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EP2042739A1 - Vacuum pump with two helical rotors - Google Patents

Vacuum pump with two helical rotors Download PDF

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Publication number
EP2042739A1
EP2042739A1 EP08165208A EP08165208A EP2042739A1 EP 2042739 A1 EP2042739 A1 EP 2042739A1 EP 08165208 A EP08165208 A EP 08165208A EP 08165208 A EP08165208 A EP 08165208A EP 2042739 A1 EP2042739 A1 EP 2042739A1
Authority
EP
European Patent Office
Prior art keywords
rotor
pump
equipment
transverse
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08165208A
Other languages
German (de)
French (fr)
Other versions
EP2042739B1 (en
Inventor
BenoƮt BARTHOD
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP2042739A1 publication Critical patent/EP2042739A1/en
Application granted granted Critical
Publication of EP2042739B1 publication Critical patent/EP2042739B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors

Definitions

  • the present invention relates to pumping devices capable of generating and maintaining a suitable vacuum in equipment.
  • Generating and maintaining a vacuum in equipment is commonly used in industrial semiconductor manufacturing processes, with certain manufacturing steps to be performed under vacuum.
  • the equipment is connected to a pumping device that lowers the internal pressure of the equipment to a suitable vacuum.
  • the known pumping devices generally comprise at least one primary pump, placed at the discharge of the vacuum line, and at least one secondary pump connected in series in the flow path of the gas pumped between the primary pump and the pump. equipment.
  • a first known pumping device is used for applications requiring that the pressure in the equipment be within a pressure range of about 10 -2 mbar to about 10 mbar. It is usually used a secondary pump type ROOTS. This ROOTS pump is connected to the suction of the primary pump. This solution is typically used to quickly pump large volume equipment or large process streams.
  • ROOTS pumps have two parallel bean cross section rotors defining intermeshing lobes.
  • the suction and discharge ports are radial, perpendicular to the axes of rotation of the rotors.
  • the pumping devices thus formed are bulky and heavy, and are important generators of vibrations and noise.
  • the industrialists deport the pumping unit away from the equipment using pipes easily reaching several meters in length.
  • these lines must have a high conductance. They are therefore large and bulky and their interior volume is added to that of the equipment: the pumping system is therefore less reactive because it has to pump a large volume to establish the internal gas pressure in the equipment.
  • it is sometimes necessary to maintain the gases at high temperature inside the vacuum line (particular chemistries with gas to maintain in volatile form with high temperatures up to 150 Ā° C). These pumping groups then require expensive heaters to keep these large pipes at high temperatures.
  • ROOTS pumps with radial input and output always generate vibrations and noise.
  • ROOTS pumps placed at the outlet of the equipment to be pumped, they generate retrograde pollution by an effect of returning the particles and powders in the equipment.
  • ROOTS pumps normally used in position in which the axes of the rotors are horizontal, have the disadvantage of being very cumbersome on the ground.
  • secondary pumps of the molecular or turbomolecular type may be employed.
  • this type of pump can not be used for applications requiring gas heating in the pumping device and / or in higher pressure applications.
  • Chemistries too, evolve and require pumping devices to always be more efficient in terms of pumping rate. These new congestion and flow criteria require finding new pumping devices that are less cumbersome and less costly, that are clean and have a high pumping rate.
  • the problem proposed by the present invention is to design a vacuum pump with high pumping rate, which can be used as a secondary pump, and sufficiently compact, low noise and low pollution for it can be placed in the immediate vicinity of the equipment without disrupting its operation.
  • the vacuum pump of the invention will also be able to pump powders as well as other particles generated in the equipment.
  • the invention provides a more responsive pumping system for the efficient generation and maintenance of a vacuum in equipment.
  • each of the two rotor bodies has a ROOTS type transverse profile, and is designed with a quarter-turn helical twist between the first rotor transverse bearing surface and the second rotor transverse bearing surface.
  • the inlet orifice being located along a first side of the plane defined by the axes of the rotors, and the outlet orifice being located along a second side of the plane defined by the axes of the rotors.
  • This quarter-turn helical twist provides the best compromise between rotor diameter.
  • a pumping rate of about 4000 m 3 / h can be achieved.
  • control and supply means for controlling the speed of rotation of the rotors.
  • the pumping rate and the upstream pressure can then be easily adjusted according to the equipment and the processing steps.
  • the single-stage vacuum pump thus formed has the advantages of ROOTS pumps or screw pumps, ie a large pumping rate. Its special design also gives it the advantage of generating less vibrations and fewer noises, and having a large flow rate at a smaller volume thanks to the possibility of faster rotation.
  • This vacuum pump can therefore be placed in the immediate vicinity of equipment in which it is desired to generate and maintain a vacuum, and can correctly fulfill the functions of secondary pump.
  • the pump according to the invention comprises two rotor bodies each having lobes which have a cross section whose contour has a profile in conventional type ROOTS pumps.
  • This profile provides the best compromise between the external size of the pump according to the invention and the flow rate of the order of 4000 m 3 / h that is desired.
  • the rotor bodies may each comprise two lobes.
  • each rotor body comprises at least three lobes.
  • One advantage is a better dynamic balance, for the reduction of noise and vibrations.
  • Another advantage is a better compression ratio.
  • a disadvantage is a reduction in the pumping rate at the same size, and a greater complexity of machining.
  • the vacuum pump of the invention may comprise means for maintaining it in a position in which the axes of the rotors are oriented, with respect to a vertical direction, at an orientation angle less than 90 Ā°.
  • the orientation angle may be chosen less than 45 Ā° with respect to the vertical. Such an angle can further reduce the footprint of the vacuum pump of the invention, and promotes the expulsion of particles.
  • the particular design of the vacuum pump of the invention allows its use along the vertical axis. Congestion is then minimum.
  • the vacuum pump according to the invention may comprise means for maintaining it in a position in which the inlet orifice is higher than the outlet orifice.
  • the vacuum pump according to the invention is made from materials which are chosen to withstand up to a temperature of about 150 Ā° C.
  • the choice of materials makes it possible to use the vacuum pump of the invention at the temperatures usually required to make certain gases volatile in the vacuum lines.
  • Such a temperature can also be achieved by a judicious choice of the materials constituting the insulation part between the pumping part and the mechanical part of the pump.
  • the vacuum pump comprises a motor mounted on one of the drive shafts between the guide means.
  • the vacuum pump comprises two synchronized motors each mounted on a respective drive shaft between the guide means.
  • the secondary suction inlet is disposed facing the outlet of the equipment, and the inlet pipe directly connects the secondary suction inlet to the outlet of the equipment.
  • the inlet pipe can then be very short or non-existent.
  • the single-stage vacuum pump as designed according to the present invention has the advantage of being positioned in the immediate vicinity of the equipment.
  • the pipes are smaller than in the pumping devices of the prior art. Fewer pipelines means less space in the clean room, and less volume to pump, so more responsiveness to the pumping system.
  • the pumping system comprises control and supply means for controlling the speed of the secondary pump.
  • the control and supply means control the secondary pump so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure.
  • the pumping system further comprises a valve placed at the discharge of the secondary pump, and control and supply means for controlling the opening of the valve.
  • the pumping system comprises a valve placed at the discharge of the secondary pump, the control and supply means acting on the speed of the secondary pump and / or on the opening of the valve so as to regulate the pressure in the equipment.
  • FIG. 1 illustrates a vacuum pump according to one embodiment of the invention.
  • This pump comprises a pump body in which there are two main parts.
  • a first main part comprises the mechanical drive elements 19 of the pump of the invention.
  • a second main portion comprises an envelope 1 sealingly enclosing the elements constituting the pump portion 22 of the pump.
  • the first main portion includes a first drive shaft 21a and a second drive shaft 21b, parallel to each other.
  • the two drive shafts 21a and 21b are held by bearings 29a, 29b, 29c and 29d.
  • a motor rotor 30 is attached to the second drive shaft 21b between the bearings 29c and 29d and rotates in a fixed motor stator 31 in the pump body between said bearings 29c and 29d.
  • Electrical conductors 20 supply the motor stator 31 with electrical energy to drive the second drive shaft 21b in rotation.
  • the first drive shaft 21a defines a first axis I-I and the second drive shaft 21b defines a second axis II-II.
  • a driving gear 32 is keyed on the second drive shaft 21b and meshes with a driven gear 33.
  • This driven gear 33 is keyed to the first drive shaft 21a.
  • the second main part comprises the envelope 1 which defines two parallel cylindrical chambers 2a and 2b, centered on the axes I-I and II-II, overlapping transversely. These parallel cylindrical chambers 2a and 2b are limited by cylindrical peripheral surfaces 3a and 3b and transverse end surfaces 10 and 12.
  • An inlet passage 4 is adapted to be connected to equipment in which the vacuum must be made and to allow the fluids to enter the pump according to the invention.
  • the inlet passage 4 communicates with the interior of the casing 1 via an inlet orifice 9 provided essentially in the first transverse end surface 10.
  • Two parallel rotors A and B are each rotatably disposed in a respective cylindrical chamber 2a or 2b about a respective axis II or II-II.
  • the rotors A and B each respectively have a rotor body 6a and 6b and a downstream coaxial shaft 62a and 62b.
  • the rotor bodies 6a and 6b are axially limited by first coplanar transverse surface surfaces 7a and 7b and by coplanar second cross-surface bearing surfaces 8a and 8b.
  • Each rotor A or B is fixed cantilevered respectively by its downstream coaxial shaft 62a or 62b, at the end of the first drive shaft 21a or the second drive shaft 21b of the first main portion.
  • the rotors are held cantilevered by guide means (the bearings 29a-29d) located downstream of the rotor bodies 6a and 6b in the direction of flow of the pumped fluids. There is no guiding means in the low gas pressure zone upstream of the rotor bodies 6a and 6b.
  • the guide means 29a-29d may be plain bearings, or magnetic bearings, or gas bearings, for example.
  • a thermally insulating wall 100 separates the first main portion from the second main portion. In this way, it is possible to heat the second main part which contains the pumped gases, in order to prevent their deposition on the pumping elements, while maintaining a lower temperature in the first main part provided with holding means and rotor drive.
  • a motor for example consisting of a rotor 30 and a stator 31, can be mounted directly on one of the drive shafts 21a or 21b between two guide means 29a and 29b, or 29c and 29d. This makes it possible to increase the compactness of the pump with respect to a motor mounted at the end of the shaft after the gears.
  • the vacuum pump according to the invention operates with two synchronized motors each mounted on a respective drive shaft 21a or 21b between the guide means. This allows to have more power in a given size.
  • An outlet passage 5 passes through the casing 1 and is positioned so that the inlet passage 4 and the outlet passage 5 pass through the casing 1 in two generally opposite positions.
  • the outlet passage 5 communicates with the interior of the casing 1 through an outlet orifice 11 provided in the second transverse end surface 12.
  • the inlet orifice 9 and the outlet orifice 11 are, however, offset with respect to each other, while being oriented axially: the inlet orifice 9 is cut by the cutting plane, while the outlet orifice 11 is in front of the cutting plane.
  • the figure 3 is a section according to the plane CC of the figure 1 .
  • the same essential elements are identified by the same numerical references as on the figures 1 and 2 .
  • the rotor A comprises a rotor body 6a having two opposing lobes 60a and 61a.
  • the rotor B comprises a rotor body 6b having two opposing lobes 60b and 61b.
  • the rotor bodies 6a and 6b are each rotatably disposed in a respective cylindrical chamber 2a and 2b.
  • Each lobe 60a, 61a, 60b, 61b of each rotor body 6a and 6b has a respective radially extending surface 25a or 26a and 25b or 26b, cooperating sealingly with the cylindrical peripheral surface 3a or 3b of the chamber respective cylindrical 2a or 2b during a portion of the rotary stroke of the rotor A or B corresponding.
  • the cross sections of the rotor bodies 6a and 6b have contours similar to the contours of the conventional ROOTS profiles.
  • the figure 4 is a top view of the pump according to the invention.
  • the same essential elements are identified by the same numerical references as on the figures 1 , 2 and 3 .
  • the Figures 5 and 6 illustrate the pairs of rotor bodies 6a and 6b respectively in perspective and in plan view.
  • each rotor body 6a and 6b has a helical twist about a respective longitudinal axis II or II-II between the first transverse bearing surface 7a or 7b and the second transverse bearing surface 8a or 8b, the helical torsions of the rotors being in opposite directions.
  • This helical twist of the ROOTS type rotor profiles makes it possible to have suction and discharge ports on the walls perpendicular to the axes and thus to have axial pumping.
  • the figure 4 also illustrates the offset between the inlet passage 4 and the outlet passage 5.
  • each of the two rotor bodies 6a and 6b is designed with a quarter-turn helical twist between the first and second transverse bearing surfaces 7a, 7b, 8a and 8b.
  • the inlet orifice 9 is located along a first side of the plane defined by the axes II and II-II of the rotor bodies 6a and 6b, and the outlet orifice 11 is situated along the second side of the plane defined by the II and II-II axes of the rotor bodies 6a and 6b.
  • the bodies of rotors 6a and 6b illustrated in the figures are relatively short, their axial height H being less than or equal to their overall diameter D.
  • the H / D ratio is less than 1, preferably about 0.6.
  • the motor formed by the rotor 30 and the stator 31 is positioned on the second drive shaft 21b between the bearings 29c and 29d, increasing the compactness of the pump.
  • the stator 31 is fed through the electrical conductors 20. This has the effect of rotating the second drive shaft 21b which rotates, via the gears 32 and 33, the first drive shaft 21a.
  • the rotors A and B mechanically coupled to drive shafts 21a and 21b are then rotated in opposite directions from each other.
  • the fluids to be pumped continuously enter the pump of the invention through the inlet orifice 9 and fill a volume between the rotor bodies 6a and 6b.
  • the rotor bodies 6a and 6b while still rotating on themselves, move said fluid-filled volume towards the outlet port 11. During a part of its displacement, the fluid-filled volume is isolated from both the fluid and the fluid. inlet port 9 and outlet port 11. Then, the fluid-filled volume is in connection with outlet port 11, and the fluids are expelled.
  • the pumping continues with the following volumes.
  • the table below validates certain qualities of a single-stage vacuum pump of the invention compared to a conventional single-stage ROOTS type pump.
  • This table compares the performance of the pump of the invention (I) compared to a conventional ROOTS type pump (R) of the same nominal flow, in terms of speed, dimensions, volume, weight and power.
  • Nominal flow m 3 / h) Rotation frequency (Hz) Dimensions (mm) Volume (liters) Weight (kg) Motor power (kW) I 000 200 540 450 300 70 150 6 R 4000 70 1240 570 400 280 430 11 1/4 1/3 1/2
  • the pump of the invention is less bulky, has a much higher rotational speed, and its engine consumes less power.
  • the design of the pump according to the invention makes it possible, compared to a conventional ROOTS pump of the same flow rate, to reduce the volume. of the pump by a factor of 4, its weight by a factor of 3 and its power consumption by a factor of about 2.
  • the pump according to the invention can operate efficiently over a wide range of flow rates, for example from 1,000 m 3 / h to more than 4,000 m 3 / h by varying its speed of rotation and at low energy.
  • the rotor bodies 6a and 6b have a helical twist of a quarter turn.
  • a helical twist of different angular value thereby lengthening the rotors.
  • Twisting a half turn would form a second intermediate fluid passage and would constitute a second pumping stage.
  • the resultant pump would be two-stage.
  • the figure 7 illustrates the pumping system according to the invention.
  • This system consists of equipment 13 in which it is desired to ensure an appropriate vacuum.
  • An output 13a of the equipment 13 is connected to the secondary suction inlet 15a of a secondary pump 15 via an inlet pipe 16.
  • the secondary pump 15 is of a type as described previously, with two rotors A and B ( figure 1 ) with helical twist.
  • the secondary pump 15 has a discharge outlet 15b which is connected to the suction inlet 14a of a primary pump 14 via an intermediate pipe 17.
  • the discharge outlet 14b of the primary pump 14 allows the system according to the invention to repress at atmospheric pressure.
  • the secondary suction inlet 15a is disposed opposite the outlet of the equipment 13a, and the inlet pipe 16 directly connects the secondary suction inlet 15a to the outlet of the equipment 13a.
  • the inlet pipe 16 is as short as possible, and may be non-existent in the case of a direct coupling of the secondary pump 15 to the equipment 13. This avoids the additional volumes to be pumped, and the losses of conductance due to pipes. We can then further reduce the size of the secondary pump 15.
  • the primary pump 14 is deported away from the equipment, for example outside the manufacturing room, while being connected to the pump secondary 15 by a relatively long intermediate pipe 17, limiting the size of the pumping system in the manufacturing room, and avoiding disturbing the equipment 13 by vibration, noise, or other nuisance.
  • the gas transferred to the exhaust is at a pressure 10 to 100 times higher than direct output of the process chamber, which allows to reduce the diameter of the pipelines transferring the process gases to the primary pump and therefore the cost of connection.
  • the particle traps may be smaller and placed downstream of the secondary pump 15 instead of being at the chamber outlet, thus avoiding phenomena of retro-diffusion of particles in the process chamber.
  • the removal of the intermediate lines between the equipment 13 and the secondary pump 15 reduces the costs of the connections, and reduces the power consumption.
  • the rotation speed of the pump rotors A and B can be controlled by control and supply means 18 which supply the electrical energy to the motor (30-31, figure 1 ) of the secondary pump 15 of the invention. Due to the position of the secondary pump 15 in the immediate vicinity of the equipment 13, a secondary pump speed variation 15 or a variation in pressure at its discharge quickly react on the equipment.
  • control and supply means 18 can act on the speed of the secondary pump 15 so as to regulate the pressure in the equipment 13.
  • a valve 40 can be provided placed at the discharge of the secondary pump 15.
  • the control and supply means 18 then drive the opening of the valve 40, which modifies the discharge pressure.
  • the modification of the discharge pressure causes the modification of the compression ratio of the pump and therefore the modification of the suction pressure, which itself is the pressure in the equipment 13.
  • the control means and power supplies 18 can thus controlling the opening of the valve 40 so as to regulate the pressure in the equipment 13, for example.
  • control and supply means 18 control the secondary pump 15 so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure
  • control means and feed 18 control the opening of the discharge valve 40 so as to control the suction pressure by the discharge pressure.
  • the document EP-1 475 535 teaches how to pilot the secondary pump for this.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The pump has a cover (1) defining cylindrical chambers (2a, 2b) bounded by cylindrical peripheral surfaces and transverse end surfaces, and helical rotors (A, B) respectively rotated in the chambers, where the rotors include rotor bodies (6a, 6b), respectively. An inlet passage (4) and an outlet passage (5) communicate inside the cover respectively by an inlet orifice (9) and an outlet orifice (11) in the transverse end surfaces. The rotors are held in overhang by bearings located downstream not upstream of the rotor bodies in a flowing direction of a pumped fluid.

Description

La prƩsente invention concerne les dispositifs de pompage capables de gƩnƩrer et d'entretenir un vide appropriƩ dans un Ʃquipement.The present invention relates to pumping devices capable of generating and maintaining a suitable vacuum in equipment.

La gĆ©nĆ©ration et le maintien d'un vide dans un Ć©quipement sont couramment utilisĆ©s dans les processus industriels de fabrication de semi-conducteurs, certaines Ć©tapes de fabrication devant ĆŖtre exĆ©cutĆ©es sous vide.Generating and maintaining a vacuum in equipment is commonly used in industrial semiconductor manufacturing processes, with certain manufacturing steps to be performed under vacuum.

Durant de telles Ʃtapes de fabrication, l'Ʃquipement est raccordƩ Ơ un dispositif de pompage qui abaisse la pression interne de l'Ʃquipement jusqu'Ơ un vide appropriƩ.During such manufacturing steps, the equipment is connected to a pumping device that lowers the internal pressure of the equipment to a suitable vacuum.

En pratique, les dispositifs connus de pompage comprennent gƩnƩralement au moins une pompe primaire, placƩe au refoulement de la ligne de vide, et au moins une pompe secondaire connectƩe en sƩrie dans le chemin d'Ʃcoulement des gaz pompƩs entre la pompe primaire et l'Ʃquipement.In practice, the known pumping devices generally comprise at least one primary pump, placed at the discharge of the vacuum line, and at least one secondary pump connected in series in the flow path of the gas pumped between the primary pump and the pump. equipment.

Un premier dispositif de pompage connu est utilisƩ pour les applications nƩcessitant que la pression dans l'Ʃquipement soit comprise dans un intervalle de pressions allant d'environ 10-2 mbar Ơ environ 10 mbar. On utilise alors habituellement une pompe secondaire de type ROOTS. Cette pompe ROOTS est reliƩe Ơ l'aspiration de la pompe primaire. Cette solution est gƩnƩralement utilisƩe pour pomper rapidement des Ʃquipements de gros volume ou des flux de procƩdƩs importants.A first known pumping device is used for applications requiring that the pressure in the equipment be within a pressure range of about 10 -2 mbar to about 10 mbar. It is usually used a secondary pump type ROOTS. This ROOTS pump is connected to the suction of the primary pump. This solution is typically used to quickly pump large volume equipment or large process streams.

Les pompes ROOTS classiques ont deux rotors parallĆØles Ć  section transversale en haricot dĆ©finissant des lobes engrenĆ©s. Les orifices d'aspiration et de refoulement sont radiaux, perpendiculaires aux axes de rotation des rotors.Conventional ROOTS pumps have two parallel bean cross section rotors defining intermeshing lobes. The suction and discharge ports are radial, perpendicular to the axes of rotation of the rotors.

Cependant, les dispositifs de pompage ainsi constituĆ©s sont encombrants et lourds, et sont d'importants gĆ©nĆ©rateurs de vibrations et de bruits. Pour limiter ces inconvĆ©nients, les industriels dĆ©portent le groupe de pompage loin de l'Ć©quipement Ć  l'aide de canalisations atteignant facilement plusieurs mĆØtres de longueur. Pour maintenir la capacitĆ© de pompage souhaitĆ©e, ces canalisations doivent avoir une grande conductance. Elles sont donc larges et encombrantes et leur volume intĆ©rieur s'ajoute Ć  celui de l'Ć©quipement : le systĆØme de pompage est par consĆ©quent moins rĆ©actif car il doit pomper un grand volume pour Ć©tablir la pression gazeuse interne dans l'Ć©quipement. D'autre part, il est parfois nĆ©cessaire de maintenir les gaz Ć  haute tempĆ©rature Ć  l'intĆ©rieur de la ligne de vide (chimies particuliĆØres avec gaz Ć  maintenir sous forme volatile avec des tempĆ©ratures Ć©levĆ©es allant jusqu'Ć  150Ā°C). Ces groupes de pompage nĆ©cessitent alors des dispositifs de chauffage onĆ©reux pour maintenir ces grosses canalisations aux tempĆ©ratures Ć©levĆ©es.However, the pumping devices thus formed are bulky and heavy, and are important generators of vibrations and noise. To limit these disadvantages, the industrialists deport the pumping unit away from the equipment using pipes easily reaching several meters in length. To maintain the desired pumping capacity, these lines must have a high conductance. They are therefore large and bulky and their interior volume is added to that of the equipment: the pumping system is therefore less reactive because it has to pump a large volume to establish the internal gas pressure in the equipment. On the other hand, it is sometimes necessary to maintain the gases at high temperature inside the vacuum line (particular chemistries with gas to maintain in volatile form with high temperatures up to 150 Ā° C). These pumping groups then require expensive heaters to keep these large pipes at high temperatures.

Ces inconvĆ©nients rendent difficile l'utilisation dans les salles blanches de ces dispositifs de pompage connus. En effet, la place en salle blanche est trĆØs onĆ©reuse, et perdre ainsi de la place occupĆ©e par des dispositifs et canalisations encombrants est un rĆ©el problĆØme.These disadvantages make it difficult to use in the clean rooms of these known pumping devices. In fact, the room in a clean room is very expensive, and thus losing space occupied by bulky devices and pipes is a real problem.

On pourrait tenter de placer une pompe secondaire de plus petite taille telle qu'une pompe ROOTS ou une pompe Ć  vis traditionnelles miniaturisĆ©es, Ć  l'aspiration de la ligne de vide c'est-Ć -dire directement en sortie de l'Ć©quipement Ć  pomper. Cette disposition permettrait de diminuer la taille des canalisations reliant le pompage primaire et le pompage secondaire. Ceci aurait Ć©galement pour effet de considĆ©rablement diminuer les coĆ»ts de chauffage des canalisations. Cependant, les pompes ROOTS Ć  entrĆ©e et sortie radiales sont toujours gĆ©nĆ©ratrices de vibrations et de bruits. En outre, placĆ©es en sortie de l'Ć©quipement Ć  pomper, elles gĆ©nĆØrent des pollutions rĆ©trogrades par un effet de renvoi des particules et poudres dans l'Ć©quipement.One could try to place a smaller secondary pump such as a ROOTS pump or a traditional miniaturized screw pump, at the suction of the vacuum line that is to say directly at the outlet of the equipment. pump. This provision would reduce the size of the pipes connecting the primary pumping and secondary pumping. This would also have the effect of considerably reducing the costs of heating the pipes. However, ROOTS pumps with radial input and output always generate vibrations and noise. In addition, placed at the outlet of the equipment to be pumped, they generate retrograde pollution by an effect of returning the particles and powders in the equipment.

De plus, les pompes ROOTS, normalement utilisĆ©es en position dans laquelle les axes des rotors sont horizontaux, prĆ©sentent l'inconvĆ©nient d'ĆŖtre trĆØs encombrantes au sol.In addition, ROOTS pumps, normally used in position in which the axes of the rotors are horizontal, have the disadvantage of being very cumbersome on the ground.

Pour les applications nĆ©cessitant des pressions infĆ©rieures Ć  10-2 mbar, des pompes secondaires de type molĆ©culaires ou turbomolĆ©culaires peuvent ĆŖtre employĆ©es. Toutefois, ce type de pompes ne peut pas ĆŖtre employĆ© pour les applications nĆ©cessitant le chauffage des gaz dans le dispositif de pompage et/ou dans les applications Ć  plus haute pression.For applications requiring pressures below 10 -2 mbar, secondary pumps of the molecular or turbomolecular type may be employed. However, this type of pump can not be used for applications requiring gas heating in the pumping device and / or in higher pressure applications.

Les industriels souhaitent continuellement rĆ©duire l'encombrement et le coĆ»t des matĆ©riels dans leurs salles de fabrication, et ceci notamment dans l'industrie du semi-conducteur oĆ¹ la place en salle blanche est trĆØs coĆ»teuse. Les chimies, elles aussi, Ć©voluent et imposent aux dispositifs de pompage de toujours ĆŖtre plus performants en terme de dĆ©bit de pompage. Ces nouveaux critĆØres d'encombrement et de dĆ©bit imposent de trouver de nouveaux dispositifs de pompage moins encombrants et moins coĆ»teux, propres et Ć  dĆ©bit de pompage Ć©levĆ©.Manufacturers want to continually reduce the size and cost of equipment in their manufacturing rooms, particularly in the semiconductor industry where space is very expensive. Chemistries, too, evolve and require pumping devices to always be more efficient in terms of pumping rate. These new congestion and flow criteria require finding new pumping devices that are less cumbersome and less costly, that are clean and have a high pumping rate.

Le problĆØme proposĆ© par la prĆ©sente invention est de concevoir une pompe Ć  vide Ć  dĆ©bit de pompage Ć©levĆ©, pouvant ĆŖtre utilisĆ©e en tant que pompe secondaire, et suffisamment peu encombrante, peu bruyante et peu polluante pour pouvoir ĆŖtre placĆ©e Ć  proximitĆ© immĆ©diate de l'Ć©quipement sans en perturber le fonctionnement.The problem proposed by the present invention is to design a vacuum pump with high pumping rate, which can be used as a secondary pump, and sufficiently compact, low noise and low pollution for it can be placed in the immediate vicinity of the equipment without disrupting its operation.

La pompe Ć  vide de l'invention devra Ć©galement ĆŖtre capable de pomper des poudres ainsi que d'autres particules gĆ©nĆ©rĆ©es dans l'Ć©quipement.The vacuum pump of the invention will also be able to pump powders as well as other particles generated in the equipment.

Selon un autre aspect, l'invention propose un systĆØme de pompage plus rĆ©actif pour la gĆ©nĆ©ration et l'entretien efficaces d'un vide dans un Ć©quipement.In another aspect, the invention provides a more responsive pumping system for the efficient generation and maintenance of a vacuum in equipment.

Pour atteindre ces buts ainsi que d'autres, l'invention propose une pompe Ć  vide dans laquelle :

  • une enveloppe dĆ©finit deux chambres cylindriques parallĆØles, se chevauchant transversalement, limitĆ©es par des surfaces pĆ©riphĆ©riques cylindriques et des surfaces transversales d'extrĆ©mitĆ©s, et ayant des axes respectifs dĆ©finissant une direction longitudinale, les surfaces transversales d'extrĆ©mitĆ©s dĆ©finissant une direction transversale,
  • un passage d'entrĆ©e et un passage de sortie traversent l'enveloppe en deux positions respectives, ces positions Ć©tant gĆ©nĆ©ralement opposĆ©es,
  • deux rotors sont disposĆ©s chacun de faƧon Ć  pouvoir tourner dans une chambre cylindrique respective, les rotors ayant des corps de rotor Ć  lobes complĆ©mentaires engrenĆ©s et des arbres de rotor, chaque lobe de chaque rotor ayant une surface de portĆ©e radiale coopĆ©rant de faƧon Ć©tanche avec la surface pĆ©riphĆ©rique cylindrique de la chambre cylindrique respective, les corps de rotor ayant des premiĆØre et seconde surfaces de portĆ©e transversales coopĆ©rant chacune de faƧon Ć©tanche avec une surface transversale d'extrĆ©mitĆ© respective de chambre,
  • chaque corps de rotor prĆ©sente une torsion hĆ©licoĆÆdale autour d'un axe longitudinal entre la premiĆØre surface de portĆ©e transversale et la seconde surface de portĆ©e transversale,
  • le passage d'entrĆ©e communique avec l'intĆ©rieur de l'enveloppe par un orifice d'entrĆ©e prĆ©vu dans la premiĆØre surface transversale d'extrĆ©mitĆ©,
  • le passage de sortie communique avec l'intĆ©rieur de l'enveloppe par un orifice de sortie prĆ©vu essentiellement dans la seconde surface transversale d'extrĆ©mitĆ©,
  • chaque rotor est tenu en porte-Ć -faux par des moyens de guidage de rotor situĆ©s en aval du corps de rotor dans le sens d'Ć©coulement du fluide pompĆ©, la pompe Ć©tant dĆ©pourvue de moyens de guidage de rotor en amont des corps de rotor.
To achieve these and other goals, the invention provides a vacuum pump in which:
  • an envelope defines two transversely overlapping parallel cylindrical chambers, bounded by cylindrical peripheral surfaces and transverse end surfaces, and having respective axes defining a longitudinal direction, the transverse end surfaces defining a transverse direction,
  • an inlet passage and an outlet passage through the envelope in two respective positions, these positions being generally opposite,
  • two rotors are each rotatably disposed in a respective cylindrical chamber, the rotors having lobed complementary lobe rotor bodies and rotor shafts, each lobe of each rotor having a radial bearing surface cooperating sealingly with the cylindrical peripheral surface of the respective cylindrical chamber, the rotor bodies having first and second transverse bearing surfaces each sealingly cooperating with a respective transverse end surface of a chamber,
  • each rotor body has a helical twist around a longitudinal axis between the first transverse bearing surface and the second transverse bearing surface,
  • the inlet passage communicates with the interior of the envelope through an inlet orifice provided in the first transverse end surface,
  • the outlet passage communicates with the interior of the casing through an outlet orifice provided essentially in the second end transverse surface,
  • each rotor is held cantilevered by rotor guide means located downstream of the rotor body in the flow direction of the pumped fluid, the pump being devoid of rotor guide means upstream of the rotor bodies .

Selon l'invention, chacun des deux corps de rotor a un profil transversal de type ROOTS, et est conƧu avec une torsion hĆ©licoĆÆdale d'un quart de tour entre la premiĆØre surface de portĆ©e transversale de rotor et la seconde surface de portĆ©e transversale de rotor, l'orifice d'entrĆ©e Ć©tant situĆ© selon un premier cĆ“tĆ© du plan dĆ©fini par les axes des rotors, et l'orifice de sortie Ć©tant situĆ© selon un second cĆ“tĆ© du plan dĆ©fini par les axes des rotors.According to the invention, each of the two rotor bodies has a ROOTS type transverse profile, and is designed with a quarter-turn helical twist between the first rotor transverse bearing surface and the second rotor transverse bearing surface. , the inlet orifice being located along a first side of the plane defined by the axes of the rotors, and the outlet orifice being located along a second side of the plane defined by the axes of the rotors.

Cette torsion hĆ©licoĆÆdale d'un quart de tour procure le meilleur compromis entre le diamĆØtre du rotor. Un dĆ©bit de pompage d'environ 4000 m3/h peut ĆŖtre atteint.This quarter-turn helical twist provides the best compromise between rotor diameter. A pumping rate of about 4000 m 3 / h can be achieved.

On peut Ć©galement prĆ©voir des moyens de commande et d'alimentation pour piloter la vitesse de rotation des rotors. Le dĆ©bit de pompage et la pression amont peuvent alors ĆŖtre facilement ajustĆ©s en fonction de l'Ć©quipement et des Ć©tapes de traitement.It is also possible to provide control and supply means for controlling the speed of rotation of the rotors. The pumping rate and the upstream pressure can then be easily adjusted according to the equipment and the processing steps.

La pompe Ć  vide monoĆ©tagĆ©e ainsi constituĆ©e prĆ©sente les avantages des pompes ROOTS ou pompes Ć  vis, Ć  savoir un grand dĆ©bit de pompage. Sa conception particuliĆØre lui confĆØre en outre l'avantage de gĆ©nĆ©rer moins de vibrations et moins de bruits, et d'avoir un grand dĆ©bit sous un plus petit volume grĆ¢ce Ć  une possibilitĆ© de rotation plus rapide.The single-stage vacuum pump thus formed has the advantages of ROOTS pumps or screw pumps, ie a large pumping rate. Its special design also gives it the advantage of generating less vibrations and fewer noises, and having a large flow rate at a smaller volume thanks to the possibility of faster rotation.

Sa conception Ć©vite aussi de gĆ©nĆ©rer des pollutions particulaires rĆ©trogrades dans un Ć©quipement adjacent, puisque les particules pompĆ©es pĆ©nĆØtrent axialement dans la pompe par le passage d'entrĆ©e et ne risquent pas d'ĆŖtre renvoyĆ©es dans l'Ć©quipement par rebond sur des portions de rotor en mouvement vers l'amont. Sa conception Ć©vite aussi les pollutions rĆ©trogrades grĆ¢ce Ć  l'absence de palier et de produits de lubrification dans la zone Ć  basse pression en amont des rotors.Its design also avoids the generation of retrograde particulate pollution in adjacent equipment, since the pumped particles enter the pump axially through the inlet passageway and are not likely to be returned to the equipment by rebound on rotor portions. upstream movement. Its design also avoids retrograde pollution due to the absence of bearings and lubricants in the low pressure zone upstream of the rotors.

Cette pompe Ć  vide peut donc ĆŖtre placĆ©e Ć  proximitĆ© immĆ©diate d'un Ć©quipement dans lequel on veut gĆ©nĆ©rer et entretenir un vide, et peut remplir correctement les fonctions de pompe secondaire.This vacuum pump can therefore be placed in the immediate vicinity of equipment in which it is desired to generate and maintain a vacuum, and can correctly fulfill the functions of secondary pump.

En outre, l'absence d'ƩlƩments de guidage mƩcanique des rotors en amont laisse toute latitude pour choisir la forme et la position de l'orifice d'aspiration de la pompe qui assurent notamment le meilleur dƩbit de la pompe.In addition, the absence of mechanical guide elements of the upstream rotors leaves room for choosing the shape and position of the suction port of the pump which ensure in particular the best flow of the pump.

Pour assurer une tenue mĆ©canique satisfaisante des rotors en porte-Ć -faux, permettant une grande vitesse de rotation sans risque de contact des rotors avec le corps de pompe, on pourra avantageusement choisir des corps de rotors relativement courts, c'est-Ć -dire dont le rapport entre la hauteur et le diamĆØtre hors tout des corps de rotor est infĆ©rieur Ć  1.To ensure a satisfactory mechanical strength of the cantilevered rotors, allowing a high speed of rotation without risk of contact of the rotors with the pump body, it is advantageous to choose relatively short rotors bodies, that is to say say whose ratio of the height and the overall diameter of the rotor bodies is less than 1.

De bons rĆ©sultats pourront ĆŖtre obtenus avec un rapport entre la hauteur et le diamĆØtre hors tout des corps de rotor d'environ 0,6.Good results can be obtained with a ratio between the height and the overall diameter of the rotor bodies of about 0.6.

Selon un premier mode de rƩalisation, la pompe selon l'invention comprend deux corps de rotor ayant chacun des lobes qui ont une section transversale dont le contour prƩsente un profil classique dans les pompes de type ROOTS.According to a first embodiment, the pump according to the invention comprises two rotor bodies each having lobes which have a cross section whose contour has a profile in conventional type ROOTS pumps.

Ce profil assure le meilleur compromis entre l'encombrement externe de la pompe selon l'invention et le dƩbit de l'ordre de 4000 m3/h que l'on souhaite obtenir.This profile provides the best compromise between the external size of the pump according to the invention and the flow rate of the order of 4000 m 3 / h that is desired.

Par exemple, les corps de rotor peuvent comprendre chacun deux lobes.For example, the rotor bodies may each comprise two lobes.

Selon un second mode de rƩalisation, chaque corps de rotor comprend au moins trois lobes. Un avantage est un meilleur Ʃquilibre dynamique, pour la rƩduction des bruits et des vibrations. Un autre avantage est un meilleur taux de compression.According to a second embodiment, each rotor body comprises at least three lobes. One advantage is a better dynamic balance, for the reduction of noise and vibrations. Another advantage is a better compression ratio.

Un inconvĆ©nient est toutefois une rĆ©duction du dĆ©bit de pompage Ć  mĆŖme encombrement, et une plus grande complexitĆ© d'usinage.A disadvantage, however, is a reduction in the pumping rate at the same size, and a greater complexity of machining.

Selon un mode de rĆ©alisation avantageux, la pompe Ć  vide de l'invention peut comprendre des moyens pour assurer son maintien dans une position dans laquelle les axes des rotors sont orientĆ©s, par rapport Ć  une direction verticale, selon un angle d'orientation infĆ©rieur Ć  90Ā°.According to an advantageous embodiment, the vacuum pump of the invention may comprise means for maintaining it in a position in which the axes of the rotors are oriented, with respect to a vertical direction, at an orientation angle less than 90 Ā°.

Rappelons que, dans les dispositifs de pompage connus comprenant des pompes secondaires de type ROOTS Ć  entrĆ©e et sortie radiales, des particules prĆ©sentes dans les gaz pompĆ©s Ć©taient susceptibles d'ĆŖtre piĆ©gĆ©es dans des zones mortes. La conception particuliĆØre de la pompe Ć  vide de l'invention, associĆ©e Ć  une orientation non horizontale des axes des rotors de la pompe Ć  vide, a pour effet d'Ć©viter la stagnation des particules.Recall that in known pumping devices comprising secondary pumps ROOTS type radial input and output, particles in the pumped gas could be trapped in dead zones. The particular design of the vacuum pump of the invention, associated with a non-horizontal orientation of the axes of the rotors of the vacuum pump, has the effect of preventing stagnation of the particles.

De faƧon avantageuse, l'angle d'orientation peut ĆŖtre choisi infĆ©rieur Ć  45Ā° par rapport Ć  la verticale. Un tel angle permet de rĆ©duire encore l'encombrement au sol de la pompe Ć  vide de l'invention, et favorise l'expulsion des particules.Advantageously, the orientation angle may be chosen less than 45 Ā° with respect to the vertical. Such an angle can further reduce the footprint of the vacuum pump of the invention, and promotes the expulsion of particles.

En effet, la conception particuliĆØre de la pompe Ć  vide de l'invention permet son utilisation selon l'axe vertical. L'encombrement est alors minimum.Indeed, the particular design of the vacuum pump of the invention allows its use along the vertical axis. Congestion is then minimum.

De prƩfƩrence, la pompe Ơ vide selon l'invention peut comprendre des moyens pour assurer son maintien dans une position dans laquelle l'orifice d'entrƩe se trouve plus haut que l'orifice de sortie.Preferably, the vacuum pump according to the invention may comprise means for maintaining it in a position in which the inlet orifice is higher than the outlet orifice.

Cette position particuliĆØre de l'orifice d'entrĆ©e par rapport Ć  l'orifice de sortie rĆ©duit encore la stagnation Ć©ventuelle de certaines particules dans la pompe Ć  vide. En effet, l'action de la gravitĆ© s'ajoute Ć  l'action du flux gazeux pour expulser les particules vers la sortie de la pompe.This particular position of the inlet orifice with respect to the outlet orifice further reduces the possible stagnation of certain particles in the pump. empty. Indeed, the action of gravity is added to the action of the gas stream to expel the particles to the outlet of the pump.

Selon un mode de rĆ©alisation avantageux, la pompe Ć  vide selon l'invention est rĆ©alisĆ©e Ć  partir de matĆ©riaux qui sont choisis pour supporter jusqu'Ć  une tempĆ©rature d'environ 150Ā°C.According to an advantageous embodiment, the vacuum pump according to the invention is made from materials which are chosen to withstand up to a temperature of about 150 Ā° C.

Ainsi, le choix des matĆ©riaux rend possible l'utilisation de la pompe Ć  vide de l'invention aux tempĆ©ratures habituellement nĆ©cessaires pour rendre volatiles certains gaz dans les lignes de vide. On peut atteindre une telle tempĆ©rature Ć©galement grĆ¢ce Ć  un choix judicieux des matĆ©riaux constituant la partie d'isolation entre la partie pompage et la partie mĆ©canique de la pompe.Thus, the choice of materials makes it possible to use the vacuum pump of the invention at the temperatures usually required to make certain gases volatile in the vacuum lines. Such a temperature can also be achieved by a judicious choice of the materials constituting the insulation part between the pumping part and the mechanical part of the pump.

Selon une forme d'exƩcution de l'invention, la pompe Ơ vide comprend un moteur montƩ sur l'un des arbres d'entraƮnement entre les moyens de guidage.According to one embodiment of the invention, the vacuum pump comprises a motor mounted on one of the drive shafts between the guide means.

Selon une autre forme d'exƩcution, la pompe Ơ vide comprend deux moteurs synchronisƩs montƩs chacun sur un arbre d'entraƮnement respectif entre les moyens de guidage.According to another embodiment, the vacuum pump comprises two synchronized motors each mounted on a respective drive shaft between the guide means.

Selon un autre aspect, l'invention propose Ć©galement un systĆØme de pompage pour la gĆ©nĆ©ration et l'entretien d'un vide dans un Ć©quipement, comprenant :

  • une pompe primaire ayant une entrĆ©e d'aspiration primaire et une sortie de refoulement primaire,
  • une pompe secondaire, ayant une entrĆ©e d'aspiration secondaire raccordĆ©e Ć  une sortie de l'Ć©quipement par une canalisation d'entrĆ©e, et ayant une sortie de refoulement secondaire raccordĆ©e Ć  l'entrĆ©e d'aspiration primaire par une canalisation intermĆ©diaire, et dans lequel :
  • la pompe secondaire est une pompe monoĆ©tagĆ©e du type tel que dĆ©fini ci-dessus,
  • la pompe secondaire est positionnĆ©e Ć  proximitĆ© immĆ©diate de l'Ć©quipement, -- a pompe primaire est dĆ©portĆ©e Ć  l'Ć©cart de l'Ć©quipement.
In another aspect, the invention also provides a pumping system for generating and maintaining a vacuum in equipment, comprising:
  • a primary pump having a primary suction inlet and a primary discharge outlet,
  • a secondary pump, having a secondary suction inlet connected to an outlet of the equipment through an inlet pipe, and having a secondary discharge outlet connected to the primary suction inlet through an intermediate pipe, and wherein :
  • the secondary pump is a single-stage pump of the type as defined above,
  • the secondary pump is positioned in the immediate vicinity of the equipment, - the primary pump is remote from the equipment.

De prĆ©fĆ©rence, l'entrĆ©e d'aspiration secondaire est disposĆ©e face Ć  la sortie de l'Ć©quipement, et la canalisation d'entrĆ©e relie directement l'entrĆ©e d'aspiration secondaire Ć  la sortie de l'Ć©quipement. La canalisation d'entrĆ©e peut alors ĆŖtre trĆØs courte, voire inexistante.Preferably, the secondary suction inlet is disposed facing the outlet of the equipment, and the inlet pipe directly connects the secondary suction inlet to the outlet of the equipment. The inlet pipe can then be very short or non-existent.

De faƧon trĆØs avantageuse, la pompe Ć  vide monoĆ©tagĆ©e telle que conƧue selon la prĆ©sente invention prĆ©sente l'avantage de pouvoir ĆŖtre positionnĆ©e Ć  proximitĆ© immĆ©diate de l'Ć©quipement. Ainsi, les canalisations sont moindres que dans les dispositifs de pompage de l'art antĆ©rieur. Moins de canalisations signifie moins de place perdue en salle blanche, et moins de volume Ć  pomper, donc une plus grande rĆ©activitĆ© du systĆØme de pompage.Very advantageously, the single-stage vacuum pump as designed according to the present invention has the advantage of being positioned in the immediate vicinity of the equipment. Thus, the pipes are smaller than in the pumping devices of the prior art. Fewer pipelines means less space in the clean room, and less volume to pump, so more responsiveness to the pumping system.

Selon un mode de rĆ©alisation avantageux, le systĆØme de pompage selon l'invention comprend des moyens de commande et d'alimentation pour piloter la vitesse de la pompe secondaire.According to an advantageous embodiment, the pumping system according to the invention comprises control and supply means for controlling the speed of the secondary pump.

Les moyens de commande et d'alimentation pilotent la pompe secondaire de faƧon Ơ rƩgler sa vitesse dans une plage de vitesse permettant un contrƓle optimal de la pression d'aspiration par la pression de refoulement.The control and supply means control the secondary pump so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure.

Selon une premiĆØre variante, le systĆØme de pompage comprend en outre une vanne placĆ©e au refoulement de la pompe secondaire, et des moyens de commande et d'alimentation pour piloter l'ouverture de la vanne.According to a first variant, the pumping system further comprises a valve placed at the discharge of the secondary pump, and control and supply means for controlling the opening of the valve.

Selon une deuxiĆØme variante, le systĆØme de pompage comprend une vanne placĆ©e au refoulement de la pompe secondaire, les moyens de commande et d'alimentation agissant sur la vitesse de la pompe secondaire et/ou sur l'ouverture de la vanne de maniĆØre Ć  rĆ©guler la pression dans l'Ć©quipement.According to a second variant, the pumping system comprises a valve placed at the discharge of the secondary pump, the control and supply means acting on the speed of the secondary pump and / or on the opening of the valve so as to regulate the pressure in the equipment.

D'autres objets, caractƩristiques et avantages de la prƩsente invention ressortiront de la description suivante de modes de rƩalisation particuliers, faite en relation avec les figures jointes, parmi lesquelles :

  • la figure 1 est une vue de face en coupe longitudinale dans le plan des axes de rotation d'une pompe selon un mode de rĆ©alisation de l'invention ;
  • la figure 2 est une vue de face de la pompe de la figure 1, en coupe longitudinale partielle selon le plan des axes de rotation ;
  • la figure 3 est une vue de dessus en coupe transversale selon le plan C-C de la figure 1 ;
  • la figure 4 est une vue de dessus de la pompe de la figure 1 ;
  • la figure 5 est une vue en perspective illustrant un couple de rotors Ć  profil transversal ROOTS selon un mode de rĆ©alisation de l'invention ;
  • la figure 6 est une vue frontale du couple de rotors de la figure 5 ; et
  • la figure 7 est un schĆ©ma d'ensemble d'un systĆØme de pompage selon un mode de rĆ©alisation de l'invention.
Other objects, features and advantages of the present invention will become apparent from the following description of particular embodiments, with reference to the accompanying figures, in which:
  • the figure 1 is a front view in longitudinal section in the plane of the axes of rotation of a pump according to one embodiment of the invention;
  • the figure 2 is a front view of the pump the figure 1 , in partial longitudinal section along the plane of the axes of rotation;
  • the figure 3 is a top view in cross-section along the plane CC of the figure 1 ;
  • the figure 4 is a top view of the pump of the figure 1 ;
  • the figure 5 is a perspective view illustrating a pair of ROOTS transverse profile rotors according to one embodiment of the invention;
  • the figure 6 is a frontal view of the couple of rotors of the figure 5 ; and
  • the figure 7 is a block diagram of a pumping system according to an embodiment of the invention.

On considĆØre la figure 1, qui illustre une pompe Ć  vide selon un mode de rĆ©alisation de l'invention. Cette pompe comprend un corps de pompe dans lequel on distingue deux parties principales. Une premiĆØre partie principale comprend les Ć©lĆ©ments d'entraĆ®nement mĆ©canique 19 de la pompe de l'invention. Une seconde partie principale comprend une enveloppe 1 enfermant de faƧon Ć©tanche les Ć©lĆ©ments constituant la partie pompage 22 de la pompe.We consider the figure 1 , which illustrates a vacuum pump according to one embodiment of the invention. This pump comprises a pump body in which there are two main parts. A first main part comprises the mechanical drive elements 19 of the pump of the invention. A second main portion comprises an envelope 1 sealingly enclosing the elements constituting the pump portion 22 of the pump.

La premiĆØre partie principale comprend un premier arbre d'entraĆ®nement 21a et un second arbre d'entraĆ®nement 21b, parallĆØles l'un par rapport Ć  l'autre. Les deux arbres d'entraĆ®nement 21a et 21b sont maintenus par des paliers 29a, 29b, 29c et 29d. Un rotor de moteur 30 est fixĆ© sur le second arbre d'entraĆ®nement 21b, entre les paliers 29c et 29d, et tourne dans un stator de moteur 31 fixe dans le corps de pompe entre lesdits paliers 29c et 29d. Des conducteurs Ć©lectriques 20 alimentent le stator de moteur 31 en Ć©nergie Ć©lectrique pour entraĆ®ner le second arbre d'entraĆ®nement 21 b en rotation.The first main portion includes a first drive shaft 21a and a second drive shaft 21b, parallel to each other. The two drive shafts 21a and 21b are held by bearings 29a, 29b, 29c and 29d. A motor rotor 30 is attached to the second drive shaft 21b between the bearings 29c and 29d and rotates in a fixed motor stator 31 in the pump body between said bearings 29c and 29d. Electrical conductors 20 supply the motor stator 31 with electrical energy to drive the second drive shaft 21b in rotation.

Le premier arbre d'entraƮnement 21a dƩfinit un premier axe I-I et le second arbre d'entraƮnement 21 b dƩfinit un second axe II-II.The first drive shaft 21a defines a first axis I-I and the second drive shaft 21b defines a second axis II-II.

Une roue dentĆ©e menante 32 est calĆ©e sur le second arbre d'entraĆ®nement 21b et s'engrĆØne avec une roue dentĆ©e menĆ©e 33. Cette roue dentĆ©e menĆ©e 33 est calĆ©e sur le premier arbre d'entraĆ®nement 21 a.A driving gear 32 is keyed on the second drive shaft 21b and meshes with a driven gear 33. This driven gear 33 is keyed to the first drive shaft 21a.

La seconde partie principale comprend l'enveloppe 1 qui dĆ©finit deux chambres cylindriques parallĆØles 2a et 2b, centrĆ©es sur les axes I-I et II-II, se chevauchant transversalement. Ces chambres cylindriques parallĆØles 2a et 2b sont limitĆ©es par des surfaces pĆ©riphĆ©riques cylindriques 3a et 3b et par des surfaces transversales d'extrĆ©mitĆ©s 10 et 12.The second main part comprises the envelope 1 which defines two parallel cylindrical chambers 2a and 2b, centered on the axes I-I and II-II, overlapping transversely. These parallel cylindrical chambers 2a and 2b are limited by cylindrical peripheral surfaces 3a and 3b and transverse end surfaces 10 and 12.

Un passage d'entrĆ©e 4 est adaptĆ© pour ĆŖtre connectĆ© Ć  un Ć©quipement dans lequel le vide doit ĆŖtre effectuĆ© et pour permettre aux fluides de pĆ©nĆ©trer dans la pompe selon l'invention.An inlet passage 4 is adapted to be connected to equipment in which the vacuum must be made and to allow the fluids to enter the pump according to the invention.

Le passage d'entrĆ©e 4 communique avec l'intĆ©rieur de l'enveloppe 1 par un orifice d'entrĆ©e 9 prĆ©vu essentiellement dans la premiĆØre surface transversale d'extrĆ©mitĆ© 10.The inlet passage 4 communicates with the interior of the casing 1 via an inlet orifice 9 provided essentially in the first transverse end surface 10.

Deux rotors A et B parallĆØles sont disposĆ©s chacun de faƧon Ć  pouvoir tourner dans une chambre cylindrique respective 2a ou 2b autour d'un axe I-I ou II-II respectif. Les rotors A et B ont chacun respectivement un corps de rotor 6a et 6b et un arbre coaxial aval 62a et 62b. Les corps de rotor 6a et 6b sont limitĆ©s axialement par des premiĆØres surfaces de portĆ©e transversales 7a et 7b coplanaires et par des secondes surfaces de portĆ©e transversales 8a et 8b coplanaires. Chaque rotor A ou B est fixĆ© en porte-Ć -faux respectivement, par son arbre coaxial aval 62a ou 62b, en bout du premier arbre d'entraĆ®nement 21a ou du second arbre d'entraĆ®nement 21 b de la premiĆØre partie principale. Ainsi, les rotors sont tenus en porte-Ć -faux par des moyens de guidage (les paliers 29a-29d) situĆ©s en aval des corps de rotor 6a et 6b dans le sens d'Ć©coulement des fluides pompĆ©s. Il n'y a aucun moyen de guidage dans la zone Ć  faible pression gazeuse en amont des corps de rotor 6a et 6b.Two parallel rotors A and B are each rotatably disposed in a respective cylindrical chamber 2a or 2b about a respective axis II or II-II. The rotors A and B each respectively have a rotor body 6a and 6b and a downstream coaxial shaft 62a and 62b. The rotor bodies 6a and 6b are axially limited by first coplanar transverse surface surfaces 7a and 7b and by coplanar second cross-surface bearing surfaces 8a and 8b. Each rotor A or B is fixed cantilevered respectively by its downstream coaxial shaft 62a or 62b, at the end of the first drive shaft 21a or the second drive shaft 21b of the first main portion. Thus, the rotors are held cantilevered by guide means (the bearings 29a-29d) located downstream of the rotor bodies 6a and 6b in the direction of flow of the pumped fluids. There is no guiding means in the low gas pressure zone upstream of the rotor bodies 6a and 6b.

Les moyens de guidage 29a-29d peuvent ĆŖtre des paliers lisses, ou des paliers magnĆ©tiques, ou des paliers Ć  gaz, par exemple.The guide means 29a-29d may be plain bearings, or magnetic bearings, or gas bearings, for example.

Une paroi thermiquement isolante 100 sĆ©pare la premiĆØre partie principale de la seconde partie principale. De la sorte, il est possible de chauffer la seconde partie principale qui contient les gaz pompĆ©s, afin d'Ć©viter leur dĆ©pĆ“t sur les Ć©lĆ©ments de pompage, tout en maintenant une tempĆ©rature plus basse dans la premiĆØre partie principale munie des moyens de maintien et d'entraĆ®nement des rotors.A thermally insulating wall 100 separates the first main portion from the second main portion. In this way, it is possible to heat the second main part which contains the pumped gases, in order to prevent their deposition on the pumping elements, while maintaining a lower temperature in the first main part provided with holding means and rotor drive.

Un moteur, par exemple constituĆ© d'un rotor 30 et d'un stator 31, peut ĆŖtre montĆ© directement sur un des arbres d'entraĆ®nement 21 a ou 21 b entre deux moyens de guidage 29a et 29b, ou 29c et 29d. Ceci permet d'augmenter la compacitĆ© de la pompe par rapport Ć  un moteur montĆ© en bout d'arbre aprĆØs les engrenages.A motor, for example consisting of a rotor 30 and a stator 31, can be mounted directly on one of the drive shafts 21a or 21b between two guide means 29a and 29b, or 29c and 29d. This makes it possible to increase the compactness of the pump with respect to a motor mounted at the end of the shaft after the gears.

Toutefois cette derniĆØre solution permet si nĆ©cessaire d'utiliser un moteur plus gros et plus puissant si l'espace entre les couples de moyens de guidage 29a et 29b, ou 29c et 29d n'est pas suffisant.However, the latter solution makes it possible, if necessary, to use a larger and more powerful motor if the space between the pairs of guide means 29a and 29b, or 29c and 29d is not sufficient.

On peut aussi prƩvoir que la pompe Ơ vide selon l'invention fonctionne avec deux moteurs synchronisƩs montƩs chacun sur un arbre d'entraƮnement 21a ou 21 b respectif entre les moyens de guidage. Ceci permet d'avoir plus de puissance dans un encombrement donnƩ.It can also be provided that the vacuum pump according to the invention operates with two synchronized motors each mounted on a respective drive shaft 21a or 21b between the guide means. This allows to have more power in a given size.

On considĆØre la figure 2, sur laquelle les mĆŖmes Ć©lĆ©ments essentiels sont repĆ©rĆ©s par les mĆŖmes rĆ©fĆ©rences numĆ©riques que sur la figure 1.We consider the figure 2 , on which the same essential elements are marked by the same numerical references as on the figure 1 .

Un passage de sortie 5 traverse l'enveloppe 1 et est positionnƩ de telle sorte que le passage d'entrƩe 4 et le passage de sortie 5 traversent l'enveloppe 1 en deux positions respectives gƩnƩralement opposƩes.An outlet passage 5 passes through the casing 1 and is positioned so that the inlet passage 4 and the outlet passage 5 pass through the casing 1 in two generally opposite positions.

Le passage de sortie 5 communique avec l'intƩrieur de l'enveloppe 1 par un orifice de sortie 11 prƩvu dans la seconde surface transversale d'extrƩmitƩ 12.The outlet passage 5 communicates with the interior of the casing 1 through an outlet orifice 11 provided in the second transverse end surface 12.

On constate aisƩment que, sur la pompe selon l'invention, l'entrƩe et la sortie des fluides s'effectuent de faƧon axiale.It is easily seen that, on the pump according to the invention, the inlet and the outlet of the fluids are effected axially.

On constate sur cette figure, que l'orifice d'entrƩe 9 et l'orifice de sortie 11 sont toutefois dƩcalƩs l'un par rapport Ơ l'autre, tout en Ʃtant orientƩs axialement : l'orifice d'entrƩe 9 est coupƩ par le plan de coupe, tandis que l'orifice de sortie 11 est en avant du plan de coupe.It can be seen from this figure that the inlet orifice 9 and the outlet orifice 11 are, however, offset with respect to each other, while being oriented axially: the inlet orifice 9 is cut by the cutting plane, while the outlet orifice 11 is in front of the cutting plane.

La figure 3 est une coupe selon le plan C-C de la figure 1. Les mĆŖmes Ć©lĆ©ments essentiels sont repĆ©rĆ©s par les mĆŖmes rĆ©fĆ©rences numĆ©riques que sur les figures 1 et 2.The figure 3 is a section according to the plane CC of the figure 1 . The same essential elements are identified by the same numerical references as on the figures 1 and 2 .

Cette figure illustre les deux rotors A et B. Le rotor A comprend un corps de rotor 6a ayant deux lobes opposƩs 60a et 61 a. Le rotor B comprend un corps de rotor 6b ayant deux lobes opposƩs 60b et 61 b. Les corps de rotors 6a et 6b sont disposƩs chacun de faƧon Ơ pouvoir tourner dans une chambre cylindrique respective 2a et 2b. Chaque lobe 60a, 61 a, 60b, 61 b de chaque corps de rotor 6a et 6b a une surface, de portƩe radiale respective 25a ou 26a et 25b ou 26b, coopƩrant de faƧon Ʃtanche avec la surface pƩriphƩrique cylindrique 3a ou 3b de la chambre cylindrique respective 2a ou 2b pendant une partie de la course rotative du rotor A ou B correspondant.This figure illustrates the two rotors A and B. The rotor A comprises a rotor body 6a having two opposing lobes 60a and 61a. The rotor B comprises a rotor body 6b having two opposing lobes 60b and 61b. The rotor bodies 6a and 6b are each rotatably disposed in a respective cylindrical chamber 2a and 2b. Each lobe 60a, 61a, 60b, 61b of each rotor body 6a and 6b has a respective radially extending surface 25a or 26a and 25b or 26b, cooperating sealingly with the cylindrical peripheral surface 3a or 3b of the chamber respective cylindrical 2a or 2b during a portion of the rotary stroke of the rotor A or B corresponding.

Les sections transversales des corps de rotors 6a et 6b ont des contours similaires aux contours des profils ROOTS classiques.The cross sections of the rotor bodies 6a and 6b have contours similar to the contours of the conventional ROOTS profiles.

La figure 4 est une vue de dessus de la pompe selon l'invention. Les mĆŖmes Ć©lĆ©ments essentiels sont repĆ©rĆ©s par les mĆŖmes rĆ©fĆ©rences numĆ©riques que sur les figures 1, 2 et 3. Les figures 5 et 6 illustrent les couples de corps de rotor 6a et 6b, respectivement en perspective et en vue de dessus.The figure 4 is a top view of the pump according to the invention. The same essential elements are identified by the same numerical references as on the figures 1 , 2 and 3 . The Figures 5 and 6 illustrate the pairs of rotor bodies 6a and 6b respectively in perspective and in plan view.

On distingue sur ces figures que chaque corps de rotor 6a et 6b prĆ©sente une torsion hĆ©licoĆÆdale autour d'un axe longitudinal respectif I-I ou II-II entre la premiĆØre surface de portĆ©e transversale 7a ou 7b et la seconde surface de portĆ©e transversale 8a ou 8b, les torsions hĆ©licoĆÆdales des rotors Ć©tant de sens opposĆ©s.In these figures, it can be seen that each rotor body 6a and 6b has a helical twist about a respective longitudinal axis II or II-II between the first transverse bearing surface 7a or 7b and the second transverse bearing surface 8a or 8b, the helical torsions of the rotors being in opposite directions.

Cette torsion hĆ©licoĆÆdale des profils des rotors de type ROOTS permet d'avoir des orifices d'aspiration et de refoulement sur les parois perpendiculaires aux axes et donc d'avoir un pompage axial.This helical twist of the ROOTS type rotor profiles makes it possible to have suction and discharge ports on the walls perpendicular to the axes and thus to have axial pumping.

La figure 4 illustre Ʃgalement le dƩcalage entre le passage d'entrƩe 4 et le passage de sortie 5.The figure 4 also illustrates the offset between the inlet passage 4 and the outlet passage 5.

Dans la rĆ©alisation illustrĆ©e sur les figures 1 Ć  7, chacun des deux corps de rotor 6a et 6b est conƧu avec une torsion hĆ©licoĆÆdale d'un quart de tour entre les premiĆØres et secondes surfaces de portĆ©e transversales 7a, 7b, 8a et 8b. L'orifice d'entrĆ©e 9 est situĆ© selon un premier cĆ“tĆ© du plan dĆ©fini par les axes I-I et II-II des corps de rotors 6a et 6b, et l'orifice de sortie 11 est situĆ© selon le second cĆ“tĆ© du plan dĆ©fini par les axes I-I et II-II des corps de rotors 6a et 6b.In the illustrated embodiment on the Figures 1 to 7 each of the two rotor bodies 6a and 6b is designed with a quarter-turn helical twist between the first and second transverse bearing surfaces 7a, 7b, 8a and 8b. The inlet orifice 9 is located along a first side of the plane defined by the axes II and II-II of the rotor bodies 6a and 6b, and the outlet orifice 11 is situated along the second side of the plane defined by the II and II-II axes of the rotor bodies 6a and 6b.

Les corps de rotors 6a et 6b illustrĆ©s sur les figures sont relativement courts, leur hauteur axiale H Ć©tant infĆ©rieure ou Ć©gale Ć  leur diamĆØtre hors tout D.The bodies of rotors 6a and 6b illustrated in the figures are relatively short, their axial height H being less than or equal to their overall diameter D.

Le rapport H/D est infƩrieur Ơ 1, avantageusement d'environ 0,6.The H / D ratio is less than 1, preferably about 0.6.

Dans la rƩalisation illustrƩe, le moteur formƩ par le rotor 30 et le stator 31 est positionnƩ sur le second arbre d'entraƮnement 21 b entre les paliers 29c et 29d, augmentant la compacitƩ de la pompe.In the illustrated embodiment, the motor formed by the rotor 30 and the stator 31 is positioned on the second drive shaft 21b between the bearings 29c and 29d, increasing the compactness of the pump.

On va maintenant dƩcrire le fonctionnement de la pompe selon l'invention.We will now describe the operation of the pump according to the invention.

On alimente le stator 31, via les conducteurs Ʃlectriques 20. Ceci a pour effet de mettre en rotation le second arbre d'entraƮnement 21 b qui entraƮne en rotation, via les roues dentƩes 32 et 33, le premier arbre d'entraƮnement 21a. Les rotors A et B couplƩs mƩcaniquement aux arbres entraƮnement 21a et 21b sont alors entraƮnƩs en rotation en sens inverses l'un de l'autre.The stator 31 is fed through the electrical conductors 20. This has the effect of rotating the second drive shaft 21b which rotates, via the gears 32 and 33, the first drive shaft 21a. The rotors A and B mechanically coupled to drive shafts 21a and 21b are then rotated in opposite directions from each other.

Les fluides Ć  pomper pĆ©nĆØtrent en continu dans la pompe de l'invention par l'orifice d'entrĆ©e 9 et remplissent un volume entre les corps de rotors 6a et 6b.The fluids to be pumped continuously enter the pump of the invention through the inlet orifice 9 and fill a volume between the rotor bodies 6a and 6b.

Les corps de rotors 6a et 6b, en tournant toujours sur eux-mĆŖmes, dĆ©placent ledit volume rempli de fluides vers l'orifice de sortie 11. Pendant une partie de son dĆ©placement, le volume rempli de fluides se trouve isolĆ© Ć  la fois de l'orifice d'entrĆ©e 9 et de l'orifice de sortie 11. Puis, le volume rempli de fluides se trouve en connexion avec l'orifice de sortie 11, et les fluides sont expulsĆ©s. Le pompage se poursuit avec les volumes suivants.The rotor bodies 6a and 6b, while still rotating on themselves, move said fluid-filled volume towards the outlet port 11. During a part of its displacement, the fluid-filled volume is isolated from both the fluid and the fluid. inlet port 9 and outlet port 11. Then, the fluid-filled volume is in connection with outlet port 11, and the fluids are expelled. The pumping continues with the following volumes.

Le tableau ci-dessous valide certaines qualitĆ©s d'une pompe Ć  vide monoĆ©tagĆ©e de l'invention par rapport Ć  une pompe de type ROOTS monoĆ©tagĆ©e classique. Ce tableau compare les performances de la pompe de l'invention (I) par rapport Ć  une pompe de type ROOTS classique (R) de mĆŖme dĆ©bit nominal, en termes de vitesse, dimensions, volume, poids et puissance. DĆ©bit nominal (m3/h) FrĆ©quence de rotation (Hz) Dimensions (mm) Volume (litres) Poids (kg) Puissance moteur (kW) I 000 200 540 450 300 70 150 6 R 4000 70 1240 570 400 280 430 11 1/4 1/3 1/2 The table below validates certain qualities of a single-stage vacuum pump of the invention compared to a conventional single-stage ROOTS type pump. This table compares the performance of the pump of the invention (I) compared to a conventional ROOTS type pump (R) of the same nominal flow, in terms of speed, dimensions, volume, weight and power. Nominal flow (m 3 / h) Rotation frequency (Hz) Dimensions (mm) Volume (liters) Weight (kg) Motor power (kW) I 000 200 540 450 300 70 150 6 R 4000 70 1240 570 400 280 430 11 1/4 1/3 1/2

On constate que pour un dƩbit dƩsirƩ, la pompe de l'invention est moins encombrante, a une vitesse de rotation nettement supƩrieure, et son moteur consomme moins de puissance.It is noted that for a desired flow rate, the pump of the invention is less bulky, has a much higher rotational speed, and its engine consumes less power.

La conception de la pompe selon l'invention (haute vitesse de rotation, position verticale, principe de montage des lobes, profils de lobes optimisĆ©s, choix des matĆ©riaux) permet, par rapport Ć  une pompe ROOTS classique de mĆŖme dĆ©bit, de rĆ©duire le volume de la pompe d'un facteur 4, son poids d'un facteur 3 et sa consommation Ć©lectrique d'un facteur 2 environ.The design of the pump according to the invention (high rotational speed, vertical position, principle of assembly of the lobes, optimized lobe profiles, choice of materials) makes it possible, compared to a conventional ROOTS pump of the same flow rate, to reduce the volume. of the pump by a factor of 4, its weight by a factor of 3 and its power consumption by a factor of about 2.

En outre, la pompe selon l'invention peut fonctionner efficacement sur une large plage de dƩbits, par exemple de 1 000 m3/h Ơ plus de 4 000 m3/h par variation de sa vitesse de rotation et Ơ faible Ʃnergie.In addition, the pump according to the invention can operate efficiently over a wide range of flow rates, for example from 1,000 m 3 / h to more than 4,000 m 3 / h by varying its speed of rotation and at low energy.

Dans le mode de rĆ©alisation dĆ©crit sur les figures 1, 2, 3 et 4, les corps de rotors 6a et 6b prĆ©sentent une torsion hĆ©licoĆÆdale d'un quart de tour. Cependant, sans sortir du cadre de l'invention, on peut choisir une torsion hĆ©licoĆÆdale de valeur angulaire diffĆ©rente, en allongeant en consĆ©quence les rotors.In the embodiment described on the figures 1 , 2 , 3 and 4 , the rotor bodies 6a and 6b have a helical twist of a quarter turn. However, without departing from the scope of the invention, one can choose a helical twist of different angular value, thereby lengthening the rotors.

Une torsion d'un demi-tour permettrait de former une seconde chambre intermƩdiaire de passage de fluides et constituerait un second Ʃtage de pompage. La pompe qui en rƩsulterait serait donc bi-ƩtagƩe.Twisting a half turn would form a second intermediate fluid passage and would constitute a second pumping stage. The resultant pump would be two-stage.

La figure 7 illustre le systĆØme de pompage selon l'invention. Ce systĆØme est constituĆ© d'un Ć©quipement 13 dans lequel on veut assurer un vide appropriĆ©.The figure 7 illustrates the pumping system according to the invention. This system consists of equipment 13 in which it is desired to ensure an appropriate vacuum.

Une sortie 13a de l'Ć©quipement 13 est reliĆ©e Ć  l'entrĆ©e d'aspiration secondaire 15a d'une pompe secondaire 15 par l'intermĆ©diaire d'une canalisation d'entrĆ©e 16. La pompe secondaire 15 est d'un type tel que dĆ©crit prĆ©cĆ©demment, avec deux rotors A et B (figure 1) Ć  torsion hĆ©licoĆÆdale.An output 13a of the equipment 13 is connected to the secondary suction inlet 15a of a secondary pump 15 via an inlet pipe 16. The secondary pump 15 is of a type as described previously, with two rotors A and B ( figure 1 ) with helical twist.

La pompe secondaire 15 possĆØde une sortie de refoulement 15b que l'on connecte Ć  l'entrĆ©e d'aspiration 14a d'une pompe primaire 14 par l'intermĆ©diaire d'une canalisation intermĆ©diaire 17. La sortie de refoulement 14b de la pompe primaire 14 permet au systĆØme selon l'invention de refouler Ć  la pression atmosphĆ©rique.The secondary pump 15 has a discharge outlet 15b which is connected to the suction inlet 14a of a primary pump 14 via an intermediate pipe 17. The discharge outlet 14b of the primary pump 14 allows the system according to the invention to repress at atmospheric pressure.

De faƧon avantageuse, l'entrĆ©e d'aspiration secondaire 15a est disposĆ©e face Ć  la sortie de l'Ć©quipement 13a, et la canalisation d'entrĆ©e 16 relie directement l'entrĆ©e d'aspiration secondaire 15a Ć  la sortie de l'Ć©quipement 13a. Ainsi, la canalisation d'entrĆ©e 16 est la plus courte possible, et peut ĆŖtre inexistante dans le cas d'un accouplement direct de la pompe secondaire 15 sur l'Ć©quipement 13. On Ć©vite ainsi les volumes supplĆ©mentaires Ć  pomper, et les pertes de conductance dues aux canalisations. On peut alors rĆ©duire encore la taille de la pompe secondaire 15.Advantageously, the secondary suction inlet 15a is disposed opposite the outlet of the equipment 13a, and the inlet pipe 16 directly connects the secondary suction inlet 15a to the outlet of the equipment 13a. Thus, the inlet pipe 16 is as short as possible, and may be non-existent in the case of a direct coupling of the secondary pump 15 to the equipment 13. This avoids the additional volumes to be pumped, and the losses of conductance due to pipes. We can then further reduce the size of the secondary pump 15.

Par contre, la pompe primaire 14 est dĆ©portĆ©e Ć  l'Ć©cart de l'Ć©quipement, par exemple hors de la salle de fabrication, en Ć©tant reliĆ©e Ć  la pompe secondaire 15 par une canalisation intermĆ©diaire 17 relativement longue, limitant l'encombrement du systĆØme de pompage dans la salle de fabrication, et Ć©vitant de perturber l'Ć©quipement 13 par des vibrations, des bruits, ou autres nuisances.On the other hand, the primary pump 14 is deported away from the equipment, for example outside the manufacturing room, while being connected to the pump secondary 15 by a relatively long intermediate pipe 17, limiting the size of the pumping system in the manufacturing room, and avoiding disturbing the equipment 13 by vibration, noise, or other nuisance.

Du fait de l'action de la pompe secondaire fonctionnant de 10-3 mbar Ć  10 mbar, le gaz transfĆ©rĆ© Ć  l'Ć©chappement est Ć  une pression 10 Ć  100 fois plus Ć©levĆ©e qu'en sortie directe de la chambre de procĆ©dĆ©s, ce qui permet de diminuer le diamĆØtre des canalisations transfĆ©rant les gaz de procĆ©dĆ©s Ć  la pompe primaire et par consĆ©quent le coĆ»t de raccordement.Due to the action of the secondary pump operating from 10 -3 mbar to 10 mbar, the gas transferred to the exhaust is at a pressure 10 to 100 times higher than direct output of the process chamber, which allows to reduce the diameter of the pipelines transferring the process gases to the primary pump and therefore the cost of connection.

Une autre consĆ©quence est que les piĆØges Ć  particules peuvent ĆŖtre de plus faibles dimensions et placĆ©s en aval de la pompe secondaire 15 au lieu d'ĆŖtre en sortie de chambre, Ć©vitant ainsi les phĆ©nomĆØnes de rĆ©tro-diffusion de particules dans la chambre de procĆ©dĆ©s.Another consequence is that the particle traps may be smaller and placed downstream of the secondary pump 15 instead of being at the chamber outlet, thus avoiding phenomena of retro-diffusion of particles in the process chamber.

La suppression des canalisations intermƩdiaires entre l'Ʃquipement 13 et la pompe secondaire 15 rƩduit les coƻts des branchements, et rƩduit la consommation Ʃlectrique.The removal of the intermediate lines between the equipment 13 and the secondary pump 15 reduces the costs of the connections, and reduces the power consumption.

La maintenance et le nettoyage sont Ʃgalement facilitƩs.Maintenance and cleaning are also facilitated.

La vitesse de rotation des rotors A et B de pompe peut ĆŖtre pilotĆ©e par des moyens de commande et d'alimentation 18 qui fournissent l'Ć©nergie Ć©lectrique au moteur (30-31, figure 1) de la pompe secondaire 15 de l'invention. Du fait de la position de la pompe secondaire 15 Ć  proximitĆ© immĆ©diate de l'Ć©quipement 13, une variation de vitesse de pompe secondaire 15 ou une variation de pression Ć  son refoulement rĆ©agissent rapidement sur l'Ć©quipement.The rotation speed of the pump rotors A and B can be controlled by control and supply means 18 which supply the electrical energy to the motor (30-31, figure 1 ) of the secondary pump 15 of the invention. Due to the position of the secondary pump 15 in the immediate vicinity of the equipment 13, a secondary pump speed variation 15 or a variation in pressure at its discharge quickly react on the equipment.

On peut ainsi envisager de contrƓler par la pompe secondaire 15 le procƩdƩ de traitement mis en oeuvre dans l'Ʃquipement 13.It is thus possible to envisage controlling by the secondary pump the treatment method used in the equipment 13.

Par exemple, les moyens de commande et d'alimentation 18 peuvent agir sur la vitesse de la pompe secondaire 15 de maniĆØre Ć  rĆ©guler la pression dans l'Ć©quipement 13.For example, the control and supply means 18 can act on the speed of the secondary pump 15 so as to regulate the pressure in the equipment 13.

Un inconvƩnient est l'inertie de la pompe.A disadvantage is the inertia of the pump.

En alternative ou en complĆ©ment, on peut prĆ©voir une vanne 40 placĆ©e au refoulement de la pompe secondaire 15. Les moyens de commande et d'alimentation 18 pilotent alors l'ouverture de la vanne 40, ce qui modifie la pression de refoulement. La modification de la pression de refoulement entraĆ®ne la modification du taux de compression de la pompe et donc la modification de la pression d'aspiration qui elle-mĆŖme est la pression dans l'Ć©quipement 13. Les moyens de commande et d'alimentations 18 peuvent ainsi piloter l'ouverture de la vanne 40 de maniĆØre Ć  rĆ©guler la pression dans l'Ć©quipement 13, par exemple.Alternatively or in addition, a valve 40 can be provided placed at the discharge of the secondary pump 15. The control and supply means 18 then drive the opening of the valve 40, which modifies the discharge pressure. The modification of the discharge pressure causes the modification of the compression ratio of the pump and therefore the modification of the suction pressure, which itself is the pressure in the equipment 13. The control means and power supplies 18 can thus controlling the opening of the valve 40 so as to regulate the pressure in the equipment 13, for example.

On peut Ć©galement combiner les deux systĆØmes, vitesse de rotation de la pompe et vanne au refoulement. Dans ce cas, les moyens de commande et d'alimentation 18 pilotent la pompe secondaire 15 de faƧon Ć  rĆ©gler sa vitesse dans une plage de vitesse permettant un contrĆ“le optimal de la pression d'aspiration par la pression de refoulement, et les moyens de commande et d'alimentation 18 pilotent l'ouverture de la vanne 40 de refoulement de maniĆØre Ć  contrĆ“ler la pression d'aspiration par la pression de refoulement. Le document EP-1 475 535 enseigne comment piloter la pompe secondaire pour cela.It is also possible to combine the two systems, rotational speed of the pump and discharge valve. In this case, the control and supply means 18 control the secondary pump 15 so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure, and the control means and feed 18 control the opening of the discharge valve 40 so as to control the suction pressure by the discharge pressure. The document EP-1 475 535 teaches how to pilot the secondary pump for this.

Dans tous les cas, on peut s'affranchir d'une vanne de rƩgulation entre la pompe secondaire 15 et l'Ʃquipement 13, vanne gƩnƩratrice de turbulences et de particules dans l'Ʃquipement 13.In all cases, it is possible to dispense with a control valve between the secondary pump 15 and the equipment 13, a turbulence and particle generating valve in the equipment 13.

Claims (11)

Pompe Ć  vide, comprenant : - une enveloppe (1) dĆ©finissant deux chambres cylindriques parallĆØles (2a, 2b), se chevauchant transversalement, limitĆ©es par des surfaces pĆ©riphĆ©riques cylindriques (3a, 3b) et des surfaces transversales d'extrĆ©mitĆ©s (10, 12), et ayant des axes (I-I, II-II) respectifs dĆ©finissant une direction longitudinale, les surfaces transversales d'extrĆ©mitĆ©s (10, 12) dĆ©finissant une direction transversale, - un passage d'entrĆ©e (4), et un passage de sortie (5), traversant l'enveloppe (1) en deux positions respectives, - le passage d'entrĆ©e (4) communiquant avec l'intĆ©rieur de l'enveloppe (1) par un orifice d'entrĆ©e (9) prĆ©vu dans la premiĆØre surface transversale d'extrĆ©mitĆ© (10), - le passage de sortie (5) communiquant avec l'intĆ©rieur de l'enveloppe (1) par un orifice de sortie (11) prĆ©vu essentiellement dans la seconde surface transversale d'extrĆ©mitĆ© (12), - deux rotors (A, B) disposĆ©s chacun de faƧon Ć  pouvoir tourner dans une chambre cylindrique respective (2a ou 2b), les rotors (A, B) ayant des corps de rotor (6a, 6b) Ć  lobes complĆ©mentaires engrenĆ©s (60a, 61a ; 60b, 61b) et des arbres de rotor (21 a, 62a ; 21 b, 62b), - chaque lobe (60a, 61 a ; 60b, 61 b) de chaque rotor (A, B) ayant une surface de portĆ©e radiale (25a, 25b, 26a, 26b) coopĆ©rant de faƧon Ć©tanche avec la surface pĆ©riphĆ©rique cylindrique (3a, 3b) de la chambre cylindrique respective (2a, 2b), les corps de rotor (6a, 6b) ayant des premiĆØre et seconde surfaces de portĆ©e transversales (7a, 7b ; 8a, 8b) coopĆ©rant chacune de faƧon Ć©tanche avec une surface transversale d'extrĆ©mitĆ© (10, 12) respective de chambre, - chaque corps de rotor (6a, 6b) prĆ©sentant une torsion hĆ©licoĆÆdale autour d'un axe longitudinal (I-I, II-II) entre la premiĆØre surface de portĆ©e transversale (7a, 7b) et la seconde surface de portĆ©e transversale (8a, 8b), - chaque rotor (A, B) Ć©tant tenu en porte-Ć -faux par des moyens de guidage (29a-29d) de rotor situĆ©s en aval du corps de rotor (6a, 6b) dans le sens d'Ć©coulement du fluide pompĆ©, la pompe Ć©tant dĆ©pourvue de moyens de guidage de rotor en amont des corps de rotor (6a, 6b). caractĆ©risĆ© en ce que chacun des deux corps de rotor (6a, 6b) a un profil transversal de type ROOTS et est conƧu avec une torsion hĆ©licoĆÆdale d'un quart de tour entre la premiĆØre surface de portĆ©e transversale de rotor (7a, 7b) et la seconde surface de portĆ©e transversale de rotor (8a, 8b), l'orifice d'entrĆ©e (9) est situĆ© selon un premier cĆ“tĆ© du plan dĆ©fini par les axes des rotors (I-I, II-II), et l'orifice de sortie (11) est situĆ© selon un second cĆ“tĆ© du plan dĆ©fini par les axes des rotors (I-I, II-II). Vacuum pump, comprising: - an envelope (1) defining two parallel cylindrical chambers (2a, 2b), transversely overlapping, limited by cylindrical peripheral surfaces (3a, 3b) and transverse end surfaces (10, 12), and having axes ( II, II-II) defining a longitudinal direction, the transverse end surfaces (10, 12) defining a transverse direction, an inlet passage (4) and an outlet passage (5) passing through the envelope (1) in two respective positions, the inlet passage (4) communicating with the inside of the envelope (1) through an inlet orifice (9) provided in the first transverse end surface (10), the outlet passage (5) communicating with the inside of the envelope (1) through an outlet orifice (11) provided essentially in the second transverse end surface (12), two rotors (A, B) each rotatably disposed in a respective cylindrical chamber (2a or 2b), the rotors (A, B) having rotor bodies (6a, 6b) with complementary lobes (60a, 61a, 60b, 61b) and rotor shafts (21a, 62a, 21b, 62b), each lobe (60a, 61a, 60b, 61b) of each rotor (A, B) having a radial bearing surface (25a, 25b, 26a, 26b) sealingly cooperating with the cylindrical peripheral surface (3a, 3b ) of the respective cylindrical chamber (2a, 2b), the rotor bodies (6a, 6b) having first and second transverse bearing surfaces (7a, 7b; 8a, 8b) each sealingly engaging a transverse surface of respective end (10, 12) of chamber, - each rotor body (6a, 6b) having a helical twist around a longitudinal axis (II, II-II) between the first transverse bearing surface (7a, 7b) and the second transverse bearing surface (8a, 8b ) each rotor (A, B) being held cantilevered by rotor guide means (29a-29d) located downstream of the rotor body (6a, 6b) in the flow direction of the pumped fluid, the pump being devoid of rotor guide means upstream of the rotor bodies (6a, 6b). characterized in that each of the two rotor bodies (6a, 6b) has a ROOTS-type cross section and is designed with a quarter-turn helical twist between the first transverse rotor bearing surface (7a, 7b) and the second transverse rotor bearing surface (8a, 8b), the inlet orifice (9) is situated along a first side of the plane defined by the axes of the rotors (II, II-II), and the orifice of outlet (11) is situated along a second side of the plane defined by the axes of the rotors (II, II-II). Pompe Ć  vide selon la revendication 1, dans laquelle le rapport entre la hauteur (H) et le diamĆØtre hors tout (D) des corps de rotor (6a, 6b) est infĆ©rieur Ć  1.Vacuum pump according to claim 1, wherein the ratio between the height (H) and the overall diameter (D) of the rotor bodies (6a, 6b) is less than 1. Pompe Ć  vide selon l'une des revendications prĆ©cĆ©dentes, dans laquelle chaque corps de rotor (6a, 6b) comprend deux lobes (60a, 61 a ; 60b, 61 b).Vacuum pump according to one of the preceding claims, wherein each rotor body (6a, 6b) comprises two lobes (60a, 61a; 60b, 61b). Pompe Ć  vide selon l'une des revendications prĆ©cĆ©dentes, dans laquelle chaque corps de rotor (6a, 6b) comprend au moins trois lobes.Vacuum pump according to one of the preceding claims, wherein each rotor body (6a, 6b) comprises at least three lobes. Pompe Ć  vide selon l'une des revendications prĆ©cĆ©dentes, dans laquelle les arbres de rotor comprennent chacun un arbre coaxial aval (62a, 62b) respectif de rotor fixĆ© en bout d'un arbre d'entraĆ®nement (21 a, 21 b) respectif.Vacuum pump according to one of the preceding claims, wherein the rotor shafts each comprise a respective downstream coaxial shaft (62a, 62b) fixed at the end of a respective drive shaft (21a, 21b). Pompe Ć  vide selon l'une des revendications 1 Ć  5, comprenant un moteur (30, 31) montĆ© sur l'un des arbres d'entraĆ®nement (21 b) entre les moyens de guidage (29c-29d).Vacuum pump according to one of claims 1 to 5, comprising a motor (30, 31) mounted on one of the drive shafts (21b) between the guide means (29c-29d). Pompe Ć  vide selon l'une des revendications 1 Ć  5, comprenant deux moteurs synchronisĆ©s montĆ©s chacun sur un arbre d'entraĆ®nement respectif (21 a, 21 b) entre les moyens de guidage (29a-29d).Vacuum pump according to one of claims 1 to 5, comprising two synchronized motors each mounted on a respective drive shaft (21a, 21b) between the guide means (29a-29d). SystĆØme de pompage pour la gĆ©nĆ©ration et l'entretien d'un vide dans un Ć©quipement (13), comprenant : - une pompe primaire (14) ayant une entrĆ©e d'aspiration primaire (14a) et une sortie de refoulement primaire (14b), - une pompe secondaire (15) ayant une entrĆ©e d'aspiration secondaire (15a) raccordĆ©e Ć  une sortie de l'Ć©quipement (13a) par une canalisation d'entrĆ©e (16) et ayant une sortie de refoulement secondaire (15b) raccordĆ©e Ć  l'entrĆ©e d'aspiration primaire (14a) par une canalisation intermĆ©diaire (17), caractĆ©risĆ© en ce que : - la pompe secondaire (15) est une pompe monoĆ©tagĆ©e du type tel que dĆ©fini par l'une des revendications 1 Ć  7, - la pompe secondaire (15) est positionnĆ©e Ć  proximitĆ© immĆ©diate de l'Ć©quipement (13), - la pompe primaire (14) est dĆ©portĆ©e Ć  l'Ć©cart de l'Ć©quipement (13). Pumping system for generating and maintaining a vacuum in equipment (13), comprising: a primary pump (14) having a primary suction inlet (14a) and a primary discharge outlet (14b), a secondary pump (15) having a secondary suction inlet (15a) connected to an outlet of the equipment (13a) via an inlet pipe (16) and having a secondary discharge outlet (15b) connected to the primary suction inlet (14a) via an intermediate pipe (17), characterized in that the secondary pump (15) is a single-stage pump of the type as defined by one of claims 1 to 7, the secondary pump (15) is positioned in the immediate vicinity of the equipment (13), the primary pump (14) is offset away from the equipment (13). SystĆØme de pompage selon la revendication 9, dans lequel l'entrĆ©e d'aspiration secondaire (15a) est disposĆ©e face Ć  la sortie de l'Ć©quipement (13a), et la canalisation d'entrĆ©e (16) relie directement l'entrĆ©e d'aspiration secondaire (15a) Ć  la sortie de l'Ć©quipement (13a).The pumping system of claim 9, wherein the secondary suction inlet (15a) is disposed opposite the exit of the equipment (13a), and the inlet pipe (16) directly connects the inlet of the secondary suction (15a) at the outlet of the equipment (13a). SystĆØme de pompage selon l'une des revendications 9 et 10, comprenant des moyens de commande et d'alimentation (18) pour piloter la pompe secondaire (15) de faƧon Ć  rĆ©gler sa vitesse dans une plage de vitesse permettant un contrĆ“le optimal de la pression d'aspiration par la pression de refoulement.Pumping system according to one of claims 9 and 10, comprising control and supply means (18) for controlling the secondary pump (15) so as to adjust its speed in a speed range allowing optimal control of the suction pressure by the discharge pressure. SystĆØme de pompage selon l'une des revendications 9 Ć  11, comprenant une vanne (40) placĆ©e au refoulement de la pompe secondaire (15), les moyens de commande et d'alimentation (18) agissant sur la vitesse de la pompe secondaire (15) et/ou sur l'ouverture de la vanne (40) de maniĆØre Ć  rĆ©guler la pression dans l'Ć©quipement (13).Pumping system according to one of claims 9 to 11, comprising a valve (40) placed at the discharge of the secondary pump (15), the control and supply means (18) acting on the speed of the secondary pump ( 15) and / or the opening of the valve (40) so as to regulate the pressure in the equipment (13).
EP08165208A 2007-09-26 2008-09-26 Vacuum pump with two helical rotors Not-in-force EP2042739B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0757858A FR2921444A1 (en) 2007-09-26 2007-09-26 VACUUM PUMP WITH TWO HELICOIDAL ROTORS.

Publications (2)

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EP2042739A1 true EP2042739A1 (en) 2009-04-01
EP2042739B1 EP2042739B1 (en) 2009-12-30

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EP (1) EP2042739B1 (en)
JP (1) JP2010540824A (en)
KR (1) KR20100072289A (en)
CN (1) CN101809290A (en)
AT (1) ATE453801T1 (en)
DE (1) DE602008000482D1 (en)
FR (1) FR2921444A1 (en)
WO (1) WO2009040412A1 (en)

Cited By (3)

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EP2873866A1 (en) * 2013-11-18 2015-05-20 Pfeiffer Vacuum GmbH Housing for a roller piston pump
FR3103862A1 (en) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
WO2022263809A1 (en) * 2021-06-17 2022-12-22 Edwards Limited Screw-type vacuum pump

Families Citing this family (4)

* Cited by examiner, ā€  Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062046B (en) * 2013-01-07 2016-01-20 č‰¾čæŖęœŗå™Ø(ę­å·ž)ęœ‰é™å…¬åø Twisted-type rotor pump
CN108953177B (en) * 2018-07-27 2020-03-31 äøœåŒ—大学 Transition structure for improving pumping speed of turbomolecular pump
US20230003208A1 (en) * 2019-12-04 2023-01-05 Ateliers Busch Sa Redundant pumping system and pumping method by means of this pumping system
FR3118650B1 (en) 2021-01-05 2023-03-24 Pfeiffer Vacuum Pumping stage and dry vacuum pump

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GB809443A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high-vacuum pumps
US5118268A (en) * 1991-06-19 1992-06-02 Eaton Corporation Trapped volume vent means with restricted flow passages for meshing lobes of roots-type supercharger
DE19522551A1 (en) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Dual-shaft displacement machine e.g. Roots (RTM) pump or helical spindle compressor
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EP2873866A1 (en) * 2013-11-18 2015-05-20 Pfeiffer Vacuum GmbH Housing for a roller piston pump
US9745978B2 (en) 2013-11-18 2017-08-29 Pfeiffer Vacuum Gmbh Housing for a rotary vane pump
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WO2022263809A1 (en) * 2021-06-17 2022-12-22 Edwards Limited Screw-type vacuum pump

Also Published As

Publication number Publication date
EP2042739B1 (en) 2009-12-30
ATE453801T1 (en) 2010-01-15
CN101809290A (en) 2010-08-18
JP2010540824A (en) 2010-12-24
KR20100072289A (en) 2010-06-30
FR2921444A1 (en) 2009-03-27
WO2009040412A1 (en) 2009-04-02
DE602008000482D1 (en) 2010-02-11

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