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DE69710606D1 - Verfahren und vorrichtung zum elektronischen ausgleich von resonanz-messfehlern in einem kapazitiven druckwandler - Google Patents

Verfahren und vorrichtung zum elektronischen ausgleich von resonanz-messfehlern in einem kapazitiven druckwandler

Info

Publication number
DE69710606D1
DE69710606D1 DE69710606T DE69710606T DE69710606D1 DE 69710606 D1 DE69710606 D1 DE 69710606D1 DE 69710606 T DE69710606 T DE 69710606T DE 69710606 T DE69710606 T DE 69710606T DE 69710606 D1 DE69710606 D1 DE 69710606D1
Authority
DE
Germany
Prior art keywords
pct
compensation
transducer
resonance
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710606T
Other languages
English (en)
Other versions
DE69710606T2 (de
Inventor
Ray Olsson
Per Bjoerkman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Aaland AB
Original Assignee
Balzers and Leybold Instrumentation AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers and Leybold Instrumentation AB filed Critical Balzers and Leybold Instrumentation AB
Application granted granted Critical
Publication of DE69710606D1 publication Critical patent/DE69710606D1/de
Publication of DE69710606T2 publication Critical patent/DE69710606T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Filters And Equalizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
DE69710606T 1996-12-13 1997-12-12 Verfahren und vorrichtung zum elektronischen ausgleich von resonanz-messfehlern in einem kapazitiven druckwandler Expired - Lifetime DE69710606T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI965016A FI101018B (sv) 1996-12-13 1996-12-13 Förfarande och anordning för elektronisk kompensation av missvisning t ill följd av resonans hos en kapacitiv tryckgivare
PCT/IB1997/001562 WO1998026262A1 (en) 1996-12-13 1997-12-12 Method and apparatus for electronic compensation of erroneous readings caused by resonance in a capacitive pressure transducer

Publications (2)

Publication Number Publication Date
DE69710606D1 true DE69710606D1 (de) 2002-03-28
DE69710606T2 DE69710606T2 (de) 2002-11-21

Family

ID=8547270

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710606T Expired - Lifetime DE69710606T2 (de) 1996-12-13 1997-12-12 Verfahren und vorrichtung zum elektronischen ausgleich von resonanz-messfehlern in einem kapazitiven druckwandler

Country Status (7)

Country Link
US (1) US6119523A (de)
EP (1) EP0944817B1 (de)
JP (1) JP2001506006A (de)
AT (1) ATE213541T1 (de)
DE (1) DE69710606T2 (de)
FI (1) FI101018B (de)
WO (1) WO1998026262A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7161476B2 (en) 2000-07-26 2007-01-09 Bridgestone Firestone North American Tire, Llc Electronic tire management system
US8266465B2 (en) 2000-07-26 2012-09-11 Bridgestone Americas Tire Operation, LLC System for conserving battery life in a battery operated device
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
FR2888930B1 (fr) * 2004-12-27 2007-08-31 Thales Sa Dispositfi de mesure a resonateur et procede mettant en oeuvre le dispositif
US7554343B2 (en) * 2005-07-25 2009-06-30 Piezoinnovations Ultrasonic transducer control method and system
EP2271905A1 (de) * 2008-04-23 2011-01-12 Nxp B.V. Elektronische schaltung zur steuerung eines kapazitiven drucksensors und system mit einem kapazitiven drucksensor
US8511599B2 (en) * 2010-03-04 2013-08-20 Richard LaLau Paper towel dispensing systems
KR101355098B1 (ko) 2012-10-10 2014-02-04 주식회사 오토산업 용량성 압력센서의 출력제어회로
US9880063B2 (en) * 2013-03-13 2018-01-30 Invensense, Inc. Pressure sensor stabilization
JP6357090B2 (ja) * 2014-12-02 2018-07-11 株式会社堀場エステック 静電容量型センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
JP2905902B2 (ja) * 1990-08-24 1999-06-14 横河電機株式会社 半導体圧力計およびその製造方法

Also Published As

Publication number Publication date
DE69710606T2 (de) 2002-11-21
EP0944817A1 (de) 1999-09-29
FI101018B (sv) 1998-03-31
WO1998026262A1 (en) 1998-06-18
JP2001506006A (ja) 2001-05-08
ATE213541T1 (de) 2002-03-15
US6119523A (en) 2000-09-19
EP0944817B1 (de) 2002-02-20
FI965016A0 (fi) 1996-12-13

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: INFICON AALAND AB, MARIEHAMM, FI

8364 No opposition during term of opposition