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DE10196030T1 - Mikrowellenerregtes Ultraviolett-Lampensystem mit verbesserter Lampenkühlung - Google Patents

Mikrowellenerregtes Ultraviolett-Lampensystem mit verbesserter Lampenkühlung

Info

Publication number
DE10196030T1
DE10196030T1 DE10196030T DE10196030T DE10196030T1 DE 10196030 T1 DE10196030 T1 DE 10196030T1 DE 10196030 T DE10196030 T DE 10196030T DE 10196030 T DE10196030 T DE 10196030T DE 10196030 T1 DE10196030 T1 DE 10196030T1
Authority
DE
Germany
Prior art keywords
microwave excited
improved
cooling
excited ultraviolet
ultraviolet lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10196030T
Other languages
English (en)
Inventor
James W Schmitkons
James M Borsuk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordson Corp
Original Assignee
Nordson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordson Corp filed Critical Nordson Corp
Publication of DE10196030T1 publication Critical patent/DE10196030T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/502—Cooling arrangements characterised by the adaptation for cooling of specific components
    • F21V29/505—Cooling arrangements characterised by the adaptation for cooling of specific components of reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
DE10196030T 2000-04-07 2001-04-06 Mikrowellenerregtes Ultraviolett-Lampensystem mit verbesserter Lampenkühlung Withdrawn DE10196030T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19556600P 2000-04-07 2000-04-07
PCT/US2001/011409 WO2001080271A2 (en) 2000-04-07 2001-04-06 Microwave excited ultraviolet lamp system with improved lamp cooling

Publications (1)

Publication Number Publication Date
DE10196030T1 true DE10196030T1 (de) 2003-03-27

Family

ID=22721897

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10196030T Withdrawn DE10196030T1 (de) 2000-04-07 2001-04-06 Mikrowellenerregtes Ultraviolett-Lampensystem mit verbesserter Lampenkühlung

Country Status (6)

Country Link
US (1) US6696801B2 (de)
JP (1) JP4777582B2 (de)
CN (1) CN1224074C (de)
AU (1) AU5324801A (de)
DE (1) DE10196030T1 (de)
WO (1) WO2001080271A2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2728326T3 (es) 2003-05-01 2019-10-23 Stratasys Ltd Aparato para producir un objeto por deposición secuencial de capas de material de construcción
KR100565218B1 (ko) * 2003-09-08 2006-03-30 엘지전자 주식회사 무전극 조명기기의 공진기구조
US20050250346A1 (en) * 2004-05-06 2005-11-10 Applied Materials, Inc. Process and apparatus for post deposition treatment of low k dielectric materials
US20050286263A1 (en) * 2004-06-23 2005-12-29 Champion David A Plasma lamp with light-transmissive waveguide
US20060206375A1 (en) * 2005-03-11 2006-09-14 Light Rhythms, Llc System and method for targeted advertising and promotions based on previous event participation
US20060249175A1 (en) * 2005-05-09 2006-11-09 Applied Materials, Inc. High efficiency UV curing system
US7777198B2 (en) * 2005-05-09 2010-08-17 Applied Materials, Inc. Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
US20060251827A1 (en) * 2005-05-09 2006-11-09 Applied Materials, Inc. Tandem uv chamber for curing dielectric materials
US7909595B2 (en) * 2006-03-17 2011-03-22 Applied Materials, Inc. Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
US7692171B2 (en) * 2006-03-17 2010-04-06 Andrzei Kaszuba Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
US7566891B2 (en) * 2006-03-17 2009-07-28 Applied Materials, Inc. Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
US8410410B2 (en) * 2006-07-12 2013-04-02 Nordson Corporation Ultraviolet lamp system with cooling air control
US7863834B2 (en) * 2007-06-29 2011-01-04 Nordson Corporation Ultraviolet lamp system and method for controlling emitted UV light
US7952289B2 (en) * 2007-12-21 2011-05-31 Nordson Corporation UV lamp system and associated method with improved magnetron control
US7964858B2 (en) * 2008-10-21 2011-06-21 Applied Materials, Inc. Ultraviolet reflector with coolant gas holes and method
DE102009018840A1 (de) * 2009-04-28 2010-11-25 Auer Lighting Gmbh Plasmalampe
CN101699610B (zh) * 2009-11-06 2011-03-16 深圳市世纪安耐光电科技有限公司 等离子灯具光源结构的制造方法
US9439273B2 (en) 2010-07-12 2016-09-06 Nordson Corporation Ultraviolet lamp system and method for controlling emitted ultraviolet light
DE112011102371T5 (de) 2010-07-16 2013-04-25 Nordson Corporation Lampensysteme und Verfahren zum Erzeugen von ultraviolettem Licht
KR101928348B1 (ko) 2011-04-08 2018-12-12 어플라이드 머티어리얼스, 인코포레이티드 자외선 처리, 화학적 처리, 및 증착을 위한 장치 및 방법
US9171747B2 (en) 2013-04-10 2015-10-27 Nordson Corporation Method and apparatus for irradiating a semi-conductor wafer with ultraviolet light
US9706609B2 (en) * 2013-09-11 2017-07-11 Heraeus Noblelight America Llc Large area high-uniformity UV source with many small emitters
JP6245427B2 (ja) * 2013-09-30 2017-12-13 岩崎電気株式会社 光照射装置
US9435031B2 (en) 2014-01-07 2016-09-06 International Business Machines Corporation Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same
US11227738B2 (en) 2017-04-21 2022-01-18 Hewlett-Packard Development Company, L.P. Cooling for a lamp assembly
CN107351533B (zh) * 2017-08-17 2023-03-14 厦门富莱仕影视器材有限公司 印刷机专用风冷低温uv光源

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4042850A (en) 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
US4695757A (en) * 1982-05-24 1987-09-22 Fusion Systems Corporation Method and apparatus for cooling electrodeless lamps
US4504768A (en) 1982-06-30 1985-03-12 Fusion Systems Corporation Electrodeless lamp using a single magnetron and improved lamp envelope therefor
HU204121B (en) * 1986-10-13 1991-11-28 Tamas Barna Reflective internal mirror with arrangement and multi-section light source
JPH0637521Y2 (ja) 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
JPH02189805A (ja) * 1989-01-17 1990-07-25 Ushio Inc マイクロ波励起型無電極発光装置
JPH0340709U (de) * 1989-08-30 1991-04-18
US5504391A (en) * 1992-01-29 1996-04-02 Fusion Systems Corporation Excimer lamp with high pressure fill
WO2001031976A1 (en) * 1999-10-27 2001-05-03 Fusion Uv Systems, Inc. Uv oven for curing magnet wire coatings

Also Published As

Publication number Publication date
US20030020414A1 (en) 2003-01-30
US6696801B2 (en) 2004-02-24
AU5324801A (en) 2001-10-30
WO2001080271A3 (en) 2002-07-04
JP2003531463A (ja) 2003-10-21
CN1224074C (zh) 2005-10-19
JP4777582B2 (ja) 2011-09-21
CN1422436A (zh) 2003-06-04
WO2001080271A2 (en) 2001-10-25

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Legal Events

Date Code Title Description
8130 Withdrawal