DE69120834D1 - Verfahren zur Zufuhr einer Beschichtungsflüssigkeit - Google Patents
Verfahren zur Zufuhr einer BeschichtungsflüssigkeitInfo
- Publication number
- DE69120834D1 DE69120834D1 DE69120834T DE69120834T DE69120834D1 DE 69120834 D1 DE69120834 D1 DE 69120834D1 DE 69120834 T DE69120834 T DE 69120834T DE 69120834 T DE69120834 T DE 69120834T DE 69120834 D1 DE69120834 D1 DE 69120834D1
- Authority
- DE
- Germany
- Prior art keywords
- supplying
- coating liquid
- coating
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
- G03C2001/7429—Cleaning means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
- G03C2001/7437—Degassing means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/74—Applying photosensitive compositions to the base; Drying processes therefor
- G03C2001/744—Delivering means for slide hopper
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000602A JP2630481B2 (ja) | 1990-01-08 | 1990-01-08 | 塗布液の送液方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69120834D1 true DE69120834D1 (de) | 1996-08-22 |
DE69120834T2 DE69120834T2 (de) | 1996-11-28 |
Family
ID=11478283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69120834T Expired - Fee Related DE69120834T2 (de) | 1990-01-08 | 1991-01-02 | Verfahren zur Zufuhr einer Beschichtungsflüssigkeit |
Country Status (4)
Country | Link |
---|---|
US (1) | US5096602A (de) |
EP (1) | EP0437215B1 (de) |
JP (1) | JP2630481B2 (de) |
DE (1) | DE69120834T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05212221A (ja) * | 1992-02-05 | 1993-08-24 | Fuji Photo Film Co Ltd | フィルター装置 |
US5792237A (en) * | 1996-12-13 | 1998-08-11 | Taiwan Semiconductor Manufacturing Co Ltd | Method and apparatus for eliminating trapped air from a liquid flow |
US6171367B1 (en) * | 1997-06-05 | 2001-01-09 | Taiwan Semiconductor Manufacturing Co., Ltd | Method and apparatus for delivering and recycling a bubble-free liquid chemical |
JP3461725B2 (ja) * | 1998-06-26 | 2003-10-27 | 東京エレクトロン株式会社 | 処理液供給装置及び処理液供給方法 |
US6402821B1 (en) * | 1998-08-18 | 2002-06-11 | Tokyo Electron Limited | Filter unit and solution treatment unit |
EP1069474A1 (de) * | 1999-07-12 | 2001-01-17 | Chugai Photo Chemical Co. Ltd. | Flüssigkeitsspender und Verfahren dazu |
JP3890229B2 (ja) * | 2001-12-27 | 2007-03-07 | 株式会社コガネイ | 薬液供給装置および薬液供給装置の脱気方法 |
JP3947398B2 (ja) * | 2001-12-28 | 2007-07-18 | 株式会社コガネイ | 薬液供給装置および薬液供給方法 |
JP2008238736A (ja) | 2007-03-28 | 2008-10-09 | Fujifilm Corp | 感熱転写受像シート |
US10121685B2 (en) * | 2015-03-31 | 2018-11-06 | Tokyo Electron Limited | Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus |
DE102023111260A1 (de) | 2023-05-02 | 2024-11-07 | Dosmatix Gmbh | Vergussanlage und Verfahren |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3425951A (en) * | 1966-03-21 | 1969-02-04 | Fuji Photo Film Co Ltd | Defoaming apparatus |
GB1441575A (en) * | 1972-08-31 | 1976-07-07 | Agfa Gevaert | Method for degassing a circuit for the transport of liquids |
JPS5729691B2 (de) * | 1975-03-15 | 1982-06-24 | ||
JPH0249149B2 (ja) * | 1984-11-15 | 1990-10-29 | Konishiroku Photo Ind | Tofuekiryuronosenjohoho |
JPS62157556A (ja) * | 1985-12-28 | 1987-07-13 | Nippon Oil & Fats Co Ltd | 浸透探傷剤用の泡沫洗浄液に用いる発泡吹付けガン |
DE3744422C1 (de) * | 1987-12-29 | 1989-07-06 | Du Pont Deutschland | Verfahren und Vorrichtung zur Entgasung und Filtration von Fluessigkeiten |
-
1990
- 1990-01-08 JP JP2000602A patent/JP2630481B2/ja not_active Expired - Fee Related
- 1990-12-31 US US07/636,460 patent/US5096602A/en not_active Expired - Lifetime
-
1991
- 1991-01-02 EP EP91100107A patent/EP0437215B1/de not_active Expired - Lifetime
- 1991-01-02 DE DE69120834T patent/DE69120834T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5096602A (en) | 1992-03-17 |
JP2630481B2 (ja) | 1997-07-16 |
JPH03207439A (ja) | 1991-09-10 |
EP0437215A2 (de) | 1991-07-17 |
EP0437215A3 (en) | 1992-10-07 |
DE69120834T2 (de) | 1996-11-28 |
EP0437215B1 (de) | 1996-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |