DE60034121D1 - Verfahren und vorrichtung zur streuparameter-kalibrierung - Google Patents
Verfahren und vorrichtung zur streuparameter-kalibrierungInfo
- Publication number
- DE60034121D1 DE60034121D1 DE60034121T DE60034121T DE60034121D1 DE 60034121 D1 DE60034121 D1 DE 60034121D1 DE 60034121 T DE60034121 T DE 60034121T DE 60034121 T DE60034121 T DE 60034121T DE 60034121 D1 DE60034121 D1 DE 60034121D1
- Authority
- DE
- Germany
- Prior art keywords
- streuparameter
- calibration
- streuparameter calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/28—Measuring attenuation, gain, phase shift or derived characteristics of electric four pole networks, i.e. two-port networks; Measuring transient response
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/241,704 US6300775B1 (en) | 1999-02-02 | 1999-02-02 | Scattering parameter calibration system and method |
US241704 | 1999-02-02 | ||
PCT/CA2000/000087 WO2000046605A2 (en) | 1999-02-02 | 2000-02-01 | Scattering parameter calibration system and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60034121D1 true DE60034121D1 (de) | 2007-05-10 |
DE60034121T2 DE60034121T2 (de) | 2007-11-08 |
Family
ID=22911826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60034121T Expired - Lifetime DE60034121T2 (de) | 1999-02-02 | 2000-02-01 | Verfahren und vorrichtung zur streuparameter-kalibrierung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6300775B1 (de) |
EP (1) | EP1181562B8 (de) |
CA (1) | CA2361666C (de) |
DE (1) | DE60034121T2 (de) |
WO (1) | WO2000046605A2 (de) |
Families Citing this family (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US7359814B1 (en) | 2000-02-07 | 2008-04-15 | Advantest | Multi-port analysis apparatus and method and calibration method thereof |
US6647357B1 (en) * | 2000-02-07 | 2003-11-11 | Avaya Technology Corp. | Method for correcting reciprocity error in two port network measurements |
US6571187B1 (en) * | 2000-02-09 | 2003-05-27 | Avaya Technology Corp. | Method for calibrating two port high frequency measurements |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6920407B2 (en) * | 2000-09-18 | 2005-07-19 | Agilent Technologies, Inc. | Method and apparatus for calibrating a multiport test system for measurement of a DUT |
WO2002023212A1 (en) * | 2000-09-18 | 2002-03-21 | Agilent Technologies, Inc. | Method and apparatus for linear characterization of multiterminal single-ended or balanced devices |
DE10143173A1 (de) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
US6643597B1 (en) * | 2001-08-24 | 2003-11-04 | Agilent Technologies, Inc. | Calibrating a test system using unknown standards |
US20030115008A1 (en) * | 2001-12-18 | 2003-06-19 | Yutaka Doi | Test fixture with adjustable pitch for network measurement |
US7231308B2 (en) * | 2001-12-21 | 2007-06-12 | Agilent Technologies, Inc. | Test system dynamic range extension through compression compensation |
US6650123B2 (en) * | 2002-01-15 | 2003-11-18 | Anritsu Company | Methods for determining characteristics of interface devices used with vector network analyzers |
US6744262B2 (en) * | 2002-03-14 | 2004-06-01 | Agilent Technologies, Inc. | Method, apparatus, and article of manufacture for characterizing a device and predicting electrical behavior of the device in a circuit |
JP2003294820A (ja) * | 2002-03-29 | 2003-10-15 | Agilent Technologies Japan Ltd | 測定装置、測定装置の校正方法および記録媒体 |
US6917892B2 (en) * | 2002-09-16 | 2005-07-12 | Anritsu Company | Single port single connection VNA calibration apparatus |
US6836743B1 (en) * | 2002-10-15 | 2004-12-28 | Agilent Technologies, Inc. | Compensating for unequal load and source match in vector network analyzer calibration |
US6853198B2 (en) * | 2002-11-14 | 2005-02-08 | Agilent Technologies, Inc. | Method and apparatus for performing multiport through-reflect-line calibration and measurement |
US20040100276A1 (en) * | 2002-11-25 | 2004-05-27 | Myron Fanton | Method and apparatus for calibration of a vector network analyzer |
US6928373B2 (en) * | 2003-01-30 | 2005-08-09 | Anritsu Company | Flexible vector network analyzer measurements and calibrations |
US6838885B2 (en) * | 2003-03-05 | 2005-01-04 | Murata Manufacturing Co., Ltd. | Method of correcting measurement error and electronic component characteristic measurement apparatus |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7500161B2 (en) * | 2003-06-11 | 2009-03-03 | Agilent Technologies, Inc. | Correcting test system calibration and transforming device measurements when using multiple test fixtures |
US7038468B2 (en) * | 2003-06-11 | 2006-05-02 | Jan Verspecht | Method and a test setup for measuring large-signal S-parameters that include the coefficients relating to the conjugate of the incident waves |
US6882160B2 (en) * | 2003-06-12 | 2005-04-19 | Anritsu Company | Methods and computer program products for full N-port vector network analyzer calibrations |
US7068049B2 (en) * | 2003-08-05 | 2006-06-27 | Agilent Technologies, Inc. | Method and apparatus for measuring a device under test using an improved through-reflect-line measurement calibration |
US6965241B1 (en) * | 2003-10-07 | 2005-11-15 | Agilent Technologies, Inc. | Automated electronic calibration apparatus |
US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
US20050110502A1 (en) * | 2003-11-05 | 2005-05-26 | Yong Wang | System and method for determining S-parameters |
US6998833B2 (en) * | 2003-11-05 | 2006-02-14 | Hewlett-Packard Development Company, L.P. | System and method for determining S-parameters using a load |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
JP2007517231A (ja) | 2003-12-24 | 2007-06-28 | カスケード マイクロテック インコーポレイテッド | アクティブ・ウェハプローブ |
US7113891B2 (en) * | 2004-05-12 | 2006-09-26 | Agilent Technologies, Inc. | Multi-port scattering parameter calibration system and method |
US7088087B2 (en) * | 2004-09-13 | 2006-08-08 | Agilent Technologies, Inc. | Network analyzer including automatic port extension calibration and method of operation |
KR20070058522A (ko) | 2004-09-13 | 2007-06-08 | 캐스케이드 마이크로테크 인코포레이티드 | 양측 프루빙 구조 |
US7248033B2 (en) * | 2004-10-18 | 2007-07-24 | Agilent Technologies, Inc. | Vector network analyzer with independently tuned receivers characterizes frequency translation devices |
US7019536B1 (en) * | 2005-01-03 | 2006-03-28 | Agilent Technologies, Inc. | Multiport calibration simplification using the “unknown thru” method |
US6995571B1 (en) * | 2005-01-03 | 2006-02-07 | Agilent Technologies, Inc. | Vector network analyzer mixer calibration using the unknown thru calibration |
US7124049B2 (en) * | 2005-01-03 | 2006-10-17 | Agilent Technologies, Inc. | Method for implementing TRL calibration in VNA |
US7030625B1 (en) | 2005-01-18 | 2006-04-18 | Agilent Technologies, Inc. | Method and apparatus for performing a minimum connection multiport through-reflect-line calibration and measurement |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7148702B2 (en) * | 2005-03-30 | 2006-12-12 | Agilent Technologies, Inc. | VNA and method for addressing transmission line effects in VNA measurement data |
US7640477B2 (en) * | 2005-05-12 | 2009-12-29 | Agilent Technologies, Inc. | Calibration system that can be utilized with a plurality of test system topologies |
US7061254B1 (en) * | 2005-05-12 | 2006-06-13 | Agilent Technologies, Inc. | Power calibration for multi-port vector network analyzer (VNA) |
WO2007014280A2 (en) * | 2005-07-25 | 2007-02-01 | University Of Florida Research Foundation, Inc. | System, device, and methods for embedded s-parameter measurement |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
DE102006030630B3 (de) * | 2006-07-03 | 2007-10-25 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | HF-Messvorrichtung, Verfahren zu deren Kalibrierung sowie Verfahren zum Bestimmen von Streuparametern mit dieser HF-Messvorrichtung |
US7545151B2 (en) * | 2007-04-20 | 2009-06-09 | Anritsu Company | Characterizing test fixtures |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
US7777497B2 (en) * | 2008-01-17 | 2010-08-17 | Com Dev International Ltd. | Method and system for tracking scattering parameter test system calibration |
DE102008014039B4 (de) * | 2008-03-13 | 2010-02-18 | Spinner Gmbh | Anordnung zum Kalibrieren eines Vektornetzwerkanalysators |
US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
WO2010059247A2 (en) | 2008-11-21 | 2010-05-27 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
DE102009018703B4 (de) * | 2008-12-19 | 2018-04-05 | Rohde & Schwarz Gmbh & Co. Kg | Netzwerkanalysator und ein Verfahren zum Betrieb eines Netzwerkanalysators mit 9-Term Kalibrierung |
US8706433B2 (en) * | 2010-02-01 | 2014-04-22 | Teledyne Lecroy, Inc. | Time domain reflectometry step to S-parameter conversion |
TWI470248B (zh) | 2011-06-22 | 2015-01-21 | Wistron Corp | 量測待測物散射參數的方法 |
DE102012006314A1 (de) * | 2012-03-28 | 2013-10-02 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Zeitbereichsmessverfahren mit Kalibrierung im Frequenzbereich |
DE102014119331B4 (de) * | 2014-12-22 | 2016-08-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Charakterisieren von Mikrowellenbauelementen |
CN107390052B (zh) * | 2017-07-03 | 2019-12-13 | 北京理工雷科电子信息技术有限公司 | 一种基于多端口abcd参数的系统特性分析方法 |
US11041894B2 (en) * | 2017-08-18 | 2021-06-22 | Rohde & Schwarz Gmbh & Co. Kg | Vector network analyzer with digital interface |
US11353536B2 (en) * | 2018-09-29 | 2022-06-07 | Keysight Technologies, Inc. | Integrated vector network analyzer |
CN111257814A (zh) * | 2020-03-05 | 2020-06-09 | 西北工业大学 | 矢量网络分析仪的直通-短路-短路校准方法 |
US11428770B2 (en) * | 2020-03-30 | 2022-08-30 | Rohde & Schwarz Gmbh & Co. Kg | Method of calibrating a setup |
EP3951405B1 (de) * | 2020-08-07 | 2024-07-31 | Rohde & Schwarz GmbH & Co. KG | Messsystem und messverfahren |
CN112051534B (zh) * | 2020-08-31 | 2023-08-25 | 中电科思仪科技股份有限公司 | 一种提高微波网络测量与校准精度的外置式装置及方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4816767A (en) * | 1984-01-09 | 1989-03-28 | Hewlett-Packard Company | Vector network analyzer with integral processor |
US4853613A (en) | 1987-10-27 | 1989-08-01 | Martin Marietta Corporation | Calibration method for apparatus evaluating microwave/millimeter wave circuits |
US4982164A (en) | 1988-04-22 | 1991-01-01 | Rhode & Schwarz Gmbh & Co. K.G. | Method of calibrating a network analyzer |
US5313166A (en) | 1990-11-11 | 1994-05-17 | Rohde & Schwarz Gmbh & Co. Kg | Method of calibrating a network analyzer |
AU3711793A (en) | 1992-05-02 | 1993-11-04 | Laboratorium Prof. Dr. Rudolf Berthold Gmbh & Co. Kg | A method of calibrating a network analyzer |
DE4332273C2 (de) | 1992-12-12 | 1997-09-25 | Rohde & Schwarz | Verfahren zum Kalibrieren eines Netzwerkanalysators |
US5467021A (en) | 1993-05-24 | 1995-11-14 | Atn Microwave, Inc. | Calibration method and apparatus |
US5434511A (en) | 1993-05-24 | 1995-07-18 | Atn Microwave, Inc. | Electronic microwave calibration device |
US5587934A (en) | 1993-10-21 | 1996-12-24 | Wiltron Company | Automatic VNA calibration apparatus |
US5561378A (en) | 1994-07-05 | 1996-10-01 | Motorola, Inc. | Circuit probe for measuring a differential circuit |
JP2807177B2 (ja) | 1994-07-27 | 1998-10-08 | 日本ヒューレット・パッカード株式会社 | 回路網測定装置及び校正方法 |
JP2866011B2 (ja) | 1994-08-24 | 1999-03-08 | 日本ヒューレット・パッカード株式会社 | 回路網測定装置の校正方法 |
DE4435559A1 (de) | 1994-10-05 | 1996-04-11 | Holger Heuermann | Verfahren zur Durchführung elektrischer Präzisionsmessungen mit Selbstkontrolle |
DE19606986C2 (de) | 1996-02-24 | 1999-03-04 | Rohde & Schwarz | Verfahren zum Messen der Eintor- bzw. Mehrtor-Parameter eines Meßobjektes mittels eines Netzwerkanalysators |
US5748506A (en) | 1996-05-28 | 1998-05-05 | Motorola, Inc. | Calibration technique for a network analyzer |
US5793213A (en) | 1996-08-01 | 1998-08-11 | Motorola, Inc. | Method and apparatus for calibrating a network analyzer |
US6147501A (en) | 1997-08-26 | 2000-11-14 | Hewlett-Packard Company | Automatic calibration of a network analyzer |
-
1999
- 1999-02-02 US US09/241,704 patent/US6300775B1/en not_active Expired - Lifetime
-
2000
- 2000-02-01 CA CA002361666A patent/CA2361666C/en not_active Expired - Fee Related
- 2000-02-01 DE DE60034121T patent/DE60034121T2/de not_active Expired - Lifetime
- 2000-02-01 EP EP00901456A patent/EP1181562B8/de not_active Expired - Lifetime
- 2000-02-01 WO PCT/CA2000/000087 patent/WO2000046605A2/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1181562A2 (de) | 2002-02-27 |
EP1181562B8 (de) | 2007-06-27 |
CA2361666A1 (en) | 2000-08-10 |
DE60034121T2 (de) | 2007-11-08 |
WO2000046605A2 (en) | 2000-08-10 |
EP1181562B1 (de) | 2007-03-28 |
CA2361666C (en) | 2005-11-01 |
US6300775B1 (en) | 2001-10-09 |
WO2000046605A3 (en) | 2001-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60034121D1 (de) | Verfahren und vorrichtung zur streuparameter-kalibrierung | |
DE60018733D1 (de) | Vorrichtung und verfahren zur probenanalyse | |
DE60021077D1 (de) | Vorrichtung und verfahren zur probenabgabe | |
DE60008102D1 (de) | Verfahren und vorrichtung zur mehrfachsendung | |
DE50109562D1 (de) | Vorrichtung und verfahren zur winkelmessung | |
DE60020614D1 (de) | Vorrichtung und Verfahren zur Planarisierung | |
DE69931750D1 (de) | Verfahren und gerät zur verkalkungsmessung | |
DE60037008D1 (de) | Verfahren und vorrichtung zur synchronisierung | |
DE60040985D1 (de) | Verfahren und vorrichtung zur internetanzeige | |
DE69927328T2 (de) | Vorrichtung und Verfahren zur Signalspitzenbegrenzung | |
DE60011541D1 (de) | Verfahren und Vorrichtung zur NOx Reduktion | |
DE60138109D1 (de) | Verfahren und vorrichtung zur mehrwegesignalkompen | |
DE69941565D1 (de) | Vorrichtung und verfahren zur spektralen abbildung | |
DE50203544D1 (de) | Verfahren und Vorrichtung zur Drehbearbeitung | |
DE69827769D1 (de) | Verfahren und Vorrichtung zur Aberrationskorrektur | |
DE50007073D1 (de) | Verfahren und vorrichtung zur strahlformung | |
DE60040530D1 (de) | Verfahren und vorrichtung zur elektrosprüh-massenspektrometrie | |
ATE275779T1 (de) | Verfahren und vorrichtung zur aufwärtsplanung | |
DE60124647D1 (de) | Vorrichtung und Verfahren zur Abstandsmessung | |
DE59902261D1 (de) | Verfahren und Einrichtung zur Zustandsschätzung | |
DE19983717T1 (de) | Vorrichtung und Verfahren zur Ausrichtung | |
DE60033330D1 (de) | Verfahren und Vorrichtung zur Blockrauschdetektion | |
DE60028581D1 (de) | Verfahren und gerät zur entfernungsmessung | |
DE69942346D1 (de) | Verfahren und vorrichtung zur zerstörungsfreien prüfung | |
DE60016639D1 (de) | Verfahren und Vorrichtung zur Pfadsuche |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: COM DEV LTD., CAMBRIDGE, ONTARIO, CA |
|
8364 | No opposition during term of opposition | ||
R081 | Change of applicant/patentee |
Ref document number: 1181562 Country of ref document: EP Owner name: AGILENT TECHNOLOGIES SINGAPORE (HOLDINGS) PTE., SG Free format text: FORMER OWNER: COM DEV LTD., CAMBRIDGE, CA Effective date: 20130131 Ref document number: 1181562 Country of ref document: EP Owner name: AGILENT TECHNOLOGIES INC., US Free format text: FORMER OWNER: AGILENT TECHNOLOGIES LTD., AGILENT TECHNOLOGIES SINGAPORE, , SG Effective date: 20130226 Ref document number: 1181562 Country of ref document: EP Owner name: AGILENT TECHNOLOGIES INC., US Free format text: FORMER OWNER: COM DEV LTD., CAMBRIDGE, CA Effective date: 20130131 Ref document number: 1181562 Country of ref document: EP Owner name: AGILENT TECHNOLOGIES SINGAPORE (HOLDINGS) PTE., SG Free format text: FORMER OWNER: AGILENT TECHNOLOGIES LTD., AGILENT TECHNOLOGIES SINGAPORE, , SG Effective date: 20130226 |
|
R082 | Change of representative |
Ref document number: 1181562 Country of ref document: EP Representative=s name: CBDL PATENTANWAELTE, DE Effective date: 20130131 Ref document number: 1181562 Country of ref document: EP Representative=s name: CBDL PATENTANWAELTE, DE Effective date: 20130226 |