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DE3775025D1 - Verfahren zum photochemischen aufdampfen von oxidschichten mit erhoehter abscheidungsgeschwindigkeit. - Google Patents

Verfahren zum photochemischen aufdampfen von oxidschichten mit erhoehter abscheidungsgeschwindigkeit.

Info

Publication number
DE3775025D1
DE3775025D1 DE8787903590T DE3775025T DE3775025D1 DE 3775025 D1 DE3775025 D1 DE 3775025D1 DE 8787903590 T DE8787903590 T DE 8787903590T DE 3775025 T DE3775025 T DE 3775025T DE 3775025 D1 DE3775025 D1 DE 3775025D1
Authority
DE
Germany
Prior art keywords
photochemically
vaporizing
oxide layers
deposition speed
increased deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787903590T
Other languages
English (en)
Inventor
N Rogers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE3775025D1 publication Critical patent/DE3775025D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Silicon Compounds (AREA)
DE8787903590T 1986-07-25 1987-05-12 Verfahren zum photochemischen aufdampfen von oxidschichten mit erhoehter abscheidungsgeschwindigkeit. Expired - Fee Related DE3775025D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/889,562 US4753818A (en) 1986-07-25 1986-07-25 Process for photochemical vapor deposition of oxide layers at enhanced deposition rates
PCT/US1987/001072 WO1988000985A1 (en) 1986-07-25 1987-05-12 Process for photochemical vapor deposition of oxide layers at enhanced deposition rates

Publications (1)

Publication Number Publication Date
DE3775025D1 true DE3775025D1 (de) 1992-01-16

Family

ID=25395366

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787903590T Expired - Fee Related DE3775025D1 (de) 1986-07-25 1987-05-12 Verfahren zum photochemischen aufdampfen von oxidschichten mit erhoehter abscheidungsgeschwindigkeit.

Country Status (8)

Country Link
US (1) US4753818A (de)
EP (1) EP0275267B1 (de)
JP (1) JPH01500444A (de)
KR (1) KR910000509B1 (de)
DE (1) DE3775025D1 (de)
HK (1) HK38292A (de)
IL (1) IL82602A0 (de)
WO (1) WO1988000985A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910003742B1 (ko) * 1986-09-09 1991-06-10 세미콘덕터 에너지 라보라터리 캄파니 리미티드 Cvd장치
US5427824A (en) * 1986-09-09 1995-06-27 Semiconductor Energy Laboratory Co., Ltd. CVD apparatus
US5417934A (en) * 1988-06-04 1995-05-23 Boc Limited Dry exhaust gas conditioning
US5104690A (en) * 1990-06-06 1992-04-14 Spire Corporation CVD thin film compounds
US5171610A (en) * 1990-08-28 1992-12-15 The Regents Of The University Of Calif. Low temperature photochemical vapor deposition of alloy and mixed metal oxide films
JP2545306B2 (ja) * 1991-03-11 1996-10-16 誠 小長井 ＺｎＯ透明導電膜の製造方法
US5728224A (en) * 1995-09-13 1998-03-17 Tetra Laval Holdings & Finance S.A. Apparatus and method for manufacturing a packaging material using gaseous phase atmospheric photo chemical vapor deposition to apply a barrier layer to a moving web substrate
US6287988B1 (en) * 1997-03-18 2001-09-11 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and semiconductor device
US5800880A (en) * 1997-03-26 1998-09-01 Tetra Laval Holdings & Finance, S.A. Process for coating the interior wall of a container with a SiOx barrier layer
GB2327090A (en) * 1997-07-09 1999-01-13 British Aerospace CVD manufacturing a multilayer optical mirror using ultra-violet light
US20010052323A1 (en) * 1999-02-17 2001-12-20 Ellie Yieh Method and apparatus for forming material layers from atomic gasses
KR20030013439A (ko) 2000-06-23 2003-02-14 테트라 라발 홀딩스 앤드 피낭스 소시에떼아노님 충전 방법, 충전 장치, 및 포장과 충전을 위한 용기
US20040171279A1 (en) * 2003-02-27 2004-09-02 Sharp Laboratories Of America Inc. Method of low-temperature oxidation of silicon using nitrous oxide
CA2653581A1 (en) * 2009-02-11 2010-08-11 Kenneth Scott Alexander Butcher Migration and plasma enhanced chemical vapour deposition
US8882972B2 (en) 2011-07-19 2014-11-11 Ecolab Usa Inc Support of ion exchange membranes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371587A (en) * 1979-12-17 1983-02-01 Hughes Aircraft Company Low temperature process for depositing oxide layers by photochemical vapor deposition
JPS5928345A (ja) * 1982-08-09 1984-02-15 Nec Corp 半導体装置の製造方法
JPS5953674A (ja) * 1982-09-17 1984-03-28 Seiko Epson Corp 化学蒸着法
US4581248A (en) * 1984-03-07 1986-04-08 Roche Gregory A Apparatus and method for laser-induced chemical vapor deposition
US4631199A (en) * 1985-07-22 1986-12-23 Hughes Aircraft Company Photochemical vapor deposition process for depositing oxide layers

Also Published As

Publication number Publication date
JPH01500444A (ja) 1989-02-16
JPH0219189B2 (de) 1990-04-27
KR880701789A (ko) 1988-11-05
IL82602A0 (en) 1987-11-30
US4753818A (en) 1988-06-28
WO1988000985A1 (en) 1988-02-11
EP0275267A1 (de) 1988-07-27
KR910000509B1 (ko) 1991-01-26
HK38292A (en) 1992-06-04
EP0275267B1 (de) 1991-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee