CN210379003U - Air lock chamber balance system - Google Patents
Air lock chamber balance system Download PDFInfo
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- CN210379003U CN210379003U CN201921594961.4U CN201921594961U CN210379003U CN 210379003 U CN210379003 U CN 210379003U CN 201921594961 U CN201921594961 U CN 201921594961U CN 210379003 U CN210379003 U CN 210379003U
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- air lock
- check valve
- airlock
- pressure
- lock chamber
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Abstract
The utility model relates to an air lock room balanced system, include: the check valve assembly is used for controlling the unidirectional flow of the gas in the balance pipeline connecting the air lock chamber and the atmosphere in the direction far away from the air lock chamber; and the pressure monitoring system is used for monitoring whether the change of the pressure value in the air lock chamber is abnormal or not. Make the gas in the balanced pipeline all to the one-way flow of direction of keeping away from the air lock room through check valve subassembly, consequently, after the air lock indoor pressure detection distortion leads to the balanced valve to open, if the indoor cavity pressure value of air lock is less than external pressure value in fact, the air current of pouring into the air lock room through balanced pipeline can be blocked by check valve subassembly, thereby reduce the condition that the micronic dust that gaseous recharge leads to gets into the air lock room, through the cavity pressure value of detecting the air lock room after opening the balanced valve, thereby can in time discover the pressure detection distortion and maintain the adjustment, make pressure normal detection in a new round of work, through above-mentioned technical scheme, can effectively reduce pressure recharge phenomenon, reduce the product probability of scrapping.
Description
Technical Field
The utility model relates to a semiconductor equipment especially relates to a airlock room balanced system
Background
In the semiconductor production process, after each step of process is finished, the wafer is transmitted to the atmosphere from the vacuum environment, so that an air lock chamber is arranged as a transfer station of a small-pressure area and an atmospheric-pressure area, and when the pressure in the air lock chamber reaches the atmospheric-pressure area, the air lock chamber is communicated with the atmospheric-pressure area, and the pressure difference is avoided when the gate is opened.
In the prior art, at least the following problems exist, if the pressure detection in the air lock chamber is distorted, the equipment system can misjudge that the air lock chamber reaches the state of the atmospheric pressure region, so that the air lock chamber is communicated with the atmospheric pressure region, the pressure recharging phenomenon is generated, the dust easily enters the air lock chamber, the wafer defect is caused, and the production yield is reduced.
SUMMERY OF THE UTILITY MODEL
Therefore, it is necessary to provide a balance system of an air lock chamber, which has the effects of reducing the pressure recharging phenomenon and reducing the product scrapping probability, for solving the problem that air with dust particles is recharged to the air lock chamber due to the distortion of pressure detection.
An airlock balancing system comprising:
the check valve assembly comprises a first check valve installed on a balance pipeline connecting the air lock chamber and the atmosphere, and the first check valve prevents external gas from flowing to the air lock chamber through the balance pipeline.
According to the air lock chamber balancing method, the gas in the balancing pipeline flows in a one-way mode towards the direction far away from the air lock chamber through the check valve assembly, and therefore after the air lock chamber is communicated with the external air pressure due to pressure detection distortion in the air lock chamber, if the cavity pressure value in the air lock chamber is actually smaller than the external pressure value, the air flow poured into the air lock chamber through the balancing pipeline can be blocked by the check valve assembly, so that the situation that the dust particles caused by gas recharging enter the air lock chamber is reduced, the pressure recharging phenomenon can be effectively reduced, and the product scrapping probability is reduced.
In one of the embodiments, the first and second electrodes are,
the check valve assembly further includes a filter mounted on the balancing conduit for filtering gas passing through the balancing conduit.
Through the technical scheme, even if air at a lower position of the machine platform enters the balance pipeline, the air is filtered by the filter, and the possibility that micro dust enters the air lock chamber is reduced.
In one embodiment, the filter is removably and fixedly attached to the balance duct.
Through above-mentioned technical scheme, the staff can change the filter regularly to the filter effect of guarantee filter.
In one embodiment, the check valve assembly further comprises at least one exhaust duct, the exhaust duct is communicated with a balance duct, and a connection point of the exhaust duct and the balance duct is located on a side of the first check valve far away from the airlock chamber.
Through above-mentioned technical scheme for the air of gushing in the balanced pipeline in the twinkling of an eye is direct to be discharged from exhaust duct, reduces the power that first check valve bore.
In one embodiment, a second check valve is installed on the exhaust pipeline and used for controlling the airflow in the exhaust pipeline to flow along the balance pipeline in the direction far away from the airlock chamber.
Make the exhaust duct only play the exhaust effect, during external dirty air can not get into balanced pipeline from the exhaust duct to difficult make unfiltered gas contact first check valve, reduce the possibility that the micronic dust got into the airlock room.
In one embodiment, the airlock balancing system includes a balancing valve mounted on the balancing conduit.
In one embodiment, the equalization valve is mounted between the airlock and the first check valve.
In one embodiment, the air lock chamber balance system further comprises a pressure monitoring system, the pressure monitoring system comprises a pressure sensing device, the pressure sensing device is installed inside the air lock chamber and used for collecting the pressure value inside the air lock chamber after the balance valve is opened, and the pressure monitoring system compares the pressure value output by the pressure sensing device with a preset upper limit pressure value and a preset lower limit pressure value.
When the air pressure in the air lock chamber detected by the monitoring system is the same as the external air pressure, the air lock chamber is communicated with the outside. Through the technical scheme, if the pressure monitoring system is distorted and the actual air pressure value of the air lock chamber is smaller than the external air pressure value, the air lock chamber can restore the pressure in the cavity to the external pressure value through other ways, and the numerical value displayed by pressure detection is correspondingly increased and is larger than the external pressure value; when the actual air pressure value of the air lock chamber is larger than the external air pressure value, the air in the air lock chamber can be discharged outwards through the check valve assembly, and the numerical value displayed by pressure detection can be correspondingly reduced and is smaller than the external pressure value. Through the cavity pressure value of the air lock chamber after gathering and external intercommunication, thereby can in time discover the pressure detection distortion and maintain the adjustment for pressure normal detection in a new round of work.
In one embodiment, the filter includes a polyurethane absorbent layer and an activated carbon filter layer.
In one embodiment, the balancing conduit is provided as a hose.
Drawings
FIG. 1 is a schematic diagram of a airlock balancing system in accordance with an embodiment of the present application;
FIG. 2 is a schematic diagram of a airlock balance system in another embodiment of the present application;
FIG. 3 is a schematic diagram of an embodiment of an airlock balancing system of the present application including a filter;
FIG. 4 is a schematic diagram of a damper balancing system according to an embodiment of the present application including a second check valve;
fig. 5 is a schematic structural diagram of a second check valve according to an embodiment of the present disclosure.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Before describing in detail embodiments that are in accordance with the present application, it should be observed that the embodiments reside primarily in combinations of steps and system components related to a method, apparatus, computer device, and storage medium for optical center testing of a camera. Accordingly, the system components and method steps have been represented where appropriate by conventional symbols in the drawings, showing only those details that are pertinent to understanding the embodiments of the present application so as not to obscure the disclosure with details that will be readily apparent to those of ordinary skill in the art having the benefit of the description herein.
In this document, relational terms such as left and right, top and bottom, front and back, first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. The terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
To the problem that pressure detection distortion leads to the air with the micronic dust to flow back to the airlock, this application provides an airlock room balanced system. As shown in fig. 1 and 2, in one embodiment, the airlock balance system includes a check valve assembly 11, the check valve assembly 11 including a first check valve 111 mounted on a balance pipe 14. The check valve assembly 11 includes a first check valve 111, and the first check valve 111 is a one-way valve allowing one-way gas flow. First check valve 111 installs on balanced pipeline 14, and the circulation direction of first check valve 111 is the direction that the airlock room was kept away from to gas, and when the airlock room and external intercommunication and the indoor atmospheric pressure of airlock was less than external atmospheric pressure, dirty gas flows back, and first check valve 111 makes the gas that gets into balanced pipeline 14 from external recharging obstructed to reduce the condition that the micronic dust that gaseous recharging leads to gets into the airlock room, thereby reduce gaseous recharging and lead to the micronic dust to get into the airlock indoor.
In an alternative embodiment, as shown in fig. 3, the check valve assembly 11 further comprises a filter 112, the filter 112 may be removably and fixedly connected to the balance duct 14 by a flange for filtering the air passing through the balance duct 14, the air flowing into the balance duct 14 from a lower position of the table is filtered by the filter 112, the fine dust can be filtered, the possibility of the fine dust entering the air lock chamber at the moment of blocking by the first check valve 111 is reduced, and the filter 112 removably and fixedly connected to the balance duct 14 can be replaced at regular intervals, so that the filter 112 maintains the filtering effect. In other alternative embodiments, the filter 112 may be threadably mounted to the equalization duct 14.
In an optional embodiment, the filter 112 may be a polyurethane air filter, which includes a particle filter layer, a dust cleaning cylinder, an annular rolling cavity, an ultrafine fiber filter layer and a roller, the inner side wall of the particle filter layer is provided with the dust cleaning cylinder, the outer side wall of the dust cleaning cylinder is provided with dust cleaning bristles, one side of the dust cleaning cylinder away from the particle filter layer is provided with the polyurethane filter layer, the inner part of the polyurethane filter layer is filled with polyurethane absorbing particles, the inner side wall of the polyurethane filter layer is fixed with an activated carbon filter layer, and one side of the activated carbon filter layer away from the polyurethane filter layer is provided with the ultrafine fiber filter layer.
In an alternative embodiment, as shown in fig. 3, the check valve assembly 11 further includes at least one exhaust duct 113, and there may be 1 exhaust duct 113, where the exhaust duct 113 is communicated with the balance duct 14, and a connection point of the exhaust duct 113 and the balance duct 14 is located at an end of the first check valve 111 far from the airlock, and in other embodiments, the check valve assembly 11 may further include two or more exhaust ducts 113.
When the difference between the air pressure in the air lock chamber and the external air pressure is large, the external dirty air is recharged at the moment of opening the balance valve 13, and when the first check valve 111 blocks the balance pipeline 14, the air can be discharged from the exhaust pipeline 113 in a rotating manner, so that the impact of the recharged air on the first check valve 111 is reduced.
As shown in fig. 4, in an alternative embodiment, the check valve assembly 11 further includes a second check valve 114, the second check valve 114 is installed on the exhaust duct 113, and the second check valve 114 is a one-way valve, so that the gas in the exhaust duct 113 can only flow from the balance duct 14 to the outside, therefore, the exhaust duct 113 only plays a role of exhausting the gas in the balance duct 14, and external dirty air cannot enter the balance duct 14 from the exhaust duct 113, so that the unfiltered gas is not easy to contact the first check valve 111, and the possibility of the fine dust entering the airlock is reduced.
In an alternative embodiment, as shown in FIG. 5, second check valve 114 may be configured as follows: the base material is polyethylene, and comprises a hollow shell 21, a ball 22 and a spring 23. Air inlet and gas outlet have respectively been seted up at the both ends of casing 21, and the inside of casing 21 taper physique is equipped with the accommodation space that is bigger than the bore of air inlet and gas vent, and spheroid 22 and spring 23 install in the accommodation space, and spring 23 fixed connection is inside casing 21, spheroid 22 and spring 23 fixed connection, and spring 23 supports spheroid 22 on the air inlet and shutoff air inlet. When air enters the shell 21 from the air inlet, the ball 22 is pushed by air pressure, so that the spring 23 is compressed, the air can flow through the one-way valve, and when the flow of the air is reversed and flows into the shell 21 from the air outlet, at the moment, the ball 22 blocks the air inlet under the action of the spring 23, so that the air entering the shell from the air outlet cannot be discharged from the air inlet, and the purpose of single-phase flow of the air is achieved.
In an alternative embodiment, the balance pipe 14 and the exhaust pipe 113 are both made of flexible pipes, and the balance pipe 14 and the exhaust pipe 113 made of flexible pipes have certain elasticity, so that a buffering effect can be achieved when the first check valve 111 or the second check valve 114 is closed, and the service life of the check valve assembly 11 is prolonged.
In other alternative embodiments, the equalization duct 14 is removably mounted to the airlock and the exhaust duct 113 is removably mounted to the equalization duct 14, so that after a period of use, personnel can remove the equalization duct 14 and the exhaust duct 113 for cleaning and replacement to maintain cleanliness of the interior of the equalization duct 14 and the exhaust duct 113.
In an optional embodiment, a balance valve 13 is installed between the air lock chamber and the first check valve 111, the air lock chamber balance system further comprises a pressure monitoring system 12, and the pressure monitoring system 12 is used for monitoring whether the change of the pressure value in the air lock chamber is abnormal; pressure monitoring system 12 detects the cavity pressure value after the balanced valve 13 is opened to the air lock room, opens the back as the balanced valve 13 of air lock room, and the atmospheric pressure of air lock indoor portion is close to outside atmospheric pressure gradually, and if the pressure detection distortion leads to opening when balanced valve 13, atmospheric pressure and the outside atmospheric pressure deviation in the air lock room are great, therefore the cavity pressure value can appear changing by a wide margin to make the staff can realize that pressure detection has distorted.
In an alternative embodiment, the pressure monitoring system 12 includes a pressure sensing device 121, and the pressure sensing device 121 is installed inside the air lock chamber, and is used for acquiring a pressure value inside the air lock chamber after the balance valve 13 is opened, and may be a gas pressure gauge, and the gas pressure gauge outputs a pressure value to the pressure detecting device 12 after detecting the pressure value inside the air lock chamber. An upper limit pressure value and a lower limit pressure value are preset in the pressure detection system, and whether the pressure value measured by the gas pressure gauge is abnormal or not is judged by comparing the pressure value obtained by measuring the gas pressure gauge with the upper limit pressure value.
In an optional embodiment, the difference between the upper limit pressure value and the lower limit pressure value can be 40Torr, when the pressure value obtained by the gas pressure gauge through measurement does not exceed the upper limit pressure value and the lower limit pressure value, the floating of the pressure value is considered to be in the range allowed by the error, if the pressure value obtained by the gas pressure gauge through measurement exceeds the upper limit pressure value or the lower limit pressure value, an alarm is given to remind a worker that the pressure value is abnormal, the abnormality can be found in time and the worker stops working for confirmation, so that the worker can find out the distortion of the pressure detection in time to carry out maintenance and adjustment, and the pressure can be.
In an optional embodiment, the alarm mode when the pressure value measured by the gas pressure gauge exceeds the upper limit pressure value or the lower limit pressure value may be one or more of a program alarm, a sound alarm, a light alarm or a vibration alarm. The sound alarm can be realized through a buzzer, the light alarm can be realized through an LED lamp, and the vibration alarm can be realized through a vibration motor.
In one embodiment, the time point when the pressure sensing device 121 acquires the pressure value in the air lock chamber is later than the opening of the balance valve, and the time interval between the two is at least 2 seconds, and may be 3 seconds, 4 seconds or 5 seconds, so that when the pressure sensing device 121 acquires the pressure value in the air lock chamber, the pressure value of the cavity in the air lock chamber tends to be stable, and the pressure value of the air lock chamber and the pressure value of the outside are substantially consistent, which can reflect the distortion phenomenon of the reading value of the gas pressure gauge.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (10)
1. An airlock balancing system, comprising:
the check valve assembly comprises a first check valve installed on a balance pipeline connecting the air lock chamber and the atmosphere, and the first check valve prevents external gas from flowing to the air lock chamber through the balance pipeline.
2. The airlock balancing system of claim 1,
the check valve assembly further includes a filter mounted on the balancing conduit for filtering gas passing through the balancing conduit.
3. The airlock balancing system of claim 2,
the filter is detachably and fixedly connected to the balance pipeline.
4. The airlock balancing system of claim 1,
the check valve subassembly still includes at least one exhaust duct, exhaust duct and balanced pipeline intercommunication, exhaust duct with balanced pipeline's tie point is located first check valve is kept away from one side of airlock room.
5. The airlock balancing system of claim 4,
and a second check valve is arranged on the exhaust pipeline and used for controlling the airflow in the exhaust pipeline to flow along the direction away from the air lock chamber along the balance pipeline.
6. The airlock balancing system of claim 1, comprising a balancing valve mounted on the balancing conduit.
7. The airlock balancing system of claim 6, wherein the balancing valve is mounted between the airlock and the first check valve.
8. The airlock balancing system of claim 1,
the air lock chamber balance system further comprises a pressure monitoring system, the pressure monitoring system comprises a pressure sensing device, the pressure sensing device is installed in the air lock chamber and used for collecting the pressure value inside the air lock chamber after the balance valve is opened, and the pressure monitoring system compares the pressure value output by the pressure sensing device with a preset upper limit pressure value and a preset lower limit pressure value.
9. The airlock balancing system of claim 2, wherein the filter comprises a polyurethane absorbent layer and an activated carbon filter layer.
10. The airlock balancing system of claim 1, wherein the balancing conduit is provided as a hose.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921594961.4U CN210379003U (en) | 2019-09-24 | 2019-09-24 | Air lock chamber balance system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921594961.4U CN210379003U (en) | 2019-09-24 | 2019-09-24 | Air lock chamber balance system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210379003U true CN210379003U (en) | 2020-04-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921594961.4U Active CN210379003U (en) | 2019-09-24 | 2019-09-24 | Air lock chamber balance system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210379003U (en) |
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2019
- 2019-09-24 CN CN201921594961.4U patent/CN210379003U/en active Active
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