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EP0975875A1 - Vacuum pump system fitted with a liquid mechanical pump - Google Patents

Vacuum pump system fitted with a liquid mechanical pump

Info

Publication number
EP0975875A1
EP0975875A1 EP98922706A EP98922706A EP0975875A1 EP 0975875 A1 EP0975875 A1 EP 0975875A1 EP 98922706 A EP98922706 A EP 98922706A EP 98922706 A EP98922706 A EP 98922706A EP 0975875 A1 EP0975875 A1 EP 0975875A1
Authority
EP
European Patent Office
Prior art keywords
pump
liquid ring
liquid
vacuum pump
pump system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98922706A
Other languages
German (de)
French (fr)
Other versions
EP0975875B1 (en
Inventor
Heinz-Dieter Bürger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Buerger Heinz-Dieter Vakuum- und Verfahrenstechni
Original Assignee
SASKIA Solar- und Energietechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SASKIA Solar- und Energietechnik GmbH filed Critical SASKIA Solar- und Energietechnik GmbH
Publication of EP0975875A1 publication Critical patent/EP0975875A1/en
Application granted granted Critical
Publication of EP0975875B1 publication Critical patent/EP0975875B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
    • F04C19/004—Details concerning the operating liquid, e.g. nature, separation, cooling, cleaning, control of the supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Definitions

  • the invention relates to a vacuum pump system with a liquid ring pump for pumping gases, e.g. against atmospheric pressure.
  • Liquid ring pumps have been used for many years. They contain a rotor eccentrically housed in a cylindrical housing, the blades of which contain a liquid along the cylindrical wall of the housing
  • the object of the invention is to provide a suction system with a liquid ring pump, in which contamination of the working fluid of the pump is avoided even if the gases to be conveyed contain substances that would condense at atmospheric pressure and the temperature of the liquid ring.
  • This object is achieved in that the liquid of the liquid ring pump is formed by an inert fluid and that the liquid ring pump cooperates with a backing pump of the membrane type and is provided on the inlet side with a suction valve which is controlled so that it can only be opened when the Liquid temperature ring in the pump has exceeded a lower limit.
  • the liquid ring pump is operated at a higher temperature in the system according to the invention, so that the risk of condensation of liquid-contaminating substances at the outlet of the liquid ring pump is reduced due to the higher temperature.
  • the choice of an inert organic fluid for the pump fluid ensures long, maintenance-free operation.
  • a vacuum pump system according to the invention is shown, with an inlet 1, which is connected to a container (not shown) to be evacuated, and an outlet 2, which, for example, leads into the atmosphere.
  • the inlet 1 is connected via a suction valve 3 and possibly a cold trap 4 to the suction connection 5 of a liquid ring pump 6.
  • the liquid ring preferably consists of perfluorinated polyether.
  • the pressure connection 7 of the pump leads via a temperature-controlled separator 8 to a diaphragm pump 9, which acts as a backing pump in the system and is connected on the outlet side to the outlet 2 to the atmosphere.
  • the diaphragm pump can also have a cold trap 10 or 11 on the inlet and / or outlet side in order to retain foreign matter before being released into the atmosphere.
  • the valve 3 is controlled by a processor 12, of the temperature measurement signals from a thermocouple 16 in the liquid ring of the pump 6 and possibly from a thermocouple 17 in the separator 8.
  • the processor 12 only opens the valve 3 when the liquid ring has reached a minimum operating temperature of, for example, 45 ° C. above the room temperature.
  • the temperature measurement in the separator 8 can serve to prevent overheating and to close the valve 3 (and to switch off the pump system) if the gases entering the separator 8 exceed an upper limit temperature of, for example, 90 ° C.
  • a safety valve 13 is inserted between the pressure connection 7 of the liquid ring pump 6 or the outlet of the separator 8 connected downstream thereof and the outlet 2 on the atmosphere side. This valve opens automatically when the pressure at the pressure outlet of the liquid ring pump exceeds a certain limit. Such a limit pressure can develop when the diaphragm pump can no longer process the throughput of the liquid ring pump.
  • An acoustic cavitation sensor not shown, as is used as a knock sensor in engine technology, measures the cavitation noise and controls the throttle valve 14 accordingly.
  • a return line 15 can also be seen, via which the liquid accumulating in the separator 8 is returned to the liquid ring pump.
  • the system according to the invention works as follows: after switching on, the liquid ring pump 6 starts to work with the valve 3 closed, as a result of which the temperature of the liquid ring rises rapidly. Is the temperature of e.g. 45 ° C reached, then the processor 12 opens the valve 3, so that the pumping process begins. The conveyed gases are conveyed via the membrane pump 9 to the outlet 2 on the atmosphere side. The pressure relief valve 13 remains blocked until the diaphragm pump is no longer able to process the throughput of the liquid ring pump, so that a pressure builds up at the inlet of the diaphragm pump which exceeds the limit pressure of the pressure relief valve 13. Then this valve is opened briefly and the pressure in question is released.
  • the diaphragm pump normally keeps the pressure connection 7 of the liquid ring pump 6 at a negative pressure of about 100 mbar absolute, so that vapors which may be in the pumped gas and which would condense at atmospheric pressure and ambient temperature remain in vapor form and are discharged into the diaphragm pump .
  • no toxic or aggressive substances accumulate in the liquid ring, so that the service life and maintenance periods of the pump system are significantly extended in comparison to known water ring pumps.
  • the invention is not restricted in detail to all features of the exemplary embodiment shown.
  • a perfluorinated polyether instead of a perfluorinated polyether, another possibly even inorganic fluid can be used, which is inert with regard to the pumped gases and vapors (such as long-chain silanes).
  • individual or all of the cold traps shown can be saved if the gases to be pumped do not contain any foreign constituents which cold traps must prevent from entering the atmosphere.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Reciprocating Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Disclosed is a vacuum pump fitted with a liquid mechanical pump for pumping out gas, for example against the atmospheric pressure. According to the invention, the liquid of the liquid mechanical pump (6) is an inert fluid; the liquid mechanical pump (6) works together with a membrane-type primary pump (9) and is provided, on the inlet side, with a suction valve (3) controlled so as to open only when the temperature of the liquid mechanical pump (6) exceeds a lower threshold value.

Description

VAKUUMPUMPSYSTEM MIT EINER FLÜSSIGRINGPUMPE VACUUM PUMP SYSTEM WITH A LIQUID RING PUMP
Die Erfindung bezieht sich auf ein Vakuumpumpsystem mit einer Flüssigringpumpe zum Abpumpen von Gasen, z.B. gegen Atmosphärendruck.The invention relates to a vacuum pump system with a liquid ring pump for pumping gases, e.g. against atmospheric pressure.
Flüssigringpumpen werden seit vielen Jahren eingesetzt. Sie enthalten einen in einem zylindrischen Gehäuse exzentrisch untergebrachten Rotor, dessen Schaufeln eine Flüssigkeit entlang der zylindrischen Wand des Gehäuses inLiquid ring pumps have been used for many years. They contain a rotor eccentrically housed in a cylindrical housing, the blades of which contain a liquid along the cylindrical wall of the housing
Umlauf versetzen und dabei aufgrund der exzentrischen Rotorlage mehr oder weniger tief in diesen Flüssigkeitsring eintauchen. Innerhalb des Flüssigkeitsrings ergeben sich daher zwischen den Schaufeln Räume variablen Volumens, so daß ein Gas, das in einen dieser Räume angesaugt wird, im Verlauf der Umdrehung des Rotors komprimiert und schließlich ausgestoßen wird.Relocate and immerse more or less deeply in this liquid ring due to the eccentric rotor position. Spaces of variable volume therefore arise within the liquid ring between the blades, so that a gas which is sucked into one of these spaces is compressed in the course of the rotation of the rotor and finally expelled.
Ein wichtiger Faktor für die Wirtschaftlichkeit solcher Pumpen sind der Wasserverbrauch und die Verschmutzung dieses Wassers mit Stoffen, die in den geförderten Gasen enthalten sind.An important factor for the economy of such pumps is the water consumption and the pollution of this water with substances contained in the extracted gases.
Es wurde auch bereits vorgeschlagen, andere Flüssigkeiten statt Wasser in der Flüssigringpumpe einzusetzen. Aufgabe der Erfindung ist es, ein Saugsystem mit einer Flüssigringpumpe anzugeben, bei der eine Verschmutzung der Arbeitsflüssigkeit der Pumpe selbst dann vermieden wird, wenn die zu fördernden Gase Stoffe enthalten, die bei Atmosphärendruck und der Temperatur des Flüssigkeitsrings kondensieren würden. Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß die Flüssigkeit der Flüssigringpumpe von einem inerten Fluid gebildet wird und daß die Flüssigringpumpe mit einer Vorpumpe vom Membrantyp zusammenwirkt und einlaßseitig mit einem Saugventil versehen ist, das so gesteuert ist, daß es sich erst öffnen läßt, wenn die Temperatur des Flüssigkeits- rings in der Pumpe einen unteren Grenzwert überschritten hat.It has also been proposed to use other liquids instead of water in the liquid ring pump. The object of the invention is to provide a suction system with a liquid ring pump, in which contamination of the working fluid of the pump is avoided even if the gases to be conveyed contain substances that would condense at atmospheric pressure and the temperature of the liquid ring. This object is achieved in that the liquid of the liquid ring pump is formed by an inert fluid and that the liquid ring pump cooperates with a backing pump of the membrane type and is provided on the inlet side with a suction valve which is controlled so that it can only be opened when the Liquid temperature ring in the pump has exceeded a lower limit.
Im Gegensatz zu bekannten Flüssigringpumpen wird also in dem erfindungsgemäßen System die Flüssigringpumpe bei höherer Temperatur betrieben, so daß schon aufgrund der höheren Temperatur die Gefahr eine Kondensation von die Flüssigkeit verunreinigenden Stoffen am Ausgang der Flüssigringpumpe verringert wird. Außerdem wird durch die Wahl eines inerten organischen Fluids für die Flüssigkeit der Pumpe ein langer wartungsfreier Betrieb gewährleistet. Schließlich herrscht am Ausgang der Flüssigringpumpe nicht mehr Atmosphärendruck, sondern ein niedrigerer Druck, so daß die Gefahr einer Kondensation von Verunreinigungen am Ausgang der Flüssigringpumpe weiter abgesenkt wird. Bezüglich von Merkmalen eines besonderen Ausführungsbeispiels der Erfindung wird auf die Unteransprüche und auf die nachfolgende Beschreibung anhand der beiliegenden Zeichnung verwiesen, die schematisch ein erfindungsgemäßes Vakuumpumpsystem zeigt. In der einzigen Figur ist ein erfindungsgemäßes Vakuumpumpsystem gezeigt, mit einem Einlaß 1, der mit einem nicht gezeigten zu evakuierenden Behälter verbunden ist, und einem Auslaß 2, der beispielsweise in die Atmosphäre führt. Der Einlaß 1 ist über ein Saugventil 3 und ggf. eine Kühlfalle 4 mit dem Sauganschluß 5 einer Flüssigringpumpe 6 verbunden. Vorzugsweise besteht der Flüssigkeitsring aus perfluoriertem Polyäther. Der Druckanschluß 7 der Pumpe führt über einen temperaturgesteuerten Abscheider 8 zu einer Membranpumpe 9, die in dem System als Vorpumpe wirkt und auslaßseitig mit dem Auslaß 2 zur Atmosphäre verbunden ist. Gegebenenfalls kann die Membranpumpe auf der Einlaß- und/oder Auslaßseite noch eine Kühlfalle 10 bzw. 11 aufweisen, um Fremdstoffe vor der Freigabe in die Atmosphäre zurückzuhalten. Das Ventil 3 wird von einem Prozessor 12 gesteuert, der Temperaturmeßsignale von einem Thermoelement 16 im Flüssigkeitsring der Pumpe 6 und ggf. von einem Thermoelement 17 in dem Abscheider 8 verwertet. Insbesondere öffnet der Prozessor 12 das Ventil 3 erst, wenn der Flüssigkeitsring eine über der Raumtemperatur liegende Mindestbetriebstemperatur von z.B. 45 °C erreicht hat. Die Temperaturmessung in dem Abscheider 8 kann dazu dienen, eine Überhitzung zu verhindern und das Ventil 3 zu schließen (und das Pumpsystem abzuschalten), wenn die in den Abscheider 8 eintretenden Gase eine obere Grenztemperatur von z.B. 90°C überschreiten.In contrast to known liquid ring pumps, the liquid ring pump is operated at a higher temperature in the system according to the invention, so that the risk of condensation of liquid-contaminating substances at the outlet of the liquid ring pump is reduced due to the higher temperature. In addition, the choice of an inert organic fluid for the pump fluid ensures long, maintenance-free operation. Finally, there is no longer atmospheric pressure at the outlet of the liquid ring pump, but a lower pressure, so that the risk of condensation of contaminants at the outlet of the liquid ring pump is further reduced. With regard to features of a particular exemplary embodiment of the invention, reference is made to the subclaims and to the following description with reference to the accompanying drawing, which schematically shows a vacuum pump system according to the invention. In the single figure, a vacuum pump system according to the invention is shown, with an inlet 1, which is connected to a container (not shown) to be evacuated, and an outlet 2, which, for example, leads into the atmosphere. The inlet 1 is connected via a suction valve 3 and possibly a cold trap 4 to the suction connection 5 of a liquid ring pump 6. The liquid ring preferably consists of perfluorinated polyether. The pressure connection 7 of the pump leads via a temperature-controlled separator 8 to a diaphragm pump 9, which acts as a backing pump in the system and is connected on the outlet side to the outlet 2 to the atmosphere. If necessary, the diaphragm pump can also have a cold trap 10 or 11 on the inlet and / or outlet side in order to retain foreign matter before being released into the atmosphere. The valve 3 is controlled by a processor 12, of the temperature measurement signals from a thermocouple 16 in the liquid ring of the pump 6 and possibly from a thermocouple 17 in the separator 8. In particular, the processor 12 only opens the valve 3 when the liquid ring has reached a minimum operating temperature of, for example, 45 ° C. above the room temperature. The temperature measurement in the separator 8 can serve to prevent overheating and to close the valve 3 (and to switch off the pump system) if the gases entering the separator 8 exceed an upper limit temperature of, for example, 90 ° C.
Außerdem ist noch ein Sicherheitsventil 13 zwischen den Druckanschluß 7 der Flüssigringpumpe 6 bzw. den Auslaß des diesem nachgeschalteten Abscheiders 8 und den atmosphä- renseitigen Auslaß 2 eingefügt. Dieses Ventil öffnet automa- tisch, wenn der Druck am Druckauslaß der Flüssigringpumpe einen bestimmten Grenzwert überschreitet. Ein solcher Grenzdruck kann sich ausbilden, wenn die Membranpumpe den Durchsatz der Flüssigringpumpe nicht mehr verarbeiten kann.In addition, a safety valve 13 is inserted between the pressure connection 7 of the liquid ring pump 6 or the outlet of the separator 8 connected downstream thereof and the outlet 2 on the atmosphere side. This valve opens automatically when the pressure at the pressure outlet of the liquid ring pump exceeds a certain limit. Such a limit pressure can develop when the diaphragm pump can no longer process the throughput of the liquid ring pump.
Weiter ist in der Figur noch eine mit einem Drossel- ventil 14 versehene Leitung gezeigt, die vom atmosphärensei- tigen Auslaß 2 in die Flüssigringpumpe zurückführt und eine geringe Menge Gas in diese Pumpe zurückleitet. Es hat sich gezeigt, daß diese Maßnahme den Flüssigkeitsring elastischer macht und Kavitationseffekte verringert. Ein nicht darge- stellter akustischer Kavitationssensor, wie er in der Motorentechnik als Klopfsensor eingesetzt wird, mißt das Kavitationsgeräusch und steuert dementsprechend das Drosselventil 14.Also shown in the figure is a line provided with a throttle valve 14, which returns from the atmosphere-side outlet 2 to the liquid ring pump and returns a small amount of gas to this pump. It has been shown that this measure makes the liquid ring more elastic and reduces cavitation effects. An acoustic cavitation sensor, not shown, as is used as a knock sensor in engine technology, measures the cavitation noise and controls the throttle valve 14 accordingly.
Schließlich ist noch eine Rückleitung 15 zu sehen, über die in dem Abscheider 8 anfallende Flüssigkeit in die Flüssigringpumpe zurückgeführt wird.Finally, a return line 15 can also be seen, via which the liquid accumulating in the separator 8 is returned to the liquid ring pump.
Das erfindungsgemäße System arbeitet folgendermaßen: Nach dem Einschalten beginnt bei geschlossenem Ventil 3 die Flüssigringpumpe 6 zu arbeiten, wodurch rasch die Temperatur des Flüssigkeitsrings ansteigt. Ist die Temperatur von z.B. 45 °C erreicht, dann öffnet der Prozessor 12 das Ventil 3, so daß der Pumpvorgang beginnt. Die geförderten Gase werden über die Membranpumpe 9 zum atmosphärenseitigen Auslaß 2 gefördert. Das Überdruckventil 13 bleibt solange gesperrt, bis die Membranpumpe nicht mehr in der Lage ist, den Durchsatz der Flüssigringpumpe zu verarbeiten, so daß sich am Einlaß der Membranpumpe ein Druck aufbaut, der den Grenzdruck des Überdruckventils 13 überschreitet. Dann wird kurzzeitig dieses Ventil geöffnet und der fragliche Druck abge- baut.The system according to the invention works as follows: after switching on, the liquid ring pump 6 starts to work with the valve 3 closed, as a result of which the temperature of the liquid ring rises rapidly. Is the temperature of e.g. 45 ° C reached, then the processor 12 opens the valve 3, so that the pumping process begins. The conveyed gases are conveyed via the membrane pump 9 to the outlet 2 on the atmosphere side. The pressure relief valve 13 remains blocked until the diaphragm pump is no longer able to process the throughput of the liquid ring pump, so that a pressure builds up at the inlet of the diaphragm pump which exceeds the limit pressure of the pressure relief valve 13. Then this valve is opened briefly and the pressure in question is released.
Die Membranpumpe hält im Normalfall den Druckanschluß 7 der Flüssigringpumpe 6 auf einem Unterdruck von etwa 100 mbar absolut, so daß Dämpfe, die sich in dem gepumpten Gas befinden können und bei Atmosphärendruck und Umgebungstempe- ratur kondensieren würden, dampfförmig bleiben und in die Membranpumpe abgeführt werden. Dadurch sammeln sich auch keine giftigen oder aggressiven Stoffe im Flüssigkeitsring, so daß die Lebensdauer und die Wartungsperioden des Pumpsystems im Vergleich zu bekannten Wasserringpumpen deutlich verlängert werden.The diaphragm pump normally keeps the pressure connection 7 of the liquid ring pump 6 at a negative pressure of about 100 mbar absolute, so that vapors which may be in the pumped gas and which would condense at atmospheric pressure and ambient temperature remain in vapor form and are discharged into the diaphragm pump . As a result, no toxic or aggressive substances accumulate in the liquid ring, so that the service life and maintenance periods of the pump system are significantly extended in comparison to known water ring pumps.
Die Erfindung ist nicht im einzelnen auf alle Merkmale des dargestellten Ausführungsbeispiels beschränkt. So kann beispielsweise statt einem perfluorierten Polyäther ein anderes ggf. sogar anorganisches Fluid verwendet werden, das bezüglich der in Frage kommenden gepumpten Gase und Dämpfe inert ist (wie z.B. langkettige Silane). Außerdem können einzelne oder alle der dargestellten Kühlfallen eingespart werden, wenn die zu pumpenden Gase keine Fremdbestandteile enthalten, die durch Kühlfallen daran gehindert werden müs- sen, in die Atmosphäre zu gelangen. The invention is not restricted in detail to all features of the exemplary embodiment shown. For example, instead of a perfluorinated polyether, another possibly even inorganic fluid can be used, which is inert with regard to the pumped gases and vapors (such as long-chain silanes). In addition, individual or all of the cold traps shown can be saved if the gases to be pumped do not contain any foreign constituents which cold traps must prevent from entering the atmosphere.

Claims

ANSPRÜCHE EXPECTATIONS
1. Vakuumpumpsystem mit einer Flüssigringpumpe zum Abpumpen von Gasen z.B. gegen Atmosphärendruck, dadurch gekennzeichnet, daß die Flüssigkeit der Flüssigringpumpe ( 6 ) von einem inerten Fluid gebildet wird und daß die Flüssigringpumpe ( 6 ) mit einer Vorpumpe ( 9 ) vom Membrantyp zusammenwirkt und einlaßseitig mit einem Saugventil (3) versehen ist, das so gesteuert wird, daß es sich erst öffnen läßt, wenn die Temperatur des Flüssigkeitsrings in der Pumpe (6) eine unteren Grenzwert überschritten hat.1.Vacuum pump system with a liquid ring pump for pumping gases e.g. against atmospheric pressure, characterized in that the liquid of the liquid ring pump (6) is formed by an inert fluid and that the liquid ring pump (6) interacts with a backing pump (9) of the membrane type and is provided on the inlet side with a suction valve (3) which is controlled in this way is that it can only be opened when the temperature of the liquid ring in the pump (6) has exceeded a lower limit.
2. Vakuumpumpsystem nach Anspruch 1, dadurch gekennzeichnet, daß das Saugventil (3) außerdem von einem Thermoelement (17) in den geschlossenen Zustand gesteuert wird, das die Gastemperatur am Ausgang der Flüssigringpumpe (6) mißt, wenn diese Temperatur einen oberen Grenzwert überschreitet.2. Vacuum pump system according to claim 1, characterized in that the suction valve (3) is also controlled by a thermocouple (17) in the closed state which measures the gas temperature at the outlet of the liquid ring pump (6) when this temperature exceeds an upper limit.
3. Vakuumpumpsystem nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß ein temperaturgesteuerter Abscheider ( 8 ) zwischen dem Auslaß ( 7 ) der Flüssigringpumpe ( 6 ) und dem Einlaß der Membranpumpe (9) eingefügt ist.3. Vacuum pump system according to one of claims 1 and 2, characterized in that a temperature-controlled separator (8) between the outlet (7) of the liquid ring pump (6) and the inlet of the diaphragm pump (9) is inserted.
4. Vakuumpumpsystem nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß ein Überdruckventil (13) parallel zur Membranpumpe angeordnet ist.4. Vacuum pump system according to one of claims 1 to 3, characterized in that a pressure relief valve (13) is arranged parallel to the diaphragm pump.
5. Vakuumpumpsystem nach einem der Ansprüche 3 und 4, dadurch gekennzeichnet, daß eine mit einem Drosselventil (14) versehene Leitung vom Auslaß der Membranpumpe zum Einlaß ( 5 ) der Flüssigringpumpe (6) führt.5. Vacuum pump system according to one of claims 3 and 4, characterized in that a line provided with a throttle valve (14) leads from the outlet of the diaphragm pump to the inlet (5) of the liquid ring pump (6).
6. Vakuumpumpsystem nach Anspruch 5, dadurch gekennzeichnet, daß ein akustischer Kavitationssensor der Flüssigringpumpe (6) zugeordnet ist und auf das Drosselventil (14) einwirkt.6. Vacuum pump system according to claim 5, characterized in that an acoustic cavitation sensor is assigned to the liquid ring pump (6) and acts on the throttle valve (14).
7. VakuumpumpSystem nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Flüssigkeit der Flüssigringpumpe (6) von perfluoriertem Polyäther gebildet wird. 7. Vacuum pump system according to one of claims 1 to 6, characterized in that the liquid of the liquid ring pump (6) is formed by perfluorinated polyether.
EP98922706A 1997-04-14 1998-04-14 Vacuum pump system fitted with a liquid mechanical pump Expired - Lifetime EP0975875B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19715480A DE19715480C2 (en) 1997-04-14 1997-04-14 Vacuum pump system with a liquid ring pump
DE19715480 1997-04-14
PCT/EP1998/002174 WO1998046885A1 (en) 1997-04-14 1998-04-14 Vacuum pump system fitted with a liquid mechanical pump

Publications (2)

Publication Number Publication Date
EP0975875A1 true EP0975875A1 (en) 2000-02-02
EP0975875B1 EP0975875B1 (en) 2003-02-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP98922706A Expired - Lifetime EP0975875B1 (en) 1997-04-14 1998-04-14 Vacuum pump system fitted with a liquid mechanical pump

Country Status (3)

Country Link
EP (1) EP0975875B1 (en)
DE (2) DE19715480C2 (en)
WO (1) WO1998046885A1 (en)

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Also Published As

Publication number Publication date
EP0975875B1 (en) 2003-02-26
DE19715480C2 (en) 1999-01-14
DE59807317D1 (en) 2003-04-03
DE19715480A1 (en) 1998-10-15
WO1998046885A1 (en) 1998-10-22

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