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EP0775835B1 - Appareil de détection de position - Google Patents

Appareil de détection de position Download PDF

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Publication number
EP0775835B1
EP0775835B1 EP96113214A EP96113214A EP0775835B1 EP 0775835 B1 EP0775835 B1 EP 0775835B1 EP 96113214 A EP96113214 A EP 96113214A EP 96113214 A EP96113214 A EP 96113214A EP 0775835 B1 EP0775835 B1 EP 0775835B1
Authority
EP
European Patent Office
Prior art keywords
sensor
position detection
detection device
signal line
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96113214A
Other languages
German (de)
English (en)
Other versions
EP0775835A2 (fr
EP0775835A3 (fr
Inventor
Kurt Dr. Stoll
Michael Streck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP0775835A2 publication Critical patent/EP0775835A2/fr
Publication of EP0775835A3 publication Critical patent/EP0775835A3/fr
Application granted granted Critical
Publication of EP0775835B1 publication Critical patent/EP0775835B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/28Means for indicating the position, e.g. end of stroke
    • F15B15/2807Position switches, i.e. means for sensing of discrete positions only, e.g. limit switches
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/28Means for indicating the position, e.g. end of stroke
    • F15B15/2815Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2853Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using potentiometers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/28Means for indicating the position, e.g. end of stroke
    • F15B15/2815Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2861Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using magnetic means

Definitions

  • the invention relates to a position detection device for the detection of several relative positions between two components movable relative to each other, with one on the one of the two components specified or definable Sensor device having a signal conductor arrangement with at least one connected to an evaluation device Signal conductor and at least two in working positions different longitudinal positions of the signal conductor arrangement positionable and in the working positions each with at least one signal conductor of the signal conductor arrangement contacted sensor units containing a sensor having.
  • a position detection device of this type runs out DE 39 23 063 C2. It comprises a signal conductor arrangement with a plurality of trained as conductor tracks Signal conductors on the circumference of the housing Working cylinders are arranged. With so-called reed switches equipped sensor units are infinitely variable different working positions along the signal conductor arrangement positionable, each with two Signal conductors are contacted that lead to an evaluation device to lead. When actuating a sensor, for example by one arranged on the piston of the working cylinder Actuator, a circuit is closed, so that a sensor signal arises that is suitable for can use other control processes.
  • the known sensor device is still something complex than when using a larger number of Sensors a correspondingly large number of signal conductors is required. This in turn results in a big one Number of plug connections in the signal conductor course for Evaluation device in which functional impairments occur over time may occur.
  • DE 32 40 351 A1 already proposed a variety of Sensors with a series connection of resistors too combine so that a resistance chain results and based on the measured resistance to the excited sensor and thus the relative position of the moving components is closed can be.
  • this position detection device is, however, the working position of the individual Sensors cannot be changed.
  • a specially designed sensor device is required. Additional sensors are required for more The sensor device must query relative positions be replaced by a correspondingly adapted one.
  • a signal conductor is sufficient because the feedback the sensor signals can take place via the component itself.
  • the Signal conductor arrangement with several, in particular with exactly to provide two signal conductors, several at the same time Sensor units are assigned.
  • a respective coding device is preferred as a resistance device trained who when actuating the associated Sensor has a certain electrical resistance causes, which is from the connected evaluation device can be evaluated as a coding signal.
  • a respective sensor can be used as a reed switch or other magnetic field sensitive element to which an ohmic resistor is connected in series , the ohmic resistances of the different Sensor units are different. Depending on excited sensor thus results in a very specific one electrical resistance, for example, over the Record the current intensity in the evaluation device lets and serves as a coding signal that the correct assignment Identification of the assigned actuated Sensor enables.
  • the signal conductors and the sensor units are expedient housed in a protective housing that damage and contamination of the sensitive Parts prevented. It expediently consists of electrical insulating material so that it is without special Isolation precautions on one of the relative to each other can determine moving components.
  • the protective housing expediently via a seal, removable lid, which is at least approximately over the extends the entire length of the protective housing and the interior of the housing easily accessible when removed.
  • the position detection device is very suitable for use in connection with all types of linear drives, especially with fluid-operated working cylinders, too such rodless type, the simple structure also makes retrofitting possible.
  • a linear drive 1 in the form of a fluid operated cylinder, especially one Pneumatic cylinder. It has a housing 2 in which a Piston 3 is arranged axially movable, the drive in a manner known per se via unspecified Pressure medium connections are made with the piston 3 communicate containing cylinder space. On the piston 3 a piston rod 4 is arranged which emerges from the housing 2 protrudes.
  • a valve device 5 is located directly on the housing 2 attached, via which the pressurization of the piston 3 and thereby its as well as the linear movement of the piston rod 4 is caused as required.
  • A likewise attached to the linear drive 1, according to the example control electronics fixed to the valve device 5 6 controls the operation of the valve device 5. It can contain its own control program however, expediently via a connecting cable 10 a higher-level control device connected, the the operation of several linear drives 1 and other components can coordinate.
  • the linear drive 1 is with a position detection device 7 equipped. It enables the acquisition of certain Relative positions between the housing 2 and the Piston 3. It includes one in the embodiment outside on the housing 2 of the linear drive 1 fixed sensor device 8 and an electronic connected to it Evaluation device 12. The latter communicates via a Connection cable 11 with the control electronics 6.
  • the sensor device 8 of the embodiment includes a protective housing 13 which in the stroke range of the piston 3rd is releasably attached to the outside of the housing 2. It has Longitudinal extension and is parallel to the longitudinal axis 14 of the Housing 2 aligned. For an exactly parallel alignment is to be made possible on a lower housing part 15 the protective housing 13 a rib-like raised, longitudinal mounting rail 16 is provided. It engages positively in an open on the long side Fastening groove 17 on the outer circumference of the housing 2.
  • the exemplary fastening groove 17 is in the manner of a T-groove trained and the mounting rail on the front inserted.
  • the interlocking sections prevent the protective housing 13 from being removed by the Groove neck 18 of the fastening groove 17 therethrough.
  • the protective housing 13 is completed by a Housing cover 22, which in the assembled state has a longitudinal, the housing opening 23 facing radially away from the housing 2 closes, with the housing cover 22 removed a sensor receiving space formed inside the protective housing 13 24 is accessible.
  • the protective housing 13 has expediently strip-shaped Shape with box-like structure.
  • the front openings are closed by end elements 25, 25 '. over the one, for example the front end element 25, the protective housing 13 is fixed at one end to the Housing 2 of the linear drive 1 connected, one in individual slot nut connection 26, not shown can be used on which the mounting groove 17th is involved.
  • End element 25 ' only forms an intermediate wall which is a block-like in the exemplary embodiment Evaluation device 12 having a housing connects.
  • the latter is with fastening screws 27 the protective housing 13 screwed on the end face, the plate-like end element 25 'clamped between them is.
  • Comparable fastening screws 27 are used Fixation of the front end element 25 on Protective housing 13.
  • evaluation device 12 directly to the protective housing 13 it can be used as a closing element act so that there is an additional intermediate Part 25 'superfluous.
  • the housing cover 22 expediently in the context of a detachable snap connection 32 fixed to the lower housing part 15.
  • To be a tight one To create the connection are in the sensor receiving space 24 in the lower housing part 15 along two sealing strips 33 used in the area of the housing opening 23 above one another facing flexible sealing lips 34 which of bear against the fitted housing cover 22 on the inside.
  • the sealing lips stand 34 according to the dash-dotted representation 31 a bit out of the housing opening 23, so that they when put on of the housing cover 22 is bent inwards by the latter and due to their rubber elasticity fixed housing cover 22 against a certain pressure the inside of which are pressed.
  • One of several signal conductors is in the sensor receiving space 24 35 existing signal conductor arrangement and one A plurality of sensor units 38 are added.
  • the signal conductors 35 are preferably in the form of conductor tracks designed. In the embodiment, they are over one Part of their circumference electrically isolated into one of the two sealing strips 33 of the sensor device 8 embedded and fixed. Your not covered, according to the example slightly raised above the sealing strips 33 more outstanding Contact section 37 extends over the entire length of the protective housing 13 or the length of the im Operation of possible stroke of the piston 3 of the linear drive 1.
  • the signal conductors 35 are expedient around metal wires.
  • the sensor units 38 already mentioned have one 3 and 4 clearly visible holder 42. about this Holders 42 are longitudinally displaceable on the protective housing 13 stored and releasably clampable in any longitudinal position.
  • the holder 42 is in one piece in particular molded bearing base 43 longitudinally displaceable in one formed at the bottom of the sensor chamber 24, longitudinal Fastening recess 44 is longitudinally displaceable led recorded.
  • the fastening recess 44 protrudes expediently in the mounting rail 16 of the Protective housing 13 and thus comes within Mounting groove 17 relatively close to the peripheral area of the Piston 3 receiving cylinder space 9 to lie.
  • One on the fastening device 45 provided to the holder 42 enables in any, hereinafter as a working position designated longitudinal position of the sensor unit 38 a housing-fixed fixation. It works in the embodiment with the mounting recess 44 together and has a sliding block 46 running in it, of a with the housing cover 22 removed externally accessible clamping screw 47 with the walls of the Fastening recess 44 can clamp.
  • a respective sensor unit 38 has a sensor 48, which expediently as a magnetic field sensitive Element is formed and in the case of Embodiment around a so-called reed switch acts.
  • the sensor 48 is actuated when it is in the Influence of a magnetic field.
  • This magnetic field comes from in the embodiment of a permanent magnet 49, which is firmly connected to the piston 3.
  • a relatively weak permanent magnet 49 is sufficient, because the sensor 48 in the bearing base 43 of the holder 42 and thus in the immediate vicinity of the cylinder space 9 or of the permanent magnet fixed on the piston 3 49 is placed.
  • the housing 2 of the linear drive 1 suitably consists of non-ferromagnetic Material in order not to negatively influence the magnetic field.
  • the two signal conductors present in the exemplary embodiment 35 are effectively all existing at the same time Associated sensor units 38, the embodiment over four axially consecutively arranged Sensor units 38 has. Every sensor unit 38 has two contact elements 53, each with one of the two signal conductors 35 in electrical Contact is established. In operation of the linear drive 1 in the course of a stroke, the sensors 48 of the existing ones Sensor units 38 actuated one after the other. Since the two sensor connections 54 each with one of the two Contact elements 53 are connected, each includes actuated sensor 48 a circuit with the evaluation device 12, resulting in a sensor signal that can be used connected facilities to operate, for example the associated valve device 5.
  • each sensor unit 38 is equipped with a coding device 55 which at Actuation of the assigned sensor for this sensor characteristic coding signal, based on the evaluation device 12 recognize the actuated sensor 48 can.
  • the coding devices 55 exist in the exemplary embodiment from resistance devices 56, which at least one electrical Resistance element included. Like the schematic 5 shows the circuit diagram Resistor device 56 preferably in series with the associated one Sensor 48 switched. Any resistance device 56 has a certain electrical resistance, where the electrical resistances of the different Differentiate resistance devices 56 from each other. The Resistance values are stored in the evaluation device 12.
  • the electrical one Resistance infinite because of the two signal conductors 35 are not connected. However, it becomes one of the sensors 48 actuated, results from the assigned sensor unit 38 an electrical connection between the two Signal conductors 35, the electrical resistance of the associated Resistance device 56 effective and from the Evaluation device 12 is detected.
  • the stored resistance values are unequivocal Assignment of the sensor signal to the excited sensor 48 possible. The one generated when a respective sensor is actuated electrical resistance thus forms practical the coding signal for the evaluation device 12 for identification of the excited sensor 48.
  • Resistance device 56 of a respective sensor unit 38 to connect the associated sensor 48 in parallel.
  • the result is with unactuated sensors Parallel resistance of all resistance devices 56 at. If one of the sensors is then activated, calls this also shows a certain resistance value, that can be used for identification.
  • the evaluation device generates as a function of the excited sensor 48 12 specific control signals for subordinate Devices, for example for the valve device 5.
  • the control signals can, however the possibly associated control electronics 6 first the higher-level coordination control.
  • the outgoing control signals 57 may be in the frame as needed a parallel, but preferably within a serial data bus are passed on.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Body Structure For Vehicles (AREA)

Claims (13)

  1. Dispositif de détection de position (7) pour la détection de plusieurs positions relatives entre deux composants (2, 3), déplaçables l'un par rapport à l'autre, comportant un dispositif à capteur (8) fixé ou pouvant être fixé sur l'un des deux composants (2), qui comporte un ensemble de lignes pour signaux avec au moins une ligne pour signaux (35) reliée à un dispositif d'exploitation (12), ainsi qu'au moins deux unités à capteur (38), contenant un capteur (48), qui peuvent être positionnées dans des positions de travail en des positions longitudinales différentes de l'ensemble de lignes pour signaux, et qui, dans les positions de travail, sont en contact chacune avec au moins une ligne pour signaux (35) de l'ensemble de lignes pour signaux, caractérisé en ce que plusieurs unités à capteur (38) sont associées ensemble et en même temps, de manière à conduire les signaux, à au moins une ligne pour signaux (35) de l'ensemble de lignes pour signaux, de manière que pour la transmission au dispositif d'exploitation (12), des signaux de capteur qui apparaissent lorsqu'un capteur (48) de ces unités à capteur (38) est actionné, on utilise dans chaque cas les mêmes lignes pour signaux (35), et en ce que chacune de ces plusieurs unités à capteur (38) est équipée d'un dispositif de codage (55) qui, lorsque le capteur (48) correspondant est actionné, provoque un signal de codage caractéristique de celui-ci, à l'aide duquel le dispositif d'exploitation (12) reconnaít le capteur (48) actionné.
  2. Dispositif de détection de position selon la revendication 1, caractérisé en ce que le l'ensemble de lignes pour signaux comporte plusieurs lignes pour signaux (35) s'étendant parallèlement entre elles et à distance les unes des autres, qui sont associées ensemble aux unités à capteur (38), pour la transmission des signaux.
  3. Dispositif de détection de position selon la revendication 2, caractérisé en ce que l'ensemble de lignes pour signaux comporte exclusivement deux lignes pour signaux (35), s'étendant parallèlement et à distance l'une de l'autre, qui sont associées ensemble aux unités à capteur (38) pour la transmission des signaux.
  4. Dispositif de détection de position selon l'une des revendications 1 à 3, caractérisé en ce que chaque dispositif de codage (55) est conformé en dispositif à résistance (56) qui, lorsque le capteur (48) correspondant est actionné, introduit une résistance électrique déterminée, qui peut être exploitée comme signal de codage, par le dispositif d'exploitation (12) raccordé.
  5. Dispositif de détection de position selon la revendication 4, caractérisé en ce que le dispositif à résistance (56) est monté en série avec le capteur (48) associé.
  6. Dispositif de détection de position selon l'une des revendications 1 à 5, caractérisé en ce que chaque capteur (48) est conformé en élément réagissant à un champ magnétique, par exemple en tant qu'interrupteur Reed.
  7. Dispositif de détection de position selon l'une des revendications 1 à 6, caractérisé en ce que les lignes pour signaux (35) de l'ensemble de lignes pour signaux sont réalisées en tant que pistes conductrices avec lesquelles il peut être réalisé un contact par des éléments de contact (53) d'une unité à capteur (38) respective, conformés en particulier en tant que contacts frottants.
  8. Dispositif de détection de position selon l'une des revendications 1 à 7, caractérisé en ce que le dispositif à capteur (8) comprend un boítier de protection (13) qui peut être fixé à l'un des deux composants (2), et qui reçoit l'ensemble de lignes pour signaux ainsi que les unités à capteur (38) correspondantes.
  9. Dispositif de détection de position selon la revendication 8, caractérisé en ce que le boítier de protection (13) comporte un rail de fixation (16) par lequel il peut être fixé de manière non permanente dans une rainure de fixation (17) du composant (2) correspondant.
  10. Dispositif de détection de position selon l'une des revendications 8 ou 9, caractérisé en ce que le boítier de protection (13) comporte, sur sa longueur, un couvercle de boítier (22) qui peut être enlevé pour le réglage de la position de travail des unités à capteur (38) et qui, lorsque le boítier de protection (13) est fermé, coopère avec des lèvres d'étanchéité (34) fixées sur la partie inférieure (15) du boítier.
  11. Dispositif de détection de position selon l'une des revendications 9 ou 10, caractérisé en ce que les unités à capteur (38) comportent un pied-support (43), par lequel elles sont fixées dans un renfoncement de fixation (44) du type rainure creusée dans le boítier de protection (13), lequel pénètre avantageusement dans le rail de fixation (16).
  12. Dispositif de détection de position selon l'une des revendications 1 à 11, caractérisé en ce que le dispositif à capteur (8) et le dispositif d'exploitation (12), reliés fixement entre eux, forment un ensemble constructif.
  13. Dispositif de détection de position selon l'une des revendications 1 à 12, caractérisé en ce que les deux composants, déplaçables l'un par rapport à l'autre, constituent le boítier (2) et la partie d'entraínement (3) d'un dispositif d'entraínement linéaire (1) actionné en particulier au moyen d'un fluide, le dispositif à capteur (8) étant fixé avantageusement sur le pourtour extérieur du boítier (2), et la partie d'entraínement (3) pouvant comporter un aimant permanent (49) pour l'actionnement du capteur.
EP96113214A 1995-11-22 1996-08-17 Appareil de détection de position Expired - Lifetime EP0775835B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE29518539U DE29518539U1 (de) 1995-11-22 1995-11-22 Positionserfassungsvorrichtung
DE29518539U 1995-11-22

Publications (3)

Publication Number Publication Date
EP0775835A2 EP0775835A2 (fr) 1997-05-28
EP0775835A3 EP0775835A3 (fr) 1999-04-28
EP0775835B1 true EP0775835B1 (fr) 2001-11-07

Family

ID=8015785

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96113214A Expired - Lifetime EP0775835B1 (fr) 1995-11-22 1996-08-17 Appareil de détection de position

Country Status (2)

Country Link
EP (1) EP0775835B1 (fr)
DE (2) DE29518539U1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004017899A1 (de) * 2004-04-13 2005-11-10 Festo Ag & Co. Positionssensoranordnung mit mehreren in einer Reihe angeordneten, magnetfeldsensitiven Sensoren, insbesondere Hall-Sensoren
DE102010049760A1 (de) * 2010-10-29 2012-05-03 Festo Ag & Co. Kg Sensoranordnung
DE102010055117A1 (de) * 2010-12-18 2012-06-21 Festo Ag & Co. Kg Positionssensoreinrichtung und damit ausgestattete Linearantriebsvorrichtung
CN101611230B (zh) * 2007-02-20 2012-12-05 费斯托股份有限两合公司 位置传感装置以及配置该位置传感装置的执行器

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29718934U1 (de) * 1997-10-23 1997-12-11 Sick AG, 79183 Waldkirch Befestigungsvorrichtung für Sensoren
DE19813371C2 (de) * 1998-03-26 2001-12-20 Festo Ag & Co Kolbenstangenloser Linearantrieb
EP1074815A1 (fr) * 1999-08-04 2001-02-07 FESTO AG & Co Capteur magnétique biaxial de position
DE19937597B4 (de) * 1999-08-09 2005-11-24 Abb Patent Gmbh Druckmittelbetriebener Stellantrieb
DE20004976U1 (de) 2000-03-17 2000-05-31 Festo AG & Co, 73734 Esslingen Fluidbetätigter Linearantrieb
DE10044984A1 (de) * 2000-09-11 2002-03-21 Mannesmann Rexroth Ag Hydraulischer Zylinder
DE10048049A1 (de) * 2000-09-28 2002-05-02 Festo Ag & Co Fluidtechnische Einrichtung mit einer Diagnoseeinrichtung
DE102004023241B4 (de) * 2004-05-07 2007-11-08 Rexroth Mecman Gmbh Einrichtung zur Positionserfassung
ATE414229T1 (de) * 2006-07-22 2008-11-15 Festo Ag & Co Kg Zylinderservicemodul
EP3070438B1 (fr) * 2015-03-19 2017-02-01 Sick Ag Boîtier de capteur

Family Cites Families (5)

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Publication number Priority date Publication date Assignee Title
DE2418860A1 (de) * 1974-04-19 1975-10-30 Kuebler Impulsgeraete Messwertgeber fuer fuellstandsanzeige von fluessigkeiten
US4068163A (en) * 1976-07-02 1978-01-10 Diamond Power Specialty Corporation Reed switch oscillator assembly for a position indicating system
DE3442879C2 (de) * 1984-11-24 1994-09-01 Wabco Vermoegensverwaltung Einrichtung zum Erfassen der relativen Position von zwei relativ zueinander bewegbaren Teilen
DE4137586A1 (de) * 1991-11-15 1993-05-19 Frank Rueger Vorrichtung zur feststellung einer kolbenstellung in einem zylinder
DE4338568C2 (de) * 1993-11-05 1997-05-22 Mannesmann Ag Einrichtung zur Abfrage von Stellungen an bewegten Elementen mittels Sensoren

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004017899A1 (de) * 2004-04-13 2005-11-10 Festo Ag & Co. Positionssensoranordnung mit mehreren in einer Reihe angeordneten, magnetfeldsensitiven Sensoren, insbesondere Hall-Sensoren
CN101611230B (zh) * 2007-02-20 2012-12-05 费斯托股份有限两合公司 位置传感装置以及配置该位置传感装置的执行器
DE102010049760A1 (de) * 2010-10-29 2012-05-03 Festo Ag & Co. Kg Sensoranordnung
DE102010055117A1 (de) * 2010-12-18 2012-06-21 Festo Ag & Co. Kg Positionssensoreinrichtung und damit ausgestattete Linearantriebsvorrichtung
EP2466269A3 (fr) * 2010-12-18 2012-11-28 Festo AG & Co. KG Dispositif de capteur de position et dispositif d'entraînement linéaire en étant équipé

Also Published As

Publication number Publication date
DE59608134D1 (de) 2001-12-13
EP0775835A2 (fr) 1997-05-28
DE29518539U1 (de) 1996-01-18
EP0775835A3 (fr) 1999-04-28

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