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EP1541871B1 - Side channel pumping stage - Google Patents

Side channel pumping stage Download PDF

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Publication number
EP1541871B1
EP1541871B1 EP04027043.1A EP04027043A EP1541871B1 EP 1541871 B1 EP1541871 B1 EP 1541871B1 EP 04027043 A EP04027043 A EP 04027043A EP 1541871 B1 EP1541871 B1 EP 1541871B1
Authority
EP
European Patent Office
Prior art keywords
rotor
blades
side channel
elements
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP04027043.1A
Other languages
German (de)
French (fr)
Other versions
EP1541871A3 (en
EP1541871A2 (en
Inventor
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1541871A2 publication Critical patent/EP1541871A2/en
Publication of EP1541871A3 publication Critical patent/EP1541871A3/en
Application granted granted Critical
Publication of EP1541871B1 publication Critical patent/EP1541871B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a side channel pumping stage according to the preamble of the first protection claim.
  • Side channel pumps are a common type of turbomachinery. You will u. a. successfully used as vacuum pumps since they are suitable for oil-free operation (ie no lubricants in the working space).
  • the pump-active parts of a side channel pump in its basic version consist of an impeller and a plurality of open radial or spatially curved blades on the outer periphery and a side channel arranged on this circumference.
  • the side channel is divided by a barrier into a suction and pressure area.
  • the prior art ( EP 0 805 275 A2 ) includes a sokanalpumptreatment with mounted on a shaft rotor elements and stator elements, which are connected to the fixed parts of the pump, wherein the rotor elements on both sides pumping structures are mounted, which consist on at least one side of projecting blades in the axial direction, which are arranged on a plurality of concentric rings and in which a plurality of concentric channels are incorporated in the stator elements, in which engage the blades of the rotor elements.
  • There are gas inlet openings which are separated by barriers from the gas outlet openings.
  • This prior art side channel pumping stage has the disadvantage that the pump power is not optimized.
  • JP 1 267 390 A A pump in which the rotor blades are arranged.
  • the invention is based on the object to present a side channel pump, which generates a sufficiently high pressure difference in a compact design.
  • the length of the pump should be kept within limits.
  • a significant increase in the pumping speed is added as a further requirement.
  • the production must be rational and with less effort than existing systems can be performed.
  • the arrangement according to the invention allows a short design of the pump, in particular of the rotor.
  • the thermal change in length is kept within limits when the rotor is heated.
  • reduction of the axial gap is possible, thereby reducing backflow losses.
  • smaller gaps in turn affect the volume of construction. Due to the possibility of parallel pumping, the pumping speed can be increased significantly.
  • a combination of parallel and serial pump stages provides a simple way to optimize pumping speed and compression. The production can be carried out easily and rationally.
  • FIG. 1 A section of side channel pumping stages is in Fig. 1 shown in perspective.
  • the pumping elements consist in this example of two rotor elements 12 which are mounted on a shaft 10 and a stator element 14a (or 14b for another embodiment).
  • the stator element which is located between the rotor elements, is connected to stationary parts of the pump, not shown here. Due to the interaction of rotor and stator elements, which are arranged alternately one behind the other, the pumping effect is created.
  • the rotor elements are manufactured in such a way that holes 15 having the desired radius of the blades 16, 18 are bored in concentric elevations which extend in the axial direction from a rotor disk. Depending on the embodiment, these holes are either drilled according to the axial extent of the blades or completely drilled through. The arrangement of the blades can thus arise in mirror image on both sides of the disc. The method of piercing the holes can result in a particularly efficient production method in which several disks are stacked in one operation.
  • a plurality of pump stages can be arranged concentrically on the top and the bottom of a rotor disk.
  • the respective corresponding pumping stages of the top and the bottom are connected by holes, it is possible to operate the pumping stages in parallel or in series.
  • the stator element 14a is in Fig. 2a in perspective and in Fig. 3a and Fig. 4a shown in two sections AA and BB.
  • a rotor element 12 is arranged between two stator elements 14a.
  • concentric channels 22a and 24a are incorporated.
  • the blades 16 and 18 of the rotor disk 12 engage and cause the rotation of the promotion of the gas, which enters the channels at 32a and 34a.
  • the channels are at 26a and 28a locks, which cause the gas is not constantly conveyed in a circle, but at 36a and 38a leaves the channels and is conveyed in the adjacent channels in the axial direction. In this way, a gas delivery takes place in parallel in the concentric rings, whereby the pumping speed of a pumping stage is substantially increased.
  • FIG. 2b Another embodiment of the invention show Fig. 2b to Fig. 4b .
  • a stator element 14b is in Fig. 2b in perspective and in Fig. 3b and Fig. 4b shown in two sections AA and BB.
  • a rotor element 12 is arranged between two stator elements 14b.
  • the stator concentric channels 22b and 24b are incorporated. In these channels, the blades 16 and 18 of the rotor disc 12 engage and cause the rotation of the promotion of the gas, which enters at 32 b in the channel 22 b.
  • At 36b causes the barrier 26b that the gas leaves the channel 22b and passes through a connecting channel 30 at 34b to the channel 24b.
  • the barrier 28b causes the gas to exit the channel 24b via the gas outlet opening 38b in order to be conveyed further via a subsequent step.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Seitenkanalpumpstufe nach dem Oberbegriff des 1. Schutzanspruches.The invention relates to a side channel pumping stage according to the preamble of the first protection claim.

Seitenkanalpumpen sind eine weit verbreitete Art von Strömungsmaschinen. Sie werden u. a. erfolgreich als Vakuumpumpen eingesetzt, da sie für einen ölfreien Betrieb (d. h. keine Schmiermittel im Arbeitsraum) geeignet sind. Die pumpaktiven Teile einer Seitenkanalpumpe in ihrer Grundausführung bestehen aus einem Laufrad und einer Vielzahl von offenen radialen oder räumlich gekrümmten Schaufeln an dessen äußerem Umfang und einem an diesem Umfang angeordneten Seitenkanal. Der Seitenkanal ist durch eine Sperre in einen Saug- und Druckbereich aufgeteilt.Side channel pumps are a common type of turbomachinery. You will u. a. successfully used as vacuum pumps since they are suitable for oil-free operation (ie no lubricants in the working space). The pump-active parts of a side channel pump in its basic version consist of an impeller and a plurality of open radial or spatially curved blades on the outer periphery and a side channel arranged on this circumference. The side channel is divided by a barrier into a suction and pressure area.

Zur Erzielung hoher Druckdifferenzen müssen mehrere Stufen hintereinander geschaltet werden. Dies hat zur Folge, dass die Pumpe in axialer Richtung länger wird. Neben einem höheren Platzbedarf wird sich auch die thermische Ausdehnung bei einer längeren Bauweise nachteilig auswirken. Zur Sicherheit müssen die Spalte zwischen Rotor- und Statorbauteilen größer werden, wodurch die Rückströmungsverluste zunehmen. Dadurch, dass die Schöpfräume, welche durch die am Umfang der Laufräder angebrachten Schaufeln und den ebenfalls am Umfang angeordneten Seitenkanal gebildet werden, begrenzt sind, werden solche Pumpen nur für kleine Förderströme eingesetzt. Folglich ist ihr Wirkungsgrad in Bezug auf die Gasförderung sehr gering.To achieve high pressure differences, several stages must be connected in series. As a result, the pump becomes longer in the axial direction. In addition to a larger footprint, the thermal expansion in a longer design will also adversely affect. For safety, the gaps between the rotor and stator components must increase, which increases the backflow losses. Due to the fact that the pump chambers, which are formed by the vanes attached to the circumference of the wheels and the side duct, which is likewise arranged on the circumference, are limited, such pumps are used only for small delivery flows. Consequently, their efficiency in terms of gas production is very low.

Zum Stand der Technik ( EP 0 805 275 A2 ) gehört eine Seitenkanalpumpstufe mit auf einer Welle befestigten Rotorelementen und Statorelementen, welche mit den feststehenden Teilen der Pumpe verbunden sind, wobei an den Rotor-elementen beidseitig pumpaktive Strukturen angebracht sind, wobei diese auf mindestens einer Seite aus in axialer Richtung abstehenden Schaufeln bestehen, welche auf mehreren konzentrischen Ringen angeordnet sind und bei der in den Statorelementen mehrere konzentrische Kanäle eingearbeitet sind, in welche die Schaufeln der Rotorelemente eingreifen. Es sind Gaseintrittsöffnungen vorhanden, welche durch Sperren von den Gasaustrittsöffnungen getrennt sind. Diese zum Stand der Technik gehörende Seitenkanalpumpstufe weist den Nachteil auf, dass die Pumpleistung nicht optimiert ist.The prior art ( EP 0 805 275 A2 ) includes a Seitenkanalpumpstufe with mounted on a shaft rotor elements and stator elements, which are connected to the fixed parts of the pump, wherein the rotor elements on both sides pumping structures are mounted, which consist on at least one side of projecting blades in the axial direction, which are arranged on a plurality of concentric rings and in which a plurality of concentric channels are incorporated in the stator elements, in which engage the blades of the rotor elements. There are gas inlet openings which are separated by barriers from the gas outlet openings. This prior art side channel pumping stage has the disadvantage that the pump power is not optimized.

Weiterhin gehört zum Stand der Technik ( JP 1 267 390 A ) eine Pumpe, bei der am Rotor Flügel angeordnet sind. Darüber hinaus gibt es Durchflusspassagen, die von der Seite der Ansaugöffnung zu der Seite der Ausstoßöffnung vorgesehen sind. Auch bei dieser Pumpe lässt sich die Pumpleistung noch optimieren.Furthermore belongs to the state of the art ( JP 1 267 390 A ) A pump in which the rotor blades are arranged. In addition, there are flow passages provided from the side of the suction port to the side of the discharge port. Even with this pump, the pump power can be optimized.

Weiterhin gehört zum Stand der Technik ( GB 2 253 246 A ) eine Pumpe mit zwei Flügelrädern. Neben den äußeren Rändern der Flügelräder erstreckt sich ein Kanal. Die Schaufeln bewegen sich jedoch nicht innerhalb des Kanals, so dass auch hier die Pumpleistung nicht optimiert ist.Furthermore belongs to the state of the art ( GB 2 253 246 A ) a pump with two impellers. In addition to the outer edges of the impellers extends a channel. However, the blades do not move within the channel, so again the pump power is not optimized.

Der Erfindung liegt die Aufgabe zu Grunde, eine Seitenkanalpumpe vorzustellen, welche bei kompakter Bauweise eine ausreichend hohe Druckdifferenz erzeugt. Insbesondere soll die Länge der Pumpe in Grenzen gehalten werden. Eine deutliche Erhöhung des Saugvermögens kommt als weitere Anforderung hinzu. Die Fertigung muss rationell und mit weniger Aufwand als bei bestehenden Systemen durchgeführt werden können.The invention is based on the object to present a side channel pump, which generates a sufficiently high pressure difference in a compact design. In particular, the length of the pump should be kept within limits. A significant increase in the pumping speed is added as a further requirement. The production must be rational and with less effort than existing systems can be performed.

Die Aufgabe wird durch die kennzeichnenden Merkmale der Schutzansprüche gelöst.The object is solved by the characterizing features of the claims.

Die erfindungsgemäße Anordnung erlaubt eine kurze Bauform der Pumpe, insbesondere des Rotors. Dadurch wird bei Erwärmung des Rotors die thermische Längenänderung in Grenzen gehalten. Als Folge ist eine Verkleinerung der axialen Spalte möglich, wodurch Rückströmverluste verringert werden. Zusätzlich wirken sich kleinere Spalte wiederum auf das Bauvolumen aus. Durch die Möglichkeit des parallelen Pumpens kann das Saugvermögen deutlich erhöht werden. Eine Kombination von parallelen und seriellen Pumpstufen bietet auf einfache Art die Möglichkeit einer Optimierung von Saugvermögen und Kompression. Die Fertigung kann einfach und rationell durchgeführt werden.The arrangement according to the invention allows a short design of the pump, in particular of the rotor. As a result, the thermal change in length is kept within limits when the rotor is heated. As a result, reduction of the axial gap is possible, thereby reducing backflow losses. In addition, smaller gaps in turn affect the volume of construction. Due to the possibility of parallel pumping, the pumping speed can be increased significantly. A combination of parallel and serial pump stages provides a simple way to optimize pumping speed and compression. The production can be carried out easily and rationally.

Anhand der Figuren 1 - 4b soll die Erfindung an einem Beispiel näher erläutert werden.

Fig. 1
zeigt eine Seitenkanalpumpstufe in perspektivischer Ansicht;
Fig. 2a
zeigt eine Statorscheibe für den Parallelbetrieb zweier koaxialer Pumpstufen;
Fig. 3a
zeigt den Schnitt A-A aus Fig. 2a;
Fig. 4a
zeigt den Schnitt B-B aus Fig. 2a;
Fig. 2b
zeigt eine Statorscheibe für den seriellen Betrieb zweier koaxialer Pumpstufen;
Fig. 3b
zeigt den Schnitt A-A aus Fig. 2b;
Fig. 4b
zeigt den Schnitt B-B aus Fig. 2b.
Based on Figures 1 - 4b the invention will be explained in more detail by way of example.
Fig. 1
shows a side channel pumping stage in perspective view;
Fig. 2a
shows a stator for the parallel operation of two coaxial pumping stages;
Fig. 3a
shows the section AA Fig. 2a ;
Fig. 4a
shows the section BB Fig. 2a ;
Fig. 2b
shows a stator for the serial operation of two coaxial pumping stages;
Fig. 3b
shows the section AA Fig. 2b ;
Fig. 4b
shows the section BB Fig. 2b ,

Ein Ausschnitt aus Seitenkanalpumpstufen ist in Fig. 1 perspektivisch dargestellt. Die Pumpelemente bestehen in diesem Beispiel aus zwei Rotorelementen 12, welche auf einer Welle 10 befestigt sind, und aus einem Statorelement 14a (bzw. 14b für eine andere Ausführungsform). Das Statorelement, welches sich zwischen den Rotorelementen befindet, ist mit hier nicht dargestellten feststehenden Teilen der Pumpe verbunden. Durch das Zusammenwirken von Rotor- und Statorelementen, welche abwechselnd hintereinander angeordnet sind, entsteht der Pumpeffekt. An dem Rotorelement 12 sind, wie hier beispielsweise dargestellt, auf zwei konzentrischen Ringen Schaufeln 16, 18 angeordnet, welche in axialer Richtung vom Rotorelement abstehen. Die Herstellung der Rotorelemente erfolgt in der Weise, dass in konzentrische Erhebungen, welche sich in axialer Richtung von einer Rotorscheibe aus erstrecken, Löcher 15 mit dem gewünschten Radius der Schaufeln 16, 18 gebohrt werden. Je nach Ausführungsform werden diese Löcher entweder entsprechend der axialen Ausdehnung der Schaufeln angebohrt oder ganz durchgebohrt. Die Anordnung der Schaufeln kann so spiegelbildlich auf beiden Seiten der Scheibe entstehen. Durch die Methode des Durchbohrens der Löcher kann eine besonders rationelle Fertigungsmethode entstehen, indem mehrere Scheiben übereinandergestapelt in einem Arbeitsgang gefertigt werden.A section of side channel pumping stages is in Fig. 1 shown in perspective. The pumping elements consist in this example of two rotor elements 12 which are mounted on a shaft 10 and a stator element 14a (or 14b for another embodiment). The stator element, which is located between the rotor elements, is connected to stationary parts of the pump, not shown here. Due to the interaction of rotor and stator elements, which are arranged alternately one behind the other, the pumping effect is created. On the rotor element 12, as shown here for example, on two concentric rings blades 16, 18 are arranged which project in the axial direction from the rotor element. The rotor elements are manufactured in such a way that holes 15 having the desired radius of the blades 16, 18 are bored in concentric elevations which extend in the axial direction from a rotor disk. Depending on the embodiment, these holes are either drilled according to the axial extent of the blades or completely drilled through. The arrangement of the blades can thus arise in mirror image on both sides of the disc. The method of piercing the holes can result in a particularly efficient production method in which several disks are stacked in one operation.

So können auf der Ober- und der Unterseite einer Rotorscheibe mehrere Pumpstufen konzentrisch angeordnet sein. Da in einer Ausführungsform die jeweils korrespondierenden Pumpstufen der Ober- und der Unterseite durch Löcher verbunden sind, wird es möglich, die Pumpstufen parallel oder seriell zu betreiben.Thus, a plurality of pump stages can be arranged concentrically on the top and the bottom of a rotor disk. In one embodiment, since the respective corresponding pumping stages of the top and the bottom are connected by holes, it is possible to operate the pumping stages in parallel or in series.

Das Statorelement 14a ist in Fig. 2a perspektivisch und in Fig. 3a und Fig. 4a in zwei Schnitten A-A und B-B dargestellt. In den Schnitten Fig. 3a und Fig. 4a ist ein Rotorelement 12 zwischen zwei Statorelementen 14a angeordnet. Im Statorelement sind konzentrische Kanäle 22a und 24a eingearbeitet. In diese Kanäle greifen die Schaufeln 16 und 18 der Rotorscheibe 12 ein und bewirken bei der Rotation die Förderung des Gases, welches bei 32a und 34a in die Kanäle eintritt. In den Kanälen befinden sich bei 26a und 28a Sperren, welche bewirken, dass das Gas nicht ständig im Kreis gefördert wird, sondern bei 36a und 38a die Kanäle verlässt und in die in axialer Richtung benachbarten Kanäle gefördert wird. Auf diese Weise findet eine Gasförderung parallel in den konzentrischen Ringen statt, wodurch das Saugvermögen einer Pumpstufe wesentlich erhöht wird.The stator element 14a is in Fig. 2a in perspective and in Fig. 3a and Fig. 4a shown in two sections AA and BB. In the cuts Fig. 3a and Fig. 4a a rotor element 12 is arranged between two stator elements 14a. In the stator element concentric channels 22a and 24a are incorporated. In these channels, the blades 16 and 18 of the rotor disk 12 engage and cause the rotation of the promotion of the gas, which enters the channels at 32a and 34a. In the channels are at 26a and 28a locks, which cause the gas is not constantly conveyed in a circle, but at 36a and 38a leaves the channels and is conveyed in the adjacent channels in the axial direction. In this way, a gas delivery takes place in parallel in the concentric rings, whereby the pumping speed of a pumping stage is substantially increased.

Eine weitere Ausführungsform der Erfindung zeigen Fig. 2b bis Fig. 4b.Another embodiment of the invention show Fig. 2b to Fig. 4b ,

Ein Statorelement 14b ist in Fig. 2b perspektivisch und in Fig. 3b und Fig. 4b in zwei Schnitten A-A und B-B dargestellt. In den Fig. 3b und 4b ist ein Rotorelement 12 zwischen zwei Statorelementen 14b angeordnet. Im Statorelement sind konzentrische Kanäle 22b und 24b eingearbeitet. In diese Kanäle greifen die Schaufeln 16 und 18 der Rotorscheibe 12 ein und bewirken bei der Rotation die Förderung des Gases, welches bei 32b in den Kanal 22b eintritt. Bei 36b bewirkt die Sperre 26b, dass das Gas den Kanal 22b verlässt und über einen Verbindungskanal 30 bei 34b an den Kanal 24b gelangt. Die Sperre 28b bewirkt, dass das Gas über die Gasaustrittsöffnung 38b den Kanal 24b verlässt, um über eine nachfolgende Stufe weiter befördert zu werden.A stator element 14b is in Fig. 2b in perspective and in Fig. 3b and Fig. 4b shown in two sections AA and BB. In the Fig. 3b and 4b a rotor element 12 is arranged between two stator elements 14b. In the stator concentric channels 22b and 24b are incorporated. In these channels, the blades 16 and 18 of the rotor disc 12 engage and cause the rotation of the promotion of the gas, which enters at 32 b in the channel 22 b. At 36b causes the barrier 26b that the gas leaves the channel 22b and passes through a connecting channel 30 at 34b to the channel 24b. The barrier 28b causes the gas to exit the channel 24b via the gas outlet opening 38b in order to be conveyed further via a subsequent step.

Die beiden Ausführungsformen für parallele und serielle Förderung können je nach Bedarf und Anwendungsfall beliebig kombiniert werden.The two embodiments for parallel and serial conveying can be combined as desired, depending on requirements and application.

Bezugszahlenreference numerals

1010
Wellewave
1212
Rotorelementrotor member
14a14a
Statorelementstator
14b14b
Statorelementstator
1515
Löcherholes
1616
Schaufelnshovel
1818
Schaufelnshovel
22a22a
Konzentrische KanäleConcentric channels
22b22b
Konzentrische KanäleConcentric channels
24a24a
Konzentrische KanäleConcentric channels
24b24b
Konzentrische KanäleConcentric channels
26a26a
SperrenLock
26b26b
SperrenLock
28a28a
SperrenLock
28b28b
SperrenLock
3030
Verbindungskanalconnecting channel
32a32a
Gaseintrittgas inlet
32b32b
Gaseintrittgas inlet
34a34a
Gaseintrittgas inlet
34b34b
Gaseintrittgas inlet
36a36a
Gasaustrittgas outlet
36b36b
Gasaustrittgas outlet
38a38a
Gasaustrittgas outlet
38b38b
Gasaustrittgas outlet

Claims (6)

  1. Side channel pump stage having rotor elements (12) fastened to a shaft (10) and stator elements (14a, 14b) which are connected to the static parts of the pump, wherein mounted on the rotor elements (12) on both sides are pump-active structures which consist on at least one side of blades (16, 18) which project in the axial direction and are arranged on one or more concentric rings, wherein, incorporated into the stator elements (14a, 14b) are one or more concentric channels (22a, 24a, 22b, 24b) in which the blades (16, 18) of the rotor elements engage, and wherein gas inlet openings (32a, 34a, 32b, 34b) are provided which are separated by means of barriers (26a, 28a, 26b, 28b) from the gas outlet openings (36a, 38a, 36b, 38b), characterised in that through holes (15) are provided in the rotor element (12) in the axial direction between the blades (16, 18) .
  2. Side channel pump stage according to claim 1, characterised in that the blades (16, 18) are arranged on both sides of the rotor elements (12).
  3. Side channel pump stage according to claim 1 or 2, characterised in that the gas guides of the two sides of a rotor element are connected to one another.
  4. Side channel pump stage according to at least one of the preceding claims, characterised in that the gas outlet opening (36b) of one channel (22b) is connected by means of a connecting channel (30) to the gas inlet opening (34b) of an adjacent channel (24b).
  5. Method for producing rotor elements (12) of a side channel pump stage, characterised in that holes (15) having the desired radius of the blades (16, 18) are bored in concentric raised portions which extend in the axial direction from a rotor disk.
  6. Method for producing rotor elements (12) of a side channel pump stage according to claim 5, characterised in that the holes (15) are bored, between the blades (16, 18), through the rotor disk.
EP04027043.1A 2003-12-10 2004-11-13 Side channel pumping stage Expired - Lifetime EP1541871B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2003157546 DE10357546A1 (en) 2003-12-10 2003-12-10 Side channel pump stage
DE10357546 2003-12-10

Publications (3)

Publication Number Publication Date
EP1541871A2 EP1541871A2 (en) 2005-06-15
EP1541871A3 EP1541871A3 (en) 2011-09-14
EP1541871B1 true EP1541871B1 (en) 2015-08-05

Family

ID=34485274

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04027043.1A Expired - Lifetime EP1541871B1 (en) 2003-12-10 2004-11-13 Side channel pumping stage

Country Status (2)

Country Link
EP (1) EP1541871B1 (en)
DE (1) DE10357546A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014067704A1 (en) * 2012-10-29 2014-05-08 Continental Automotive Gmbh Turbomachine in a motor vehicle
DE102013108482A1 (en) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vacuum pump stage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2253246A (en) * 1990-12-15 1992-09-02 Dowty Defence & Air Syst Regenerative pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE872819C (en) * 1944-11-04 1953-04-09 Siemens Ag Ring compressor
JPS61247893A (en) * 1985-04-26 1986-11-05 Hitachi Ltd Vacuum pump
JPH01267390A (en) 1988-04-18 1989-10-25 Daikin Ind Ltd Vortex vacuum pump
RU2032836C1 (en) * 1992-12-29 1995-04-10 Владимир Николаевич Хмара Vortex compressor
DE4314418A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with differently designed pump sections
GB9609281D0 (en) 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19756026C2 (en) * 1997-12-17 2003-01-09 Webasto Thermosysteme Gmbh Two-stage ring duct blower

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2253246A (en) * 1990-12-15 1992-09-02 Dowty Defence & Air Syst Regenerative pump

Also Published As

Publication number Publication date
DE10357546A1 (en) 2005-07-07
EP1541871A3 (en) 2011-09-14
EP1541871A2 (en) 2005-06-15

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