CN220872340U - Optical detection device - Google Patents
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Abstract
The disclosure provides an optical detection device, and belongs to the technical field of optical detection. The device comprises a light source, a light source homogenizing system and a detection platform sequentially along an incident light path. The light source is used for emitting Gaussian beams to the light source homogenizing system; the light source homogenizing system is used for converting Gaussian beams into homogenized beams and projecting the homogenized beams on the detection platform to form homogenized light spots. The light source homogenization system includes a shaping supersurface configured to modulate a gaussian beam into a homogenized beam. The application realizes the homogenization of the light beam at any distance based on the combination of the shaping super surface and the collimation super surface, and can reduce the volume of the system and efficiently utilize the excitation light.
Description
Technical Field
The utility model relates to the technical field of optical detection, in particular to an optical detection device applied to multiple samples.
Background
Most of the existing light source homogenizing devices adopt a compound eye scheme to split incident light into beams through a micro lens array and focus the beams to the same area so as to realize homogenization of the beams in a specific area; or by a combination between a spherical mirror and an aspherical mirror to achieve a redistribution of the light intensity. In the optical detection device, the distance between optical devices in the light source homogenizing system is far, so that the homogenized light beam is more difficult to adjust, and the system often occupies an excessive space volume. There is a need to reduce the size of optical detection devices, increase the accuracy of modulation and the utilization of excitation light.
Disclosure of utility model
In order to solve the above problems, the present application provides an optical detection device, which sequentially includes a light source, a light source homogenizing system and a detection platform along an incident light path;
The light source is used for emitting Gaussian beams to the light source homogenizing system;
the light source homogenizing system is used for converting Gaussian beams into homogenized beams and projecting the homogenized beams on the detection platform to form homogenized light spots;
Wherein the light source homogenization system includes a shaping supersurface configured to modulate the gaussian beam into a homogenized beam.
Optionally, the light source homogenizing system further comprises a collimating super-surface, wherein the collimating super-surface is arranged between the shaping super-surface and the detection platform;
The collimating supersurface is configured to modulate the homogenized light beam into a collimated light beam.
Optionally, the light source homogenizing system further comprises an additional lens configured to change a diameter of the collimated light beam, the additional lens disposed between the collimating super surface and the detection platform;
the distance from the additional lens to the detection platform is greater than or equal to the focal length of the additional lens.
Optionally, the additional lens is a zoom superlens.
Optionally, the additional lens is a refractive lens or a fixed focus superlens.
Optionally, at least one of a distance between the additional lens and the collimating super surface, a distance between the additional lens and the detection platform, and a focal length of the additional lens is adjustable.
Alternatively, the light source may be a solid state laser, a gas laser or a fiber laser.
Optionally, the optical detection device further comprises a photodetector for receiving a fluorescent signal generated by the detection sample placed on the detection platform under the irradiation of the homogenized light beam.
Alternatively, the optical detection device may adjust the size of the homogenized light spot by a light source homogenizing system such that the change in the size of the homogenized light spot corresponds to the change in the number of detected samples.
According to the technical scheme provided by the embodiment of the application, at least the following beneficial effects are achieved:
The optical detection device provided by the application adopts the ultra-surface design beam homogenization system, so that the miniaturization of the optical detection device can be realized, and meanwhile, the ultra-surface is prepared on the basis of nano-scale, so that the high-precision regulation and control can be realized. Furthermore, the technical scheme provided by the application comprises the additional lens, and the irradiation area can be adjusted according to the quantity of the detection samples, so that the efficient utilization of the excitation light is realized.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of an optical detection device according to an embodiment of the disclosure;
FIG. 2 is a schematic diagram of another structure of an optical detection device according to an embodiment of the disclosure;
FIG. 3 is a schematic diagram of the working principle of the shaping super-surface in the optical inspection device shown in FIG. 2;
FIG. 4 is a schematic diagram illustrating the working principle of a light source homogenizing system in the optical inspection apparatus shown in FIG. 2;
FIG. 5 is a schematic diagram of another optical detection device according to an embodiment of the disclosure;
FIG. 6 is a diagram illustrating an operation state of an optical detection device according to an embodiment of the disclosure;
FIG. 7 is a schematic diagram illustrating a combination of optical components of an optical detection device according to an embodiment of the disclosure;
FIG. 8 is a schematic diagram illustrating a phase distribution of a shaping super-surface in an optical inspection device according to an embodiment of the disclosure;
FIG. 9 is a schematic diagram of a phase distribution of a collimating super-surface in an optical inspection device according to an embodiment of the present disclosure;
FIG. 10 is a schematic diagram showing the light intensity distribution of a light beam on a collimating super-surface in an optical detection apparatus according to an embodiment of the present disclosure;
FIG. 11 is a schematic view of divergence angle of a light beam passing through a collimating super-surface in an optical inspection apparatus according to an embodiment of the present disclosure;
Fig. 12 is a schematic diagram of light intensity distribution of a light beam passing through a beam expander lens in an optical detection apparatus according to an embodiment of the present disclosure.
List of reference numerals:
10-shaping supersurface, 20-collimating supersurface, 30-additional lens, 40-detection stage, 51-Gaussian beam, 53-homogenized beam, 55-collimated beam, 80-detection sample, 90-light source.
Detailed Description
The present application now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments are shown. The application may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the application to those skilled in the art. Like numbers refer to like elements throughout. Also, in the drawings, the thickness, ratio, and size of the parts are exaggerated for clarity of illustration.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, "a," "an," "the," and "at least one" are not meant to limit the amount, but are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, the meaning of "a component" is the same as "at least one component". The "at least one" should not be construed as limited to the number "one". "or" means "and/or". The term "and/or" includes any and all combinations of one or more of the associated listed items.
Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms as defined in commonly used dictionaries should be interpreted as having the same meaning as the relevant art context and are not interpreted in an idealized or overly formal sense unless expressly so defined herein.
The meaning of "comprising" or "including" indicates a property, quantity, step, operation, component, element, or combination thereof, but does not preclude other properties, quantities, steps, operations, components, elements, or combinations thereof.
Embodiments are described herein with reference to cross-sectional illustrations that are idealized embodiments. Thus, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments described herein should not be construed as limited to the particular shapes of regions as illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, a region shown or described as being flat may typically have rough and/or nonlinear features. Also, the acute angles shown may be rounded. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the claims.
Hereinafter, exemplary embodiments according to the present application will be described with reference to the accompanying drawings.
For example, in the case of performing a detection method such as fluorescent labeling, it is necessary to use excitation light having uniform intensity in order to optically detect a large number of samples to be replicated. If a gaussian beam with uneven light intensity is adopted, misjudgment is easily caused by weak excitation signals at weak light intensity, so that a beam homogenizing system is required to homogenize the gaussian beam output by a laser.
Most of the conventional light source homogenizing devices adopt a compound eye scheme, and the incident light is split by a micro lens array and focused to the same area to achieve the homogenization of the light beam in a specific area. Because the size and focal length of the microlenses are typically large, the optics in the light homogenizing device are far apart, so that the system often occupies an excessive volume of space.
Conventional light source homogenizers may also be used to achieve a redistribution of light intensity by a combination of spherical and aspherical mirrors. Because the manufacturing difficulty of the aspherical mirror is high in actual processing, higher processing precision is required, and the processing cost is increased. At the same time, the combination between the machining curvature lenses also requires a long spatial distance, resulting in an excessive overall size of the optical system.
In view of the above, the present application provides an optical detection device. The optical detection device can realize high-performance light beam homogenization and collimation, and the regulation and control precision corresponds to nanometer scale. Meanwhile, the superlens is adopted, so that the system volume is greatly reduced.
The embodiment of the utility model provides an optical detection device, which sequentially comprises a light source 90, a light source homogenizing system and a detection platform 40 along an incident light path, wherein the light source 90 is used for emitting a Gaussian beam 51, and the light source homogenizing system is used for converting the Gaussian beam into a homogenized beam 53 and projecting homogenized light spots to the detection platform 40.
Alternatively, the light source 90 may be a solid state laser, a gas laser, or a fiber laser.
In one embodiment, referring to FIG. 1, a light source homogenization system includes a shaped super surface 10, the shaped super surface 10 modulating a Gaussian beam 51 into a homogenized beam 53.
Homogenized beam 53 may form a homogenized spot on inspection platform 40, inspection platform 40 being located at the focal plane of shaped super surface 10.
In the embodiments and the alternative embodiments of the present application, the super surface is a layer of artificial nano-structure film with sub-wavelength, and the amplitude, phase and polarization of the incident light can be modulated by the nano-structure disposed on the super surface, wherein the nano-structure is understood to be a sub-wavelength structure which contains all media or plasma and can cause phase mutation, and the nano-structure is a structural unit centered on each nano-structure by dividing the super lens. The nanostructures are periodically arranged on the substrate in the superlens, wherein the nanostructures in each period form one superstructural unit, wherein the superstructural units are in a close-packed pattern, such as regular quadrangles, regular hexagons, etc., each period comprises a group of nanostructures, and the vertices and/or the centers of the superstructural units can be provided with nanostructures, for example.
The gaussian beam 51 is homogenized by designing the phase distribution of the nanostructures of the shaped super surface 10 such that the shaped super surface 10 redistributes the light intensity distribution of the incident gaussian beam 51, modulating it into a homogenized beam 53. Specifically, the light intensity of the homogenized beam 53 is uniformly distributed in the flat top region.
In one embodiment, referring to FIG. 2, a collimating super-surface 20 is also included in the light source homogenization system due to the divergence angle of the homogenized light beam 53.
The homogenized beam 53 is modulated into a collimated beam 55 by designing the nanostructure of the collimating super-surface 20 such that its phase distribution correlates with the divergence angle distribution of the homogenized beam 53.
The collimated beam 55 may form a homogenized spot on the detection platform 40, with the vertical distance d between the collimating sub-surface 20 and the detection platform 40 being any value.
In the embodiment of the present application and the alternative embodiments, as shown in fig. 2, since the gaussian beam 51 incident on the shaping super surface 10 and the collimated beam 55 exiting from the collimating super surface 20 are both collimated, in order to keep the deflection angle of the homogenized beam 53 exiting from the shaping super surface 10 consistent with the angle θ required to be collimated when incident on the collimating super surface 20, the phase distributions of the shaping super surface 10 and the collimating super surface 20 need to be strictly related to the angle θ and are matched.
During the incidence of gaussian beam 51 on shaping super-surface 10, the energy of gaussian beam 51 is redistributed by the nanostructure of shaping super-surface 10, in which the phase distribution of the nanostructure of shaping super-surface 10 will be related to the wavelength of gaussian beam 51, the beam waist radius, the radius of homogenized beam 53, and the shaping distance z between shaping super-surface 10 and collimating super-surface 20.
As shown in fig. 3, the energy in the individual energy equally divided regions of gaussian beam 51 is each distributed to a different region on shaped super surface 10. The process of energy redistribution with either direction perpendicular to the optical axis of gaussian beam 51 as the x-direction can be represented by formula (1):
Where u 1 and u 2 are the x-direction coordinates of the exit point of the light ray in homogenized beam 53 on shaping surface 10 and the point of incidence on collimating surface 20, respectively, and I 1 and I 2 are the light intensity distributions of gaussian beam 51 and homogenized beam 53, respectively.
The intensity distribution of the Gaussian beam 51 isAfter shaping, the light intensity distribution of the homogenized light beam 53 is/>
Where a 1 is the beam waist radius of the gaussian beam and a 2 is the half width of homogenized beam 53, obtainable according to equation (1):
Wherein erf is an error function, an ErfInv is an inverse function of the error function, which is difficult to represent as an explicit expression, typically using an approximate solution or a numerical solution.
As shown in fig. 4, the deflection angle of the homogenized beam 53 exiting from the shaping super surface 10 is consistent with the angle θ to be collimated when entering the collimating super surface 20, and according to the generalized snell's law, it can be derived that:
Where λ is the wavelength of the gaussian beam 51 and θ is the deflection angle of the light.
Further, in the case of selecting an appropriate shaping distance z, the deflection angle θ is smaller, where sin θ and tan θ may be approximately the same, and according to the geometric relationship in fig. 4, it may be obtained:
Integrating equations (4) and (5) yields the phase distribution of the shaped 10 and collimated 20 hypersurfaces in the x-direction:
Wherein the integral variable x=u 1 when calculating the phase distribution on the shaped hypersurface 10 and the integral variable x=u 2 when calculating the phase distribution on the collimating hypersurface 20. Substituting the formulas (2) and (3) into the above formula gives:
The equations (9) and (10) are extended to a two-dimensional plane, and the y direction is any direction orthogonal to the x direction and the optical axis of the gaussian beam 51, respectively. On the premise that the x direction and the y direction are orthogonal, the phase distribution in the x direction and the y direction can be overlapped to obtain:
Referring to fig. 5, in one embodiment, the light source homogenization system further comprises an additional lens 30, the additional lens 30 being capable of changing the diameter of the collimated light beam 55 to act as a beam shrink and/or a beam expansion. In one embodiment, the additional lens 30 is a beam expanding lens, in another embodiment, the additional lens 30 is a beam shrinking lens, and in yet another embodiment, the additional lens 30 is a lens that is both beam expanding and beam shrinking.
The additional lens 30 is disposed between the collimating super surface 20 and the detection stage 40, and the distance from the additional lens 30 to the detection stage is greater than or equal to the focal length of the additional lens 30.
In one embodiment, the additional lens 30 is a zoom superlens.
In one embodiment, the additional lens 30 is a fixed focus lens. For example, a refractive lens or a fixed focus superlens.
In embodiments of the present application and in various alternative embodiments, an additional lens 30 may be used to regulate the size of the homogenized spot formed. When the additional lens 30 is a fixed focus lens, as shown in fig. 5, the size of the homogenized spot may be changed by adjusting at least one of the distance l 1 between the additional lens 30 and the collimating super surface 20 and the distance l 2 between the additional lens 30 and the detecting platform 40. When the additional lens 30 is a zoom lens, the size of the homogenized spot may be changed by adjusting at least one of the distance l 1 between the additional lens 30 and the collimating super surface 20, the distance l 2 between the additional lens 30 and the detecting platform 40, and the focal length f of the additional lens 30.
For the imaging process of the additional lens 30, l 1 corresponds to the object distance of the additional lens 30, l 2 corresponds to the image distance of the additional lens 30, and the size of the homogenized light spot is adjusted by changing the object-image relationship of the lens according to the number of samples to be detected, so that the irradiation area of the detected samples can be maximally utilized by the excitation light energy.
Hereinafter, the additional lens 30 is exemplified as a beam shrinking lens. Referring to fig. 5, in the embodiment of the present application and the alternative embodiments, the homogenized beam 53 emitted from the collimating super-surface 20 corresponds to a luminous object at a distance l 1 from the beam-shrinking lens, and forms a clear image at a position at a distance l 2 from the beam-shrinking lens after passing through the beam-shrinking lens with a focal length f, and the object-image relationship is as follows:
l2＝f(1+M)…(16)
Where M is the demagnification of homogenized beam 53 after passing through a demagnification lens. At this time, when the beam reduction lens is a fixed focus lens, l 1 and l 2 can be adjusted to change the size of the homogenized spot, and when the beam reduction lens is a zoom lens, l 1、l2 and f can be adjusted to change the size of the homogenized spot. And the half width R of the homogenized light spot on the detection platform is Mxa 2.
In embodiments and alternative embodiments of the present application, the optical detection device may include a photodetector, and the detection sample 80 disposed on the detection platform generates a fluorescent signal under the irradiation of the homogenized light beam and is received by the photodetector.
In one embodiment, the Gaussian beam from the light source is modulated into a homogenized beam, as shown in FIG. 6 (1), which excites the test sample 80 directly on the test platform 40.
In one embodiment, as shown in fig. 6 (2), the gaussian beam from the light source is modulated into a homogenized collimated beam, which excites the test sample 80.
In one embodiment, the additional lens may adjust the size of the homogenized spot, adjusting the illumination area based on the number of detected samples 80 actually detected. The optical detection device can adjust the size of the homogenized light spot through the light source homogenizing system, and the size of the homogenized light spot can be adjusted according to the number of the detection samples 80, so that the irradiation area is matched with the number of the detection samples 80, and the excitation light energy can be efficiently utilized.
The optical detection device according to the present application will be described in more detail below in more specific application.
Examples
As shown in fig. 7, a gaussian beam having a wavelength of 488nm and a beam waist radius a 1 =5 mm was modulated using a light source homogenization system. The light source homogenization system was constructed using a shaping super-surface and a collimating super-surface of dimensions 16mm x 16mm, with a shaping distance z=40 mm, and the phase distribution of the shaping super-surface and the collimating super-surface are shown in fig. 8 and 9, respectively. In the phase diagram, the phase of the superlens nanopillar is 0 to 2 pi, and the phase curved surface is unwound (unwrap) for the convenience of observation. In addition, since the half width of the homogenized spot is 4mm, the collimation phase is not significant in the region of |x| >4mm and |y| >4mm, and the smooth zeroing process is adopted in this embodiment.
The gaussian beam, after passing through the shaped super-surface, forms a homogenized beam that impinges on the collimated super-surface. The two-dimensional light intensity distribution of the homogenized light beam on the side of the collimating and super-surface near the shaping and super-surface is shown in fig. 10 (1), it can be seen from fig. 10 (1) that the light intensity distribution is uniform in the region where the x value is-4 mm and the y value is-4 mm, the light intensity distribution curve on the y=0 section line is shown in fig. 10 (2), and it can be seen from fig. 10 (2) that the curve is flat in the range where the x value is-4 mm.
After the homogenized beam passes through the collimating super surface, the collimated beam is formed by the collimating super lens, and the divergence angle of the collimated beam on the y=0 section is shown in fig. 11, wherein all divergence angles are smaller than 0.5 °.
In the beam expansion process, the collimated beam is subjected to three-time beam expansion through a beam expansion lens with the focal length f=150mm, and the half width of a light spot of a collimated light spot is 12mm, and can be calculated according to the formula (15) and the formula (16): the object distance l 1 =200 mm, and the image distance l 2 =600 mm of the beam expanding lens. After passing through the beam expander, the two-dimensional light intensity distribution of the collimated light beam on the detection platform is shown in (1) in fig. 12, and as can be seen from (1) in fig. 12, the light intensity distribution is uniform in the region where the x value is-12 mm and the y value is-12 mm, the light intensity distribution curve on the y=0 section line is shown in (2) in fig. 12, and as can be seen from (2) in fig. 12, the curve deviation is small in the range where the x value is-12 mm.
In the above embodiment and the preferred embodiment, the optical detection device adopts the sub-wavelength optical device of the superlens, thereby greatly reducing the system volume. Meanwhile, due to the adoption of the super-lens structure, the light source homogenizing system can achieve high-performance light beam homogenization and collimation, the regulation and control precision corresponds to nanometer scale, and the utilization rate of excitation light energy is improved.
The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art can easily think about variations or alternatives within the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.
Claims (10)
1. An optical detection device is characterized in that,
The optical detection device sequentially comprises a light source (90), a light source homogenizing system and a detection platform (40) along an incident light path;
the light source (90) is for emitting a gaussian light beam (51) towards the light source homogenizing system;
The light source homogenizing system is used for converting the Gaussian beam into a homogenized beam (53) and projecting the homogenized beam on the detection platform (40) to form a homogenized light spot;
wherein the light source homogenizing system comprises a shaping supersurface (10), the shaping supersurface (10) being configured to modulate the gaussian beam (51) into the homogenized beam (53).
2. The optical detection device according to claim 1, wherein,
The light source homogenizing system further comprises a collimating supersurface (20), the collimating supersurface (20) being arranged between the shaping supersurface (10) and the detection platform (40);
The collimating supersurface (20) is configured to modulate the homogenized beam (53) into a collimated beam (55).
3. The optical detection device according to claim 2, wherein,
The light source homogenizing system further comprises an additional lens (30), the additional lens (30) being configured to change the diameter of the collimated light beam (55); the additional lens (30) is arranged between the collimating super surface (20) and the detection platform (40);
the distance from the additional lens (30) to the detection platform (40) is greater than or equal to the focal length of the additional lens (30).
4. An optical detection device according to claim 3, characterized in that the additional lens (30) is a zoom superlens.
5. An optical detection device according to claim 3, characterized in that the additional lens (30) is a refractive lens or a fixed focus superlens.
6. The optical detection device according to claim 3, wherein,
At least one of a distance between the additional lens (30) and the collimating super surface (20), a distance between the additional lens (30) and the detection platform (40), and a focal length of the additional lens (30) is adjustable.
7. The optical detection device of claim 3, wherein the half-width R of the homogenized spot satisfies:
Wherein a 2 is the half-width of the homogenized beam (53);
l 1 is the distance between the additional lens (30) and the collimating super-surface (20);
l 2 the distance between the additional lens (30) and the detection platform (40).
8. An optical detection device according to any one of claims 1-3, characterized in that the light source (90) may be a solid state laser, a gas laser or a fiber laser.
9. The optical detection device of any one of claims 1-3, further comprising a photodetector;
The photodetector is configured to receive a fluorescent signal generated by a test sample (80) disposed on the test platform (40).
10. The optical detection device according to claim 9, wherein,
The optical detection device may adjust the size of the homogenized light spot by the light source homogenizing system such that a change in the size of the homogenized light spot corresponds to a change in the number of detection samples (80).
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