Nothing Special   »   [go: up one dir, main page]

DE3777232D1 - Vorrichtung zum messen der schichtdicke. - Google Patents

Vorrichtung zum messen der schichtdicke.

Info

Publication number
DE3777232D1
DE3777232D1 DE8787106268T DE3777232T DE3777232D1 DE 3777232 D1 DE3777232 D1 DE 3777232D1 DE 8787106268 T DE8787106268 T DE 8787106268T DE 3777232 T DE3777232 T DE 3777232T DE 3777232 D1 DE3777232 D1 DE 3777232D1
Authority
DE
Germany
Prior art keywords
measuring
layer thickness
thickness
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787106268T
Other languages
English (en)
Inventor
Toshishige C O Mitsubish Nagao
Masayuki C O Mitsubishi Ariki
Yoshiaki C O Mitsubishi De Ida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6524986U external-priority patent/JPS62176706U/ja
Priority claimed from JP10006786A external-priority patent/JPS62255807A/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE3777232D1 publication Critical patent/DE3777232D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07F—COIN-FREED OR LIKE APPARATUS
    • G07F13/00—Coin-freed apparatus for controlling dispensing or fluids, semiliquids or granular material from reservoirs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8787106268T 1986-04-29 1987-04-29 Vorrichtung zum messen der schichtdicke. Expired - Fee Related DE3777232D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6524986U JPS62176706U (de) 1986-04-29 1986-04-29
JP10006786A JPS62255807A (ja) 1986-04-29 1986-04-29 膜厚測定装置

Publications (1)

Publication Number Publication Date
DE3777232D1 true DE3777232D1 (de) 1992-04-16

Family

ID=26406376

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787106268T Expired - Fee Related DE3777232D1 (de) 1986-04-29 1987-04-29 Vorrichtung zum messen der schichtdicke.

Country Status (5)

Country Link
US (1) US4748331A (de)
EP (1) EP0243961B1 (de)
KR (1) KR900003208B1 (de)
CA (1) CA1292803C (de)
DE (1) DE3777232D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920004750B1 (ko) * 1988-01-19 1992-06-15 미쓰비시전기 주식회사 막(膜)두께 측정방법
DE4209314C1 (de) * 1992-03-23 1993-02-11 Fagus-Grecon Greten Gmbh & Co Kg, 3220 Alfeld, De
US5622268A (en) * 1994-11-30 1997-04-22 Heidelberg Finishing Systems, Inc. Apparatus for calipering a collated assemblage
DE10054227A1 (de) * 2000-11-02 2002-08-01 Musa Kazalan Messvorrichtung zur Überwachung der Aussenkontur von Profilen bei der Herstellung
US7824730B2 (en) * 2007-08-31 2010-11-02 United Technologies Corporation Method and apparatus for measuring coating thickness with a laser
US9109330B2 (en) 2009-03-09 2015-08-18 Honeywell International Inc. Apparatus and method for measuring properties of unstabilized moving sheets
US9403259B2 (en) 2013-03-15 2016-08-02 United Technologies Corporation Removing material from a workpiece with a water jet
CN110142954A (zh) * 2019-03-26 2019-08-20 宁波太古新材料科技有限公司 一种自动调节电晕距离的保护膜电晕处理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518441A (en) * 1968-01-24 1970-06-30 Neotec Corp Optical gage for measuring the thickness of a continuous web
DE2352694C2 (de) * 1973-10-20 1983-05-19 Robert Bosch Gmbh, 7000 Stuttgart Digitale Schaltungsanordnung zur Auslösung eines Betriebsvorganges, insbesondere des Zündvorganges einer Brennkraftmaschine
US4182259A (en) * 1978-10-04 1980-01-08 The Dow Chemical Company Apparatus for measuring coating thickness on an applicator roll
JPS5667704A (en) * 1979-11-08 1981-06-08 Kobe Steel Ltd Automatic nondestructive measuring method for eccentricity of coated welding rod
GB2063826B (en) * 1979-11-19 1982-10-06 Ciba Geigy Ag Controlling winding or unwinding of webs rolls
US4730116A (en) * 1985-08-06 1988-03-08 Mitsubishi Denki Kabushiki Kaisha Sheet thickness measuring apparatus by optical scanning

Also Published As

Publication number Publication date
EP0243961A3 (en) 1989-03-22
KR870010382A (ko) 1987-11-30
EP0243961B1 (de) 1992-03-11
US4748331A (en) 1988-05-31
EP0243961A2 (de) 1987-11-04
KR900003208B1 (ko) 1990-05-10
CA1292803C (en) 1991-12-03

Similar Documents

Publication Publication Date Title
DE3577600D1 (de) Geraet zum messen von belagdicken.
DE3582783D1 (de) Einrichtung zum erfassen der drehlage.
DE3579144D1 (de) Vorrichtung zur ermittlung der position.
DE3789060D1 (de) Vorrichtung zum messen von biologischen signalen.
DE69006673D1 (de) Blattdicken-Messapparat.
DE69013236D1 (de) Messanordnung für Oberflächen-Widerstand.
DE3879657D1 (de) Geraet zum berechnen der rad-referenz-geschwindigkeit.
DE3676431D1 (de) Einrichtung zur messung der drehgeschwindigkeit.
DE3784063D1 (de) Druckmessgeraet.
DE3874999D1 (de) Wanddicken-messgeraet.
DE3578898D1 (de) Vorrichtung zum messen des profils von brillenfassungen.
DE3280275D1 (de) Vorrichtung zum messen blattfoermigen materials.
DE3861343D1 (de) Vorrichtung zum messen von luftdaten.
DE3684594D1 (de) Verfahren und vorrichtung zum messen der blickrichtung.
DE3485866D1 (de) Vorrichtung zum erkennen der gueltigkeit von muenzen.
KR870010384A (ko) 표층두께 측정장치
DE3784383D1 (de) Verfahren zum messen von filmdicken und vorrichtung dafuer.
DE69019231D1 (de) Vorrichtung zum Messen der Konzentration von NOx.
DE3887639D1 (de) Vorrichtung zum Untersuchen der Leberfunktion.
DE3777232D1 (de) Vorrichtung zum messen der schichtdicke.
DE69201064D1 (de) Vorrichtung zum Messen der Dicke von Blumenstielen.
DE69007842D1 (de) Vorrichtung zum Messen physikalischer Parameter.
ATA283388A (de) Einrichtung zum regeln der wandstärke
DE3887638D1 (de) Vorrichtung zum Untersuchen der Leberfunktion.
DE3871936D1 (de) Schicht-kontaktierendes dickenmessgeraet.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee