CN217405399U

CN217405399U - A tongs for 8 very little wafers

Info

Publication number: CN217405399U
Application number: CN202220988774.XU
Authority: CN
Inventors: 余君山; 温孟川; 龚昱; 王伟忠; 刘军
Original assignee: Huaxin Jiaxing Intelligent Equipment Co ltd
Current assignee: Huaxin Jiaxing Intelligent Equipment Co ltd
Priority date: 2022-04-26
Filing date: 2022-04-26
Publication date: 2022-09-09
Anticipated expiration: 2032-04-26

Abstract

The utility model provides a tongs for 8 cun wafers belongs to wafer production facility technical field, including the mounting panel, install a guide bar on the mounting panel lower surface, fixedly connected with a locating plate on the lower surface of deflector, the locating plate is the cross setting, equal fixedly connected with guide block on four end lower surfaces of locating plate, a spigot surface has all been seted up to the lower extreme of the opposite face at two relative guide blocks, all install a splint on the lower surface of mounting panel both ends, at the equal fixedly connected with lifting plate of lower extreme of two splint opposite faces, the lifting plate is perpendicular setting with splint, be equipped with the actuating mechanism who is used for driving two splint relative motion on the mounting panel lower surface, the utility model has the advantages of having made things convenient for getting of 8 cun wafer boxes and having improved getting of getting the wafer box and put stability.

Description

A tongs for 8 very little wafers

Technical Field

The utility model belongs to the technical field of wafer production equipment, especially a tongs for 8 very little wafers.

Background

In the semiconductor field, an Automatic Material Handling System (AMHS) is commonly used in wafer factories to improve the automation of the factories and more intelligently manage the transportation of materials and the process management in the factories.

Automated overhead transport vehicles (OHT) are important subsystems in automated material handling systems, primarily responsible for transporting FOUPs to different process tools or stockers.

Current overhead traveling crane is in the use, because 12 cun wafer box top is equipped with the structure of "mushroom head" shape, the overhead traveling crane can take the wafer box through the first structure of mushroom on the wafer box, but in the production process of 8 cun wafer box, because 8 cun wafer box does not have the structure of mushroom head for current overhead traveling crane can't be accurate take the wafer box of 8 cun.

Disclosure of Invention

The utility model aims at having the above-mentioned problem to current technique, provided a tongs for 8 cun wafers, had and made things convenient for getting of 8 cun wafer box to put, improved getting of wafer box and put the characteristics of stability.

The purpose of the utility model can be realized by the following technical proposal:

a gripper for 8-inch wafers comprises a mounting plate, wherein a guide rod is mounted on the lower surface of the mounting plate, a positioning plate is fixedly connected to the lower surface of the guide plate, the positioning plate is arranged in a cross shape, a guide block is fixedly connected to the lower surfaces of four ends of the positioning plate, a guide surface is arranged at the lower end of each of the opposite surfaces of two opposite guide blocks, clamping plates are mounted on the lower surfaces of two ends of the mounting plate, a lifting plate is fixedly connected to the lower ends of the opposite surfaces of the two clamping plates, the lifting plate and the clamping plates are arranged vertically, and a driving mechanism for driving the two clamping plates to move relatively is arranged on the lower surface of the mounting plate; the anti-falling device is characterized in that a guide pipe is fixedly connected to the lower surface of the mounting plate, the cross section of the inner wall of the guide pipe is arranged in a rectangular shape, the guide rod is connected to the guide pipe in a sliding mode, an anti-falling bolt is connected to the outer wall of the guide pipe in a threaded mode, one end of the anti-falling bolt extends into the guide pipe, an elongated slot is formed in the outer wall of the guide rod along the length direction of the guide rod, and one end of the anti-falling bolt is connected to the elongated slot in a sliding mode.

Further, actuating mechanism includes that fixed connection is on the mounting panel lower surface biax motor, coaxial fixed connection are at the drive lead screw of two output shafts of biax motor and set up and be used for spacing splint along the locating part of drive lead screw length direction motion between splint and mounting panel lower surface, two the screw thread of drive lead screw revolves to opposite, two drive lead screw respectively with two splint threaded connection.

Further, the locating part includes slide rail, fixed connection of fixed connection on the mounting panel lower surface and is slider, the dust cover of fixed connection on the slider is close to open-ended one end inner wall that the U type set up on the splint upper surface, the opening of slider sets up, dust cover sliding connection is on the slide rail.

Furthermore, threaded connection has two spacing bolts on the mounting panel, and the lower extreme of spacing bolt surpasss the lower surface of slide rail and two spacing bolts are located the both ends of slide rail respectively.

Furthermore, be equipped with the setting element that is used for fixing a position splint position on the mounting panel between splint and mounting panel, the setting element includes pick-up plate, two fixed connection photoelectric sensor on the mounting panel lower surface of fixed connection on two splint opposite faces, and two photoelectric sensor's line is parallel arrangement with the length direction of slide rail.

Furthermore, a detection plate is fixedly connected to the upper surface of the positioning plate, a support is fixedly connected to the lower surface of the mounting plate, and two second photoelectric sensors are fixedly connected to the support along the height direction of the support.

Furthermore, a mounting hole is formed in the end face of the upper end of the guide rod, a mounting spring is fixedly connected to the bottom of the mounting hole, and the other end of the mounting spring is fixedly connected to the lower surface of the mounting plate.

Furthermore, a protective cover is fixedly connected to the side wall of the mounting plate.

Furthermore, a third photoelectric sensor for detecting the upper handle of the wafer box is arranged on the upper surface of the lifting plate.

Compared with the prior art, the utility model has the advantages of it is following:

1. the utility model uses the crown block to transport the mounting plate to the upper part of the wafer box, the mounting plate is driven to move downwards by the lifting mechanism on the crown block, when the guide block contacts the wafer box, under the action of the guide surface and gravity, the opposite surfaces of the four guide blocks are respectively butted on the outer walls of the four sides of the wafer box, the mounting plate continues to move downwards, after the lower surface of the positioning plate is butted on the upper surface of the wafer box, the detecting plate is separated from the second photoelectric sensor which is leaned on, the guide rod slides in the guide tube, the guide rod compresses the mounting spring, when the detecting plate moves to the second photoelectric sensor which is leaned on, the mounting plate stops moving downwards, at the moment, the double-shaft motor is started, the double-shaft motor drives the clamping plate to move by the driving lead screw, the two clamping plates move relatively, the lifting plate moves to the lower part of the handle of the wafer box, at the moment, the detecting plate moves to the first photoelectric sensor which is far away from the clamping plate, the double-shaft motor stops working, the mounting plate is lifted up through the lifting mechanism on the crown block, and through the arrangement, the structure is simple, the operation is convenient, the taking and placing of the 8-inch wafer box are facilitated, and the stability of the taking and placing of the wafer box is improved.

2. The utility model discloses a biax motor drives two drive screws simultaneously and rotates, and drive screw drives the splint motion, and through such setting, simple structure, convenient operation has made things convenient for two splint of control relative or motion in opposite directions simultaneously, has improved the stability of getting of putting the wafer box.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is an enlarged view at a in fig. 1.

Fig. 3 is a schematic structural view of the guide tube in the embodiment of the present invention.

In the figure, 1, mounting plate; 2. a guide bar; 3. positioning a plate; 4. a guide block; 5. a guide surface; 6. a splint; 7. a lifting plate; 8. a drive mechanism; 9. a dual-axis motor; 10. driving a lead screw; 11. a limiting member; 12. a slide rail; 14. a slider; 15. a dust-proof sleeve; 16. a limit bolt; 17. a guide tube; 18. an anti-drop bolt; 19. a long groove; 20. a positioning member; 21. detecting a plate; 22. a first photosensor; 23. a detection plate; 24. a support; 25. a second photosensor; 26. mounting holes; 27. installing a spring; 28. a protective cover; 29. a third photosensor.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in fig. 1, fig. 2, fig. 3 shows, a tongs for 8 cun wafers, including mounting panel 1, install a guide bar 2 on mounting panel 1 lower surface, cover fixedly connected with locating plate 3 on guide bar 2 lower surface, locating plate 3 is the cross setting, equal fixedly connected with guide block 4 on four end lower surfaces of locating plate 3, a spigot surface 5 has all been seted up on the lower extreme of the opposite face of two relative guide block 4, spigot surface 5 is seted up down, all install a splint 6 on mounting panel 1 both ends lower surface, equal fixedly connected with lifting plate 7 at the opposite face lower extreme of two splint 6, lifting plate 7 is perpendicular setting with splint 6, be equipped with the actuating mechanism 8 that is used for driving two splint 6 relative motion on mounting panel 1.

As shown in fig. 1, fig. 2, and fig. 3, the driving mechanism 8 includes a dual-axis motor 9, a driving lead screw 10 and a limiting member 11, the dual-axis motor 9 is fixedly connected to the lower surface of the mounting plate 1, the driving lead screw 10 is coaxially and fixedly connected to the output shaft of the dual-axis motor 9, a driving lead screw 10 is fixedly connected to each of two output shafts of the dual-axis motor 9, a lead screw nut is fixedly connected to the clamping plate 6, the clamping plate 6 is in threaded connection with the driving lead screw 10 through the lead screw nut, the limiting member 11 is disposed between the clamping plate 6 and the lower surface of the mounting plate 1, and the limiting member 11 is used for limiting the movement of the clamping plate 6 only along the length direction of the driving lead screw 10.

As shown in fig. 1, 2 and 3, the limiting member 11 includes a slide rail 12, a slide block 14 and a dust-proof sleeve 15, the slide rail 12 is fixedly connected to the lower surface of the mounting plate 1, the slide block 14 is fixedly connected to the upper surface of the clamping plate 6, the cross section of the slide block 14 is arranged in a U shape, the opening of the slide block is arranged upwards, the dust-proof sleeve 15 is fixedly connected to the inner wall of the slide block 14 near the opening, and the dust-proof sleeve 15 is slidably connected to the limiting groove 13.

As shown in fig. 1, 2, and 3, in order to prevent the slider 14 from being detached from the slide rail 12, two limit bolts 16 are screwed to the mounting plate 1, the lower ends of the limit bolts 16 are located above the lower surface of the slide rail 12, and the two limit bolts 16 are located at both ends of the slide rail 12.

As shown in fig. 1, 2 and 3, a guide tube 17 is fixedly connected to the lower surface of the mounting plate 1, the cross section of the inner wall of the guide tube 17 is rectangular, the cross section of the guide rod 2 is rectangular, one end of the guide rod 2 is slidably connected to the guide tube 17, an anti-falling bolt 18 is threadedly connected to the outer wall of the guide tube 17, one end of the anti-falling bolt 18 extends into the guide tube 17, a long groove 19 is formed in the outer wall of the guide rod 2 along the axial direction of the guide rod 2, and one end of the anti-falling bolt 18 is slidably connected to the long groove 19.

As shown in fig. 1, fig. 2 and fig. 3, a mounting hole 26 is formed on the upper surface of the guide rod 2, a mounting spring 27 is fixedly connected to the bottom of the mounting hole 26, the other end of the mounting spring 27 is fixedly connected to the lower surface of the mounting plate 1, and the mounting spring 27 is in a compressed arrangement.

As shown in fig. 1, 2 and 3, in order to facilitate operator control of the position of the clamping plate 6 on the mounting plate 1, a positioning part 20 is arranged between the clamping plate 6 and the mounting plate 1, the positioning part 20 comprises a detection plate 21 and two first photoelectric sensors 22, the detection plate 21 is arranged in an L shape, one end of the detection plate 21 is fixedly connected to the clamping plate 6, the first photoelectric sensors 22 are fixedly connected to the lower surface of the mounting plate 1, two first photoelectric sensors 22 are fixedly connected on the lower surface of the mounting plate 1, the connecting line of the two first photoelectric sensors is parallel to the length direction of the slide rail 12, when the detection plate 21 is positioned adjacent to the first photosensor 22 of the clamp plate 6, indicating that the clamp plate 6 is in the most open position, when the detection plate 21 is located away from the first photosensor 22 of the clamp plate 6, it is indicated that the clamp plate 6 is in the minimum open position while the lift plate 7 below the clamp plate 6 is moved to below the handle of the 8 "wafer cassette.

As shown in fig. 1, 2, and 3, a detecting plate 23 is fixedly connected to the upper surface of the positioning plate 3, the detecting plate 23 is disposed in an L shape, a bracket 24 is fixedly connected to the lower surface of the mounting plate 1, two second photosensors 25 are fixedly connected to the bracket 24 along the height direction of the bracket 24, the width of one end of the detecting plate 23 away from the positioning plate 3 is smaller than the distance between the two second photosensors 25, when the lower surface of the positioning plate 3 abuts against the upper surface of the wafer cassette, the detecting plate 23 is located at the lower second photosensor 25, the mounting plate 1 continues to move downward, the guide rod 2 slides in the guide tube 17 and compresses the mounting spring 27, and the detecting plate 23 is separated from the lower second photosensor, which indicates that the positioning plate 3 abuts against the wafer cassette at this time, when the detecting plate 23 moves to the upper second photosensor 25, the mounting plate 1 stops moving downwards; the lifting plate 7 moves below the handle on the wafer cassette and is arranged with a gap, when the lifting plate 7 lifts the wafer cassette, the detection plate 23 moves downwards, the detection plate 23 moves to between the two second photoelectric sensors 25, and at this time, the lifting plate 7 accurately lifts the wafer cassette.

As shown in fig. 1, 2 and 3, a protective cover is fixedly connected to the side wall of the mounting plate 1 to improve the safety of the device.

As shown in fig. 1, 2 and 3, a third photosensor 29 is fixedly attached to the upper surface of the lift plate 7 in order to ensure that the lift plate 7 moves below the handle of the wafer cassette.

The utility model discloses theory of operation of embodiment: the mounting plate 1 is driven to move downwards by a lifting mechanism on the crown block, when the guide block 4 contacts the wafer cassette, under the action of the guide surface 5 and gravity, the opposite surfaces of the four guide blocks 4 are respectively abutted against the outer walls of the four sides of the wafer cassette, the mounting plate 1 continues to move downwards, after the lower surface of the positioning plate 3 is abutted against the upper surface of the wafer cassette, the detection plate 23 is separated from the lower second photoelectric sensor 25, the guide rod 2 slides in the guide pipe 17, the guide rod 2 compresses the mounting spring 27, when the detection plate 23 moves to the upper second photoelectric sensor 25, the mounting plate 1 stops moving downwards, the double-shaft motor 9 is started, the double-shaft motor 9 drives the clamping plates 6 to move by driving the screw rod 10, the two clamping plates 6 move relatively, the lifting plate 7 moves to the lower part of the handle of the wafer cassette, and the detection plate 21 moves to the position of the first photoelectric sensor 22 far away from the clamping plates 6, the operation of the double-shaft motor 9 is stopped, and the mounting plate 1 is lifted up by the lifting mechanism on the crown block.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Although 1, a mounting plate is used more herein; 2. a guide bar; 3. positioning a plate; 4. a guide block; 5. a guide surface; 6. a splint; 7. a lifting plate; 8. a drive mechanism; 9. a dual-axis motor; 10. driving a lead screw; 11. a limiting member; 12. a slide rail; 13. a limiting groove; 14. a slider; 15. a dust-proof sleeve; 16. a limit bolt; 17. a guide tube; 18. an anti-drop bolt; 19. a long groove; 20. a positioning member; 21. detecting a plate; 22. a first photosensor; 23. a detection plate; 24. a support; 25. a second photosensor; 26. mounting holes; 27. installing a spring; 28. a protective cover; 29. third photosensor, etc., without excluding the possibility of using other terms. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed in a manner that is inconsistent with the spirit of the invention.

Claims

1. The gripper for the 8-inch wafer is characterized by comprising a mounting plate (1), wherein a guide rod (2) is mounted on the lower surface of the mounting plate (1), a positioning plate (3) is fixedly connected onto the lower surface of the guide plate, the positioning plate (3) is arranged in a cross shape, a guide block (4) is fixedly connected onto the lower surfaces of four ends of the positioning plate (3), a guide surface (5) is respectively arranged at the lower ends of the opposite surfaces of the two opposite guide blocks (4), clamping plates (6) are respectively mounted on the lower surfaces of two ends of the mounting plate (1), a lifting plate (7) is respectively fixedly connected onto the lower ends of the opposite surfaces of the two clamping plates (6), the lifting plate (7) and the clamping plates (6) are vertically arranged, and a driving mechanism (8) for driving the two clamping plates (6) to relatively move is arranged on the lower surface of the mounting plate (1); fixedly connected with stand pipe (17) on mounting panel (1) lower surface, stand pipe (17) inner wall cross-section is the rectangle setting, the cross-section of guide bar (2) is the rectangle setting, and guide bar (2) sliding connection has an anticreep bolt (18) in stand pipe (17), and threaded connection has an anticreep bolt (18) on the outer wall of stand pipe (17), and the one end of anticreep bolt (18) stretches into in stand pipe (17), has seted up an elongated slot (19) along guide bar (2) length direction on guide bar (2) outer wall, the one end sliding connection of anticreep bolt (18) is in elongated slot (19).

2. The gripper for 8-inch wafers as claimed in claim 1, wherein the driving mechanism (8) comprises a double-shaft motor (9) fixedly connected to the lower surface of the mounting plate (1), driving screws (10) coaxially and fixedly connected to two output shafts of the double-shaft motor (9), and a limiting member (11) arranged between the clamping plate (6) and the lower surface of the mounting plate (1) and used for limiting the movement of the clamping plate (6) along the length direction of the driving screws (10), the thread directions of the two driving screws (10) are opposite, and the two driving screws (10) are respectively in threaded connection with the two clamping plates (6).

3. The gripper for 8-inch wafers as claimed in claim 2, wherein the limiting member (11) comprises a slide rail (12) fixedly connected to the lower surface of the mounting plate (1), a slide block (14) fixedly connected to the upper surface of the clamping plate (6) and arranged in a U shape, and a dust-proof sleeve (15) fixedly connected to the inner wall of one end of the slide block (14) close to the opening, the opening of the slide block (14) is arranged upward, and the dust-proof sleeve (15) is slidably connected to the slide rail (12).

4. The gripper for 8-inch wafers according to claim 3, wherein two limiting bolts (16) are screwed on the mounting plate (1), the lower ends of the limiting bolts (16) exceed the lower surface of the slide rail (12), and the two limiting bolts (16) are respectively located at two ends of the slide rail (12).

5. The gripper for 8-inch wafers as claimed in claim 1, wherein a positioning member (20) for positioning the position of the gripper plate (6) on the mounting plate (1) is arranged between the gripper plate (6) and the mounting plate (1), the positioning member (20) comprises a detection plate (21) fixedly connected to the opposite surfaces of the two gripper plates (6), and two first photoelectric sensors (22) fixedly connected to the lower surface of the mounting plate (1), and the connecting line of the two photoelectric sensors is arranged in parallel with the length direction of the slide rail (12).

6. Gripper for 8-inch wafers according to claim 5, characterized in that a detection plate (23) is fixedly connected to the upper surface of the positioning plate (3), a support (24) is fixedly connected to the lower surface of the mounting plate (1), and two second photosensors (25) are fixedly connected to the support (24) along the height direction of the support (24).

7. The gripper for 8-inch wafers as claimed in claim 6, wherein a mounting hole (26) is formed in the upper end face of the guide rod (2), a mounting spring (27) is fixedly connected to the bottom of the mounting hole (26), and the other end of the mounting spring (27) is fixedly connected to the lower surface of the mounting plate (1).

8. A gripper for 8 "wafers as claimed in claim 1 characterised in that a shield (28) is fixedly attached to the side wall of the mounting plate (1).

9. Gripper for 8-inch wafers according to claim 1, characterized in that on the upper surface of the lifting plate (7) there is a third photoelectric sensor (29) for detecting the grip on the pod.