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DE50209085D1 - MEMS contact arrangement and micro-relay - Google Patents

MEMS contact arrangement and micro-relay

Info

Publication number
DE50209085D1
DE50209085D1 DE50209085T DE50209085T DE50209085D1 DE 50209085 D1 DE50209085 D1 DE 50209085D1 DE 50209085 T DE50209085 T DE 50209085T DE 50209085 T DE50209085 T DE 50209085T DE 50209085 D1 DE50209085 D1 DE 50209085D1
Authority
DE
Germany
Prior art keywords
micro
relay
contact
contact arrangement
mems contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50209085T
Other languages
German (de)
Inventor
Ralf Struempler
Sami Kotilainen
Jan-Henning Fabian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Research Ltd Switzerland
ABB Research Ltd Sweden
Original Assignee
ABB Research Ltd Switzerland
ABB Research Ltd Sweden
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB Research Ltd Switzerland, ABB Research Ltd Sweden filed Critical ABB Research Ltd Switzerland
Application granted granted Critical
Publication of DE50209085D1 publication Critical patent/DE50209085D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/24—Contacts characterised by the manner in which co-operating contacts engage by abutting with resilient mounting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/36—Contacts characterised by the manner in which co-operating contacts engage by sliding
    • H01H1/38—Plug-and-socket contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H01H1/52—Contacts adapted to act as latches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H01H2001/0047—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet operable only by mechanical latching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Push-Button Switches (AREA)
  • Slide Switches (AREA)
  • Relay Circuits (AREA)
  • Interface Circuits In Exchanges (AREA)

Abstract

The micro-electromechanical (MEMS) contact and micro-relay (1) may be used for switching electric and electronic equipment on and off. It has a flexible membrane (12) held at its edges. It is moved by drive actuators (4) between contact (B) and non-contact (A) positions. The membrane may carry a flexible contact region (11) on one side, which may touch fixed contacts (2,3).
DE50209085T 2002-08-30 2002-08-30 MEMS contact arrangement and micro-relay Expired - Lifetime DE50209085D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02405741A EP1394825B1 (en) 2002-08-30 2002-08-30 Micromechanical contact arrangement and microrelay having the same

Publications (1)

Publication Number Publication Date
DE50209085D1 true DE50209085D1 (en) 2007-02-08

Family

ID=31198013

Family Applications (1)

Application Number Title Priority Date Filing Date
DE50209085T Expired - Lifetime DE50209085D1 (en) 2002-08-30 2002-08-30 MEMS contact arrangement and micro-relay

Country Status (3)

Country Link
EP (1) EP1394825B1 (en)
AT (1) ATE349762T1 (en)
DE (1) DE50209085D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006043512A1 (en) * 2006-05-22 2007-11-29 Continental Teves Ag & Co. Ohg Acceleration switch has beam element bent so as to contact base element by defined acceleration with component perpendicular to beam element; switch is encapsulated by cover attached to base element
DE102022200336A1 (en) * 2022-01-13 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung Contact element of a MEMS relay

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6020564A (en) * 1998-06-04 2000-02-01 Wang Electro-Opto Corporation Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications
DE19950373B4 (en) * 1998-10-23 2005-06-30 Rohde & Schwarz Gmbh & Co. Kg Micromechanical relay with resilient contact and method of making the same
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
WO2002058089A1 (en) * 2001-01-19 2002-07-25 Massachusetts Institute Of Technology Bistable actuation techniques, mechanisms, and applications

Also Published As

Publication number Publication date
EP1394825B1 (en) 2006-12-27
ATE349762T1 (en) 2007-01-15
EP1394825A1 (en) 2004-03-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition