CN202393356U - Normal displacement and angle sensing optical measuring head - Google Patents
Normal displacement and angle sensing optical measuring head Download PDFInfo
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- CN202393356U CN202393356U CN2011205570450U CN201120557045U CN202393356U CN 202393356 U CN202393356 U CN 202393356U CN 2011205570450 U CN2011205570450 U CN 2011205570450U CN 201120557045 U CN201120557045 U CN 201120557045U CN 202393356 U CN202393356 U CN 202393356U
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- microcobjective
- laser
- infrared
- measuring head
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Abstract
The utility model discloses a normal displacement and angle sensing optical measuring head, being characterized in that the laser sent by a semiconductor laser unit becomes the collimated beam after the collimation through spectro-grating, spectroscope and speculum successively; the collimated beam is reflected to a microobjective through a rectangular prism; the beam reflected by the object to be detected is focused on a quadrantal detector through an astigmatic lens after returning to the spectroscope according to the former path; the Laser sent by the infrared laser light source is focused on the focuses on an infrared reflector through a light guide fibre, a collimating mirror and a focusing mirror successively so as to form a focus point which is coincident with the front focus point of the microobjective; the infrared laser is reflected perpendicularly into the microobjective by the infrared reflector; the parallel infrared laser beam being emergent in microobjective is reflected back to the microobjective through the detected object; and the returned infrared laser beam is reflected to a two-dimentional PSD by the infrared beamsplitter. The normal displacement and angle sensing optical measuring head can effectively measure and calibrate the linear guideway three degree of freedom and the surface appearance reconstruction of the free-form surface.
Description
Technical field
The utility model relates to a kind of measurement and demarcation that especially is applied in line slideway Three Degree Of Freedom geometric error, and normal direction displacement in the surface topography reconstruct of free form surface and angle sensor optical measuring head.
Background technology
Gauge head is one of critical component of precision measurement instrument, as sensor the geological information of measured workpiece is provided, and its development level directly affects measuring accuracy, serviceability, service efficiency and the flexible degree of precision measurement instrument.So far; Closely gauge head be divided into usually contact measuring head and contactless survey first two; But not contact measuring head because its noncontact, harmless, need not be to advantages such as probe radius compensation; Worldwide become the research emphasis of precision measurement instrument manufacturing firm, and obtain increasing concern and development.
Germany Dr.Wolf&Beck company utilizes the OTM series gauge head of optical triangulation method exploitation can be used for the high measurement in rank; U.S. Perceptron company utilizes structured light and coordinate conversion principle to develop the Scanworks 3 D laser scanning testing head; The ViScan optic probe of Germany Zeiss company is used for graphical analysis and non-cpntact measurement, its automatic focus function can also measuring vertical in the object of probe aspect; MAT has developed high-precision three-dimensional detector UA3P and has utilized atomic force probe and He-Ne laser instrument to realize that free sphere detects; Japan Sensofar company utilizes the optics confocal principle to develop the 2D gauge head of measuring free form surface; Germany Trioptics company utilizes the 3D-Deflectometry principle to realize the slope variation measurement of free form surface; People such as Taiwan Univ.'s model illumination have developed based on the automatic focus of the DVD laser head of cheapness probe, are used for three profile measurements in surface, and based on the autocollimator of DVD laser head, are used for measurement of dip angle.Though wherein some all has very high precision to above-mentioned accurate gauge head, can only tackle the sensing of a certain geometric sense, like elevation information, angle information etc.
Existing utilize two DVD laser heads respectively as the gauge head of angle sensing and displacement sensing, for contact measuring head provides trigger pip; The miniature laser interferometer of exploitation such as Renishaw company, API company and Hewlett-Packard Corporation through joining the various combination mode of mirror, also can accurately be measured a plurality of geometry parameters simultaneously.Yet above method has all increased system complexity in order to measure a plurality of geometry parameters simultaneously, uses a DVD laser head such as increasing; Though the method for laser interferometer is flexible, aspect the installation and combination debugging, all bother very much, and price is extremely expensive.
The utility model content
The purpose of the utility model is in order to overcome disadvantages of background technology, to provide a kind of and can displacement of sensing normal direction and normal direction displacement and the angle sensor optical measuring head of sensing angle inclination fusion in a system be realized the simultaneously-measured function of three degree of freedom.
The utility model is that the technical scheme that the technical solution problem is adopted is:
The design feature of displacement of the utility model normal direction and angle sensor optical measuring head is to be made up of automatic focusing unit, inclination angle probe unit and microcobjective;
In said automatic focusing unit, after the laser that is sent by semiconductor laser passes through the reflection of spectro-grating, spectroscope and catoptron successively, be collimated into parallel beam through collimating mirror, get into microcobjective with said parallel beam through the reflection of right-angle prism; Be back to spectroscope after astigmatic lens focuses on the 4 quadrant detector by the object under test beam reflected according to former road;
The laser that infrared laser light source sends focuses on through light-conductive optic fibre, collimating mirror and focus lamp successively and forms a focus point on the ir reflector; Said focus point overlaps with the front focus of microcobjective; Said ir reflector is between right-angle prism and microcobjective, and optical axis becomes 45 °; By said ir reflector the infrared laser vertical reflection is got in the microcobjective; The parallel infrared laser beam of outgoing is through testee reflected back microcobjective in microcobjective, and the infrared beamsplitter between ir reflector and microcobjective reflexes to the infrared laser beam that returns on the Two-dimensional PSD.
The design feature of displacement of the utility model normal direction and angle sensor optical measuring head is that also said automatic focusing unit adopts the DVD laser read head of removing condenser lens.
The measuring method of displacement of the utility model normal direction and angle sensor optical measuring head is:
The voltage signal that four voltage signals of said 4 quadrant detector export after amplifying is set is designated as U respectively
A, U
B, U
CAnd U
D, normalization focus error signal FES=[(U then
A+ U
C)-(U
B+ U
D)]/(U
A+ U
B+ U
C+ U
D); To be transverse axis apart from △ d between the focal plane of testee surface and microcobjective, be that the longitudinal axis obtains a corresponding S curve with normalization focus error signal FES, utilize the linear relationship section P in the S curve to measure the displacement of testee (19) surface in Z-direction;
Infrared laser beam according to reflection focuses on the variation of position on the Two-dimensional PSD, judges the inclination angle size of surface on X or Y direction of testee.
Compare with background technology, the utlity model has following advantage:
1, the utility model belongs to the non-contact optical measuring method, has avoided traditional contact to pop one's head in to the compensation of probe radius; Owing to do not have contact stress, can not produce and destroy to measured object.
2, the utility model combines the Z wheelbase from sensing and X-Y plane angle sensing back focal length and the front focal length through microcobjective, the sensor that realization can the sensing three degree of freedom.
3, the utlity model has the integration of height, compact conformation, volume is little, is convenient to install and be integrated in the test environment; If focusing part automatically adopts the DVD laser read head of removing condenser lens to realize that then cost of development then can reduce again greatly.
4, the utility model can be measured straightness error, these three geometric senses of deflection angle sum of errors angle of pitch error of line slideway simultaneously; Also can focus automatically simultaneously and the surface slope detection to free form surface.
Description of drawings
Fig. 1 is displacement of the utility model normal direction and angle sensor optical measuring head structural representation;
Fig. 2 a, Fig. 2 b and Fig. 2 c are the principle schematic of focusing automatically in displacement of the utility model normal direction and the angle sensor optical measuring head;
Fig. 3 is focus error signal (FES) curve of focusing part automatically in displacement of the utility model normal direction and the angle sensor optical measuring head;
Fig. 4 is a Y direction inclination angle sensing principle schematic in displacement of the utility model normal direction and the angle sensor optical measuring head;
Fig. 5 is a directions X inclination angle sensing principle schematic in displacement of the utility model normal direction and the angle sensor optical measuring head;
Fig. 6 a Fig. 6 b is the measured surface inclination angle of sensing part in inclination angle in displacement of the utility model normal direction and the angle sensor optical measuring head and the relation curve of hot spot centre of gravity place;
Label among the figure: 1 automatic focusing unit, 2 inclination angle probe units, 3 microcobjectives, 4 semiconductor lasers, 5 spectro-gratings; 6 spectroscopes, 7 catoptrons, 8 collimating mirrors, 9 right-angle prisms, 10 astigmatic lenses; 11 4 quadrant detectors, 12 infrared laser light sources, 13 light-conductive optic fibres, 14 collimating mirrors, 15 focus lamps; 16 ir reflectors, 17 infrared beamsplitters, 18 two-dimentional DSP, 19 testees.
Embodiment
As shown in Figure 1, displacement of present embodiment normal direction and angle sensor optical measuring head are made up of automatic focusing unit 1, inclination angle probe unit 2 and microcobjective 3; Automatically focusing unit 1 comprises semiconductor laser 4, spectro-grating 5, spectroscope 6, catoptron 7, collimating mirror 8, right-angle prism 9, astigmatic lens 10 and 4 quadrant detector 11; Inclination angle probe portion 2 comprises infrared laser light source 12, light-conductive optic fibre 13, collimating mirror 14, focus lamp 15, ir reflector 16, infrared beamsplitter 17 and two-dimentional DSP18; Microcobjective 3 is that limited far infrared secondary color difference is proofreaied and correct microcobjective.
Like Fig. 1, focus function realizes through method of astigmatism automatically.The centre wavelength of being sent by semiconductor laser 4 is the laser of 650nm, is divided into three light beams by spectro-grating 5, and promptly 0 grade of light and ± 1 order diffraction light only utilize 0 grade of light in the present embodiment; After 0 grade of light reflection through spectroscope 6 and catoptron 7; Be collimated into parallel beam by collimating mirror 8; Parallel beam gets into microcobjective 3 through right-angle prism 9 reflection backs, is back to spectroscope 6 by object under test 19 beam reflected according to former road, focuses on the 4 quadrant detector 11 through astigmatic lens 10 then; Four voltage signal output ends of 4 quadrant detector 11 are followed successively by A, B, C and D; Because 4 quadrant detector 11 outputs is the weak voltage signal, therefore need at 4 quadrant detector 11 back signalization amplifying circuits, the voltage signal that amplifies back output can correspondingly be designated as U
A, U
B, U
CAnd U
D, definition normalization focus error signal FES=[(U
A+ U
C)-(U
B+ U
D)]/(U
A+ U
B+ U
C+ U
D).
Because astigmatic lens 10 is different with the focal length of sagitta of arc direction at meridian direction, the focal beam spot that drops on the 4 quadrant detector 11 has been introduced geometrical aberration, i.e. astigmatism; As shown in Figure 2, when testee 19 surfaces are positioned at the position of focal plane of microcobjective 3, i.e. out of focus displacement d=0 (shown in Fig. 2 b), the focal beam spot on the 4 quadrant detector 11 are circular, FES=0; When the nearly burnt Δ d in testee 19 surface＞0 (shown in Fig. 2 c) and burnt Δ d far away＜0 (shown in Fig. 2 a), focal beam spot is the orthogonal ellipse of direction, and FES＞0 and FES＜0 is arranged respectively.With distance, delta d between the focal plane of testee 19 surfaces and microcobjective 3 is transverse axis; With normalization focus error signal FES is the longitudinal axis; Obtain the S curve of astigmatism autofocus system, the curve null position is exactly the position of accurately focusing, and one section has good linear relationship in the middle of the curve; As shown in Figure 3, utilize this linear relationship can accurately measure the displacement of testee 19 surfaces in Z-direction.
Like Fig. 1, the inclination angle detecting function is to utilize the front focus of microcobjective 3 to realize.The laser that infrared laser light source 12 sends focuses on the ir reflector 16 through light-conductive optic fibre 13, collimating mirror 14 and focus lamp 15; And this focus overlaps with the front focus of microcobjective 3; And ir reflector 16 is between right-angle prism 9 and microcobjective 3, and becomes 45 ° with optical axis.Ir reflector 16 gets into the infrared laser vertical reflection in the microcobjective 3, and the parallel infrared laser beam of outgoing is through testee 19 reflected back microcobjectives 3.Infrared beamsplitter 17 between ir reflector 16 and microcobjective 3 reflexes to the infrared laser beam that returns on the Two-dimensional PSD 18.
Influence each other for fear of the light beam of automatic focusing and the light beam at sensing inclination angle, present embodiment uses limited far infrared secondary color difference to proofread and correct microcobjective 3.
Like Fig. 4, if there is the inclination angle on testee 19 surfaces in the Y direction, then the infrared laser beam of reflected back focuses on the variation that has the position on the Two-dimensional PSD, and the change in location of its hot spot on Two-dimensional PSD is shown in Fig. 4 bottom right; In like manner like Fig. 5, if there is the inclination angle on testee 19 surfaces at directions X, then the infrared laser beam of reflected back focuses on the variation that also has the position on the Two-dimensional PSD 18, and the change in location of its hot spot on Two-dimensional PSD 18 is shown in Fig. 5 bottom right; Therefore, testee 19 surfaces have the inclination angle in any direction, can come out through Two-dimensional PSD 18 sensings.
At present, two-dimentional DSP is divided into three kinds: quadrilateral structure two dimension DSP, two sides type structure two dimension DSP and pillow type two dimension DSP.Quadrilateral structure two dimension DSP has less dark current and higher spectrum sensitivity, but because that four electrodes lean on mutually is very near, is easy to generate edge effect, and the position linearity degree is poor; Two sides type structure two dimension DSP has good position linearity degree, but its dark current bigger (comparable quadrilateral structure two dimension DSP exceeds an one magnitude), and do not have public electrode, increased the complicacy of signal processing circuit; And pillow type two dimension DSP had both had the little anti-characteristics that are easy to partially of quadrilateral structure two dimension DSP dark current, had the good strong point of the two sides type structure two dimension DSP linearity again.Therefore, present embodiment adopts pillow type two dimension DSP.Shown in Fig. 6 a and Fig. 6 b, utilize the ZEMAX optical design software through after the optics emulation, what obtain becomes better linearity relation respectively between the measured surface inclination angle of Y direction and directions X and hot spot centre of gravity place.Among Fig. 6 a, horizontal ordinate is the measured surface inclination angle, and ordinate is the position coordinates of Y direction hot spot center of gravity on two-dimentional DSP; Among Fig. 6 b, horizontal ordinate is the measured surface inclination angle, and ordinate is the position coordinates of directions X hot spot center of gravity on two-dimentional DSP.
Claims (2)
1. normal direction displacement and angle sensor optical measuring head is characterized in that being made up of automatic focusing unit (1), inclination angle probe unit (2) and microcobjective (3);
In said automatic focusing unit (1); After the laser that is sent by semiconductor laser (4) passes through the reflection of spectro-grating (5), spectroscope (6) and catoptron (7) successively; Be collimated into parallel beam through collimating mirror (8), with the reflection entering microcobjective (3) of said parallel beam through right-angle prism (9); Be back to spectroscope (6) according to former road after astigmatic lens (10) focuses on the 4 quadrant detector (11) by object under test (19) beam reflected;
The laser that infrared laser light source (12) sends focuses on ir reflector (16) through light-conductive optic fibre (13), collimating mirror (14) and focus lamp (15) successively and goes up formation one focus point; Said focus point overlaps with the front focus of microcobjective (3); Said ir reflector (16) is positioned between right-angle prism (9) and the microcobjective (3), and optical axis becomes 45 °; By said ir reflector (16) the infrared laser vertical reflection is got in the microcobjective (3); The parallel infrared laser beam of outgoing is through testee (19) reflected back microcobjective (3) in microcobjective (3), and the infrared beamsplitter (17) that is positioned between ir reflector (16) and the microcobjective (3) reflexes to the infrared laser beam that returns on the Two-dimensional PSD (18).
2. normal direction displacement according to claim 1 and angle sensor optical measuring head is characterized in that said automatic focusing unit (1) adopts the DVD laser read head of removing condenser lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205570450U CN202393356U (en) | 2011-12-27 | 2011-12-27 | Normal displacement and angle sensing optical measuring head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011205570450U CN202393356U (en) | 2011-12-27 | 2011-12-27 | Normal displacement and angle sensing optical measuring head |
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| CN202393356U true CN202393356U (en) | 2012-08-22 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519368A (en) * | 2011-12-27 | 2012-06-27 | 合肥工业大学 | Normal displacement and angle sensing optical measuring head and measuring method thereof |
| CN102879109A (en) * | 2012-09-12 | 2013-01-16 | 中国科学院西安光学精密机械研究所 | dynamic wavefront testing device |
| CN103868464A (en) * | 2014-03-27 | 2014-06-18 | 西安交通大学 | Sensor for active leveling detection of nanoimprint lithography working tables |
| TWI507663B (en) * | 2014-11-14 | 2015-11-11 | Metal Ind Res & Dev Ct | Measurement device of linear bearing stage and measuring method thereof |
| CN109556518A (en) * | 2017-09-26 | 2019-04-02 | 欧姆龙株式会社 | Shift measuring device, measuring system and displacement measurement method |
-
2011
- 2011-12-27 CN CN2011205570450U patent/CN202393356U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519368A (en) * | 2011-12-27 | 2012-06-27 | 合肥工业大学 | Normal displacement and angle sensing optical measuring head and measuring method thereof |
| CN102879109A (en) * | 2012-09-12 | 2013-01-16 | 中国科学院西安光学精密机械研究所 | dynamic wavefront testing device |
| CN102879109B (en) * | 2012-09-12 | 2014-05-21 | 中国科学院西安光学精密机械研究所 | Dynamic wavefront testing device |
| CN103868464A (en) * | 2014-03-27 | 2014-06-18 | 西安交通大学 | Sensor for active leveling detection of nanoimprint lithography working tables |
| TWI507663B (en) * | 2014-11-14 | 2015-11-11 | Metal Ind Res & Dev Ct | Measurement device of linear bearing stage and measuring method thereof |
| CN109556518A (en) * | 2017-09-26 | 2019-04-02 | 欧姆龙株式会社 | Shift measuring device, measuring system and displacement measurement method |
| CN109556518B (en) * | 2017-09-26 | 2020-12-22 | 欧姆龙株式会社 | Displacement measuring device, measuring system and displacement measuring method |
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Legal Events
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120822 |
|
| CX01 | Expiry of patent term |