CN220775059U - Full-automatic electric control cabinet of single crystal furnace - Google Patents
Full-automatic electric control cabinet of single crystal furnace Download PDFInfo
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- CN220775059U CN220775059U CN202322358636.0U CN202322358636U CN220775059U CN 220775059 U CN220775059 U CN 220775059U CN 202322358636 U CN202322358636 U CN 202322358636U CN 220775059 U CN220775059 U CN 220775059U
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- crystal furnace
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- 239000013078 crystal Substances 0.000 title claims abstract description 71
- 230000000149 penetrating effect Effects 0.000 claims abstract description 8
- 230000002745 absorbent Effects 0.000 claims abstract description 4
- 239000002250 absorbent Substances 0.000 claims abstract description 4
- 239000000428 dust Substances 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 8
- 238000011418 maintenance treatment Methods 0.000 abstract description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to the technical field of electric control cabinets, in particular to a full-automatic electric control cabinet of a single crystal furnace, which comprises: an electric control cabinet mechanism; the electric control cabinet mechanism comprises an electric control cabinet body, air outlet grooves are formed in two sides of the bottom end of the electric control cabinet body in a penetrating mode, and moisture absorbent plates are arranged on the inner sides of the air outlet grooves; an air inlet groove is formed in the top end of the electric control cabinet body in a penetrating mode, and a fan is arranged on the inner side of the air inlet groove. According to the utility model, the automatic control mechanism of the single crystal furnace is moved out of the electric control cabinet mechanism, the motor is started to drive the screw rod to rotate, the screw rod is meshed with the top screw frame, the top screw frame is moved out of the electric control cabinet body along the operation table on the front cabinet plate pushed by the screw rod, the bottom of the supporting rod is moved on the ground through the moving wheel II, the automatic control mechanism of the single crystal furnace is conveniently moved out of the electric control cabinet mechanism, wiring operation and maintenance treatment of the automatic control device of the single crystal furnace are conveniently carried out, and the automatic control mechanism of the single crystal furnace and the electric control cabinet mechanism are integrally arranged, so that the single crystal furnace is conveniently integrally moved and connected.
Description
Technical Field
The utility model relates to the technical field of electric control cabinets, in particular to a full-automatic electric control cabinet for a single crystal furnace.
Background
Monocrystalline silicon is a semiconductor material commonly used in the manufacture of integrated circuits and other electronic components, and there are two types of monocrystalline silicon growth techniques: one is the zone-melting method, and the other is the Czochralski method, which is a currently common method. The method for growing monocrystalline silicon by the Czochralski method comprises the following steps: placing high-purity polycrystalline silicon raw material into a quartz crucible of a Czochralski method single crystal furnace, heating and melting under the protection of low vacuum flowing inert gas, placing a piece of single crystal silicon (also called seed crystal) with a specific growth direction into a seed crystal holding device, enabling the seed crystal to be in contact with silicon solution, adjusting the temperature of the molten silicon solution to be close to the melting point temperature, driving the seed crystal to stretch into the molten silicon solution from top to bottom and rotate, slowly lifting the seed crystal, at the moment, enabling the single crystal silicon to enter the growth of a cone part, increasing the lifting speed of the seed crystal when the diameter of the cone is close to the target diameter, enabling the diameter of the single crystal silicon body not to increase any more and enter the middle growth stage of the crystal, and increasing the lifting speed of the seed crystal when the growth of the single crystal silicon body is close to the end, gradually separating the single crystal silicon body from the molten silicon to form a lower cone and ending the growth. The monocrystalline silicon grown by the method is in the shape of two sections of conical cylinders, and the cylinders are sliced to obtain monocrystalline silicon semiconductor raw materials, and the round monocrystalline silicon slice can be used as an integrated circuit or solar energy material. Silicon single crystal pulling is typically performed in a Czochralski single crystal furnace. The Chinese patent discloses a full-automatic electric control cabinet (grant bulletin No. CN 214937963U) of a single crystal furnace, and the technology of the patent discloses the full-automatic electric control cabinet of the single crystal furnace, which consists of an operation desk and an electric box; the operation desk comprises an acousto-optic alarm lamp, an industrial computer, an indicator lamp, a button and a manual operator; the operation panel is connected with the electrical box through the cable, and the electrical box includes heavy load connector, brush wiring box, fan, circuit breaker, switching power supply, transformer, intermediate relay, PLC, servo driver and wave filter. The full-automatic electric control cabinet of the single crystal furnace provided by the utility model consists of an operation desk and an electric box, wherein the operation desk is mainly used for man-machine interface interaction, is movable and is convenient for operators to operate; the electric box is used for arranging main components of the electric control device and is hung on a single crystal furnace component; the operation table and the electric box act on the single crystal furnace moving part and the sensor together to realize the full-automatic control of the single crystal furnace. The technology solves the problems that the structure of the single crystal furnace on the market at present is simpler, the production state of single crystal silicon cannot be accurately mastered, the production efficiency is low, the control mode is dispersive and single, the centralized control and management cannot be realized, the safety performance is low, the product manufacturing shape is different, and the production qualification rate is low.
However, in the prior art, the control console and the electric box are arranged in a single split mode, so that the integral movement of the control console and the electric box and the connection control of the single crystal furnace are inconvenient.
The problem that the control console and the electric box are integrally arranged in the prior art, are convenient to connect with the single crystal furnace and move to adjust positions is solved.
Therefore, a full-automatic electric control cabinet for the single crystal furnace is provided by a person skilled in the art to solve the problems in the background art.
Disclosure of Invention
In order to solve the technical problems, the utility model provides:
a full-automatic electric control cabinet of a single crystal furnace, comprising: an electric control cabinet mechanism; the electric control cabinet mechanism comprises an electric control cabinet body, air outlet grooves are formed in two sides of the bottom end of the electric control cabinet body in a penetrating mode, and moisture absorbent plates are arranged on the inner sides of the air outlet grooves; an air inlet groove is formed in the top end of the electric control cabinet body in a penetrating manner, a fan is arranged on the inner side of the air inlet groove, a dust filtering plate is arranged above the fan, and the dust filtering plate is arranged on the inner side of the air inlet groove; an automatic control mechanism of the single crystal furnace; the automatic control mechanism of the single crystal furnace comprises a front cabinet plate arranged on the front side of the electric control cabinet body.
Preferably: and the four corners of the bottom of the electric control cabinet body are respectively provided with a movable wheel I.
The electric control cabinet body moves the adjusting position on the ground through the first four moving wheels.
Preferably: the top of the inner side of the electric control cabinet body is rotatably provided with a screw, one end of the screw is connected with a motor, and the motor is fixedly arranged on the inner wall of the electric control cabinet body.
The motor is used for actively driving the screw rod to rotate.
Preferably: the automatic control mechanism of the single crystal furnace comprises a bottom frame plate movably positioned at the inner side of the electric control cabinet body, one end of the bottom frame plate is fixedly arranged on the inner wall of the front cabinet plate, a bottom shaft body is fixedly assembled on the bottom wall of the other end of the bottom frame plate, and a pulley rod is rotatably arranged at the inner side of the bottom shaft body.
The bottom frame plate is slidably arranged on the inner side of the electric control cabinet body through a pulley rod arranged on the bottom shaft body.
Preferably: the top inner wall of the front cabinet plate is fixedly provided with a top screw frame, and the middle part of the top screw frame is meshed and sleeved outside the screw rod.
The screw rod is used for engaging the top screw frame, and the opposite top screw frame pushes the front cabinet plate to move out of the electric control cabinet body.
Preferably: the inner wall of the front cabinet plate is provided with a plurality of mounting frame plates, and the mounting frame plates are provided with an automatic single crystal furnace control device.
The automatic control device of the single crystal furnace is arranged on the front cabinet plate through the mounting plate, and the connecting wire cannot move when the automatic control device is mounted in a moving mode.
Preferably: the front side wall of the front cabinet plate is provided with an operation table, two sides of the bottom of the operation table are provided with support rods, and the bottom ends of the support rods are provided with moving wheels II.
The second moving wheel and the first moving wheel are in the same level and are used for supporting the second moving wheel on the ground in a moving way.
The utility model has the technical effects and advantages that:
according to the utility model, the automatic control mechanism of the single crystal furnace is moved out of the electric control cabinet mechanism, the motor is started to drive the screw rod to rotate through the starting motor, the screw rod is meshed with the top screw frame, the top screw frame is moved out of the electric control cabinet body along the operation table on the front cabinet plate pushed by the screw rod, the bottom of the supporting rod is moved on the ground through the second moving wheel, the automatic control mechanism of the single crystal furnace is conveniently moved out of the electric control cabinet mechanism, wiring operation and maintenance treatment of the automatic control device of the single crystal furnace are conveniently carried out, and the automatic control mechanism of the single crystal furnace and the electric control cabinet mechanism are integrally arranged to facilitate integral movement and connection control of the single crystal furnace.
Drawings
Fig. 1 is a schematic structural diagram of a full-automatic electric control cabinet of a single crystal furnace provided in an embodiment of the present application;
fig. 2 is a schematic structural diagram of an air inlet slot in a full-automatic electric control cabinet of a single crystal furnace according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a motor in a full-automatic electric control cabinet of a single crystal furnace according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a top screw frame in a full-automatic electric control cabinet of a single crystal furnace according to an embodiment of the present application;
fig. 5 is a schematic structural diagram of a position a in a full-automatic electric control cabinet of a single crystal furnace according to an embodiment of the present application;
in the figure:
1. an electric control cabinet mechanism; 101. an electric control cabinet body; 102. the first wheel is moved; 103. an air outlet groove; 104. a moisture absorber plate; 105. an air inlet groove; 106. a blower; 107. a dust filtering plate; 108. a screw; 109. a motor;
2. an automatic control mechanism of the single crystal furnace; 201. a front cabinet plate; 202. a bottom frame plate; 203. a bottom shaft body; 204. a pulley lever; 205. a top screw frame; 206. mounting a frame plate; 207. an automatic control device of the single crystal furnace; 208. an operation table; 209. a support rod; 210. and a second moving wheel.
Detailed Description
The utility model will be described in further detail with reference to the drawings and the detailed description. The embodiments of the utility model have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the utility model in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, and to enable others of ordinary skill in the art to understand the utility model for various embodiments with various modifications as are suited to the particular use contemplated.
Examples:
referring to fig. 1 to 5, in this embodiment, a full-automatic electric control cabinet for a single crystal furnace is provided, including: an electric control cabinet mechanism 1; the electric control cabinet mechanism 1 comprises an electric control cabinet body 101, wherein air outlet grooves 103 are formed in two sides of the bottom end of the electric control cabinet body 101 in a penetrating manner, and moisture absorbent plates 104 are arranged on the inner sides of the air outlet grooves 103; an air inlet groove 105 is formed in the top end of the electric control cabinet body 101 in a penetrating manner, a fan 106 is arranged on the inner side of the air inlet groove 105, a dust filtering plate 107 is arranged above the fan 106, and the dust filtering plate 107 is arranged on the inner side of the air inlet groove 105; an automatic control mechanism 2 of the single crystal furnace; the automatic control mechanism 2 of the single crystal furnace comprises a front cabinet plate 201 arranged on the front side of the electric control cabinet body 101; the four corners of the bottom of the electric control cabinet 101 are provided with a first movable wheel 102; the electric control cabinet 101 moves the adjusting position on the ground through four moving wheels 102; a screw 108 is rotatably arranged at the top of the inner side of the electric control cabinet body 101, one end of the screw 108 is connected with a motor 109, and the motor 109 is fixedly arranged on the inner wall of the electric control cabinet body 101; the motor 109 is used for driving the screw 108 to rotate actively; the automatic control mechanism 2 of the single crystal furnace comprises a bottom frame plate 202 movably positioned at the inner side of the electric control cabinet body 101, one end of the bottom frame plate 202 is fixedly arranged on the inner wall of the front cabinet plate 201, a bottom shaft body 203 is fixedly arranged on the bottom wall of the other end of the bottom frame plate 202, and a pulley rod 204 is rotatably arranged at the inner side of the bottom shaft body 203; the bottom frame plate 202 is slidably positioned on the inner side of the electric control cabinet body 101 through a pulley rod 204 arranged on a bottom shaft body 203; the top inner wall of the front cabinet plate 201 is fixedly provided with a top screw frame 205, and the middle part of the top screw frame 205 is meshed and sleeved outside the screw 108; the screw 108 is used for engaging the top screw frame 205, and the opposite top screw frame 205 pushes the front cabinet plate 201 to move out of the electric control cabinet body 101; a plurality of mounting frame plates 206 are arranged on the inner wall of the front cabinet plate 201, and an automatic single crystal furnace control device 207 is arranged on the mounting frame plates 206; the automatic control device 207 of the single crystal furnace is arranged on the front cabinet plate 201 through the mounting plate 206, and the connecting wire does not move when the single crystal furnace is movably arranged; an operation table 208 is arranged on the front side wall of the front cabinet plate 201, support rods 209 are arranged on two sides of the bottom of the operation table 208, and a movable wheel two 210 is arranged at the bottom end of each support rod 209; the second moving wheel 210 is level with the first moving wheel 102, and is used for moving and supporting the second moving wheel 210 on the ground.
Working principle:
an automatic control mechanism 2 of the single crystal furnace;
the single crystal furnace automatic control mechanism 2 is moved out of the electric control cabinet mechanism 1, the motor 109 is started to drive the screw 108 to rotate through the starting motor 109, the screw 108 is meshed with the top screw frame 205, the top screw frame 205 pushes an operation table 208 on the front cabinet plate 201 to move out of the electric control cabinet body 101 along the screw 108, and the bottom of a supporting rod 209 moves on the ground through a moving wheel II 210, so that the single crystal furnace automatic control mechanism 2 is conveniently moved out of the electric control cabinet mechanism 1, and the single crystal furnace automatic control device 207 is conveniently subjected to wiring operation;
when the fan 106 radiates heat to the single crystal furnace automatic control device 207 in the electric control cabinet 101;
the fan 106 pumps air outside the electric control cabinet 101 into the electric control cabinet 101, the air filters dust in the air through the dust filtering plate 107, the air inside the electric control cabinet 101 is discharged through the air outlet groove 103, and the air inside the electric control cabinet 101 is subjected to moisture absorption and dehumidification through the moisture absorbing agent plate 104.
It will be apparent that the described embodiments are only some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art and which are included in the embodiments of the present utility model without the inventive step, are intended to be within the scope of the present utility model. Structures, devices and methods of operation not specifically described and illustrated herein, unless otherwise indicated and limited, are implemented according to conventional means in the art.
Claims (7)
1. A full-automatic electric control cabinet of single crystal growing furnace, characterized by comprising:
an electric control cabinet mechanism (1);
the electric control cabinet mechanism (1) comprises an electric control cabinet body (101), wherein air outlet grooves (103) are formed in two sides of the bottom end of the electric control cabinet body (101) in a penetrating mode, and moisture absorbent plates (104) are arranged on the inner sides of the air outlet grooves (103);
an air inlet groove (105) is formed in the top end of the electric control cabinet body (101) in a penetrating mode, a fan (106) is arranged on the inner side of the air inlet groove (105), a dust filtering plate (107) is arranged above the fan (106), and the dust filtering plate (107) is arranged on the inner side of the air inlet groove (105);
an automatic control mechanism (2) of the single crystal furnace;
the automatic control mechanism (2) of the single crystal furnace comprises a front cabinet plate (201) arranged on the front side of the electric control cabinet body (101).
2. The full-automatic electric control cabinet of the single crystal furnace according to claim 1, wherein the movable wheel I (102) is arranged at four corners of the bottom of the electric control cabinet body (101).
3. The full-automatic electric control cabinet of the single crystal furnace according to claim 2, wherein a screw (108) is rotatably arranged at the top of the inner side of the electric control cabinet body (101), one end of the screw (108) is connected with a motor (109), and the motor (109) is fixedly arranged on the inner wall of the electric control cabinet body (101).
4. The full-automatic electric control cabinet of the single crystal furnace according to claim 1, wherein the automatic control mechanism (2) of the single crystal furnace comprises a bottom frame plate (202) movably positioned on the inner side of the electric control cabinet body (101), one end of the bottom frame plate (202) is fixedly arranged on the inner wall of the front cabinet plate (201), a bottom shaft body (203) is fixedly assembled on the bottom wall of the other end of the bottom frame plate (202), and a pulley rod (204) is rotatably arranged on the inner side of the bottom shaft body (203).
5. The full-automatic electric control cabinet of the single crystal furnace according to claim 4, wherein a top screw frame (205) is fixedly arranged on the inner wall of the top of the front cabinet plate (201), and the middle part of the top screw frame (205) is meshed and sleeved outside the screw rod (108).
6. The full-automatic electric control cabinet of the single crystal furnace according to claim 5, wherein a plurality of mounting frame plates (206) are arranged on the inner wall of the front cabinet plate (201), and an automatic control device (207) of the single crystal furnace is arranged on the mounting frame plates (206).
7. The full-automatic electric control cabinet of the single crystal furnace according to claim 5, wherein an operation table (208) is arranged on the front side wall of the front cabinet plate (201), supporting rods (209) are arranged on two sides of the bottom of the operation table (208), and a movable wheel II (210) is arranged at the bottom end of each supporting rod (209).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322358636.0U CN220775059U (en) | 2023-08-31 | 2023-08-31 | Full-automatic electric control cabinet of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322358636.0U CN220775059U (en) | 2023-08-31 | 2023-08-31 | Full-automatic electric control cabinet of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220775059U true CN220775059U (en) | 2024-04-12 |
Family
ID=90604690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322358636.0U Active CN220775059U (en) | 2023-08-31 | 2023-08-31 | Full-automatic electric control cabinet of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220775059U (en) |
-
2023
- 2023-08-31 CN CN202322358636.0U patent/CN220775059U/en active Active
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