DE3877795D1 - Stroemungssensor. - Google Patents

Stroemungssensor.

Info

Publication number: DE3877795D1
Authority: DE; Germany
Prior art keywords: flow sensor; sensor; flow
Prior art date: 1987-03-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE8888302969T

Other languages

English (en)

Other versions

DE3877795T2 (de

Inventor

Nobuyuki - Takanoharaek Tanaka

Yasuhiko Green Park Nara Inami

Masaya Hijikigawa

Shoei Kataoka

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sharp Corp

Original Assignee

Sharp Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-31

Filing date

1988-03-31

Publication date

1993-03-11

1988-03-31 Application filed by Sharp Corp filed Critical Sharp Corp

1993-03-11 Publication of DE3877795D1 publication Critical patent/DE3877795D1/de

1993-05-27 Application granted granted Critical

1993-05-27 Publication of DE3877795T2 publication Critical patent/DE3877795T2/de

2008-04-01 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Engineering & Computer Science (AREA)
Aviation & Aerospace Engineering (AREA)
Measuring Volume Flow (AREA)
Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)

DE8888302969T 1987-03-31 1988-03-31 Stroemungssensor. Expired - Fee Related DE3877795T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62079244A JPH0810231B2 (ja)	1987-03-31	1987-03-31	フローセンサ

Publications (2)

Publication Number	Publication Date
DE3877795D1 true DE3877795D1 (de)	1993-03-11
DE3877795T2 DE3877795T2 (de)	1993-05-27

Family

ID=13684443

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE8888302969T Expired - Fee Related DE3877795T2 (de)	1987-03-31	1988-03-31	Stroemungssensor.

Country Status (4)

Country	Link
US (1)	US4885937A (de)
EP (1)	EP0285451B1 (de)
JP (1)	JPH0810231B2 (de)
DE (1)	DE3877795T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5231877A (en) *	1990-12-12	1993-08-03	University Of Cincinnati	Solid state microanemometer
JPH04240566A (ja) *	1991-01-24	1992-08-27	Anritsu Corp	流量方向センサ
JPH04295768A (ja) *	1991-03-25	1992-10-20	Yamatake Honeywell Co Ltd	流体検出装置
ITGE940008A1 (it) *	1994-01-19	1995-07-19	Vincenzo Arrichiello	Dispositivo per la misurazione della velocita' di un flusso di fluido.
US5461910A (en) *	1994-06-16	1995-10-31	Alnor Instrument Company	Fluid flow direction and velocity monitor
NL9401051A (nl) *	1994-06-24	1996-02-01	Stichting Tech Wetenschapp	Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.
DE19605180A1 (de) *	1996-02-13	1997-08-14	Daimler Benz Ag	Anemometer
JP3981907B2 (ja)	1998-10-21	2007-09-26	株式会社デンソー	流量測定装置
JP3513041B2 (ja) *	1999-01-25	2004-03-31	三菱電機株式会社	流量センサ
JP2007101561A (ja) *	1999-06-14	2007-04-19	Yamatake Corp	流速検出器
US6502459B1 (en) *	2000-09-01	2003-01-07	Honeywell International Inc.	Microsensor for measuring velocity and angular direction of an incoming air stream
JP4474771B2 (ja)	2000-12-20	2010-06-09	株式会社デンソー	流量測定装置
US6631638B2 (en) *	2001-01-30	2003-10-14	Rosemount Aerospace Inc.	Fluid flow sensor
DE10146321B4 (de) *	2001-09-20	2008-08-14	Robert Bosch Gmbh	Sensorbaustein mit einem Sensorelement, das von einem Heizelement umgeben ist
US20030130624A1 (en) *	2002-01-07	2003-07-10	Kowalik Francis C.	Medical infusion system with integrated power supply and pump therefor
DE10322012A1 (de) *	2003-05-16	2004-12-02	Robert Bosch Gmbh	Durchflusssensor mit verbessertem Betriebsverhalten
IL157354A0 (en) *	2003-08-12	2004-02-19		Apparatus for determining the amount of milk breast-fed to a baby
DE102005051672A1 (de) *	2005-10-28	2007-05-03	Hydac Electronic Gmbh	Mehrdimensionaler Fluidströmungssensor
DE102005061703A1 (de) *	2005-12-21	2007-07-05	Innovative Sensor Technology Ist Ag	Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit
ATE553361T1 (de) *	2006-10-23	2012-04-15	Ust Umweltsensortechnik Gmbh	Hochtemperatursensor und verfahren zu dessen überprüfung
DE102007023824B4 (de) *	2007-05-21	2010-01-07	Abb Ag	Thermischer Massendurchflussmesser
US7500392B1 (en)	2007-10-11	2009-03-10	Memsys, Inc.	Solid state microanemometer device and method of fabrication
JP2012189571A (ja) *	2011-02-24	2012-10-04	Renesas Electronics Corp	半導体装置及びその製造方法
JP5696605B2 (ja) *	2011-07-01	2015-04-08	東京エレクトロン株式会社	基板処理装置のデータ取得方法及び基板処理装置
JP5704129B2 (ja) *	2012-06-22	2015-04-22	東京エレクトロン株式会社	基板処理装置のデータ取得方法及びセンサ用基板
CN103217550B (zh) *	2013-03-29	2015-04-22	北京遥测技术研究所	铂热栅式风速风向传感器
JP6669957B2 (ja)	2015-09-30	2020-03-18	ミツミ電機株式会社	流量センサ
US10724882B2 (en) *	2015-11-24	2020-07-28	Ifm Electronic Gmbh	Thermal flowmeter and method having a self-heated element controlled to operate differently under high and low phases of square wave signal
US10168349B2 (en) *	2016-09-08	2019-01-01	Robert Bosch Gmbh	Bolometer fluid flow sensor
JP7235218B2 (ja) *	2019-03-04	2023-03-08	ミネベアミツミ株式会社	流体センサ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3677085A (en) *	1970-04-08	1972-07-18	Yugen Kaisha Tsukasa Sokken	Tandem-type hot-wire velocity meter probe
US3995481A (en) *	1973-02-07	1976-12-07	Environmental Instruments, Inc.	Directional fluid flow transducer
US4024761A (en) *	1976-06-11	1977-05-24	Kyma Corporation	Directional hot film anemometer transducer
US4135396A (en) *	1978-04-24	1979-01-23	The Trane Company	Temperature compensating fluid velocity sensing apparatus
DE2925975A1 (de) *	1979-06-27	1981-01-15	Siemens Ag	Mengendurchflussmesser
JPS56162014A (en) *	1980-05-16	1981-12-12	Nippon Denso Co Ltd	Measuring device for flow rate of gas
DE3024417A1 (de) *	1980-06-28	1982-01-21	William Buchanan Falmouth Mass. Kerfoot	Verfahren und vorrichtung zur messung einer stroemungscharakteristik
US4478076A (en) *	1982-09-30	1984-10-23	Honeywell Inc.	Flow sensor
JPS604815A (ja) *	1983-06-23	1985-01-11	Nippon Soken Inc	流量測定装置
US4637253A (en) *	1984-05-22	1987-01-20	Kabushiki Kaisha Toshiba	Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
US4576050A (en) *	1984-08-29	1986-03-18	General Motors Corporation	Thermal diffusion fluid flow sensor
JPS61133866A (ja) *	1984-12-03	1986-06-21	Toyota Central Res & Dev Lab Inc	流動状態検出センサ
JPS61194317A (ja) *	1985-02-25	1986-08-28	Nippon Soken Inc	直熱型流量センサ

1987
- 1987-03-31 JP JP62079244A patent/JPH0810231B2/ja not_active Expired - Fee Related
1988
- 1988-03-31 EP EP88302969A patent/EP0285451B1/de not_active Expired - Lifetime
- 1988-03-31 DE DE8888302969T patent/DE3877795T2/de not_active Expired - Fee Related
- 1988-03-31 US US07/175,561 patent/US4885937A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPS63243885A (ja)	1988-10-11
JPH0810231B2 (ja)	1996-01-31
DE3877795T2 (de)	1993-05-27
EP0285451B1 (de)	1993-01-27
EP0285451A1 (de)	1988-10-05
US4885937A (en)	1989-12-12

Publication	Publication Date	Title
DE3877795D1 (de)	1993-03-11	Stroemungssensor.
DE3861518D1 (de)	1991-02-14	Messaufnehmer.
DE3777200D1 (de)	1992-04-09	Positionsfuehler.
DE3887310D1 (de)	1994-03-03	Messwertaufnehmer.
DE3672080D1 (de)	1990-07-19	Fuehler.
DE3850178D1 (de)	1994-07-21	Strömungsmesssystem.
FI881497A (fi)	1988-10-02	Snabbt hybridisationsbestaemningsfoerfarande i vilket anvaends lateximmobiliserad sensor.
DE3670574D1 (de)	1990-05-31	Optischer durchflusssensor.
DE3877171D1 (de)	1993-02-11	Drucksensor.
DE3885784D1 (de)	1994-01-05	Gasfühler.
DE3874329D1 (de)	1992-10-08	Positionsfuehler.
DE3483708D1 (de)	1991-01-17	Kraftsensor.
DE3767092D1 (de)	1991-02-07	Winkelsensor.
DE3785399D1 (de)	1993-05-19	Neigungssensor.
DE3883995D1 (de)	1993-10-14	Drucksensor.
DE3769709D1 (de)	1991-06-06	Prothesenformfuehler.
DE3884264D1 (de)	1993-10-28	Druckmessfühler.
DE3861551D1 (de)	1991-02-21	Durchflussoszillator.
DE3889719D1 (de)	1994-06-30	Flüssigkeitssensor.
DE3667437D1 (de)	1990-01-18	Fuehleranordnung.
DE3880268D1 (de)	1993-05-19	Positionsgeber.
DE3485492D1 (de)	1992-03-12	Maltosesensor.
DE3584620D1 (de)	1991-12-12	Neigungsgeber.
NO890673L (no)	1989-04-17	Boelgeleder-sensor.
NO843551L (no)	1986-03-10	Sensor.

Legal Events

Date	Code	Title	Description
1994-03-03	8364	No opposition during term of opposition
2004-01-15	8339	Ceased/non-payment of the annual fee