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CN217604123U - Thermal oxidation furnace - Google Patents

Thermal oxidation furnace Download PDF

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Publication number
CN217604123U
CN217604123U CN202221456648.6U CN202221456648U CN217604123U CN 217604123 U CN217604123 U CN 217604123U CN 202221456648 U CN202221456648 U CN 202221456648U CN 217604123 U CN217604123 U CN 217604123U
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China
Prior art keywords
flue gas
thermal oxidation
cooling
pipe
oxidation furnace
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CN202221456648.6U
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Chinese (zh)
Inventor
顾潮冰
吴红艳
贾昀澎
陈一萍
曹虎子
朱志斌
赵博鸿
于清
李伟硕
杜晓杰
王磊
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Shanghai Nuclear Energy Environmental Protection Technology Co ltd
Hualu Engineering and Technology Co Ltd
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Shanghai Nuclear Energy Environmental Protection Technology Co ltd
Hualu Engineering and Technology Co Ltd
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Abstract

The utility model discloses a thermal oxidation furnace. The thermal oxidation furnace comprises a combustion zone and a cooling zone which are sequentially connected from top to bottom; the bottom of the combustion zone is provided with a Venturi extension pipe extending to the lower part of the cooling zone; the combustion zone comprises a burner and a combustion chamber from top to bottom, the burner is used for mixing the waste gas to be treated with an oxidantAfter being ignited, the fuel is conveyed to a combustion chamber; the cooling zone comprises a cooling liquid spraying end which is arranged at the joint of the combustion zone and the cooling zone and is communicated with a nested space formed by the cooling zone and the Venturi extension pipe; the thermal oxidation furnace is also provided with a circulating flue gas pipe which is used for collecting the flue gas after washing and cooling and circulating the flue gas to the combustion chamber; the first port of circulation flue gas pipe locates the cooling space, communicates with nested space, and the entrance of combustion chamber is located to the second port of circulation flue gas pipe. The thermal oxidation furnace of the utility model can reduce NO x The generation of the heat treatment device can effectively prevent the Venturi extension pipe from being ablated, and the product treated by the thermal oxidation furnace can be directly discharged after being subsequently cooled.

Description

Thermal oxidation furnace
Technical Field
The utility model relates to a thermal oxidation furnace.
Background
With the high development of industrialization, the waste discharged by various production devices is increased, which causes pollution to the environment and even harms the health of people.
The thermal oxidation combustion process is capable of destroying harmful components in the waste stream exhaust pollutants. In the thermal oxidation process, pollutants and oxygen are subjected to oxidation reaction under a certain temperature condition. The products of this chemical reaction are harmless substances (carbon dioxide, water vapor and heat). The conventional thermal oxidation furnace is a separate combustion chamber, waste gas or waste liquid is subjected to combustion reaction with air in the combustion chamber, waste is subjected to oxidative decomposition at high temperature, and subsequent harmless treatment is carried out in other equipment so as to meet the requirement of environmental protection, but the equipment quantity is large, and the process flow is complex.
Patent document CN209343792U discloses a process system for treating radioactive organic waste, in which a thermal oxidizer in a thermal oxidation furnace is communicated with an immersion scrubber, and the gas after thermal oxidation is rapidly quenched and scrubbed by a cooling chamber to remove acid gas, so that the waste gas can be safely discharged. Although it is possible to achieve both thermal oxidation combustion and treatment of harmful substances in a thermal oxidation furnace, the thermal oxidation furnace has a problem that oxygen content and combustion temperature are difficult to control, and NO is easily generated x And the Venturi extension pipe is easy to be ablated, thereby bringing adverse effects on the service life of the thermal oxidation furnace and the subsequent process.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems that the thermal oxidation furnace in the prior art has oxygen content and combustion temperature which are difficult to control and easily generates NO x And the Venturi extension pipe of the furnace is easy to be ablated, thereby providing the thermal oxidation furnace. The utility model discloses a thermal oxidation stove passes through the setting that circulation flue gas pipe and coolant liquid sprayed the end, makes circulation flue gas and the pending waste gas intensive mixing after lighting, reduces the flue gas temperature, reduces NO x The generation of the heat oxidation furnace effectively prevents the Venturi extension pipe from being ablated due to overhigh temperature, the service life is long, the product treated by the heat oxidation furnace reaches the national emission standard, and the product can be directly discharged after being subjected to subsequent cooling treatment.
The utility model discloses a following technical scheme solves above-mentioned technical problem.
The utility model provides a thermal oxidation furnace, which comprises a combustion area and a cooling area which are sequentially connected from top to bottom; the bottom of the combustion zone is provided with a Venturi extension pipe extending to the lower part of the cooling zone;
the combustion zone comprises a burner and a combustion chamber from top to bottom, and the burner is used for igniting the waste gas to be treated and the oxidant conveyed to the thermal oxidation furnace and then conveying the waste gas to be treated and the oxidant to the combustion chamber;
the cooling zone comprises a cooling liquid spraying end, and the cooling liquid spraying end is arranged at the joint of the combustion zone and the cooling zone and is communicated with a nested space formed by the cooling zone and the Venturi extension pipe;
the thermal oxidation furnace is also provided with a circulating flue gas pipe which is used for collecting the washed and cooled flue gas and circulating the flue gas to the combustion chamber; the first port of the circulating flue gas pipe is arranged in the cooling area and communicated with the nesting space, and the second port of the circulating flue gas pipe is arranged at the inlet of the combustion chamber.
In the utility model, the waste gas to be treated and the oxidant are in the combustion chamber is completely combusted. The waste gas to be treated contains various combustible components, sulfur and ash, and products generated after the waste gas to be treated and the oxidant are combusted comprise carbon dioxide, water, sulfide and the like. And after the combustion products are washed and cooled by the cooling zone, the washed and cooled flue gas is recovered as circulating flue gas and is conveyed to an inlet of the combustion chamber. The circulating flue gas is mixed with the ignited waste gas to be treated, so that the combustion temperature can be reduced, the oxygen content in the circulating flue gas is low, and the oxygen content in the ignited waste gas to be treated can be controlled after the circulating flue gas is mixed with the ignited waste gas to be treated, so that NO can be effectively inhibited x And (4) generating.
The utility model discloses in, preferably, the length of combustion chamber should guarantee that pending waste gas is in dwell time in the combustion chamber is greater than 2s.
In the utility model discloses, preferably, the top of combustor still is equipped with pending waste gas entry and oxidant entry.
In the utility model, preferably, the circulating flue gas pipe comprises a circulating flue gas circular pipe and a plurality of circulating flue gas branch pipes; the inlet end of the circulating flue gas loop pipe is a first port of the circulating flue gas pipe, and the outlet ends of the circulating flue gas branch pipes are second ports of the circulating flue gas pipe; the outlet ends of the circulating flue gas circular pipes are correspondingly connected with the inlet ends of the circulating flue gas branch pipes.
Wherein, the angle between the axis of the circulating flue gas branch pipe and the horizontal plane is preferably 30-60 degrees.
Wherein, preferably, the sum of the total area of the flow cross sections of the plurality of the branch circulation flue gas pipes is smaller than the area of the flow cross section of the circular circulation flue gas loop.
Preferably, a plurality of the circulating flue gas branch pipes are uniformly distributed at the inlet of the combustion chamber.
Wherein, the number of the circulating flue gas branch pipes is preferably 4 to 12, such as 6 or 8.
The utility model discloses in, the alkali lye that contains NaOH etc. in the cooling zone, the sulfur-containing substance in with the combustion products generates salts such as sodium sulfate, calcium carbonate through taking place chemical reaction, absorbs the sulphide in the flue gas to discharge concentration to reaching standard.
In the utility model, preferably, the thermal oxidation furnace is further provided with a cooling liquid spraying pipe, and the cooling liquid spraying pipe comprises a cooling liquid ring pipe and a plurality of cooling liquid branch pipes;
the cooling liquid ring pipe is sleeved outside the furnace body of the thermal oxidation furnace, the inlet end of the cooling liquid ring pipe is connected with a cooling liquid source, and the outlet ends of the cooling liquid ring pipe are connected with the cooling liquid branch pipes;
the plurality of cooling liquid branch pipes penetrate through the side wall of the thermal oxidation furnace and are arranged in the nesting space, and the outlet ends of the plurality of cooling liquid branch pipes are cooling liquid spraying ends.
Wherein, the number of the cooling liquid spraying ends is preferably 4 to 12, such as 6 or 8.
Preferably, the cooling liquid spraying ends are uniformly distributed at the joint of the combustion area and the cooling area.
Preferably, the coolant branch pipe is a folded pipe, and the coolant branch pipe is folded at least twice in the nesting space.
Wherein, the angle between the axis of the tail end of the cooling liquid branch pipe and the horizontal plane is preferably 30-60 degrees.
The utility model discloses in, preferably, the thermal oxidation stove includes the casing, the combustion chamber with the cooling space is located in the casing, form the integral structure, can effectively guarantee the leakproofness and the reliability of thermal oxidation stove simultaneously, reduce aftertreatment equipment's quantity, improve flow efficiency.
The utility model discloses in, preferably, the combustion chamber inner wall is equipped with an annular protruding structure, and multiplicable pending waste gas and oxidant are in disturbance in the combustion chamber makes pending waste gas and oxidant intensive mixing.
Wherein, preferably, the annular protrusion structure is located in the middle of the combustion chamber.
The utility model discloses in, preferably, the bottom of combustion chamber still is equipped with the bottom plate for support refractory material and venturi extension.
The utility model discloses in, the length of venturi extension generally needs to guarantee the export of venturi extension is located the liquid level below take the altitude of cooling space. Combustion products enter the cooling zone through the Venturi extension pipe, are rapidly cooled to prevent organic matters which are not completely oxidized from generating dioxin and furan, and absorb acid gas and washing smoke dust to the maximum extent; in addition, the arrangement of the cooling liquid spraying end can also effectively prevent the Venturi extension pipe from being ablated by combustion products with higher temperature.
The utility model discloses in, preferably, the lower part of venturi extension pipe is fixed in through four angle irons the inner wall of cooling space.
The utility model discloses in, preferably, the thermal oxidation stove still is equipped with the demineralized water entry, the demineralized water entry is located the below in cooling zone.
Wherein, preferably, the thermal oxidation furnace is further provided with an alkali liquor inlet, and the alkali liquor inlet is positioned below the cooling zone.
Preferably, the thermal oxidation furnace is further provided with a nitrogen purging port, the nitrogen purging port is located below the cooling zone, the nitrogen purging port and the flue gas outlet are not in the same plane, and an included angle with any size is formed, so that the medium in the thermal oxidation furnace can be completely replaced when the thermal oxidation furnace is started and stopped.
Preferably, the thermal oxidation furnace is further provided with an alkali liquor outlet, the alkali liquor outlet is positioned at the bottom of the cooling zone, the outlet alkali liquor is cooled and then recycled, and when the salt concentration in the alkali liquor reaches a set value, a part of the alkali liquor is discharged and fresh alkali liquor is supplemented.
The utility model discloses in, preferably, thermal oxidation stove still is equipped with the manhole, the manhole is located the below in cooling zone for the maintenance.
The utility model discloses in, the use step of thermal oxidation stove is as follows:
s1, conveying waste gas to be treated and an oxidant to a combustor for ignition, and mixing and combusting the waste gas to be treated and the oxidant with circulating flue gas in a combustion chamber to obtain a combustion product;
and S2, conveying cooling liquid to the cooling zone, conveying the combustion products to the cooling zone through the Venturi extension pipe, collecting the washed and cooled flue gas, and circulating the flue gas to the combustion chamber or discharging the flue gas as the circulating flue gas.
In the present invention, the oxidizing agent may be an oxidizing agent conventional in the art, such as air or oxygen.
The utility model discloses in, can adjust the volume of letting in of circulation flue gas according to the burning condition of pending waste gas and oxidant.
Wherein, preferably, the volume percentage of the circulating flue gas circulating to the combustion chamber in the collected washed and cooled flue gas is 0-30%.
In the present invention, preferably, the combustion temperature of the combustion chamber is above 1000 ℃, for example, 1000-1150 ℃.
In the utility model, preferably, the oxygen content of the flue gas after combustion in the combustion chamber is 6%.
The utility model discloses in, through the velocity of flow of control coolant liquid, make the coolant liquid be in form the one deck liquid film on the venturi extension, make protect in the time of the combustion products cooling venturi extension is not ablated by the combustion products.
In the utility model, preferably, the alkali liquor in the cooling zone is preferably an alkaline solution containing NaOH.
In the present invention, preferably, the cooling liquid contains sodium carbonate and/or sodium sulfate.
In the utility model, preferably, the washing liquid is desalted water, and the pH value of the desalted water is 6.5-7.2 (25 ℃); the conductivity was 0.2. Mu.S/cm (25 ℃ C.); hardness (as CaCO) 3 )≈0μmol/L;SiO 2 The content is less than or equal to 20 mu g/L.
On the basis of the common knowledge in the field, the above preferred conditions can be combined at will to obtain the preferred embodiments of the present invention.
The utility model discloses an actively advance the effect and lie in:
the utility model discloses a thermal oxidation stove passes through the setting that circulation flue gas pipe and coolant liquid sprayed the end, makes circulation flue gas and the pending waste gas intensive mixing after lighting, reduces the gas temperature, reduces NO x The generation of the heat oxidation furnace effectively prevents the Venturi extension pipe from being ablated due to overhigh temperature, the service life is long, the product treated by the heat oxidation furnace reaches the national emission standard, and the product can be directly discharged after being subjected to subsequent cooling treatment.
Drawings
Fig. 1 is a schematic structural view of a thermal oxidation furnace of example 1.
Description of the reference numerals
Combustion zone 1
Cooling zone 2
Venturi extension pipe 3
Burner 4
Combustion chamber 5
Cooling liquid spray end 6
Circulating flue gas pipe 7
First port 8
Inlet 9 for exhaust gas to be treated
Oxidant inlet 10
Coolant branch pipe 11
Annular protrusion structure 12
Base plate 13
Angle iron 14
Desalted water inlet 15
Lye inlet 16
Nitrogen purge port 17
An alkali liquor outlet 18
Manhole 19
Nesting space 20
Detailed Description
The present invention is further illustrated by way of the following examples, which are not intended to limit the scope of the invention. The experimental methods without specifying specific conditions in the following examples were selected according to the conventional methods and conditions, or according to the commercial instructions.
Example 1
As shown in fig. 1, embodiment 1 provides a thermal oxidation furnace comprising a combustion zone 1 and a cooling zone 2 connected in this order from top to bottom; the bottom of the combustion zone 1 is provided with a Venturi extension pipe 3 extending to the lower part of the cooling zone 2; the combustion zone 1 comprises a burner 4 and a combustion chamber 5 from top to bottom, wherein the burner 4 is used for igniting the waste gas to be treated and the oxidant which are conveyed to the thermal oxidation furnace and then conveying the waste gas to be treated and the oxidant to the combustion chamber 5; the cooling zone 2 comprises a cooling liquid spraying end 6, and the cooling liquid spraying end 6 is arranged at the joint of the combustion zone 1 and the cooling zone 2 and is communicated with a nesting space 20 formed by the cooling zone 2 and the Venturi extension pipe 3; the thermal oxidation furnace is also provided with a circulating flue gas pipe 7 which is used for collecting the flue gas after washing and cooling and circulating the flue gas to the combustion chamber 5; the first port 8 of the circulating flue gas pipe 7 is arranged in the cooling area 2 and communicated with the nesting space 20, and the second port of the circulating flue gas pipe 7 is arranged at the inlet of the combustion chamber 5.
The length of the combustion chamber 5 is such that the residence time of the treated exhaust gases in the combustion chamber 5 is greater than 2s.
The top of the burner 4 is also provided with an inlet 9 for the exhaust gas to be treated and an inlet 10 for the oxidizing agent.
The circulating flue gas pipe 7 comprises a circulating flue gas circular pipe and 12 circulating flue gas branch pipes; the inlet end of the circulating flue gas loop pipe is a first port 8 of the circulating flue gas pipe 7, and the outlet ends of the 12 circulating flue gas branch pipes are second ports of the circulating flue gas pipe 7; the outlet ends of the 12 circular smoke gas pipes are correspondingly connected with the inlet ends of the 12 circular smoke gas branch pipes. The angle between the axis of the circulating flue gas branch pipe and the horizontal plane is 30-60 degrees. The 12 circulating flue gas branch pipes are uniformly distributed at the inlet of the combustion chamber 5. The sum of the total area of the flow cross sections of the circulating flue gas branch pipes is smaller than the area of the flow cross section of the circulating flue gas circular pipe.
The thermal oxidation furnace is also provided with a cooling liquid spraying pipe, and the cooling liquid spraying pipe comprises a cooling liquid ring pipe and 6 cooling liquid branch pipes; the cooling liquid ring pipe is sleeved outside the furnace body of the thermal oxidation furnace, the inlet end of the cooling liquid ring pipe is connected with a cooling liquid source, and the outlet ends of 6 cooling liquid ring pipes are connected with 6 cooling liquid branch pipes 11; 6 coolant liquid branch pipes 11 penetrate through the side wall of the thermal oxidation furnace and are arranged in the nesting space 20, and the outlet ends of the 6 coolant liquid branch pipes 11 are coolant liquid spraying ends 6.
The cooling liquid spraying ends 6 are uniformly distributed at the joint of the combustion area 1 and the cooling area 2. The coolant branch pipe 11 is a folded pipe, and the coolant branch pipe 11 is folded at least twice in the nesting space 20. The angle between the axis of the tail end of the cooling liquid branch pipe 11 and the horizontal plane is 30-60 degrees.
The thermal oxidation furnace comprises a shell, wherein a combustion chamber 5 and a cooling area 2 are positioned in the shell to form an integrated structure.
The shell is made of carbon steel. The side walls of the combustion chamber 5 are of a multi-layer refractory material. The material of the refractory material of the inner layer of the combustion chamber 5 is low silicon corundum castable, and the material of the refractory material of the outer layer of the combustion chamber 5 is heat insulation castable. The refractory material at the outlet of the combustion chamber 5 is made of low-silicon corundum bricks.
The inner wall of the combustion chamber 5 is provided with an annular projection structure 12, and the annular projection structure 12 is positioned in the middle of the combustion chamber 5.
The bottom of the combustion chamber 5 is also provided with a floor 13 for supporting the refractory material and the venturi extension 3.
The length of the venturi extension 3 is required to ensure that the outlet of the venturi extension 3 is located at a certain height below the liquid level of the cooling zone 2. The lower part of the venturi extension pipe 3 is fixed to the inner wall of the cooling zone 2 by four angle irons 14.
The thermal oxidation furnace is further provided with a desalted water inlet 15, and the desalted water inlet 15 is positioned below the cooling zone 2.
The thermal oxidation furnace is also provided with an alkali liquor inlet 16, and the alkali liquor inlet 16 is positioned below the cooling zone 2.
The thermal oxidation furnace is also provided with a nitrogen purging port 17, and the nitrogen purging port 17 is positioned below the cooling area 2, is not in the same plane with the flue gas outlet and is arranged to form an included angle with any size.
The thermal oxidation furnace is also provided with an alkali liquor outlet 18, and the alkali liquor outlet 18 is positioned at the bottom of the cooling area.
The thermal oxidation furnace is further provided with a manhole 19, and the manhole 19 is positioned below the cooling zone 2 for maintenance.
Effect example 1
A thermal oxidation process was performed using the thermal oxidation furnace of example 1,
s1, combustible gas and H are mixed 2 S, conveying waste gas to be treated and air to a combustor 4 for ignition, mixing the waste gas and the air with circulating flue gas in a combustion chamber 5 for combustion, wherein the combustion temperature of the combustion chamber 5 is-1150 ℃, and obtaining a combustion product, wherein the oxygen content of the combustion product is-6%;
s2, conveying the cooling liquid to a cooling area 2, conveying the combustion products in the S1 to the cooling area 2 through a Venturi extension pipe 3, collecting the washed and cooled flue gas as circulating flue gas to a combustion chamber 5, wherein the cooling area 2 contains NaOH solution and sodium carbonate cooling liquid, and the circulating flue gas accounts for 30% of the washed and cooled flue gas in volume percentage.
The flue gas recovered after the treatment of the thermal oxidation furnace does not contain combustible gas H 2 S meets the emission standard, NO x :<250mg/Nm 3

Claims (10)

1. The thermal oxidation furnace is characterized by comprising a combustion zone and a cooling zone which are sequentially connected from top to bottom; the bottom of the combustion zone is provided with a Venturi extension pipe extending to the lower part of the cooling zone;
the combustion zone comprises a burner and a combustion chamber from top to bottom, and the burner is used for igniting the waste gas to be treated and the oxidant conveyed to the thermal oxidation furnace and then conveying the waste gas to be treated and the oxidant to the combustion chamber;
the cooling zone comprises a cooling liquid spraying end, and the cooling liquid spraying end is arranged at the joint of the combustion zone and the cooling zone and is communicated with a nesting space formed by the cooling zone and the Venturi extension pipe;
the thermal oxidation furnace is also provided with a circulating flue gas pipe which is used for collecting the washed and cooled flue gas and circulating the flue gas to the combustion chamber; the first port of the circulating flue gas pipe is arranged in the cooling area and communicated with the nesting space, and the second port of the circulating flue gas pipe is arranged at the inlet of the combustion chamber.
2. The thermal oxidizer of claim 1, wherein the length of the combustion chamber is such that the residence time of the process off-gas in the combustion chamber is greater than 2 seconds;
the top of the burner is also provided with a waste gas inlet to be treated and an oxidant inlet.
3. The thermal oxidizer of claim 1, wherein the circulating flue gas duct comprises a circulating flue gas loop and a plurality of circulating flue gas branch ducts; the inlet end of the circulating flue gas loop pipe is a first port of the circulating flue gas pipe, and the outlet ends of the circulating flue gas branch pipes are second ports of the circulating flue gas pipe; the outlet ends of the circulating flue gas circular pipes are correspondingly connected with the inlet ends of the circulating flue gas branch pipes.
4. The thermal oxidizer of claim 3, wherein the axis of the circulating flue gas branch is at an angle of 30-60 ° to the horizontal;
the sum of the total area of the flow cross sections of the plurality of circulating flue gas branch pipes is smaller than the area of the flow cross section of the circulating flue gas circular pipe;
the circulating flue gas branch pipes are uniformly distributed at the inlet of the combustion chamber;
the number of the plurality of circulating flue gas branch pipes is 4-12.
5. The thermal oxidizer of claim 4, wherein the number of said plurality of flue gas recirculation manifolds is 6 or 8.
6. The thermal oxidation furnace according to claim 1, wherein said thermal oxidation furnace is further provided with a coolant shower, said coolant shower comprising a coolant loop and a plurality of coolant branches;
the cooling liquid ring pipe is sleeved outside the furnace body of the thermal oxidation furnace, the inlet end of the cooling liquid ring pipe is connected with a cooling liquid source, and the outlet ends of the cooling liquid ring pipe are connected with the cooling liquid branch pipes;
the plurality of cooling liquid branch pipes penetrate through the side wall of the thermal oxidation furnace and are arranged in the nesting space, and the outlet ends of the plurality of cooling liquid branch pipes are cooling liquid spraying ends.
7. The thermal oxidizer of claim 6, wherein the number of coolant spray ends is 4-12;
the cooling liquid spraying ends are uniformly distributed at the joint of the combustion area and the cooling area;
the cooling liquid branch pipe is a folded pipe, and the cooling liquid branch pipe is folded at least twice in the nesting space;
the angle between the axis of the tail end of the cooling liquid branch pipe and the horizontal plane is 30-60 degrees.
8. The thermal oxidizer of claim 7, wherein the number of coolant spray ends is 6 or 8.
9. The thermal oxidation oven according to claim 1, wherein said thermal oxidation oven comprises a housing, said combustion zone and cooling zone being located within said housing;
the inner wall of the combustion chamber is provided with an annular bulge structure; the annular protrusion structure is positioned in the middle of the combustion chamber;
the bottom of the combustion chamber is also provided with a bottom plate;
the lower part of the venturi extension pipe is fixed on the inner wall of the cooling area through four angle steels.
10. The thermal oxidation oven according to claim 1, further comprising a desalted water inlet located below said cooling zone;
the thermal oxidation furnace is also provided with a nitrogen purging port, and the nitrogen purging port is positioned below the cooling area;
the thermal oxidation furnace is also provided with an alkali liquor inlet, and the alkali liquor inlet is positioned below the cooling zone;
the thermal oxidation furnace is also provided with an alkali liquor outlet, and the alkali liquor outlet is positioned at the bottom of the cooling zone;
the thermal oxidation furnace is also provided with a manhole, and the manhole is positioned below the cooling area.
CN202221456648.6U 2022-06-10 2022-06-10 Thermal oxidation furnace Active CN217604123U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221456648.6U CN217604123U (en) 2022-06-10 2022-06-10 Thermal oxidation furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221456648.6U CN217604123U (en) 2022-06-10 2022-06-10 Thermal oxidation furnace

Publications (1)

Publication Number Publication Date
CN217604123U true CN217604123U (en) 2022-10-18

Family

ID=83588585

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221456648.6U Active CN217604123U (en) 2022-06-10 2022-06-10 Thermal oxidation furnace

Country Status (1)

Country Link
CN (1) CN217604123U (en)

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