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DE60225548D1 - Dungsionisierter luft - Google Patents

Dungsionisierter luft

Info

Publication number
DE60225548D1
DE60225548D1 DE60225548T DE60225548T DE60225548D1 DE 60225548 D1 DE60225548 D1 DE 60225548D1 DE 60225548 T DE60225548 T DE 60225548T DE 60225548 T DE60225548 T DE 60225548T DE 60225548 D1 DE60225548 D1 DE 60225548D1
Authority
DE
Germany
Prior art keywords
ductioned
air
ductioned air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225548T
Other languages
English (en)
Other versions
DE60225548T2 (de
Inventor
Akira Mizuno
Akio Sugita
Masanori Suzuki
Tomokatsu Sato
Toshihiko Hino
Haruyuki Togari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Techno Ryowa Ltd
Harada Corp
Original Assignee
Hamamatsu Photonics KK
Techno Ryowa Ltd
Harada Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK, Techno Ryowa Ltd, Harada Corp filed Critical Hamamatsu Photonics KK
Application granted granted Critical
Publication of DE60225548D1 publication Critical patent/DE60225548D1/de
Publication of DE60225548T2 publication Critical patent/DE60225548T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05FSTATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00Carrying-off electrostatic charges
    • H05F3/06Carrying-off electrostatic charges by means of ionising radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01TSPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Elimination Of Static Electricity (AREA)
DE60225548T 2001-05-29 2002-05-28 Staubfreier ionisierer des typs mit strömungsentladungsionisierter luft Expired - Lifetime DE60225548T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001161060A JP4738636B2 (ja) 2001-05-29 2001-05-29 防爆型無発塵イオナイザー
JP2001161060 2001-05-29
PCT/JP2002/005136 WO2002098188A1 (en) 2001-05-29 2002-05-28 Ionized air flow discharge type non-dusting ionizer

Publications (2)

Publication Number Publication Date
DE60225548D1 true DE60225548D1 (de) 2008-04-24
DE60225548T2 DE60225548T2 (de) 2009-04-23

Family

ID=19004394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225548T Expired - Lifetime DE60225548T2 (de) 2001-05-29 2002-05-28 Staubfreier ionisierer des typs mit strömungsentladungsionisierter luft

Country Status (8)

Country Link
US (2) US7126807B2 (de)
EP (2) EP1397030B1 (de)
JP (1) JP4738636B2 (de)
KR (1) KR100912981B1 (de)
CN (1) CN1301633C (de)
DE (1) DE60225548T2 (de)
TW (1) TWI242394B (de)
WO (1) WO2002098188A1 (de)

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JP4446755B2 (ja) * 2004-01-29 2010-04-07 トヨタ自動車株式会社 除電除塵器
CN102602894A (zh) * 2004-03-30 2012-07-25 国立大学法人京都大学 使用异极象结晶体的x 射线发生装置及使用其的臭氧发生装置
JP4594111B2 (ja) * 2005-01-17 2010-12-08 株式会社コガネイ 除電装置および放電モジュール
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KR100680760B1 (ko) * 2005-04-19 2007-02-08 (주)선재하이테크 가요형 연엑스선 이오나이저
JP5032827B2 (ja) * 2006-04-11 2012-09-26 高砂熱学工業株式会社 除電装置
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JP5354281B2 (ja) * 2009-06-25 2013-11-27 日本メクトロン株式会社 シール構造体
CN102136681B (zh) * 2010-01-26 2013-01-02 罗莎国际有限公司 自冷式离子化空气产生装置
JP5485056B2 (ja) * 2010-07-21 2014-05-07 東京エレクトロン株式会社 イオン供給装置及びこれを備えた被処理体の処理システム
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JP5937918B2 (ja) * 2012-08-08 2016-06-22 シャープ株式会社 イオン発生装置およびこれを備えた除電装置
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CN103353142A (zh) * 2013-05-30 2013-10-16 苏州华达仪器设备有限公司 一种空气静电中和装置
US9779847B2 (en) 2014-07-23 2017-10-03 Moxtek, Inc. Spark gap X-ray source
US9839106B2 (en) 2014-07-23 2017-12-05 Moxtek, Inc. Flat-panel-display, bottom-side, electrostatic-dissipation
US9839107B2 (en) * 2014-07-23 2017-12-05 Moxtek, Inc. Flowing-fluid X-ray induced ionic electrostatic dissipation
US9826610B2 (en) 2014-07-23 2017-11-21 Moxtek, Inc. Electrostatic-dissipation device
US9084334B1 (en) 2014-11-10 2015-07-14 Illinois Tool Works Inc. Balanced barrier discharge neutralization in variable pressure environments
WO2016077056A1 (en) * 2014-11-13 2016-05-19 Moxtek, Inc. Electrostatic-dissipation device
US10524341B2 (en) 2015-05-08 2019-12-31 Moxtek, Inc. Flowing-fluid X-ray induced ionic electrostatic dissipation
JP6655418B2 (ja) * 2016-02-17 2020-02-26 株式会社Screenホールディングス 基板処理装置および基板処理方法
US10744515B2 (en) * 2016-08-26 2020-08-18 Plasma Shield Pty Ltd Gas purifying apparatus
KR102020911B1 (ko) * 2018-02-26 2019-09-11 (주)선재하이테크 가스 스트림에 적용되는 인-라인형 정전기 제거장치
US20240194454A1 (en) * 2022-12-08 2024-06-13 Hamamatsu Photonics K.K. Inductively Coupled Plasma Light Source with Direct Gas Injection
KR102552934B1 (ko) * 2023-02-06 2023-07-07 주식회사 저스템 배플 구조를 갖춘 진공 제전 장치
KR102677916B1 (ko) * 2023-05-02 2024-06-25 주식회사 저스템 진공 제전 장치

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Also Published As

Publication number Publication date
WO2002098188A9 (fr) 2003-04-10
TWI242394B (en) 2005-10-21
CN1513284A (zh) 2004-07-14
US20060279897A1 (en) 2006-12-14
US20040218315A1 (en) 2004-11-04
KR20040004662A (ko) 2004-01-13
DE60225548T2 (de) 2009-04-23
US7126807B2 (en) 2006-10-24
JP2002352997A (ja) 2002-12-06
EP1397030A4 (de) 2004-09-01
WO2002098188A1 (en) 2002-12-05
EP1947915A2 (de) 2008-07-23
KR100912981B1 (ko) 2009-08-20
US7397647B2 (en) 2008-07-08
EP1397030B1 (de) 2008-03-12
EP1397030A1 (de) 2004-03-10
JP4738636B2 (ja) 2011-08-03
CN1301633C (zh) 2007-02-21

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Legal Events

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