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DE69920453D1 - Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben - Google Patents

Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben

Info

Publication number
DE69920453D1
DE69920453D1 DE69920453T DE69920453T DE69920453D1 DE 69920453 D1 DE69920453 D1 DE 69920453D1 DE 69920453 T DE69920453 T DE 69920453T DE 69920453 T DE69920453 T DE 69920453T DE 69920453 D1 DE69920453 D1 DE 69920453D1
Authority
DE
Germany
Prior art keywords
electrode
applying
producing
same
plasma treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69920453T
Other languages
English (en)
Other versions
DE69920453T2 (de
Inventor
John Lilleland
S Hubacek
S Kennedy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Application granted granted Critical
Publication of DE69920453D1 publication Critical patent/DE69920453D1/de
Publication of DE69920453T2 publication Critical patent/DE69920453T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
DE69920453T 1998-06-30 1999-06-30 Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben Expired - Lifetime DE69920453T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/107,471 US6073577A (en) 1998-06-30 1998-06-30 Electrode for plasma processes and method for manufacture and use thereof
US107471 1998-06-30
PCT/US1999/015053 WO2000000998A2 (en) 1998-06-30 1999-06-30 Electrode for plasma processes and method for manufacture and use thereof

Publications (2)

Publication Number Publication Date
DE69920453D1 true DE69920453D1 (de) 2004-10-28
DE69920453T2 DE69920453T2 (de) 2005-11-24

Family

ID=22316783

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69939606T Expired - Lifetime DE69939606D1 (de) 1998-06-30 1999-06-30 Verfahren zum Ersetzen einer Elektrodenanordnung für Plasmabehandlungsverfahren
DE69931168T Expired - Lifetime DE69931168T2 (de) 1998-06-30 1999-06-30 Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung
DE69920453T Expired - Lifetime DE69920453T2 (de) 1998-06-30 1999-06-30 Elektrode für plasmabehandlungsverfahren und verfahren zur herstellung und anwendung derselben

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69939606T Expired - Lifetime DE69939606D1 (de) 1998-06-30 1999-06-30 Verfahren zum Ersetzen einer Elektrodenanordnung für Plasmabehandlungsverfahren
DE69931168T Expired - Lifetime DE69931168T2 (de) 1998-06-30 1999-06-30 Elastomer-gebundene teile fuer plasmaverfahren, deren herstellung und verwendung

Country Status (11)

Country Link
US (4) US6073577A (de)
EP (3) EP1475820B1 (de)
JP (3) JP3408245B2 (de)
KR (3) KR100426149B1 (de)
CN (2) CN100585794C (de)
AU (2) AU4963699A (de)
DE (3) DE69939606D1 (de)
ES (2) ES2229731T3 (de)
MY (1) MY120364A (de)
TW (1) TW423072B (de)
WO (2) WO2000000998A2 (de)

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* Cited by examiner, † Cited by third party
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