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DE602004021076D1 - Bolometer, Infrarotdetektionsvorrichtung diese anwendend und Verfahren zur Herstellung davon - Google Patents

Bolometer, Infrarotdetektionsvorrichtung diese anwendend und Verfahren zur Herstellung davon

Info

Publication number
DE602004021076D1
DE602004021076D1 DE602004021076T DE602004021076T DE602004021076D1 DE 602004021076 D1 DE602004021076 D1 DE 602004021076D1 DE 602004021076 T DE602004021076 T DE 602004021076T DE 602004021076 T DE602004021076 T DE 602004021076T DE 602004021076 D1 DE602004021076 D1 DE 602004021076D1
Authority
DE
Germany
Prior art keywords
bolometer
preparation
methods
detection device
infrared detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004021076T
Other languages
English (en)
Inventor
Michel Vilain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulis SAS
Original Assignee
Ulis SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulis SAS filed Critical Ulis SAS
Publication of DE602004021076D1 publication Critical patent/DE602004021076D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14692—Thin film technologies, e.g. amorphous, poly, micro- or nanocrystalline silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14669—Infrared imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE602004021076T 2003-10-15 2004-10-08 Bolometer, Infrarotdetektionsvorrichtung diese anwendend und Verfahren zur Herstellung davon Expired - Lifetime DE602004021076D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0312042A FR2861172B1 (fr) 2003-10-15 2003-10-15 Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique et procede de fabrication de ce detecteur

Publications (1)

Publication Number Publication Date
DE602004021076D1 true DE602004021076D1 (de) 2009-06-25

Family

ID=34355479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004021076T Expired - Lifetime DE602004021076D1 (de) 2003-10-15 2004-10-08 Bolometer, Infrarotdetektionsvorrichtung diese anwendend und Verfahren zur Herstellung davon

Country Status (7)

Country Link
US (1) US7138630B2 (de)
EP (1) EP1524507B1 (de)
CN (1) CN1727856B (de)
CA (1) CA2481056C (de)
DE (1) DE602004021076D1 (de)
FR (1) FR2861172B1 (de)
RU (1) RU2356017C2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006038213A2 (en) * 2004-10-04 2006-04-13 Bluebird Optical Mems Ltd. Millimeter wave pixel and focal plane array imaging sensors thereof
US7718965B1 (en) * 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
FR2906029B1 (fr) * 2006-09-18 2010-09-24 Ulis Dispositif electronique de detection et detecteur comprenant un tel dispositif
US7633065B2 (en) * 2006-10-19 2009-12-15 Sensormatic Electronics, LLC Conduction structure for infrared microbolometer sensors
US8026486B2 (en) * 2008-11-21 2011-09-27 Panasonic Corporation Radiation detector and radiation detection method
KR20100073073A (ko) * 2008-12-22 2010-07-01 한국전자통신연구원 적외선 감지 센서 및 그 제조 방법
RU2447411C1 (ru) * 2010-12-01 2012-04-10 Виктор Акиндинович Солдатенков Способ измерения температуры, термоэлектронномеханический преобразователь с автоэлектронной эмиссией и способ его изготовления
RU2511275C2 (ru) * 2012-07-16 2014-04-10 Федеральное государственное унитарное предприятие "Научно-исследовательский институт физических проблем им. Ф.В. Лукина" Наноструктурный ик-приемник (болометр) с большой поверхностью поглощения
US9368658B2 (en) * 2012-08-31 2016-06-14 Robert Bosch Gmbh Serpentine IR sensor
US9297700B2 (en) * 2012-12-03 2016-03-29 Analog Devices, Inc. Photonic sensor and a method of manufacturing such a sensor
US9199838B2 (en) 2013-10-25 2015-12-01 Robert Bosch Gmbh Thermally shorted bolometer
FR3056292B1 (fr) * 2016-09-22 2020-11-20 Commissariat Energie Atomique Structure de detection de rayonnements electromagnetiques de type bolometre et procede de fabrication d'une telle structure
JP6726087B2 (ja) * 2016-12-14 2020-07-22 浜松ホトニクス株式会社 光検出器
EP3483574A1 (de) 2017-11-14 2019-05-15 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Mikrobolometer und verfahren zur herstellung
US10436646B2 (en) * 2018-02-28 2019-10-08 Ams Sensors Uk Limited IR detector arrays
FR3089291B1 (fr) * 2018-11-29 2023-03-24 Commissariat Energie Atomique Structure de détection de rayonnement électromagnétique à absorption optimisée et procédé de formation d’une telle structure
FR3098904B1 (fr) * 2019-07-16 2021-06-18 Lynred Micro-bolometre a faible capacite thermique et procede de fabrication associe
FR3099573B1 (fr) * 2019-07-30 2021-07-23 Commissariat Energie Atomique Procédé de fabrication d’un microbolomètre comportant un matériau sensible à base d’oxyde de vanadium
FR3101151B1 (fr) * 2019-09-24 2021-12-17 Office National Detudes Rech Aerospatiales Dispositif pour reveler des variations spatiales de polarisation d’un rayonnement electromagnetique
CN113188669B (zh) * 2021-04-29 2023-06-27 上海翼捷工业安全设备股份有限公司 红外吸收复合膜结构及二氧化碳热释电红外探测器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
US5399897A (en) * 1993-11-29 1995-03-21 Raytheon Company Microstructure and method of making such structure
FR2752299B1 (fr) * 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci
EP1147388A1 (de) * 1998-12-18 2001-10-24 Daewoo Electronics Co., Ltd Infarotempfindliches bolometer und verfahren zu dessen herstellung
FR2796148B1 (fr) 1999-07-08 2001-11-23 Commissariat Energie Atomique Detecteur bolometrique a isolation electrique intermediaire et procede de fabrication de ce detecteur
JP4009832B2 (ja) * 2002-05-10 2007-11-21 日本電気株式会社 ボロメータ型赤外線固体撮像素子

Also Published As

Publication number Publication date
RU2004129916A (ru) 2006-03-20
RU2356017C2 (ru) 2009-05-20
EP1524507B1 (de) 2009-05-13
CN1727856B (zh) 2010-05-26
US20050082481A1 (en) 2005-04-21
FR2861172A1 (fr) 2005-04-22
EP1524507A1 (de) 2005-04-20
US7138630B2 (en) 2006-11-21
CN1727856A (zh) 2006-02-01
CA2481056C (fr) 2013-03-26
FR2861172B1 (fr) 2006-06-02
CA2481056A1 (fr) 2005-04-15

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