CN201933202U - Seed-crystal transmission device - Google Patents
Seed-crystal transmission device Download PDFInfo
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- CN201933202U CN201933202U CN2010206209770U CN201020620977U CN201933202U CN 201933202 U CN201933202 U CN 201933202U CN 2010206209770 U CN2010206209770 U CN 2010206209770U CN 201020620977 U CN201020620977 U CN 201020620977U CN 201933202 U CN201933202 U CN 201933202U
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- seed
- screw
- crystal transmission
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Abstract
The utility model relates to a seed-crystal transmission device, which belongs to the technical field of vacuum equipment and comprises a seed-crystal shaft, a water and electricity connecting mechanism, a weighing mechanism, an adjusting platform, a screw-rod and screw-nut assembly, a supporting mechanism and an auxiliary driving mechanism, wherein the screw-rod and screw-nut assembly connected with a fixed bracket of the adjusting platform is arranged on the supporting mechanism, a screw rod is connected with an output shaft of a second motor, the auxiliary driving mechanism is connected with the screw rod, and the seed-crystal transmission device can be manually operated when in power failure. Since a structure of combining a conducting slide ring and a rotary joint is adopted in the water and electricity connecting mechanism of the seed-crystal transmission device, the connection of electricity and water is realized when a seed-crystal rod rotates. An expansion-joint sealing structure is adopted in the weighing mechanism, so that the measuring range of a weighing sensor can be properly selected according to an actual sample, and the weight of the sample in vacuum can be accurately measured by the weighing sensor under the atmosphere. Double guide rails and a slide lock are adopted in precision adjustment, so that the seed-crystal transmission device is flexible to move, and through the use of a micrometer head, not only is the seed-crystal transmission device more convenient to operate, but also fine adjustment and accurate adjustment are realized. An aluminum-profile mechanism is adopted by the supporting mechanism, so that the weight is effectively lightened, and the whole body is attractive.
Description
Technical field
The invention belongs to the vacuum apparatus technical field, particularly relate to a kind of seed crystal transmission mechanism.
Background technology
At present, the seed rod transmission rig function ratio of known single crystal furnace equipment is more single, and method is heavy, such as: a: in Weighing mechanism, because the LOAD CELLS under the atmosphere will measure the weight of sample in the vacuum, the methods of measuring whole mechanism that adopt make LOAD CELLS be far longer than the weight of actual sample in the selection of range more; B: be carbon steel or stainless steel for the intensity that guarantees whole mechanism lays particular stress in selection, weight is not attractive in appearance when strengthening yet; C: the shaft seal assemblies that adopt are realized more in the connection of seed rod time rotational water, electricity, and not only structure becomes huge and be inconvenient when installation, maintenance; D: can't accomplish that when adjusting seed rod fine setting and operation are also flexibly inconvenient; E: the seed crystal transmission rig can't use when outage.
Summary of the invention
At the technical problem of above-mentioned existence, the invention provides a kind of seed crystal transmission mechanism.Its office of one-piece construction portion is reasonable, compact, easy to operate.
To achieve these goals, technical scheme of the present invention is as follows:
The present invention includes seed shaft, water power connection mechanism, Weighing mechanism, adjusting platform, leading screw screw assembly and supporting mechanism, the described leading screw screw assembly that is connected with adjusting platform fixed support is arranged on the supporting mechanism, leading screw is connected with second motor output shaft, also includes the process auxiliary drive mechanism that is connected with leading screw.
Described process auxiliary drive mechanism comprises electromagnetic clutch, electromagnetism dead electricity clutch coupling, handwheel and second transmission rig, described electromagnetic clutch two ends connect second motor output shaft and leading screw one end respectively, electromagnetism dead electricity clutch coupling is connected with the leading screw the other end by second transmission rig, handwheel is installed on the electromagnetism dead electricity clutch coupling, and electromagnetism dead electricity clutch coupling is connected with power supply.
Described second transmission rig comprises that second between the 3rd, the 4th flute profile belt wheel and two flute profile belt wheels are with synchronously, and described the 4th flute profile belt wheel is installed on the output shaft of electromagnetism dead electricity clutch coupling, and the 3rd flute profile belt wheel is installed on the leading screw.
Described water power connection mechanism comprises swivel joint, web plate, anchor, water pipe and conducting slip ring, described conducting slip ring is set on the seed shaft, swivel joint places the conducting slip ring top, and ring is fixed on the seed shaft in it, the outer shroud of swivel joint and conducting slip ring is fixed on the anchor by web plate respectively, be built-in with water pipe at swivel joint and seed shaft endoporus, the water-in on the swivel joint is connected with water inlet pipe, and water outlet is connected with rising pipe.
Described Weighing mechanism comprises housing, LOAD CELLS, bearing and expansion joint assembly, described housing is fixed on an end of seed shaft, on seed shaft, also be sealed and installed with the expansion joint assembly, bearing is installed on the lower flange of seed shaft lateral expansion joint assembly by a plurality of the 3rd set screw, LOAD CELLS is separately fixed on housing and the bearing, during work, be connected with sample at the other end of seed shaft.
Described expansion joint assembly comprises expansion joint and the upper and lower flange that is installed in the expansion joint two ends, and described upper flange is the structure that has ring groove on the periphery, and the end face that is connected with seed shaft is the structure that is mated.
Described adjusting platform comprises the slide unit plate, slide unit, carriage saddle, fixed support, the X-axis regulating mechanism, the Y-axis regulating mechanism, the first sliding-rail sliding assembly, the second sliding-rail sliding assembly and the locking mechanism that is connected with slide unit, described slide unit plate, slide unit, carriage saddle, fixed support all has endoporus, and be set on the seed shaft successively, carriage saddle is fixed on the fixed support, between carriage saddle and slide unit, be separately installed with first between slide unit and slide unit plate, the second sliding-rail sliding assembly, slide unit is along carriage saddle, the slide unit plate is along slide unit difference relatively sliding, the slide unit plate is fixedlyed connected with seed shaft, on the X-direction between slide unit and slide unit plate, be provided with the X-axis regulating mechanism, on the Y direction of slide unit and carriage saddle, be provided with the Y-axis regulating mechanism.
Described X axle regulating mechanism comprises the first differential head and first adjustable plate, and the first differential head is connected with the slide unit end by first adjustable plate that is fixed on the slide unit plate.Described Y axle regulating mechanism comprises the second differential head and second adjustable plate, and the second differential head is connected with the slide unit end by second adjustable plate that is fixed on the carriage saddle.Described locking mechanism comprises first, second set screw, and first set screw is connected on the slide unit by carriage saddle, and second set screw is connected on the slide unit by the slide unit plate.
Described supporting mechanism comprises upper bracket, lower bracket, stiffening web, pillar stiffener and the interior filler rod of aluminium section bar structure, fix upper and lower support respectively at described pillar stiffener two ends, between the angle of upper and lower support and pillar stiffener formation, stiffening web is set respectively, in pillar stiffener, is provided with interior filler rod.
The invention has the beneficial effects as follows:
1. the present invention has adopted the structure of conducting slip ring and swivel joint and usefulness in water power connection mechanism, realizes the connection of seed rod time rotational electricity, water.
2. the present invention has adopted the expansion joint sealed structure in Weighing mechanism, makes LOAD CELLS suitably select range according to actual sample, makes the LOAD CELLS under the atmosphere can accurately measure the weight of sample in the vacuum.
3. the present invention has adopted two guide rails and slide block on the two-dimentional precision regulatory function of seed rod, makes its motion flexibly, and the use of differential head not only makes it more convenient to operate and realized fine setting, accurate adjustment.
4. the present invention adopts the process auxiliary drive mechanism of double clutch, can carry out manual operation when outage.
5. the supporting mechanism of entire mechanism of the present invention adopts aluminium section bar mechanism, effectively weight reduction, and overall aesthetic.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 looks partial view for the left side of Fig. 1.
Fig. 3 is a water power connection mechanism synoptic diagram among Fig. 1.
Fig. 4 is a Weighing mechanism synoptic diagram among Fig. 1.
Fig. 5 is a structural representation of regulating platform among Fig. 1.
Fig. 6 is a supporting mechanism synoptic diagram among Fig. 1.
Fig. 7 is the A-A cross-sectional schematic of Fig. 6.
Among the figure: 1. water power connection mechanism: 101. swivel joints, 102. web plates, 103. anchors, 104. water pipes, 105. conducting slip rings, 108. water inlet water pipes, 109. water outlet water pipes;
2. Weighing mechanism: 201. housings, 202. LOAD CELLS, 203. the 3rd set screw, 204. bearings, 205. upper flanges, 206. expansion joints, 207. lower flanges;
3. adjusting platform: 302. slide unit plates, 303. first adjustable plates, 304. first differential heads, 305. slide unit, 306. first slide blocks, 307. first linear slide rails, 308. carriage saddle, 309. fixed support, 310. first set screw, 311. second adjustable plates, 312. second slide block, 313. second set screw, 314. second differential heads, 315. second linear slide rails;
4. supporting mechanism: 401 upper brackets, angle stiffening web on 402., 403. pillar stiffeners, 404. inferior horn stiffening webs, 405. lower brackets, filler rods in 406.;
5. first motor 6. first is with, 7. the first flute profile belt wheel, 8. second flute profile belt wheel, the 9. seed shaft synchronously, 10. second motor, 11. electromagnetic clutch, 12. leading screws, 14. the 3rd flute profile belt wheels, 15. handwheels, 16. electromagnetism dead electricity clutch coupling, 17. second are with 18. the 4th flute profile belt wheels, 19. samples synchronously.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further detail.
Embodiment 1: as Fig. 1, shown in Figure 2, the present invention includes seed shaft 9, water power connection mechanism 1, Weighing mechanism 2, regulate platform 3, leading screw screw assembly and supporting mechanism 4, described Weighing mechanism 2 is fixed on to be regulated on the platform 3, first motor 5 is connected Weighing mechanism 2 by first transmission mechanism and regulates on the seed shaft 9 of 3 on platform, the described leading screw screw assembly that is connected with adjusting platform 3 fixed supports 309 is arranged on the supporting mechanism 4, leading screw 12 is connected with second motor, 10 output shafts, also include the process auxiliary drive mechanism that is connected with leading screw 12, first, second motor and auxiliary drive are connected with power supply respectively.
Described process auxiliary drive mechanism comprises electromagnetic clutch 11, electromagnetism dead electricity clutch coupling 16, handwheel 15 and second transmission rig, described electromagnetic clutch 11 two ends connect the output shaft of second motor 10 and an end of leading screw 12 respectively, electromagnetism dead electricity clutch coupling 16 is connected with the other end of leading screw 12 by second transmission rig, handwheel 15 is installed on the electromagnetism dead electricity clutch coupling 16, and electromagnetism dead electricity clutch coupling 16 is connected with power supply.Wherein said first transmission rig is identical with the second transmission rig structure, include the synchronous band between two flute profile belt wheels and two flute profile belt wheels, described the first, the 4th flute profile belt wheel 7,18 is installed in respectively on the output shaft of first motor 5 and electromagnetism dead electricity clutch coupling 16, and second, third flute profile belt wheel 8,14 is installed in respectively on seed shaft 9 and the leading screw 12.When energising, second motor 10 drives electromagnetic clutch 11 and drives leading screw 12 motions, and seed shaft 9 is normally moved, electromagnetic clutch 11 adhesives this moment, and electromagnetism dead electricity clutch coupling 16 disconnects; When having a power failure, electromagnetic clutch 11 disconnects, second motor 10 stops action, electromagnetism dead electricity clutch coupling 16 adhesives simultaneously, can operate the handwheel 15 that is connected with electromagnetism dead electricity clutch coupling 16, be with 14 transmissions of the 17, the 3rd flute profile belt wheel synchronously by the 4th flute profile belt wheel 18, second, leading screw 12 is carried out manual operation, reach the purpose of seed shaft 9 normal liftings.
As shown in Figure 3, water power connection mechanism 1 in this example comprises swivel joint 101, web plate 102, anchor 103, water pipe 104 and conducting slip ring 105, described conducting slip ring 105 is set in the top of transition piece 106, swivel joint 101 places conducting slip ring 105 tops, and ring is fixed on the seed shaft 9 in it, the outer shroud of swivel joint 101 and conducting slip ring 105 is fixed on the anchor 103 by web plate 102 respectively, be built-in with water pipe 104 at swivel joint 101 and seed shaft 9 endoporus, water inlet water pipe 108 on the swivel joint 101 is connected with water inlet, and water outlet water pipe 109 is connected with water outlet.At seed shaft 9 time rotationals, swivel joint 101 and conducting slip ring 105 are fixing by web plate 102, and with seed shaft 9 rotations, its water inlet pipe and cable etc. all can not be fixed on any suitable location of seed crystal transmission rig to its outer shroud.Water enters into water pipe 104 through water inlet water pipe 108, and circulation realizes the water-cooled of seed shaft 9 after water outlet water pipe 109 flows out.
As shown in Figure 4, this routine described Weighing mechanism 2 comprises housing 201, LOAD CELLS 202, bearing 204 and expansion joint assembly, described housing 201 is fixed on an end of seed shaft 9, on seed shaft 9, also be sealed and installed with the expansion joint assembly, described expansion joint assembly comprises expansion joint 206 and is installed in the upper and lower flange 205,207 at expansion joint 206 two ends, described upper flange 205 is for having the structure of ring groove on the periphery, the end face that is connected with seed shaft 9 is the structure that is mated; Bearing 204 is installed on the lower flange 207 of seed shaft 9 lateral expansion joint assembly by a plurality of the 3rd set screw 203, and LOAD CELLS 202 is separately fixed on housing 201 and the bearing 204.During work, the other end at seed shaft 9 is connected with sample 19, regulate bearing 204 by some the 3rd set screw 203 that transfer is connected on the lower flange 207, make LOAD CELLS 202 vertical with seed shaft 9, the deflection of regulating is absorbed by the expansion joint assembly fully, at this moment the accurate measure sample weight of LOAD CELLS 202.
As shown in Figure 5, described adjusting platform 3 comprises slide unit plate 302, slide unit 305, carriage saddle 308, fixed support 309, the X-axis regulating mechanism, the Y-axis regulating mechanism, the first sliding-rail sliding assembly, the second sliding-rail sliding assembly and the locking mechanism that is connected with slide unit 305, described slide unit plate 302, slide unit 305, carriage saddle 308, fixed support 309 all has endoporus, and be set in successively on the seed shaft 9, carriage saddle 308 is fixed on the fixed support 309, on 305 on carriage saddle 308 and slide unit, 302 of slide unit 305 and slide unit plates are separately installed with two covers first, the second sliding-rail sliding assembly, that is: install first respectively at carriage saddle 308 and slide unit 305 homonymies, second linear slide rail 307,315, with first of its relatively sliding, second slide block 306,312 are installed in respectively on slide unit 305 and the slide unit plate 302, make slide unit 305 along carriage saddle 308, slide unit plate 302 is along slide unit 305 difference relatively sliding, slide unit plate 302 is fixedlyed connected with seed shaft 9, on the X-direction of 302 of slide unit 305 and slide unit plates, be provided with the X-axis regulating mechanism, described X-axis regulating mechanism comprises that the first differential head 304 and first adjustable plate, 303, the first differential heads 304 are connected with slide unit 305 ends by first adjustable plate 303 that is fixed on the slide unit plate 302; On the Y direction of slide unit 305 and carriage saddle 308, be provided with the Y-axis regulating mechanism, described Y-axis regulating mechanism comprises that the second differential head 314 and second adjustable plate, 311, the second differential heads 314 are connected with slide unit 305 ends by second adjustable plate 311 that is fixed on the carriage saddle 308.Wherein said locking mechanism comprises that first, second set screw 310,313, the first set screw 310 are connected on the slide unit 305 by carriage saddle 308, and second set screw 313 is connected on the slide unit 305 by slide unit plate 302.
As Fig. 6, shown in Figure 7, this routine described supporting mechanism comprises upper bracket 401, lower bracket 405, stiffening web, pillar stiffener 403 and the interior filler rod 406 of aluminium section bar structure, fix upper and lower support 401,405 respectively at described pillar stiffener 403 two ends, between the angle of upper and lower support 401,405 and pillar stiffener 403 formation, angle stiffening web 402 and inferior horn stiffening web 404 are set respectively, increased the resistance to bend of pillar stiffener 403, in pillar stiffener 403, be provided with elongated interior filler rod 406, increased bulk strength of the present invention by interior filler rod 406.
Working process of the present invention:
The present invention is fixed on by Weighing mechanism 2 and regulates on the platform 3, and fixed support 309 1 ends of regulating platform 3 are fixed on the lead screw assembly, and lead screw assembly is fixed on the supporting mechanism 4.The present invention drives the second flute profile belt wheel 8 by first motor 5, be with 6 transmissions synchronously by first, thereby drive seed shaft 9 rotations, Weighing mechanism 2 rotates thereupon together, regulate bearing 204 by transferring a plurality of the 3rd set screw 203 on it, make LOAD CELLS 202 vertical, at this moment the accurate measure sample weight of LOAD CELLS 202 with seed shaft 9.
This example drives lead screw assembly by process auxiliary drive mechanism when outage suddenly, finish seed shaft 9 up-and-down movement, makes single unit system works better of the present invention.
Claims (10)
1. seed crystal transmission mechanism, comprise seed shaft, water power connection mechanism, Weighing mechanism, adjusting platform, leading screw screw assembly and supporting mechanism, the described leading screw screw assembly that is connected with adjusting platform fixed support is arranged on the supporting mechanism, leading screw is connected with second motor output shaft, it is characterized in that: also include the process auxiliary drive mechanism that is connected with leading screw.
2. seed crystal transmission mechanism according to claim 1, it is characterized in that: described process auxiliary drive mechanism comprises electromagnetic clutch, electromagnetism dead electricity clutch coupling, handwheel and second transmission rig, described electromagnetic clutch two ends connect second motor output shaft and leading screw one end respectively, electromagnetism dead electricity clutch coupling is connected with the leading screw the other end by second transmission rig, handwheel is installed on the electromagnetism dead electricity clutch coupling, and electromagnetism dead electricity clutch coupling is connected with power supply.
3. according to the described seed crystal transmission mechanism of claim 2, it is characterized in that: described second transmission rig comprises that second between the 3rd, the 4th flute profile belt wheel and two flute profile belt wheels are with synchronously, described the 4th flute profile belt wheel is installed on the output shaft of electromagnetism dead electricity clutch coupling, and the 3rd flute profile belt wheel is installed on the leading screw.
4. according to the described seed crystal transmission mechanism of claim 1, it is characterized in that: described water power connection mechanism comprises swivel joint, web plate, anchor, water pipe and conducting slip ring, described conducting slip ring is set on the seed shaft, swivel joint places the conducting slip ring top, and ring is fixed on the seed shaft in it, the outer shroud of swivel joint and conducting slip ring is fixed on the anchor by web plate respectively, be built-in with water pipe at swivel joint and seed shaft endoporus, water-in on the swivel joint is connected with water inlet pipe, and water outlet is connected with rising pipe.
5. seed crystal transmission mechanism according to claim 1, it is characterized in that: described Weighing mechanism comprises housing, LOAD CELLS, bearing and expansion joint assembly, described housing is fixed on an end of seed shaft, on seed shaft, also be sealed and installed with the expansion joint assembly, bearing is installed on the lower flange of seed shaft lateral expansion joint assembly by a plurality of the 3rd set screw, LOAD CELLS is separately fixed on housing and the bearing, during work, is connected with sample at the other end of seed shaft.
6. seed crystal transmission mechanism according to claim 5, it is characterized in that: described expansion joint assembly comprises expansion joint and is installed in the upper and lower flange at expansion joint two ends, described upper flange is the structure that has ring groove on the periphery, and the end face that is connected with seed shaft is the structure that is mated.
7. seed crystal transmission mechanism according to claim 1, it is characterized in that: described adjusting platform comprises the slide unit plate, slide unit, carriage saddle, fixed support, the X-axis regulating mechanism, the Y-axis regulating mechanism, the first sliding-rail sliding assembly, the second sliding-rail sliding assembly and the locking mechanism that is connected with slide unit, described slide unit plate, slide unit, carriage saddle, fixed support all has endoporus, and be set on the seed shaft successively, carriage saddle is fixed on the fixed support, between carriage saddle and slide unit, be separately installed with first between slide unit and slide unit plate, the second sliding-rail sliding assembly, slide unit is along carriage saddle, the slide unit plate is along slide unit difference relatively sliding, the slide unit plate is fixedlyed connected with seed shaft, on the X-direction between slide unit and slide unit plate, be provided with the X-axis regulating mechanism, on the Y direction of slide unit and carriage saddle, be provided with the Y-axis regulating mechanism.
8. seed crystal transmission mechanism according to claim 7 is characterized in that: described X-axis regulating mechanism comprises the first differential head and first adjustable plate, and the first differential head is connected with the slide unit end by first adjustable plate that is fixed on the slide unit plate; Described Y-axis regulating mechanism comprises the second differential head and second adjustable plate, and the second differential head is connected with the slide unit end by second adjustable plate that is fixed on the carriage saddle.
9. seed crystal transmission mechanism according to claim 7 is characterized in that: described locking mechanism comprises first, second set screw, and first set screw is connected on the slide unit by carriage saddle, and second set screw is connected on the slide unit by the slide unit plate.
10. according to the described seed crystal transmission mechanism of claim 1, it is characterized in that: described supporting mechanism comprises upper bracket, lower bracket, stiffening web, pillar stiffener and the interior filler rod of aluminium section bar structure, fix upper and lower support respectively at described pillar stiffener two ends, between the angle of upper and lower support and pillar stiffener formation, stiffening web is set respectively, in pillar stiffener, is provided with interior filler rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206209770U CN201933202U (en) | 2010-11-24 | 2010-11-24 | Seed-crystal transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206209770U CN201933202U (en) | 2010-11-24 | 2010-11-24 | Seed-crystal transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201933202U true CN201933202U (en) | 2011-08-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206209770U Expired - Lifetime CN201933202U (en) | 2010-11-24 | 2010-11-24 | Seed-crystal transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201933202U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN102534760A (en) * | 2011-12-28 | 2012-07-04 | 苏州优晶光电科技有限公司 | Device for monitoring crystal growth |
| CN114214731A (en) * | 2021-10-08 | 2022-03-22 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
-
2010
- 2010-11-24 CN CN2010206209770U patent/CN201933202U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102477587A (en) * | 2010-11-24 | 2012-05-30 | 中国科学院沈阳科学仪器研制中心有限公司 | Seed-crystal transmission gear |
| CN102477587B (en) * | 2010-11-24 | 2014-04-16 | 中国科学院沈阳科学仪器股份有限公司 | Seed-crystal transmission gear |
| CN102534760A (en) * | 2011-12-28 | 2012-07-04 | 苏州优晶光电科技有限公司 | Device for monitoring crystal growth |
| CN114214731A (en) * | 2021-10-08 | 2022-03-22 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
| CN114214731B (en) * | 2021-10-08 | 2024-02-06 | 上海汉虹精密机械有限公司 | Seed crystal lifting and rotating mechanism special for silicon carbide furnace |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110817 Effective date of abandoning: 20140416 |
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| RGAV | Abandon patent right to avoid regrant |