EP1075897A1 - Zweischeiben-Feinschleifmaschine - Google Patents
Zweischeiben-Feinschleifmaschine Download PDFInfo
- Publication number
- EP1075897A1 EP1075897A1 EP00113746A EP00113746A EP1075897A1 EP 1075897 A1 EP1075897 A1 EP 1075897A1 EP 00113746 A EP00113746 A EP 00113746A EP 00113746 A EP00113746 A EP 00113746A EP 1075897 A1 EP1075897 A1 EP 1075897A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- disc
- drive shaft
- axially parallel
- working
- grinding machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Definitions
- the invention relates to a two-disc fine grinding machine according to the Preamble of claim 1.
- From DE 195 47 085 is a lapping or polishing machine with an upper and one lower working disc, of which at least one by one Drive is driven in rotation. Between the work surfaces of the lower and upper Working disk, several rotor disks are arranged, the openings for Include workpieces and a toothing on the circumference, the Tooth teeth with an inner and an outer pin ring are engaged Rotation and propulsion of the rotor disks if at least one pin ring is in Rotation is offset. It is also a source of the supply of flowable Work equipment or lubricant provided that entered between the work surfaces becomes. External and internal interceptors catch the inside and outside of the Workers leaving the working gap and feed it to a filtration system. A what can either use a recycling tank or some other Connect process.
- Cooling channels are provided in the carrier disk, to which a cooling medium is fed.
- the invention has for its object to a two-disc grinding machine create the effort for the supply of the working fluid and the coolant reduced and optimal cooling is guaranteed.
- the carrier disks are formed at least one radially sealed chamber which over axially parallel bores of the carrier disc is connected to the working surfaces.
- At least one axially parallel channel is provided in each shaft, which is connected to a Source of cooling lubricant connected via a stationary feed device is.
- an internally closed cooling circuit instead of an internally closed cooling circuit, as was previously the case, an open circuit is provided and the coolant is also lubricating or Work equipment. It is understood that a suitable cooling unit is provided is to bring the cooling lubricant to a low temperature before it Worktops is fed. Catching the radially from the gap between cooling lubricant emerging from the work surfaces is carried out in a known manner, about as described in DE 195 47 085, to which express reference is made becomes. The cooling lubricant collected can be recycled or filtered, before it is fed back to the work discs via the cooling unit.
- the construction according to the invention ensures that the active ones Grinding zones at the top and bottom and therefore also below the workpieces be optimally cooled. The chips are also optimally removed. Through the The measure according to the invention increases the cutting performance and the service life of the grinding wheels considerably.
- the drive shafts two or have more axially parallel channels, which with the feed device and with in Circumferential direction offset points of the chambers are connected.
- the axially parallel channels can be formed with the help of a sleeve that is rotatably in the hollow drive shaft sits and on the outside one or more axially parallel Has grooves that form the cooling channels.
- the chambers in the carrier disks can be connected via at least one connecting channel in the carrier disc via a radial hole in the drive shaft with the axially parallel channels in the drive shaft.
- Another one Embodiment of the invention has the lower carrier disc spokes, which Connect the hub to a support section. The connecting channel can then in one or several spokes.
- the feed device on the drive shafts is according to a further embodiment the invention with a stationary distributor ring surrounding the drive shaft provided, on which at least one feed line is attached. This is over a radial hole in the distributor ring is connected to an axially parallel ring chamber, which is formed between the distributor ring and the drive shaft. About a radial The bore in the drive shaft is then the annular chamber with at least one axially parallel channel connected in the drive shaft.
- Fig. 1 is described in more detail, but with the explanation of such Parts are omitted in detail, which are usually components of grinding, lapping, Represent polishing or other two-disc machines.
- a machine housing 10 of the fine grinding machine with lapping kinematics according to FIG. 1 has a lower part 12 and an upper part 14.
- the upper part is 14 relative to the lower part 12 about a vertical axis.
- the upper Part has an upper grinding wheel 16, which is composed of a carrier wheel 18 and a work disc 20 attached thereto by screwing.
- the Grinding wheel 16 is oscillating but non-rotatably on an upper vertical drive shaft 22 suspended on which a gear 24 sits, which is not shown in detail Is driven by a suitable drive for the purpose of rotation of the Grinding wheel 16.
- the drive shaft 22 is of a stationary one Surround feed device 26, which will be discussed in more detail below.
- the feed device 26 is connected to two lines 28, 30, via which one Cooling lubricant is supplied.
- the source of cooling lubricant is not shown. It has a filter and cooling unit for cooling the liquid and a pump to generate sufficient pressure.
- the management of the Coolant to the grinding wheel 16 occurs through the hollow drive shaft 22 way to be described further below.
- the carrier disk 18 has an inclined channel 32 which is in connection with a labyrinth 34, which contains several chambers for receiving the supplied Coolant.
- the work disk 20 is with a pattern of axially parallel Provide through holes 36 through which liquid emerges to the work surface can.
- the grinding wheel 16 can be described and not described with the aid Medium vertically are moved towards a lower grinding wheel 40 which is made up of a lower support plate 42 and a lower working plate 44.
- the lower grinding wheel 40 is fixed in height, but is vertical Drive shaft 46 rotated. Again sits on the drive shaft 46 Gear 48, which can be driven by a drive motor, not shown.
- Gear 48 which can be driven by a drive motor, not shown.
- a further supply device 50 for cooling lubricant provided which is connected to two lines 52, 54.
- the lines 52, 54 are like lines 28, 30 with a source of cooled and filtered Cooling lubricant connected. This can be identical to that for the lines 28, 30
- the supply of the cooling lubricant to the lower grinding wheel 40 takes place via the hollow drive shaft 46 in a manner to be described and Wise.
- the lower carrier plate 42 has a support section 56 which is screwed together is connected to the working disc 44, a hub 58 and spokes 60 between hub 58 and support section 56.
- the support section 56 again has a cooling labyrinth 62, which is similar to the cooling labyrinth 34 and that with a pattern of axially parallel through holes 64 in the working disc 44 the facing work surface is connected.
- the cooling labyrinth 42 is over Channels 66 in the spokes 60 are connected to the feed in the drive shaft 46 in a manner that will be described below.
- a ring 70 can be seen, which is arranged stationary and surrounds the drive shaft 22 and with one surrounding the drive shaft and with this rotating sleeve 72 forms an annular chamber 74 which over a radial bore 76 or 78 is connected to the line 28 or 30.
- radial bores 80 and 82 are radial bores 80 and 82, respectively intended.
- the radial bores are connected to axially parallel channels 84 and 86, which are formed by a sleeve 88 which is rotatably within the hollow Wave 22 sits.
- the attachment of the bushing 88 is not dealt with in detail.
- the ring body 90 has a first Channel arrangement 92 and a second channel arrangement 94, which one Connect axially parallel channel 84 or 86 to a channel 32 in the carrier disk 18, around cooling lubricant at several circumferentially spaced locations initiate into the labyrinth 34.
- the grinding wheel 16 is surrounded by a hood 96 which is adjustable in height on Housing part 14 is attached.
- An adjustment cylinder 98 is used for adjustment. How 1, the side wall of the hood 96 extends over the work surface the grinding wheel 16 downward when the grinding wheel 16 in Is lowered towards the lower grinding wheel 40. This is left in Fig. 1 by the dashed double line indicated.
- An arrangement designated 100 is used for measuring purposes during grinding, on what is not discussed further. It has a guided through the hollow shaft 22 Rod that is led out of the shaft 22 at the upper end.
- the feed device 50 has a feed ring 110 on, which stationary surrounds the lower end of the drive shaft 46 and the one with the two Lines 52, 54 is connected.
- Radial bores 112, 114 are with a Annulus 116 communicates between the ring 50 and one on the shaft 46 seated socket 118 is formed.
- Bushing 118 and shaft 46 are aligned radial bores, which are in connection with axially parallel Channels 120, 122 in the shaft 46. These are formed by axially parallel grooves a sleeve 124 which is rotatably arranged in the hollow shaft 46.
- the annular chamber 116 is sealed by an upper and a lower lip seal, as well as chamber 74 of distributor 26 on the upper shaft 22. With the help of one built on the other side of the seals Pressure from air or a liquid under pressure will improve sealing maintain and prevents the cooling lubricant introduced under pressure escapes.
- the axially parallel channels 120, 122 are via upper radial bores in the shaft 46 in communication with the channels 66 in the spokes 60, the hub assembly 58 has connecting channels, but not provided with reference numerals are.
- the cooling lubricant can therefore also in rotation of the grinding wheel 40 in the cooling labyrinths 62 are fed in and from there via the holes 64 to Exit the work surface.
- An inner pin ring 126 is connected to an inner shaft 128 within the shaft 46 driven by a toothed belt drive 130, which is driven by a motor 132 is driven. Furthermore, an outer pin collar 134 is shown, which the grinding wheel 40 surrounds and can also be driven in rotation, which is not shown here is. Only one lifting device 136 is shown, but in detail not to be described and with which the pin collar 134 is adjustable in height is. This applies in particular to lowering the pin collar 134 during loading and unloading of the workpieces. As is known, the pin wreaths are not used to drive the shown, toothed rotor discs on the circumference.
- a rod 138 in the inner shaft 128 with an upper plate 140 is another Part of the measuring device shown in Fig. 2. This will be discussed in detail not received.
- the cooling lubricant escaping radially outwards is through a side wall 142, which surrounds the lower grinding wheel 40 like a trough.
- the Cooling lubricant is collected in a tub, then filtered and cooled and fed again.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
Claims (6)
- Zweischeiben-Feinschleifmaschine mit einem Maschinengehäuse, einer oberen und einer unteren Arbeitsscheibe, die jeweils an einer Trägerscheibe befestigt sind, einer oberen und einer unteren vertikalen Antriebswelle zum Antrieb der Arbeitsscheiben, die mittels Rollenlager im Maschinengehäuse drehbar gelagert und von einem Motor über Getriebemittel antreibbar sind, und mit einer Kühlvorrichtung, die mittels Kühlflüssigkeit die Arbeitsscheiben kühlt, dadurch gekennzeichnet, daß in der der jeweiligen Arbeitsscheibe (20, 44) zugekehrten Fläche der Trägerscheibe (18, 42) mindestens eine radial abgedichtete Kammer (34, 62) geformt ist, die über achsparallele Bohrungen (36, 64) der Arbeitsscheiben (20, 44) mit deren Arbeitsfläche verbunden ist, und jede Welle (22, 46) mindestens einen achsparallelen Kanal (86, 88, 120, 122) aufweist, dem von einer Quelle für Kühlschmierflüssigkeit über eine stationäre Zuführvorrichtung (26, 50) Kühlschmierflüssigkeit zugeführt wird.
- Zweischeiben-Schleifmaschine nach Anspruch 1, dadurch gekennzeichnet, daß mindestens eine der Arbeitswellen (22, 46) zwei oder mehr achsparallele Kanäle (86, 88, 120, 122) aufweist, die mit der Zuführvorrichtung (26, 50) und mit in Umfangsrichtung versetzt angeordneten Stellen der Kammern (34, 62) verbunden sind.
- Zweischeiben-Schleifmaschine nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Kammern (34, 62) über mindestens einen Verbindungskanal (32, 66) in der Trägerscheibe (18, 42) über eine radiale Bohrung in der Antriebswelle (22, 46) mit dem achsparallelen Kanal (86, 88, 120, 122) in der Antriebswelle (22, 46) verbunden ist.
- Zweischeiben-Schleifmaschine nach Anspruch 3, dadurch gekennzeichnet, daß die untere Trägerscheibe (42) einen mit der Arbeitsscheibe (44) verbundenen Tragschnitt (56), eine auf der Antriebswelle (46) sitzende Nabe (58) und Speichen (60) zwischen Nabe und Tragabschnitt aufweist und der Verbindungskanal (66) durch eine Speiche (60) geführt ist.
- Zweischeiben-Schleifmaschine nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Zuführvorrichtung (26, 50) einen die Antriebswelle (22, 46) im Abstand zur Trägerscheibe umgebenen stationären Verteilerring (70,110) aufweist, an dem mindestens eine Zuführleitung (28, 30, 52, 54) angebracht ist, die über eine radiale Bohrung (76, 78, 112, 114) im Verteilerring mit einer achsparallelen Ringkammer (74, 116) zwischen Verteilerring und Antriebswelle verbunden ist.
- Zweischeiben-Schleifmaschine nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß in der hohlen Antriebswelle (22, 46) eine Hülse (88, 124) angeordnet ist, die an der Außenseite mindestens eine achsparallele Nut aufweist zur Bildung des achsparallelen Kanals (86, 88, 120, 122).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19937784 | 1999-08-10 | ||
DE1999137784 DE19937784B4 (de) | 1999-08-10 | 1999-08-10 | Zweischeiben-Feinschleifmaschine |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1075897A1 true EP1075897A1 (de) | 2001-02-14 |
EP1075897B1 EP1075897B1 (de) | 2006-09-13 |
Family
ID=7917886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP20000113746 Expired - Lifetime EP1075897B1 (de) | 1999-08-10 | 2000-06-29 | Zweischeiben-Feinschleifmaschine |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1075897B1 (de) |
DE (2) | DE19937784B4 (de) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1366854A1 (de) * | 2002-05-29 | 2003-12-03 | PETER WOLTERS Werkzeugmaschinen GmbH | Zweischeiben-Schleifvorrichtung |
WO2004060610A2 (en) * | 2002-12-27 | 2004-07-22 | Ebara Corporation | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
CN100566938C (zh) * | 2002-12-27 | 2009-12-09 | 株式会社荏原制作所 | 基片抛光方法 |
CN102666015A (zh) * | 2009-11-05 | 2012-09-12 | 彼特沃尔特斯有限公司 | 利用优化的液态加工介质供给双面加工扁平工件的装置和方法 |
CN107671728A (zh) * | 2017-11-15 | 2018-02-09 | 深圳赛贝尔自动化设备有限公司 | 一种抛光研磨机的上盘水冷机构 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10159848B4 (de) * | 2001-12-06 | 2004-07-15 | Siltronic Ag | Vorrichtung zur beidseitigen Bearbeitung von Werkstücken |
DE10159832A1 (de) * | 2001-12-06 | 2003-06-26 | Wacker Siltronic Halbleitermat | Halbleiterscheibe aus Silicium und Verfahren zu deren Herstellung |
DE10218483B4 (de) * | 2002-04-25 | 2004-09-23 | Siltronic Ag | Vorrichtung zur gleichzeitig beidseitigen Material abtragenden Bearbeitung von Werkstücken |
DE102006037490B4 (de) | 2006-08-10 | 2011-04-07 | Peter Wolters Gmbh | Doppelseiten-Bearbeitungsmaschine |
DE102007056627B4 (de) | 2007-03-19 | 2023-12-21 | Lapmaster Wolters Gmbh | Verfahren zum gleichzeitigen Schleifen mehrerer Halbleiterscheiben |
DE102007013058B4 (de) | 2007-03-19 | 2024-01-11 | Lapmaster Wolters Gmbh | Verfahren zum gleichzeitigen Schleifen mehrerer Halbleiterscheiben |
DE102010024040A1 (de) | 2010-06-16 | 2011-12-22 | Siltronic Ag | Verfahren zur Politur einer Halbleiterscheibe |
DE102010032501B4 (de) | 2010-07-28 | 2019-03-28 | Siltronic Ag | Verfahren und Vorrichtung zum Abrichten der Arbeitsschichten einer Doppelseiten-Schleifvorrichtung |
DE102010042040A1 (de) | 2010-10-06 | 2012-04-12 | Siltronic Ag | Verfahren zum Schleifen einer Halbleiterscheibe |
DE102011003008B4 (de) | 2011-01-21 | 2018-07-12 | Siltronic Ag | Führungskäfig und Verfahren zur gleichzeitig beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben |
DE102011003006B4 (de) | 2011-01-21 | 2013-02-07 | Siltronic Ag | Verfahren zur Bereitstellung jeweils einer ebenen Arbeitsschicht auf jeder der zwei Arbeitsscheiben einer Doppelseiten-Bearbeitungsvorrichtung |
DE102011080323A1 (de) | 2011-08-03 | 2013-02-07 | Siltronic Ag | Verfahren zum Einebnen einer Halbleiterscheibe mit verbesserter Kantenschonung |
DE102011082857B4 (de) | 2011-09-16 | 2020-02-20 | Siltronic Ag | Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung wenigstens dreier Werkstücke |
DE102011089570A1 (de) | 2011-12-22 | 2013-06-27 | Siltronic Ag | Führungskäfig zum beidseitigen Schleifen von mindestens einem scheibenförmigen Werkstück zwischen zwei rotierenden Arbeitsscheiben einer Schleifvorrichtung, Verfahren zur Herstellung des Führungskäfigs und Verfahren zum gleichzeitigen beidseitigen Schleifen von scheibenförmigen Werkstücken unter Verwendung des Führungskäfigs |
DE102014220888B4 (de) | 2014-10-15 | 2019-02-14 | Siltronic Ag | Vorrichtung und Verfahren zum doppelseitigen Polieren von scheibenförmigen Werkstücken |
CN115026698A (zh) * | 2022-07-01 | 2022-09-09 | 深圳市易天自动化设备股份有限公司 | 研磨清洁组件及其控制方法和研磨清洁装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1261131A (en) * | 1969-06-06 | 1972-01-19 | Burmah Oil Trading Ltd | Improvements in or relating to lapping machines |
US4007560A (en) * | 1974-09-03 | 1977-02-15 | Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung | Two wheel lapping machine |
DE3411120A1 (de) * | 1983-03-26 | 1984-11-08 | TOTO Ltd., Kitakyushyu, Fukuoka | Laeppvorrichtung |
DE19547085A1 (de) * | 1995-12-15 | 1997-06-19 | Wolters Peter Werkzeugmasch | Poliermaschine |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2780038A (en) * | 1954-09-08 | 1957-02-05 | Glaceries Sambre Sa | Glass grinding and polishing method and apparatus |
FR2564360B1 (fr) * | 1984-05-21 | 1986-10-17 | Crismatec | Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante |
JP3734878B2 (ja) * | 1996-04-25 | 2006-01-11 | 不二越機械工業株式会社 | ウェーハの研磨装置 |
US5674116A (en) * | 1996-10-09 | 1997-10-07 | Cmi International Inc. | Disc with coolant passages for an abrasive machining assembly |
-
1999
- 1999-08-10 DE DE1999137784 patent/DE19937784B4/de not_active Expired - Lifetime
-
2000
- 2000-06-29 EP EP20000113746 patent/EP1075897B1/de not_active Expired - Lifetime
- 2000-06-29 DE DE50013453T patent/DE50013453D1/de not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1261131A (en) * | 1969-06-06 | 1972-01-19 | Burmah Oil Trading Ltd | Improvements in or relating to lapping machines |
US4007560A (en) * | 1974-09-03 | 1977-02-15 | Jmj Werkzeugmaschinen Gmbh Fuer Feinbearbeitung | Two wheel lapping machine |
DE3411120A1 (de) * | 1983-03-26 | 1984-11-08 | TOTO Ltd., Kitakyushyu, Fukuoka | Laeppvorrichtung |
DE19547085A1 (de) * | 1995-12-15 | 1997-06-19 | Wolters Peter Werkzeugmasch | Poliermaschine |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1366854A1 (de) * | 2002-05-29 | 2003-12-03 | PETER WOLTERS Werkzeugmaschinen GmbH | Zweischeiben-Schleifvorrichtung |
WO2004060610A2 (en) * | 2002-12-27 | 2004-07-22 | Ebara Corporation | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
WO2004060610A3 (en) * | 2002-12-27 | 2004-11-25 | Ebara Corp | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
US7419420B2 (en) | 2002-12-27 | 2008-09-02 | Ebara Corporation | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
CN100566938C (zh) * | 2002-12-27 | 2009-12-09 | 株式会社荏原制作所 | 基片抛光方法 |
US7883394B2 (en) | 2002-12-27 | 2011-02-08 | Ebara Corporation | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
US8292694B2 (en) | 2002-12-27 | 2012-10-23 | Ebara Corporation | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method |
CN102666015A (zh) * | 2009-11-05 | 2012-09-12 | 彼特沃尔特斯有限公司 | 利用优化的液态加工介质供给双面加工扁平工件的装置和方法 |
CN107671728A (zh) * | 2017-11-15 | 2018-02-09 | 深圳赛贝尔自动化设备有限公司 | 一种抛光研磨机的上盘水冷机构 |
Also Published As
Publication number | Publication date |
---|---|
DE19937784B4 (de) | 2006-02-16 |
EP1075897B1 (de) | 2006-09-13 |
DE50013453D1 (de) | 2006-10-26 |
DE19937784A1 (de) | 2001-02-22 |
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