation of a spring holder or retaining block for the spiral or balance spring of the vibration system of FIG. 3 ;
  • Fig. 7 in a simplified representation of a section through a multilayer coating on a functional element made of silicon.

Das in der Figur allgemein mit 1 bezeichnete Schwingsystem besteht aus der Spiralfeder 2 und aus dem Schwing- oder Unruhrad 3. Die Unruhfeder 2 ist aus Silizium gefertigt, vorzugsweise aus polykristallinem Silizium. Die Herstellung der Unruhfeder 2 erfolgt dabei beispielsweise aus einem nicht metallischen kristallinen oder gesinterten Werkstoff mit einer Korngröße im Bereich zwischen 10 und 50.000 nm, bevorzugt zwischen 10 - 10.000nm, wobei bei Columnen-Wachstum die Korngröße beispielsweise eine Länge von etwa 5 - 50µm und eine Breite von 10 -1.000nm aufweist. Weiterhin besitzt der nicht metallischen kristallinen oder gesinterten Werkstoff einen thermischen Längenausdehnungskoeffizienten kleiner 8 10-6/K oder die Unruhfeder 2 ist unter Verwendung eines Wafers aus diesem Werkstoff oder aus Silizium, z.B. durch Schneiden und/oder Ätzen (Maskierungs- und Ätztechnik). Der Wafer ist beispielsweise durch epitaktisches Abscheiden von Silizium erzeugt. Die Querschnittsfläche der Federwindung beträgt beispielsweise 0,001 - 0,01 mm2.The vibration system generally designated 1 in the figure consists of the spiral spring 2 and of the oscillating or balance wheel 3. The balance spring 2 is made of silicon, preferably of polycrystalline silicon. The preparation of the balance spring 2 is carried out, for example, from a non-metallic crystalline or sintered material having a particle size in the range between 10 and 50,000 nm, preferably between 10 - 10.000nm, wherein Columnen-growth, the grain size, for example, a length of about 5 - 50μm and has a width of 10 -1,000nm. Furthermore, the non-metallic crystalline or sintered material has a thermal coefficient of linear expansion of less than 8 10 -6 / K or the balance spring 2 is using a wafer made of this material or silicon, for example by cutting and / or etching (masking and etching). The wafer is produced, for example, by epitaxial deposition of silicon. The cross-sectional area of the spring coil is, for example, 0.001-0.01 mm 2 .

Die Unruhfeder 2 ist an der Außenfläche ihrer Windungen mit einer z.B. thermisch erzeugten Schicht aus Siliziumoxid versehen. Diese Schicht besitzt eine Dicke von maximal 4µm, bevorzugt von maximal 3µm oder kleiner.The balance spring 2 is provided on the outer surface of its turns with a e.g. provided thermally generated layer of silicon oxide. This layer has a maximum thickness of 4 microns, preferably of at most 3 microns or smaller.

Die Schwingmasse bzw. der Schwingkörper, d.h. das Schwing- oder Unruhrad 3, welches beispielsweise die für derartige Räder übliche speichenradartige Form aufweist, ist aus Molybdän oder aus einer Legierung mit einem hohen Molybdän-Anteil gefertigt. Durch die Kombination von Silizium (für die Unruhfeder 2) und Molybdän (für das Unruhrad 3) wird ein in optimaler Weise temperaturkompensiertes mechanisches Schwingsystem erhalten, d.h. ein mechanisches Schwingsystem, dessen Gang- oder Frequenzgenauigkeit insbesondere auch unabhängig von Temperaturänderungen ist.The oscillating mass or the oscillating body, ie the oscillating or balance wheel 3, which has, for example, the usual spoked wheel-like form for such wheels, is made of Molybdenum or made of an alloy with a high molybdenum content. The combination of silicon (for the balance spring 2) and molybdenum (for the balance wheel 3) results in an optimally temperature-compensated mechanical vibration system, ie a mechanical vibration system whose gear or frequency accuracy is, in particular, independent of changes in temperature.

Die Figur 2 zeigt die Spiralfeder 2 nochmals in Einzeldarstellung. Eine Besonderheit dieser Spiralfeder besteht darin, dass sie im Bereich ihres außenliegenden Federendes bei 2.1 mehrfach wellenförmig ausgeführt ist. Durch diesen Bereich ergibt sich ein verbessertes, sehr gleichmäßiges Schwingungsverhalten der Spiralfeder 2.The FIG. 2 shows the coil spring 2 again in an individual representation. A special feature of this coil spring is that it is designed in the area of its outer spring end at 2.1 multiple wave-shaped. This area results in an improved, very uniform vibration behavior of the spiral spring 2.

Die Spiralfeder 2 mit dem Abschnitt 2.1 ist in vorteilhafter Weise auch für Schwingsysteme von Uhren, insbesondere Armbanduhren verwendbar, bei denen die Schwingmasse anders als vorstehend beschrieben ausgeführt ist.The spiral spring 2 with the section 2.1 is also advantageously used for oscillating systems of watches, in particular wristwatches, in which the oscillating mass is designed differently than described above.

Die Figur 3 zeigt in perspektivischer Darstellung ein Schwingsystem 1 a mit der Spiralfeder 2a und dem Schwing- oder Unruhrad 3a. Die Unruhfeder 2a sowie das Unruhrad 3a sind dem selben Material und/oder in der selben Weise hergestellt, wie dies vorstehend für die Spiralfeder 2 und das Unruhrad 3 beschrieben wurde.The FIG. 3 shows a perspective view of a vibrating system 1 a with the coil spring 2a and the oscillating or balance wheel 3a. The balance spring 2a and the balance wheel 3a are made of the same material and / or in the same manner as described above for the coil spring 2 and the balance wheel 3.

Das Unruhrad 3a ist speichenradartig ausgeführt, und zwar bestehend aus einem äußeren Ring 4, aus vier vom Ring 4 radial nach innen verlaufenden Speichen 5 und aus einem mittleren Nabenabschnitt 6, der die Öffnung 6.1 zur Befestigung der Unruh-Welle aufweist und einstückig mit den Speichen 5 und dem äußeren Ring 4 hergestellt ist.The balance wheel 3a is designed spoke-like, consisting of an outer ring 4, four radially extending from the ring 4 inwardly extending spokes 5 and a central hub portion 6, which has the opening 6.1 for attachment of the balance shaft and integral with the spokes 5 and the outer ring 4 is made.

Der äußere Ring 4 ist an seiner Innenseite mit einer umlaufenden Nut 7 sowie zwischen den Speichen 5 jeweils mit einem gabelartigen Befestigungsabschnitt 8 ausgebildet. An jedem Befestigungsabschnitt 8 ist ein Justierelement 9 vorgesehen, welches einstückig aus einem nicht magnetischen metallischen Material, z.B. aus Molybdän oder aus einem korrosionsbeständigen Stahl gefertigt ist. Mit den Justierelementen 9, die ebenso wie die Speichen 5 in gleichmäßigen Winkelabständen um die Achse des Unruhrades 3a bzw. der Öffnung 6.1 verteilt angeordnet sind, kann das für die Frequenz bzw. Schwingungsdauer des Schwingsystems maßgebliche dynamische Trägheitsmoment des Unruhrades 3a eingestellt werden. Die Befestigungsabschnitt 8 sind jeweils unterhalb der Nut 7 vorgesehen.The outer ring 4 is formed on its inside with a circumferential groove 7 and between the spokes 5 each having a fork-like attachment portion 8. At each mounting portion 8, an adjusting element 9 is provided, which is made in one piece of a non-magnetic metallic material, such as molybdenum or a corrosion-resistant steel. With the adjusting elements 9, as well as the spokes 5 at regular angular intervals about the axis of the balance wheel 3a and the Opening 6.1 are arranged distributed, the relevant for the frequency or oscillation period of the vibration system dynamic moment of inertia of the balance wheel 3a can be adjusted. The attachment portion 8 are each provided below the groove 7.

Die Justierelemente 9 bestehen hierfür aus einem kreisscheibenförmigen Körper 10 mit einem achsgleich mit der Achse dieses Körpers angeordneten und über eine Stirnseite des Zentrierelementes 9 wegstehenden Zapfen 11 mit kreiszylinderförmiger Außenfläche. Weiterhin ist im Körper 10 eine durchgehende, d.h. an beiden Stirnseiten des scheibenförmigen Körpers 10 offene und bogenförmig gekrümmte Ausnehmung 12 vorgesehen, die sich über einen Winkelbereich von etwas weniger als 180° um die Achse des Zentrierelementes 9 erstreckt, und zwar derart, dass das Zentrierelement 9 bzw. dessen Körper 10 an seinem Umfang einen durchgehenden Rand aufweist, der Massenschwerpunkt des Zentrierelementes 9 aber radial zur Achse des Zentrierelementes 9 versetzt ist. An der dem Zapfen 11 abgewandten Oberseite ist der Körper 10 weiterhin mit einer schlitzförmigen, sich radial oder in etwa radial zur Achse des Zentrierelementes erstreckenden Vertiefung 13 versehen, die die Angriffsoder Betätigungsfläche für ein Einstell-Werkstück, beispielsweise für einen Schraubenzieher bildet. Mit dem Zapfen 11 ist jedes Zentrierelement an einem Befestigungsabschnitt 8 um eine Achse parallel zur Achse des Unruhrades 3a drehbar vorgesehen, und zwar mit einer gewissen Schwergängigkeit dadurch, dass der jeweilige Zapfen 1 1 durch Einschnappen oder Verrasten an dem gabelartigen Befestigungsabschnitt 8 gehalten ist und jedes Justierelement 9 am Umfang mit seinem scheibenartigen Körper 10 in die Nut 7 hineinreicht, dort axial gesichert ist und radial gegen den Boden der Nut anliegt.For this purpose, the adjusting elements 9 consist of a circular-disk-shaped body 10 with a pin 11 which is arranged coaxially with the axis of this body and projecting beyond an end face of the centering element 9 with a circular-cylindrical outer surface. Furthermore, in the body 10 is a continuous, i. open and arcuately curved recess 12 is provided on both end faces of the disk-shaped body 10, which extends over an angular range of slightly less than 180 ° about the axis of the centering element 9, in such a way that the centering element 9 and its body 10 at its periphery has a continuous edge, the center of mass of the centering element 9 but is offset radially to the axis of the centering element 9. At the top 11 facing away from the pin 11, the body 10 is further provided with a slot-shaped, radially or approximately radially to the axis of the centering extending recess 13, which forms the attack or actuating surface for a setting workpiece, such as a screwdriver. With the pin 11, each centering element is rotatably provided on a mounting portion 8 about an axis parallel to the axis of the balance wheel 3a, with a certain stiffness in that the respective pin 1 1 is held by snapping or latching on the fork-like mounting portion 8 and each Adjusting element 9 extends on the periphery with its disc-like body 10 in the groove 7, where it is secured axially and bears radially against the bottom of the groove.

Die Montage der Justierelemente 9 am Ring 4 erfolgt also derart, dass jedes Justierelement 9 mit seinem Zapfen 1 1 radial auf den zugehörigen gabelartigen Befestigungsabschnitt 8 aufgeschoben wird. Durch Drehen oder Schwenken der Justierelemente 9 um die Achse ihrer Zapfen 1 1 können der Masseschwerpunkt jedes Justierelementes u.a. radial zur Achse des Unruhrades 3a verlagert und dadurch das dynamische Massenträgheitsmoment in der gewünschten Weise eingestellt werden. Nach der Einstellung der Justierelemente 9 werden diese durch einen geeigneten Kleber oder Fixierlack fixiert.The assembly of the adjusting elements 9 on the ring 4 is thus carried out such that each adjusting element 9 is pushed with its pin 1 1 radially on the associated fork-like mounting portion 8. By turning or pivoting the adjusting elements 9 about the axis of their pins 1 1, the center of mass of each adjusting element u.a. displaced radially to the axis of the balance wheel 3a and thereby set the dynamic moment of inertia in the desired manner. After adjustment of the adjusting elements 9 they are fixed by a suitable adhesive or fixing lacquer.

Die Unruhfeder 2a ist mit dem innenliegenden Ende in geeigneter Weise an der nicht dargestellten Unruhwelle befestigt. Das außenliegende Ende der Spiralfeder 2a ist an einem Federhalterklötzchen oder -klotz 14 eines durch Schwenken um die Achse des Unruhrades 3a einstellbaren Federhalters 15 gehalten.The balance spring 2a is fastened with the inner end in a suitable manner to the balance shaft, not shown. The outer end of the coil spring 2a is at a Federhalterklötzchen or block 14 held by pivoting about the axis of the balance wheel 3a adjustable spring holder 15.

Wie insbesondere der Figur 6 zu entnehmen ist, ist der aus metallischem Werkstoff hergestellte Federhalterklotz 14 einem Abschnitt 14.1, mit dem er in einer Öffnung 16 des Federhalters 15 durch Einklipsen oder Verrasten befestigt werden kann, sowie mit einem Abschnitt 14.2 mit zwei Gabel- oder Klemmarme 17 und 18 ausgeführt, die zwischen sich einen Klemmspalt 19 bilden, in dem die Spiralfeder 2a durch Klemmen befestigt werden kann. Der Klemmspalt 19 ist zu der dem Abschnitt 14.1 abgewandten Unterseite sowie auch zu zwei einander gegenüberliegenden Stirnseiten des Federhalterklotzes 14 offen ist und an der dem Abschnitt 14.1 zugewandten Seite durch eine Fläche 20.1 begrenzt.How the particular FIG. 6 it can be seen, the spring holder block 14 made of metallic material is a section 14.1, with which it can be secured in an opening 16 of the spring holder 15 by clipping or latching, as well as with a section 14.2 with two fork or clamping arms 17 and 18 executed, which form between them a clamping gap 19, in which the coil spring 2a can be fixed by clamping. The clamping gap 19 is open to the underside facing away from the portion 14.1 as well as to two opposite end faces of the spring holder block 14 and on the side facing the portion 14.1 bounded by a surface 20.1.

Im montierten Zustand ist der Federhalterklotz 14 mit seiner Längserstreckung parallel zur Achse des Unruhrades 3a orientiert. Bei der Montage des Schwingsystems wird der außenliegende Abschnitt der Spiralfeder 2a von der dem Abschnitt 14.1 bzw. demIn the assembled state, the spring holder block 14 is oriented with its longitudinal extent parallel to the axis of the balance wheel 3a. During assembly of the oscillating system, the outer portion of the coil spring 2a of the section 14.1 or

Federhalter 15 abgewandten Unterseite des Federhalterklotzes 14 her in den Klemmspalt 19 eingeführt. Damit ist die Spiralfeder 2a bereits an dem am Federhalter 15 montierten Federhalterklotz 14 derart gehalten, dass noch eine Änderung und Einstellung der wirksamen Federlänge, die für die Frequenz des mechanischen Schwingungssystems erforderlich ist, durch Verschieben der Spiralfeder 2a relativ zum Federhalterklotz 14 bei Aufrechterhaltung der Klemmverbindung möglich ist. Nach dieser Einstellung wird die Verbindung zwischen der Spiralfeder 2a und dem Federhalterklotz 14 fixiert, und zwar wiederum unter Verwendung eines geeigneten Klebers oder Fixierlacks.Pen holder 15 opposite bottom of the spring holder block 14 forth introduced into the nip 19. Thus, the coil spring 2a is already held on the spring holder 15 mounted on the spring holder block 14 such that even a change and adjustment of the effective spring length, which is required for the frequency of the mechanical vibration system by moving the coil spring 2a relative to the spring holder block 14 while maintaining the clamp connection is possible. After this adjustment, the connection between the coil spring 2a and the spring holder block 14 is fixed, again using a suitable adhesive or fixing varnish.

Die Justierelemente 9, insbesondere aber der jeweilige Federhalterklotz 14 sind bevorzugt als sogenannte LIGA-Teile mit dem dem Fachmann bekannten LIGA-Verfahren gefertigt, welches durch die Verfahrensschritte Lithographie, Galvanik und Abformung die Herstellung von metallischen Formkörpern mit sehr kleinen Abmessungen ermöglicht.The adjusting elements 9, but in particular the respective spring holder block 14 are preferably manufactured as so-called LIGA parts with the LIGA method known to those skilled in the art, which allows the production of metallic moldings with very small dimensions by the process steps lithography, electroplating and impression.

In der Figur 7 ist schematisch die Ausbildung einer Lager- und/oder Geleit- und/oder Montagefläche eines Funktionselementes 21 wiedergegeben, welches aus Silizium, vorzugsweise aus polykristallinen, beispielsweise aus epitaktisch abgeschiedenem polykristallinen Silizium besteht. Die die Lager und/oder Gleit- und/oder Montagefläche bildende Oberfläche 22 des Funktionselementes 21 ist von einer mehrlagigen Beschichtung gebildet, und zwar zumindest bestehend aus einer an das Silizium-Material des Funktionselementes 21 unmittelbar anschließenden Beschichtung 23 aus Siliziumoxid, die z.B. durch thermische Oxidation oder auf andere geeignete Weise erzeugt ist. Auf die Beschichtung 23 folgt eine metallische Zwischenschicht 24, die bevorzugt aus Titan-Nitrid und/oder Titan-Carbid und/oder Wolfram-Carbid besteht und z.B. in einem PVD-Beschichtungsverfahren aufgebracht ist. Die Zwischenschicht 24 kann ihrerseits mehrschichtig ausgeführt sein, und zwar in mehreren Einzelschichten z.B. aus den vorgenannten Materialien. Auf die Zwischenschicht 24 folgt eine die eigentliche Außenfläche bildende Beschichtung 25, die als DLC-Beschichtung ausgeführt und beispielsweise durch CVD-Abscheidung erzeugt ist. Der Erfindung liegt die Erkenntnis zugrunde, dass durch die metallische Zwischenschicht 24 eine verbesserte Haftung der Schicht 25 an der Schicht 23 erreicht wird, sodass ein Abplatzen oder Lösen der Schicht 25 von dem Funktionselement 21 bei der Montage und während der Verwendung einer Uhr wirksam verhindert ist. Dies gilt nicht nur für Lager- und Gleitflächen, sondern insbesondere auch für Montageflächen und dabei speziell auch für solche, mit oder an denen eine klemmende Befestigung erfolgt, beispielsweise eine klemmende Befestigung der Spiraloder Unruhfeder oder des Schwingkörpers an einer Welle usw.In the FIG. 7 schematically the formation of a bearing and / or escort and / or mounting surface of a functional element 21 reproduced, which consists of silicon, preferably polycrystalline, for example, epitaxially deposited polycrystalline silicon. The bearing and / or sliding and / or mounting surface forming surface 22 of the functional element 21 is formed by a multilayer coating, at least consisting of a directly adjoining the silicon material of the functional element 21 coating 23 of silicon oxide, for example by thermal Oxidation or produced in any other suitable manner. The coating 23 is followed by a metallic intermediate layer 24, which preferably consists of titanium nitride and / or titanium carbide and / or tungsten carbide and is applied, for example, in a PVD coating process. The intermediate layer 24 may in turn be designed in a multi-layered manner, specifically in several individual layers, for example, of the abovementioned materials. The intermediate layer 24 is followed by a coating 25 forming the actual outer surface, which is embodied as a DLC coating and produced, for example, by CVD deposition. The invention is based on the finding that improved adhesion of the layer 25 to the layer 23 is achieved by the metallic intermediate layer 24, so that the layer 25 is effectively prevented from flaking or loosening by the functional element 21 during assembly and during use of a clock , This is true not only for storage and sliding surfaces, but especially for mounting surfaces and especially for those with or on which a clamping attachment is done, such as a clamping attachment of the spiral or balance spring or the oscillating body to a shaft, etc.

Die Erfindung wurde voranstehend an Ausführungsbeispielen beschrieben. Es versteht sich, dass zahlreiche Änderungen sowie Abwandlungen möglich sind, ohne dass dadurch der der Erfindung zugrundeliegende Erfindungsgedanke verlassen wird. Anstelle des vorgenannten Silizium-Material (z.B. polykristallinem Silizium) eignet sich insbesondere auch ein Sintermaterial auf Silizium-Basis bzw. Silizium-Sintermaterial und/oder der nicht metallische kristalline oder gesinterte Werkstoff mit der Korngröße im Bereich zwischen 10 und 50 000 nm und mit dem thermischen Längenausdehnungskoeffizienten kleiner 8 x 10-6/K.The invention has been described above by means of exemplary embodiments. It is understood that numerous changes and modifications are possible without thereby departing from the inventive concept underlying the invention. Instead of the aforementioned silicon material (eg polycrystalline silicon), in particular a sintered material based on silicon or silicon sintered material and / or the non-metallic crystalline or sintered material with the grain size in the range between 10 and 50 000 nm and with the thermal expansion coefficients smaller 8 x 10 -6 / K.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

  • 1 , 1 a mechanisches Schwingsystem1, 1 a mechanical vibration system
  • 2, 2a Unruhfeder2, 2a balance spring
  • 3, 3a Unruhrad3, 3a balance wheel
  • 4 Reifen oder Ring4 tires or ring
  • 5 Speiche5 spoke
  • 6 nabenartiger Abschnitt6 hub-like section
  • 7 Nut7 groove
  • 8 Befestigungsabschnitt8 fixing section
  • 9 Justierelement9 adjustment element
  • 10 scheibenförmiger Körper des Justierelementes 910 disc-shaped body of the adjusting element. 9
  • 1 1 Zapfen des Justierelementes 91 1 pin of the adjusting element 9
  • 12 Ausnehmung12 recess
  • 1 3 Schlitz1 3 slot
  • 14 Federhalterklötzchen14 spring holder blocks
  • 14.1 , 14.2 Abschnitt des Federhalterklötzchens14.1, 14.2 section of the spring holder block
  • 15 Federhalter15 pen holder
  • 16 Öffnung16 opening
  • 17, 18 Klemmarm17, 18 clamping arm
  • 19 Klemmspalt19 nip
  • 20 Anlagefläche20 contact surface
  • 21 Funktionselement21 functional element
  • 22 Oberfläche des Funktionselementes 2122 surface of the functional element 21st
  • 23, 24, 25 Beschichtung oder Lage23, 24, 25 coating or layer

Claims (10)

  1. A mechanical oscillation system for clocks, in particular wristwatches, having a balance spring (2, 2a) and a balance wheel (3, 3a) having a shaft for fastening the balance spring (2, 2a), wherein
    the balance spring (2, 2a) consists of polycrystalline silicon having elongated grains, which result because of column growth, and the elongated grains have a grain width in the range between 10 and 1000 nm and a grain length in the range between 2 and 50 µm; and a turn cross section of the balance spring (2, 2a) is 0.001 mm2 to 0.3 mm2.
  2. The mechanical oscillation system according to Claim 1, wherein the grain length is in the range between 5 and 50 µm.
  3. The mechanical oscillation according to any one of the preceding claims, wherein the turn cross section of the balance spring (2, 2a) is 0.001 mm2 to 0.01 mm2 or 0.001 mm2 to 0.03 mm2.
  4. The mechanical oscillation system according to any one of the preceding claims, wherein the coefficient of linear expansion of the balance spring (2, 2a) is less than 8 x 10-6/K.
  5. The mechanical oscillation system according to any one of the preceding claims, wherein the balance spring (2, 2a) is provided on the external surface of the turns thereof with a thermally produced layer made of silicon oxide and this layer has a thickness of at most 4 µm, preferably at most 3 µm or less.
  6. The mechanical oscillation system according to any one of the preceding claims, wherein the balance spring (2, 2a) is fastened with an inner end in a suitable manner to the shaft and an outer end of the balance spring (2, 2a) is held by a spring holder block (14) on a spring holder (15), which is adjustable by pivoting about an axis of the balance wheel (3, 3a).
  7. The mechanical oscillation system according to Claim 1, wherein the balance wheel (3, 3a) consists of an outer ring (4), spokes extending radially inward (5), and a middle hub section (6) for fastening the balance shaft, and wherein the balance wheel (3, 3a) is produced in one piece with the spokes (5) and the outer ring (4).
  8. The mechanical oscillation system according to Claim 7, wherein the outer ring (4) has fastening sections (8) formed on its inner side between the spokes (5), wherein an adjustment element (9) is provided on each fastening section (8).
  9. The mechanical oscillation system according to any one of the preceding claims, wherein the balance wheel (3, 3a) or the balance spring (2, 2a) form at least one bearing and/or sliding and/or installation surface, at which the surface (22) of the balance wheel (3, 3a) or the balance spring (2, 2a) consists of an inner layer (23) made of silicon oxide and a DLC coating (25), which forms the outer surface.
  10. The mechanical oscillation system according to Claim 9, wherein at least one single layer or multilayer metallic intermediate layer (24), which consists of titanium nitride and/or titanium carbide and/or tungsten carbide, for example, is provided between the outer layer formed by the DLC coating (25) and the inner layer (23) made of silicon oxide.
EP10721923.0A 2009-02-06 2010-02-04 Mechanical oscillating system for watches and functional element for watches Revoked EP2394202B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16165465.2A EP3101484A1 (en) 2009-02-06 2010-02-04 Mechanical oscillation system for timepieces and method for manufacturing a mechanical oscillation system for watches

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
DE102009007973 2009-02-06
DE102009013741 2009-03-20
DE102009025645 2009-06-17
DE102009030539 2009-06-24
DE102009031841A DE102009031841A1 (en) 2009-02-06 2009-07-03 Mechanical oscillating system for watch i.e. wrist watch, has balance spring made of non-metallic crystalline or sintered material, and oscillating body for temperature compensation and made of molybdenum
DE102009050045 2009-09-24
DE102009048580 2009-10-07
DE102009060024 2009-12-21
DE102010004025 2010-01-04
DE102010005257 2010-01-20
DE102010006790A DE102010006790A1 (en) 2009-12-21 2010-02-04 Mechanical oscillating system for watch i.e. wrist watch, has balance spring made of non-metallic crystalline or sintered material, and oscillating body for temperature compensation and made of molybdenum
PCT/DE2010/000126 WO2010088891A2 (en) 2009-02-06 2010-02-04 Mechanical oscillating system for watches and functional element for watches

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EP16165465.2A Division-Into EP3101484A1 (en) 2009-02-06 2010-02-04 Mechanical oscillation system for timepieces and method for manufacturing a mechanical oscillation system for watches

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EP2394202B1 true EP2394202B1 (en) 2016-09-07

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EP (2) EP3101484A1 (en)
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EP2474871B1 (en) * 2011-01-06 2017-05-10 ETA SA Manufacture Horlogère Suisse Index pin for sprung balance
EP2511229B1 (en) * 2011-04-12 2017-03-08 GFD Gesellschaft für Diamantprodukte mbH Micromechanical component with reinforced flanks
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WO2010088891A3 (en) 2010-11-25
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DE202010018420U1 (en) 2016-06-22
WO2010088891A2 (en) 2010-08-12

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