EP1864175A4 - Small ultra-high na catadioptric objective using aspheric surfaces - Google Patents

Small ultra-high na catadioptric objective using aspheric surfaces

Info

Publication number: EP1864175A4
Authority: EP; European Patent Office
Prior art keywords: aspheric surfaces; catadioptric objective; small ultra; ultra; small
Prior art date: 2005-03-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP06738149A

Other languages

German (de)

French (fr)

Other versions

EP1864175A2 (en

Inventor

David Shafer

J Joseph Armstrong

Yung-Ho Chuang

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

KLA Tencor Technologies Corp

Original Assignee

KLA Tencor Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-03-31

Filing date

2006-03-13

Publication date

2008-08-27

2006-03-13 Application filed by KLA Tencor Technologies Corp filed Critical KLA Tencor Technologies Corp

2006-03-13 Priority to EP10000348.2A priority Critical patent/EP2187251B1/en

2007-12-12 Publication of EP1864175A2 publication Critical patent/EP1864175A2/en

2008-08-27 Publication of EP1864175A4 publication Critical patent/EP1864175A4/en

Status Withdrawn legal-status Critical Current

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/008—Systems specially adapted to form image relays or chained systems
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0892—Catadioptric systems specially adapted for the UV
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
- G02B21/04—Objectives involving mirrors

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Lenses (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

EP06738149A 2005-03-31 2006-03-13 Small ultra-high na catadioptric objective using aspheric surfaces Withdrawn EP1864175A4 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
EP10000348.2A EP2187251B1 (en)	2005-03-31	2006-03-13	Small ultra-high NA catadioptric objective using a Mangin mirror

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US66723705P	2005-03-31	2005-03-31
PCT/US2006/009059 WO2006107527A2 (en)	2005-03-31	2006-03-13	Small ultra-high na catadioptric objective using aspheric surfaces

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
EP10000348.2A Division EP2187251B1 (en)	2005-03-31	2006-03-13	Small ultra-high NA catadioptric objective using a Mangin mirror

Publications (2)

Publication Number	Publication Date
EP1864175A2 EP1864175A2 (en)	2007-12-12
EP1864175A4 true EP1864175A4 (en)	2008-08-27

Family

ID=37073925

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
EP06738149A Withdrawn EP1864175A4 (en)	2005-03-31	2006-03-13	Small ultra-high na catadioptric objective using aspheric surfaces
EP10000348.2A Not-in-force EP2187251B1 (en)	2005-03-31	2006-03-13	Small ultra-high NA catadioptric objective using a Mangin mirror

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
EP10000348.2A Not-in-force EP2187251B1 (en)	2005-03-31	2006-03-13	Small ultra-high NA catadioptric objective using a Mangin mirror

Country Status (3)

Country	Link
EP (2)	EP1864175A4 (en)
JP (1)	JP5495555B2 (en)
WO (1)	WO2006107527A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5634989B2 (en) *	2008-06-17	2014-12-03	ケーエルエー−テンカー・コーポレーションＫｌａ−ＴｅｎｃｏｒＣｏｒｐｏｒａｔｉｏｎ	Objective optical system and sample inspection device
US8908294B2 (en) *	2012-05-18	2014-12-09	Canon Kabushiki Kaisha	Catadioptric optical system with high numerical aperture
US10823943B2 (en) *	2018-07-31	2020-11-03	Kla Corporation	Plasma source with lamp house correction

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6324015B1 (en) *	1999-08-10	2001-11-27	Sumitomo Electric Industries, Ltd.	fθ lens
US6636350B2 (en) *	2000-01-14	2003-10-21	Carl-Zeiss-Stiftung	Microlithographic reduction projection catadioptric objective

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5073016A (en) *	1990-08-27	1991-12-17	Medical Concepts, Inc.	Lens system for compact camera
US5031976A (en) *	1990-09-24	1991-07-16	Kla Instruments, Corporation	Catadioptric imaging system
US6064517A (en) *	1996-07-22	2000-05-16	Kla-Tencor Corporation	High NA system for multiple mode imaging
DE19639586A1 (en) *	1996-09-26	1998-04-02	Zeiss Carl Fa	Catadioptric microlithography reduction lens
JP4245286B2 (en) *	2000-10-23	2009-03-25	株式会社ニコン	Catadioptric optical system and exposure apparatus provided with the optical system
JP4014840B2 (en) *	2001-10-12	2007-11-28	株式会社日立製作所	Coma aberration correcting element and optical system for optical head using the same
TWI249082B (en) *	2002-08-23	2006-02-11	Nikon Corp	Projection optical system and method for photolithography and exposure apparatus and method using same
US7180658B2 (en) *	2003-02-21	2007-02-20	Kla-Tencor Technologies Corporation	High performance catadioptric imaging system
US7639419B2 (en) *	2003-02-21	2009-12-29	Kla-Tencor Technologies, Inc.	Inspection system using small catadioptric objective
US8675276B2 (en) *	2003-02-21	2014-03-18	Kla-Tencor Corporation	Catadioptric imaging system for broad band microscopy

2006
- 2006-03-13 EP EP06738149A patent/EP1864175A4/en not_active Withdrawn
- 2006-03-13 JP JP2008504088A patent/JP5495555B2/en not_active Expired - Fee Related
- 2006-03-13 EP EP10000348.2A patent/EP2187251B1/en not_active Not-in-force
- 2006-03-13 WO PCT/US2006/009059 patent/WO2006107527A2/en active Search and Examination

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6324015B1 (en) *	1999-08-10	2001-11-27	Sumitomo Electric Industries, Ltd.	fθ lens
US6636350B2 (en) *	2000-01-14	2003-10-21	Carl-Zeiss-Stiftung	Microlithographic reduction projection catadioptric objective

Also Published As

Publication number	Publication date
EP2187251B1 (en)	2016-06-01
WO2006107527A3 (en)	2007-04-19
WO2006107527A2 (en)	2006-10-12
EP2187251A3 (en)	2010-08-25
EP1864175A2 (en)	2007-12-12
JP5495555B2 (en)	2014-05-21
EP2187251A2 (en)	2010-05-19
JP2008536166A (en)	2008-09-04

Publication	Publication Date	Title
EP1864177A4 (en)	2012-01-25	Small ultra-high na catadioptric objective
EP1932030A4 (en)	2010-12-01	Fresnel lens
GB0519009D0 (en)	2005-10-26	Pocketted spring units
GB0513347D0 (en)	2005-08-03	Lens
AU307469S (en)	2006-06-20	Eyeglasses
AU303738S (en)	2005-11-02	Eyeglasses
GB2427169B (en)	2010-10-06	Moulding lenses
AU307852S (en)	2006-07-12	Drinking glasses
EP1864175A4 (en)	2008-08-27	Small ultra-high na catadioptric objective using aspheric surfaces
GB2425129B (en)	2008-11-05	Cytotrophoblast stem cell
DE602005023532D1 (en)	2010-10-21	CONTAINER FOR FLAT OBJECTS
AU307533S (en)	2006-06-21	Drinking glasses
EP1934472A4 (en)	2012-04-11	Slide valve
HK1086352A1 (en)	2006-09-15	Reversion-collapsible lens group
AU307595S (en)	2006-06-26	Eyeglasses
AU307470S (en)	2006-06-20	Eyeglasses
DE502006003587D1 (en)	2009-06-10	valve train
FR2905476B1 (en)	2008-10-31	PENDANT GUN GLASSES.
GB0524468D0 (en)	2006-01-11	Spring units
DE502006004285D1 (en)	2009-09-03	Forced-control valve train
DE502006004287D1 (en)	2009-09-03	Forced-control valve train
GB0521608D0 (en)	2005-11-30	Novel valve
AU309889S (en)	2006-09-13	Eyeglasses
NO20075310L (en)	2008-01-18	Spherical alignment mechanism
DE502006004288D1 (en)	2009-09-03	Forced-control valve train

Legal Events

Date	Code	Title	Description
2007-11-09	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2007-12-12	17P	Request for examination filed	Effective date: 20070917
2007-12-12	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): DE FR GB
2008-04-30	RBV	Designated contracting states (corrected)	Designated state(s): FR GB
2008-06-12	REG	Reference to a national code	Ref country code: DE Ref legal event code: 8566
2008-07-09	DAX	Request for extension of the european patent (deleted)
2008-08-27	A4	Supplementary search report drawn up and despatched	Effective date: 20080730
2008-08-27	RIC1	Information provided on ipc code assigned before grant	Ipc: G02B 17/00 20060101AFI20070925BHEP Ipc: G02B 17/08 20060101ALI20080724BHEP
2009-01-14	17Q	First examination report despatched	Effective date: 20081215
2010-06-11	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2010-07-14	18D	Application deemed to be withdrawn	Effective date: 20100119