DE2221138B2 - Feldemissions-elektronenquelle - Google Patents
Feldemissions-elektronenquelleInfo
- Publication number
- DE2221138B2 DE2221138B2 DE19722221138 DE2221138A DE2221138B2 DE 2221138 B2 DE2221138 B2 DE 2221138B2 DE 19722221138 DE19722221138 DE 19722221138 DE 2221138 A DE2221138 A DE 2221138A DE 2221138 B2 DE2221138 B2 DE 2221138B2
- Authority
- DE
- Germany
- Prior art keywords
- field emission
- electron source
- emission electron
- source
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electron Sources, Ion Sources (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2875371 | 1971-04-30 | ||
JP5161071 | 1971-07-12 |
Publications (3)
Publication Number | Publication Date |
---|---|
DE2221138A1 DE2221138A1 (de) | 1972-11-23 |
DE2221138B2 true DE2221138B2 (de) | 1976-06-16 |
DE2221138C3 DE2221138C3 (de) | 1979-07-19 |
Family
ID=26366896
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DENDAT221138D Active DE221138C (de) | 1971-04-30 | ||
DE2221138A Expired DE2221138C3 (de) | 1971-04-30 | 1972-04-28 | Feldemissions-Elektronenquelle |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DENDAT221138D Active DE221138C (de) | 1971-04-30 |
Country Status (4)
Country | Link |
---|---|
US (1) | US3825839A (de) |
DE (2) | DE2221138C3 (de) |
FR (1) | FR2134396B1 (de) |
GB (1) | GB1375789A (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT988681B (it) * | 1972-07-03 | 1975-04-30 | Ibm | Sistema di controllo per dispo sitivi emettitori di elettroni |
DE2325808C2 (de) * | 1973-05-22 | 1983-07-14 | Leybold-Heraeus GmbH, 5000 Köln | Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers |
DE2325786C2 (de) * | 1973-05-22 | 1983-10-06 | Leybold-Heraeus Gmbh, 5000 Koeln | Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers |
JPS5279757A (en) * | 1975-12-26 | 1977-07-05 | Hitachi Ltd | Power supply for field emission electron gun |
US4525652A (en) * | 1982-10-23 | 1985-06-25 | Leybold-Heraeus Gmbh | Auxiliary-voltage source for supplying electric circuits which are at a high potential |
US4588928A (en) * | 1983-06-15 | 1986-05-13 | At&T Bell Laboratories | Electron emission system |
US4687970A (en) * | 1985-05-31 | 1987-08-18 | Hughes Aircraft Company | Digital cathode current control loop |
US5401973A (en) * | 1992-12-04 | 1995-03-28 | Atomic Energy Of Canada Limited | Industrial material processing electron linear accelerator |
DE10031090A1 (de) * | 2000-06-30 | 2002-01-31 | Acl Lichttechnik Gmbh | Reflektorleuchte mit Zwangskühlung des Leuchtmittels |
US6847164B2 (en) | 2002-12-10 | 2005-01-25 | Applied Matrials, Inc. | Current-stabilizing illumination of photocathode electron beam source |
EP1993119B1 (de) * | 2005-09-05 | 2017-11-08 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Vorrichtung zur Emission geladener Teilchen und Verfahren zum Betrieb einer Vorrichtung zur Emission geladener Teilchen |
CN117501402A (zh) * | 2021-06-18 | 2024-02-02 | Asml荷兰有限公司 | 用于在带电粒子系统中使用反馈回路调整束电流的系统和方法 |
CN117850168B (zh) * | 2023-11-28 | 2024-09-24 | 上海集成电路材料研究院有限公司 | 一种电子束直写装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2384087A (en) * | 1942-04-01 | 1945-09-04 | Rca Corp | Current limiter |
US3377506A (en) * | 1966-03-30 | 1968-04-09 | United Aircraft Corp | Electromagnetic current control for a hollow cathode |
US3413517A (en) * | 1967-01-13 | 1968-11-26 | Ibm | Filament current control by a superposed dithering voltage |
SU490099A1 (ru) * | 1968-07-17 | 1975-10-30 | Московский Ордена Ленина Энергетический Институт | Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой |
NL7012758A (de) * | 1970-08-28 | 1972-03-01 |
-
0
- DE DENDAT221138D patent/DE221138C/de active Active
-
1972
- 1972-04-19 US US00245328A patent/US3825839A/en not_active Expired - Lifetime
- 1972-04-20 FR FR7214004A patent/FR2134396B1/fr not_active Expired
- 1972-04-21 GB GB1872572A patent/GB1375789A/en not_active Expired
- 1972-04-28 DE DE2221138A patent/DE2221138C3/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3825839A (en) | 1974-07-23 |
GB1375789A (de) | 1974-11-27 |
DE221138C (de) | |
FR2134396A1 (de) | 1972-12-08 |
FR2134396B1 (de) | 1976-08-06 |
DE2221138C3 (de) | 1979-07-19 |
DE2221138A1 (de) | 1972-11-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C3 | Grant after two publication steps (3rd publication) | ||
8339 | Ceased/non-payment of the annual fee |