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DE69308996D1 - Tintenstrahlaufzeichnungskopf - Google Patents

Tintenstrahlaufzeichnungskopf

Info

Publication number
DE69308996D1
DE69308996D1 DE69308996T DE69308996T DE69308996D1 DE 69308996 D1 DE69308996 D1 DE 69308996D1 DE 69308996 T DE69308996 T DE 69308996T DE 69308996 T DE69308996 T DE 69308996T DE 69308996 D1 DE69308996 D1 DE 69308996D1
Authority
DE
Germany
Prior art keywords
ink jet
recording head
jet recording
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69308996T
Other languages
English (en)
Other versions
DE69308996T2 (de
Inventor
Atsushi Kobayashi
Tatsuo Furuta
Fumiyuki Kanai
Shinri Sakai
Hiroshi Hosokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP10557893A external-priority patent/JP3257140B2/ja
Priority claimed from JP29118793A external-priority patent/JP3324621B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69308996D1 publication Critical patent/DE69308996D1/de
Application granted granted Critical
Publication of DE69308996T2 publication Critical patent/DE69308996T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69308996T 1992-11-25 1993-11-25 Tintenstrahlaufzeichnungskopf Expired - Fee Related DE69308996T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP31533592 1992-11-25
JP1197593 1993-01-27
JP2819193 1993-02-17
JP10557893A JP3257140B2 (ja) 1993-05-06 1993-05-06 インクジェット記録装置
JP11856193 1993-05-20
JP29118793A JP3324621B2 (ja) 1992-11-25 1993-10-27 インクジェット式記録ヘッド

Publications (2)

Publication Number Publication Date
DE69308996D1 true DE69308996D1 (de) 1997-04-24
DE69308996T2 DE69308996T2 (de) 1997-10-23

Family

ID=27548371

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69308996T Expired - Fee Related DE69308996T2 (de) 1992-11-25 1993-11-25 Tintenstrahlaufzeichnungskopf

Country Status (4)

Country Link
US (2) US5896150A (de)
EP (1) EP0600382B1 (de)
DE (1) DE69308996T2 (de)
HK (1) HK1006444A1 (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5956058A (en) * 1993-11-05 1999-09-21 Seiko Epson Corporation Ink jet print head with improved spacer made from silicon single-crystal substrate
US6371598B1 (en) 1994-04-20 2002-04-16 Seiko Epson Corporation Ink jet recording apparatus, and an ink jet head
JP3235638B2 (ja) * 1994-07-25 2001-12-04 セイコーエプソン株式会社 インクジェット式記録ヘッド、及びその製造方法
EP0974466B1 (de) * 1995-04-19 2003-03-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung
JP3679863B2 (ja) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
JP3386099B2 (ja) * 1995-07-03 2003-03-10 セイコーエプソン株式会社 インクジェット式記録ヘッド用ノズルプレート、これの製造方法、及びインクジェット式記録ヘッド
GB2302842B (en) * 1995-07-03 1998-12-30 Seiko Epson Corp A nozzle plate, ink-jet head and manufacturing method thereof
US7003857B1 (en) 1995-11-24 2006-02-28 Seiko Epson Corporation Method of producing an ink-jet printing head
JP3460218B2 (ja) * 1995-11-24 2003-10-27 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
US6433471B1 (en) * 1996-01-19 2002-08-13 Philips Electronics North America Corporation Plasma addressed liquid crystal display with glass spacers
JP3601239B2 (ja) * 1996-04-05 2004-12-15 セイコーエプソン株式会社 インクジェット式記録ヘッド及びそれを用いたインクジェット式記録装置
US6334672B1 (en) * 1996-04-18 2002-01-01 Minolta Co., Ltd. Inkjet recording head having a driving source attached by a chamfered adhesive layer
US6290341B1 (en) * 1996-10-18 2001-09-18 Seiko Epson Corporation Ink jet printing head which prevents the stagnation of ink in the vicinity of the nozzle orifices
JP3713921B2 (ja) * 1996-10-24 2005-11-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
US6332672B1 (en) 1997-04-30 2001-12-25 Seiko Epson Corporation Ink jet recording head including a cap member sealing piezoelectric vibrators
DE69810691T2 (de) 1997-04-30 2003-08-07 Seiko Epson Corp., Tokio/Tokyo Tintenstrahlaufzeichnungskopf
JP3887137B2 (ja) * 1999-01-29 2007-02-28 セイコーインスツル株式会社 圧電振動子の製造方法
US6303042B1 (en) * 1999-03-02 2001-10-16 Eastman Kodak Company Making ink jet nozzle plates
US6258286B1 (en) * 1999-03-02 2001-07-10 Eastman Kodak Company Making ink jet nozzle plates using bore liners
US6631980B2 (en) 2000-01-19 2003-10-14 Seiko Epson Corporation Liquid jetting head
KR100474836B1 (ko) * 2000-08-05 2005-03-08 삼성전자주식회사 액적 분사 장치의 제조 방법
US20020134749A1 (en) * 2001-01-26 2002-09-26 Chromux Technologies. Inc. Method of making a vertical, mirror quality surface in silicon and mirror made by the method
KR20040027906A (ko) * 2001-08-30 2004-04-01 니폰샤신인사츠가부시키가이샤 재박리 가능한 투명터치패널의 실장구조와 이에 이용하는실장용 시트
JP4731763B2 (ja) * 2001-09-12 2011-07-27 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
US6926382B2 (en) * 2002-04-25 2005-08-09 Brother Kogyo Kabushiki Kaisha Ink-jet head and ink-jet printer
JP2004312666A (ja) * 2003-03-25 2004-11-04 Fuji Photo Film Co Ltd 固体撮像装置及び固体撮像装置の製造方法
US7455394B2 (en) * 2004-09-30 2008-11-25 Brother Kogyo Kabushiki Kaisha Inkjet head
JP4228239B2 (ja) 2006-09-13 2009-02-25 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP4911189B2 (ja) * 2009-03-30 2012-04-04 ブラザー工業株式会社 液体吐出装置およびその製造方法
JP5914969B2 (ja) * 2011-01-13 2016-05-11 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2013063557A (ja) * 2011-09-16 2013-04-11 Ricoh Co Ltd 液体吐出ヘッド及び画像形成装置
KR101846400B1 (ko) * 2011-12-31 2018-04-09 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조방법
EP3162568A4 (de) * 2014-06-27 2017-12-13 Panasonic Intellectual Property Management Co., Ltd. Tintenstrahlkopf und anwendungsvorrichtung zur verwendung darin
JP2017080946A (ja) * 2015-10-26 2017-05-18 セイコーエプソン株式会社 Ｍｅｍｓデバイスの製造方法、ｍｅｍｓデバイス、液体噴射ヘッド、および液体噴射装置
EP3424720B1 (de) * 2016-03-03 2020-09-23 Ricoh Company, Ltd. Flüssigkeitsausstosskopf, flüssigkeitsausstosseinheit und vorrichtung zum ausstossen von flüssigkeit
JP7087521B2 (ja) * 2018-03-22 2022-06-21 ブラザー工業株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
CN111204136A (zh) * 2018-11-22 2020-05-29 东芝泰格有限公司 液体喷出头及流路部件

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047184A (en) * 1976-01-28 1977-09-06 International Business Machines Corporation Charge electrode array and combination for ink jet printing and method of manufacture
US4216483A (en) * 1977-11-16 1980-08-05 Silonics, Inc. Linear array ink jet assembly
JPS5840512B2 (ja) * 1978-10-04 1983-09-06 株式会社リコー インクジェット記録装置
JPS5586767A (en) * 1978-12-23 1980-06-30 Seiko Epson Corp Print head
JPS5644671A (en) * 1979-09-21 1981-04-23 Seiko Epson Corp Ink-jet head
US4312008A (en) * 1979-11-02 1982-01-19 Dataproducts Corporation Impulse jet head using etched silicon
JPS57201665A (en) * 1981-06-05 1982-12-10 Hitachi Ltd Ink jet device
JPS5869068A (ja) * 1981-10-20 1983-04-25 Ricoh Co Ltd インクジエツト記録装置
US4611219A (en) * 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
US4516140A (en) * 1983-12-27 1985-05-07 At&T Teletype Corporation Print head actuator for an ink jet printer
US4786357A (en) * 1987-11-27 1988-11-22 Xerox Corporation Thermal ink jet printhead and fabrication method therefor
US4829324A (en) * 1987-12-23 1989-05-09 Xerox Corporation Large array thermal ink jet printhead
US5157420A (en) * 1989-08-17 1992-10-20 Takahiro Naka Ink jet recording head having reduced manufacturing steps
DE3938282A1 (de) * 1989-11-17 1991-05-23 Bayer Ag Verfahren zur herstellung von 3,8-dihydroxy-5a,10b-diphenylcumarano-2',3',2,3-cumaran
US5265315A (en) * 1990-11-20 1993-11-30 Spectra, Inc. Method of making a thin-film transducer ink jet head

Also Published As

Publication number Publication date
EP0600382B1 (de) 1997-03-19
HK1006444A1 (en) 1999-02-26
EP0600382A3 (en) 1994-08-17
US6309057B1 (en) 2001-10-30
EP0600382A2 (de) 1994-06-08
DE69308996T2 (de) 1997-10-23
US5896150A (en) 1999-04-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee