CN219350175U - Loading and unloading device and detection system - Google Patents

Abstract

The utility model discloses a loading and unloading device and a detection system. The loading and unloading device comprises a frame, a transfer mechanism and a plurality of material box groups. The rack comprises a main body and a plurality of carrier plates. The transfer mechanism comprises a transfer assembly, the transfer assembly comprises a mounting piece and a bearing assembly, the bearing assembly comprises a connecting piece and a bearing piece, and the bearing piece is connected to the connecting piece and can move along the connecting piece. The magazine group includes the magazine, and the magazine still is provided with a plurality of loading parts, and the loading part is used for bearing the tablet. The carrier plate can move relative to the main body, and the carrier piece can move to partially protrude into the second accommodating cavity. The material box sets are connected to different carrier plates, the material boxes are detachably connected to the carrier plates, after all the material sheets in the material boxes on the same carrier plate are detected, the carrier plates can move relative to the main body to move out of the corresponding material box sets for replacement, at the moment, the material transfer assembly can take the material sheets in the rest material boxes, detection can not be stopped when the material boxes are replaced, and detection efficiency is improved.

Description

Loading and unloading device and detection system

Technical Field

The utility model relates to the technical field of semiconductor detection, in particular to a loading and unloading device and a detection system.

Background

In the related art, the detection of the material sheets is not necessary in the semiconductor processing, the material sheets are generally arranged in the material boxes, when the detection is needed, the material sheets are sequentially taken out of the material boxes through a manual or mechanical arm and then put back after the detection is completed, and in the prior art, after all the material sheets in one material box are detected, the material boxes to be detected are replaced by new ones, and at the moment, the mechanical arm and the related detection devices are required to be stopped, so that the detection efficiency is reduced.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the loading and unloading device which can store a plurality of cartridges at the same time, does not influence the detection when the detected cartridges are taken out, and improves the detection efficiency.

The utility model further provides a detection system with the feeding and discharging device.

According to an embodiment of the first aspect of the present utility model, a loading and unloading device includes:

the rack comprises a main body and a plurality of carrier plates which are arranged at intervals along the vertical direction, and the rack is provided with a first accommodating cavity;

the transfer mechanism is accommodated in the first accommodating cavity and comprises a transfer assembly, the transfer assembly can move along the vertical direction, the transfer assembly comprises a mounting piece and a bearing assembly, the bearing assembly comprises a connecting piece and a bearing piece, the connecting piece has a set length, the bearing piece is connected with the connecting piece and can move along the length direction of the connecting piece, and the bearing piece is used for bearing a material sheet;

the material box sets are in one-to-one correspondence with the carrier plates and are arranged on the carrier plates, each material box set comprises a material box which is detachably connected with the carrier plates, each material box is provided with a second accommodating cavity, the inner walls of the material boxes are also provided with a plurality of bearing parts which are distributed at intervals along the vertical direction, and the bearing parts are used for bearing the material sheets;

the carrier plate can move relative to the main body to move the material box group out of or into the first accommodating cavity, and the carrier piece can move to partially protrude into the second accommodating cavity along the length direction of the connecting piece.

The feeding and discharging device provided by the embodiment of the utility model has at least the following beneficial effects: the plurality of magazine groups are connected in the different carrier plates that set up along vertical direction interval, the carrier plate can remove in order to shift out first holding chamber with the magazine group that corresponds for the main part, the magazine can be dismantled and connect in the carrier plate, consequently the tablet in the magazine on same carrier plate all is by the back that detects, the carrier plate can remove in order to shift out first holding chamber with the magazine group that corresponds for the main part, change undetected magazine and the magazine that detects that finishes, move and carry the subassembly and can get the material detection to the tablet of installing in the magazine of other carrier plates this moment, can not stop detecting when carrying out the change of magazine, detection efficiency has been promoted.

According to some embodiments of the utility model, the transfer assembly further comprises a mounting member, the bearing assembly is rotatably connected to the mounting member, the rotation axis of the bearing assembly is vertically arranged, the cartridge group comprises a plurality of cartridges, the plurality of cartridges are arranged at intervals around the circumferential direction of the rotation axis of the bearing assembly and have equal distances from the rotation axis, and the bearing assembly can rotate relative to the mounting member to correspond to each of the cartridges.

According to some embodiments of the utility model, the carrier is provided with a carrier surface provided with suction holes for communicating with a vacuum source, the carrier surface being for carrying the material sheets.

According to some embodiments of the utility model, the first limiting assembly is connected to the carrier plate, the first limiting assembly comprises a first limiting member and a second limiting member, the first limiting member and the second limiting member are arranged at intervals along a first direction, the first direction is parallel to a radial direction of a rotation axis of the carrier assembly, the two first limiting assemblies are arranged at intervals along a second direction, the second direction is perpendicular to the first direction, and the first limiting assembly is used for fixing the material box.

According to some embodiments of the present utility model, the first limiting member is provided with a first limiting surface and a second limiting surface which are perpendicular to each other, the second limiting member is provided with a third limiting surface, the first limiting surface and the third limiting surface are parallel to each other and have a set distance therebetween, the second limiting surfaces of the two first limiting members are opposite in orientation, the two second limiting surfaces are parallel to each other and have a set distance therebetween, the cartridge has a set length and a set width, the cartridge comprises a main body part and a base, the main body part is connected to the base, the main body part is provided with the bearing part, the base comprises a mounting part extending along the width direction of the cartridge and a connecting part connecting the two mounting parts, the mounting part is abutted between the first limiting surface and the third limiting surface, and the two second limiting surfaces are abutted against surfaces of the mounting parts facing each other.

According to some embodiments of the utility model, the bearing assembly further comprises a third limiting piece, the third limiting piece is connected to the bearing plate, a plurality of positioning grooves are formed in the third limiting piece at intervals along the radial direction of the rotation axis of the bearing assembly, and the connecting portion is accommodated in the positioning grooves and abuts against the groove walls of the positioning grooves.

According to some embodiments of the utility model, the transfer mechanism comprises a first driving member, a second driving member and a third driving member, wherein the first driving member is connected to the frame, the transfer assembly is connected to the first driving member, the first driving member can drive the transfer assembly to move along the vertical direction, the second driving member is connected to the mounting member, the bearing assembly is connected to the second driving member, the second driving member can drive the bearing assembly to rotate relative to the mounting member, the third driving member is installed between the bearing member and the connecting member, and the third driving member can drive the bearing member to move along the length direction of the connecting member.

According to some embodiments of the utility model, the magazine has a set length and a set width, the magazine includes two first body portions and second body portions that are disposed at intervals along a width direction, the first body portions are provided with a plurality of first bearing portions along a vertical direction, the second body portions are provided with a plurality of second bearing portions along a vertical direction, each of the first bearing portions corresponds to each of the second bearing portions one by one, the first bearing portions and the second bearing portions are used for bearing a web together, and an opening is defined between the corresponding first bearing portions and second bearing portions.

According to some embodiments of the utility model, the transfer mechanism is configured to transfer the material from the first container to the second container, and the transfer mechanism is configured to transfer the material from the second container to the first container.

A detection system according to an embodiment of the second aspect of the present utility model includes:

the detection table is used for bearing the material sheet to be detected;

a camera disposed above the detection table and facing the detection table;

according to the loading and unloading device provided by the embodiment of the first aspect, the bearing piece can move to correspond to the detection table for unloading, and the detected material sheets are received.

The detection system provided by the embodiment of the utility model has at least the following beneficial effects: the detection system at least has all advantages of the feeding and discharging device due to the fact that the feeding and discharging device provided by the embodiment is used, the bearing piece can move the to-be-detected material sheet to the detection table to be photographed and detected by the camera, and the detected material sheet can be adsorbed again and moved back to the material box to complete the detection function.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic diagram of a loading and unloading device according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a transfer mechanism according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram illustrating an assembly of a cartridge and a carrier according to an embodiment of the present utility model;

fig. 4 is an assembly schematic diagram of the first limiting member, the third limiting member and the carrier according to the embodiment of the present utility model;

fig. 5 is a schematic view of a cartridge according to an embodiment of the present utility model.

Reference numerals:

the device comprises a rack 100, a carrier plate 110, a guide rail 111, a first accommodating cavity 120 and a main body 130;

transfer mechanism 200, transfer assembly 210, mounting member 211, carrier assembly 212, connecting member 213, carrier 214, carrier surface 2141, and suction hole 2142;

a first driving member 220, a second driving member 230, a third driving member 240;

cartridge set 300, cartridge 310, second receiving cavity 311, bearing 312, first bearing 313, second bearing 314, opening 315, body 316, first body 3161, second body 3162, mounting 317, connecting 318, base 319;

the first limiting component 400, the first limiting piece 410, the first limiting surface 411, the second limiting surface 412, the second limiting piece 420, the third limiting surface 421, the third limiting piece 430 and the positioning groove 431;

sensor 500, web 600.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, the meaning of a number is one or more, the meaning of a number is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of a number is understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

In the description of the present utility model, the descriptions of the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Referring to fig. 1 to 5, an embodiment of the first aspect of the present utility model provides a loading and unloading device, which includes a frame 100, a transfer mechanism 200, and a plurality of magazine sets 300. The rack 100 includes a main body and a plurality of carrier plates 110 disposed at intervals along a vertical direction, and the rack 100 is provided with a first accommodating cavity 120. The transfer mechanism 200 is accommodated in the first accommodating cavity 120, the transfer mechanism 200 comprises a transfer component 210, the transfer component 210 can move along the vertical direction, the transfer component 210 comprises a mounting piece 211 and a bearing component 212, the bearing component 212 comprises a connecting piece 213 and a bearing piece 214, the connecting piece 213 has a set length, the bearing piece 214 is connected to the connecting piece 213 and can move along the length direction of the connecting piece 213, and the bearing piece 214 is used for bearing the material sheet 600. The plurality of material box groups 300 are in one-to-one correspondence with the carrier plates 110 and are installed on the carrier plates 110, the material box groups 300 comprise material boxes 310, the material boxes 310 are detachably connected to the carrier plates 110, the material boxes 310 are provided with second accommodating cavities 311, the inner walls of the material boxes 310 are further provided with a plurality of bearing parts 312 which are distributed at intervals along the vertical direction, and the bearing parts 312 are used for bearing the material sheets 600.

The carrier 110 can move relative to the main body to move the cartridge set 300 out of or into the first accommodating cavity 120, and the carrier 214 can move along the length direction of the connecting member 213 to partially protrude into the second accommodating cavity 311. Specifically, a guide rail 111 is disposed between the carrier plate 110 and the main body, and the cartridge 310 can enter and exit the first accommodating cavity 120 by driving the guide rail 111 through a motor.

The plurality of magazine groups 300 are connected to different carrier plates 110 arranged at intervals along the vertical direction, the carrier plates 110 can move relative to the main body to move the corresponding magazine groups 300 out of the first accommodating cavity 120, and the magazine 310 can be detachably connected to the carrier plates 110, so that after all the material sheets 600 in the material boxes 310 on the same carrier plate 110 are detected, the carrier plates 110 can move relative to the main body to move the corresponding magazine groups 300 out of the first accommodating cavity 120, the undetected material boxes 310 and the detected material boxes 310 are replaced, at the moment, the transfer assembly 210 can perform material taking detection on the material sheets 600 in the material boxes 310 mounted on the rest carrier plates 110, the detection is stopped when the material boxes 310 are replaced, and the detection efficiency is improved.

Referring to fig. 2, in some embodiments, the transfer assembly 210 further includes a mounting member 211, the carrier assembly 212 is rotatably connected to the mounting member 211, the rotation axis of the carrier assembly 212 is vertically disposed, the cartridge group 300 includes a plurality of cartridges 310, and the plurality of cartridges 310 are disposed at intervals around the circumferential direction of the rotation axis of the carrier assembly 212 and have equal distances from the rotation axis, so that the carrier assembly 212 can correspond to different cartridges 310 of the same cartridge group 300 through rotation of the carrier assembly 211, and space utilization of loading and unloading equipment is improved. In addition, the plurality of cartridges 310 may have equal distances from the rotation axis of the carrier assembly 212, so that the carrier 214 may move the same distance when moving along the length direction of the connecting member 213.

Referring to fig. 2, in some embodiments, the carrier 214 is provided with a carrier surface 2141, the carrier surface 2141 is provided with an adsorption hole 2142, the adsorption hole 2142 is for communicating with a vacuum source, and the carrier surface 2141 is for carrying the web 600. When the carrier 214 is adsorbed, the carrier 214 moves to correspond to the web 600, and then continues to move along the vertical direction until the carrier 600 contacts the web 600, the web 600 is adsorbed by the adsorption hole 2142 and fixed on the carrying surface 2141, so that the web 600 and the carrier 214 are prevented from dropping due to relative movement when the carrier 214 moves, and then the carrier 214 moves relative to the connecting piece 213 to move the web 600 out of the second accommodating cavity 311, thereby realizing blanking of the web 600 to be detected. The step of loading the magazine 310 after the inspection of the web 600 is completed is opposite to the above-described process, that is, the carrier 214 moves relative to the connecting member 213 to move the web 600 into the second accommodating cavity 311 and place it on the empty carrier 312, and then the suction force applied to the web 600 by the suction hole 2142 is removed.

Referring to fig. 4, in some embodiments, the loading and unloading device further includes two first limiting assemblies 400, where the first limiting assemblies 400 are connected to the carrier plate 110, the first limiting assemblies 400 include first limiting members 410 and second limiting members 420, the first limiting members 410 and the second limiting members 420 are spaced along a first direction, the first direction is parallel to a radial direction of a rotation axis of the carrier assembly 212, the two first limiting assemblies 400 are spaced along a second direction, the second direction is perpendicular to the first direction, the first limiting assemblies 400 are used for fixing the material boxes 310, and fixing positions of the material boxes 310 in the first direction and the second direction, so as to ensure position determination of the material boxes 310 in the loading and unloading process. In addition, the cartridge 310 can be separated from the carrier plate 110 by moving in a direction parallel to the rotation axis of the carrier assembly 212, so as to facilitate the taking and placing of the cartridge 310.

Referring to fig. 4 and 5, further, the first limiting member 410 is provided with a first limiting surface 411 and a second limiting surface 412 which are perpendicular to each other, the second limiting member 420 is provided with a third limiting surface 421, the first limiting surface 411 and the third limiting surface 421 are parallel to each other and have a set distance therebetween, the second limiting surfaces 412 of the two first limiting members 410 are opposite to each other, the two second limiting surfaces 412 are parallel to each other and have a set distance therebetween, the cartridge 310 has a set length and a set width, the cartridge 310 includes a main body 316 and a base 319, the main body 316 is connected to the base 319, the main body 316 is provided with a bearing portion 312, the base 319 includes a mounting portion 317 extending along the width direction of the cartridge 310 and a connecting portion 318 connecting the two mounting portions 317, the mounting portion 317 is abutted between the first limiting surface 411 and the third limiting surface, the two second limiting surfaces 412 are abutted to the surfaces of the mounting portion 317 facing each other to achieve positioning of the cartridge 310 in the first direction and the second direction, and in addition, a plurality of set distances can be provided between the respective limiting members to achieve positioning of the cartridges 310 in different sizes.

Referring to fig. 4, in some embodiments, the loading and unloading device further includes a third limiting member 430, the third limiting member 430 is connected to the carrier 110, the third limiting member 430 is provided with a plurality of positioning slots 431 along a radial direction of the rotation axis of the carrier 212 at intervals, and the connecting portion 318 is accommodated in the positioning slots 431 and abuts against a slot wall of the positioning slots 431. Specifically, the third limiting member 430 is disposed between the two first limiting assemblies 400, the connecting portion 318 is clamped to the positioning groove 431, so that the positioning capability of each limiting member to the material box 310 can be enhanced, the material box 310 is ensured not to be displaced when in use, and the connecting portions 318 disposed on the material boxes 310 with different sizes can be clamped to different positioning grooves 431, so as to realize the positioning of the material boxes 310.

Referring to fig. 2, in some embodiments, the transfer mechanism 200 includes a first driving member 220, a second driving member 230, and a third driving member 240, where the first driving member 220 is connected to the frame 100, the transfer assembly 210 is connected to the first driving member 220, the first driving member 220 is capable of driving the transfer assembly 210 to move in a vertical direction, the second driving member 230 is connected to the mounting member 211, the bearing assembly 212 is connected to the second driving member 230, the second driving member 230 is capable of driving the bearing assembly 212 to rotate relative to the mounting member 211, the third driving member 240 is mounted between the bearing member 214 and the connecting member 213, and the third driving member 240 is capable of driving the bearing member 214 to move in a length direction of the connecting member 213. The first driving member 220 may be selected as a motor and a ball screw, so as to accurately position the transfer assembly 210 in the vertical direction, the second driving member 230 may be selected as a motor, and the third driving member 240 may be selected as a linear motor module.

Referring to fig. 2, in some embodiments, the carrier mechanism includes a plurality of carriers 214, and the plurality of carriers 214 are spaced apart in a vertical direction. Specifically, in this embodiment, two carriers 214 are provided, when in use, one carrier 214 carries and adsorbs a to-be-detected web 600 to move to a detection table, another empty carrier 214 adsorbs the web 600 already detected on the carrier table, so as to realize the blanking of the detected web 600 and the feeding of the to-be-detected web 600, and then the carrier mechanism moves the carrier 214 carrying the detected web 214 back to the magazine 310 for blanking, and meanwhile, the other empty carrier 214 adsorbs the to-be-detected web 600, and the reciprocating cycle is performed, so that compared with the process of using only one carrier 214 to reciprocate between the detection table and the magazine 310 for multiple times, the detection efficiency is improved.

Referring to fig. 3, in some embodiments, the cartridge 310 has a set length and width, the cartridge 310 includes two first body portions 3161 and second body portions 3162 disposed at intervals in a width direction, the first body portions 3161 are provided with a plurality of first bearing portions 313 in a vertical direction, the second body portions 3162 are provided with a plurality of second bearing portions 314 in a vertical direction, each first bearing portion 313 corresponds to each second bearing portion 314 one by one, the first bearing portions 313 and the second bearing portions 314 are used together to bear the web 600, and openings 315 are defined between the corresponding first bearing portions 313 and second bearing portions 314. When the material is discharged, the bearing piece 214 penetrates into the second accommodating cavity 311 from a gap between the two material sheets 600, then moves upwards to penetrate through the opening 315 and lifts the material sheets 600 for adsorption, and then the second driving piece 230 drives the bearing piece to move out of the second accommodating cavity 311, so that the material sheets 600 are discharged.

Referring to fig. 2, in some embodiments, the loading and unloading device further includes a sensor 500, where the sensor 500 is connected to the transfer mechanism 200 and faces the magazine 310, and the sensor 500 is used to detect a position and a number of the webs 600 in the magazine 310, so as to ensure that the carrier 214 can carry the webs 600 to be detected. Specifically, the sensor 500 is connected to the connecting member 213, the second driving member 230 drives the carrying assembly 212 to rotate to drive the sensor 500 to correspond to different cartridges 310, the carrying member 214 is controlled by the third driving member 240, and after determining that the corresponding carrying portion 312 carries the web 600, the third driving member 240 drives the carrying member 214 to move for a set distance to correspond to the web 600, and then the web 600 is blanked.

An embodiment of the second aspect of the present utility model provides a detection system (not shown in the figure), which includes a detection table, a camera, and the feeding and discharging device provided in the embodiment of the first aspect. Wherein the inspection station is used for carrying the web 600 to be inspected. The camera is arranged above the detection table and faces the detection table. The carrier 214 can be moved to correspond to the inspection station for blanking and receiving the inspected web 600. The detecting system has at least all advantages of the feeding and discharging device due to the feeding and discharging device provided by the above embodiment, the carrier 214 can move the to-be-detected tablet 600 to the detecting table for photographing and detecting by the camera, and can re-adsorb and move the detected tablet 600 back to the magazine 310 to complete the detecting function.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model. Furthermore, embodiments of the utility model and features of the embodiments may be combined with each other without conflict.

Claims (10)

1. Feeding and discharging device, characterized by comprising:

the rack comprises a main body and a plurality of carrier plates which are arranged at intervals along the vertical direction, and the rack is provided with a first accommodating cavity;

the transfer mechanism is accommodated in the first accommodating cavity and comprises a transfer assembly, the transfer assembly can move along the vertical direction, the transfer assembly comprises a bearing assembly, the bearing assembly comprises a connecting piece and a bearing piece, the connecting piece has a set length, the bearing piece is connected with the connecting piece and can move along the length direction of the connecting piece, and the bearing piece is used for bearing a material sheet;

the material box sets are in one-to-one correspondence with the carrier plates and are arranged on the carrier plates, each material box set comprises a material box which is detachably connected with the carrier plates, a second accommodating cavity is formed in the material box, a plurality of bearing parts which are distributed at intervals along the vertical direction are further formed in the inner wall of the material box, and the bearing parts are used for bearing the material sheets;

the carrier plate can move relative to the main body to move the material box group out of or into the first accommodating cavity, and the carrier piece can move to partially protrude into the second accommodating cavity along the length direction of the connecting piece.

2. The loading and unloading device according to claim 1, wherein the transfer assembly further comprises a mounting member, the carrying assembly is rotatably connected to the mounting member, the rotation axis of the carrying assembly is vertically arranged, the cartridge group comprises a plurality of cartridges, the plurality of cartridges are arranged at intervals in a circumferential direction around the rotation axis of the carrying assembly and have equal distances from the rotation axis, and the carrying assembly can rotate relative to the mounting member to correspond to each of the cartridges.

3. The loading and unloading device of claim 1, wherein the carrier is provided with a carrying surface, the carrying surface is provided with adsorption holes, the adsorption holes are used for communicating with a vacuum source, and the carrying surface is used for carrying the material sheets.

4. The loading and unloading device of claim 1, further comprising two first limiting assemblies, wherein the first limiting assemblies are connected to the carrier plate, the first limiting assemblies comprise first limiting members and second limiting members, the first limiting members and the second limiting members are arranged at intervals along a first direction, the first direction is parallel to a radial direction of a rotation axis of the carrier assembly, the two first limiting assemblies are arranged at intervals along a second direction, the second direction is perpendicular to the first direction, and the first limiting assemblies are used for fixing the material box.

5. The feeding and discharging device according to claim 4, wherein the first limiting member is provided with a first limiting surface and a second limiting surface which are perpendicular to each other, the second limiting member is provided with a third limiting surface, the first limiting surface and the third limiting surface are parallel to each other and have a set distance therebetween, the second limiting surfaces of the two first limiting members are opposite in orientation, the two second limiting surfaces are parallel to each other and have a set distance therebetween, the cartridge has a set length and a set width, the cartridge comprises a main body portion and a base, the main body portion is connected to the base, the main body portion is provided with the bearing portion, the base comprises a mounting portion extending in the width direction of the cartridge and a connecting portion connecting the two mounting portions, the mounting portion is abutted between the first limiting surface and the third limiting surface, and the two second limiting surfaces are abutted to surfaces facing each other of the mounting portion.

6. The loading and unloading device according to claim 5, further comprising a third limiting member, wherein the third limiting member is connected to the carrier plate, a plurality of positioning grooves are formed in the third limiting member along the radial direction of the rotation axis of the bearing assembly at intervals, and the connecting portion is accommodated in the positioning grooves and abuts against the groove walls of the positioning grooves.

7. The loading and unloading device according to claim 2, wherein the transfer mechanism comprises a first driving member, a second driving member and a third driving member, the first driving member is connected to the frame, the transfer assembly is connected to the first driving member, the first driving member can drive the transfer assembly to move along a vertical direction, the second driving member is connected to the mounting member, the bearing assembly is connected to the second driving member, the second driving member can drive the bearing assembly to rotate relative to the mounting member, the third driving member is installed between the bearing member and the connecting member, and the third driving member can drive the bearing member to move along a length direction of the connecting member.

8. The feeding and discharging device according to claim 1, wherein the magazine has a set length and a set width, the magazine includes two first main body portions and second main body portions that are disposed at intervals along a width direction, the first main body portions are provided with a plurality of first bearing portions along a vertical direction, the second main body portions are provided with a plurality of second bearing portions along a vertical direction, each of the first bearing portions corresponds to each of the second bearing portions one by one, the first bearing portions and the second bearing portions are used together for bearing a web, and an opening is defined between the corresponding first bearing portions and second bearing portions.

9. The loading and unloading device of claim 1, further comprising a sensor coupled to the transfer mechanism and oriented toward the cartridge, the sensor configured to detect a position and a number of the material sheets in the cartridge.

10. A detection system, comprising:

the detection table is used for bearing the material sheet to be detected;

a camera disposed above the detection table and facing the detection table;

the loading and unloading device of any one of claims 1 to 9, wherein the carrier is movable to correspond to the inspection station for unloading and for receiving the inspected web.

Images