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DE3775459D1 - Verfahren zur herstellung einer diamantenschicht. - Google Patents

Verfahren zur herstellung einer diamantenschicht.

Info

Publication number
DE3775459D1
DE3775459D1 DE8787106104T DE3775459T DE3775459D1 DE 3775459 D1 DE3775459 D1 DE 3775459D1 DE 8787106104 T DE8787106104 T DE 8787106104T DE 3775459 T DE3775459 T DE 3775459T DE 3775459 D1 DE3775459 D1 DE 3775459D1
Authority
DE
Germany
Prior art keywords
producing
diamond layer
diamond
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787106104T
Other languages
English (en)
Inventor
Kiyoshi Ogata
Eiji Kamijo
Yasunori Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9888886A external-priority patent/JPS62256794A/ja
Priority claimed from JP3757687A external-priority patent/JPS63206387A/ja
Priority claimed from JP8762487A external-priority patent/JPS63250457A/ja
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Application granted granted Critical
Publication of DE3775459D1 publication Critical patent/DE3775459D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
DE8787106104T 1986-04-28 1987-04-28 Verfahren zur herstellung einer diamantenschicht. Expired - Fee Related DE3775459D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9888886A JPS62256794A (ja) 1986-04-28 1986-04-28 ダイヤモンド薄膜の作製方法
JP3757687A JPS63206387A (ja) 1987-02-19 1987-02-19 ダイヤモンド薄膜の作製方法
JP8762487A JPS63250457A (ja) 1987-04-08 1987-04-08 ダイヤモンド薄膜の作製方法

Publications (1)

Publication Number Publication Date
DE3775459D1 true DE3775459D1 (de) 1992-02-06

Family

ID=27289514

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787106104T Expired - Fee Related DE3775459D1 (de) 1986-04-28 1987-04-28 Verfahren zur herstellung einer diamantenschicht.

Country Status (3)

Country Link
US (1) US5009923A (de)
EP (1) EP0245688B1 (de)
DE (1) DE3775459D1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5284709A (en) * 1987-03-30 1994-02-08 Crystallume Diamond materials with enhanced heat conductivity
US5273825A (en) * 1987-03-30 1993-12-28 Crystallume Article comprising regions of high thermal conductivity diamond on substrates
US5270114A (en) * 1987-03-30 1993-12-14 Crystallume High thermal conductivity diamond/non-diamond composite materials
US5271971A (en) * 1987-03-30 1993-12-21 Crystallume Microwave plasma CVD method for coating a substrate with high thermal-conductivity diamond material
US5413772A (en) * 1987-03-30 1995-05-09 Crystallume Diamond film and solid particle composite structure and methods for fabricating same
US5432003A (en) * 1988-10-03 1995-07-11 Crystallume Continuous thin diamond film and method for making same
US5182093A (en) * 1990-01-08 1993-01-26 Celestech, Inc. Diamond deposition cell
CA2014913A1 (en) * 1989-07-31 1991-01-31 Thomas R. Anthony Method for improving adhesion of synthetic diamond coatings to substrates
US5190823A (en) * 1989-07-31 1993-03-02 General Electric Company Method for improving adhesion of synthetic diamond coatings to substrates
JPH04305096A (ja) * 1991-04-01 1992-10-28 Sumitomo Electric Ind Ltd 高品質気相合成ダイヤモンドの低温形成法
US6294479B1 (en) * 1992-05-21 2001-09-25 Nissin Electric Co., Ltd Film forming method and apparatus
US5391407A (en) * 1994-03-18 1995-02-21 Southwest Research Institute Process for forming protective diamond-like carbon coatings on metallic surfaces
US5593719A (en) * 1994-03-29 1997-01-14 Southwest Research Institute Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloys
US6087025A (en) * 1994-03-29 2000-07-11 Southwest Research Institute Application of diamond-like carbon coatings to cutting surfaces of metal cutting tools
US5725573A (en) * 1994-03-29 1998-03-10 Southwest Research Institute Medical implants made of metal alloys bearing cohesive diamond like carbon coatings
US5605714A (en) * 1994-03-29 1997-02-25 Southwest Research Institute Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys
US5731045A (en) * 1996-01-26 1998-03-24 Southwest Research Institute Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components
US5984905A (en) * 1994-07-11 1999-11-16 Southwest Research Institute Non-irritating antimicrobial coating for medical implants and a process for preparing same
US5780119A (en) * 1996-03-20 1998-07-14 Southwest Research Institute Treatments to reduce friction and wear on metal alloy components
US5922415A (en) * 1996-06-20 1999-07-13 Southwest Research Institute Lubrication of magnetic disk storage media
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
US6632483B1 (en) * 2000-06-30 2003-10-14 International Business Machines Corporation Ion gun deposition and alignment for liquid-crystal applications
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
JPWO2010018639A1 (ja) * 2008-08-15 2012-01-26 株式会社シンクロン 蒸着装置及び薄膜デバイスの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4503125A (en) * 1979-10-01 1985-03-05 Xebec, Inc. Protective overcoating for magnetic recording discs and method for forming the same
US4618505A (en) * 1983-12-27 1986-10-21 General Motors Corporation Method of making adherent score-resistant coating for metals
US4490229A (en) * 1984-07-09 1984-12-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamondlike carbon films

Also Published As

Publication number Publication date
EP0245688A1 (de) 1987-11-19
US5009923A (en) 1991-04-23
EP0245688B1 (de) 1991-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BARZ, P., DIPL.-CHEM. DR.RER.NAT., PAT.-ANW., 80803 MUENCHEN

8339 Ceased/non-payment of the annual fee